CN211293369U - High-coupling-efficiency optical fiber laser debugging device - Google Patents
High-coupling-efficiency optical fiber laser debugging device Download PDFInfo
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- CN211293369U CN211293369U CN201922290276.9U CN201922290276U CN211293369U CN 211293369 U CN211293369 U CN 211293369U CN 201922290276 U CN201922290276 U CN 201922290276U CN 211293369 U CN211293369 U CN 211293369U
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Abstract
The utility model discloses a high coupling efficiency's optic fibre laser debugging device, it is arranged in the optical fiber core footpath of laser coupling to on the laser beam machining head that jets out the laser instrument, and it includes 45 speculum, coupling mirror group, is equipped with double-end QBH fiber splice, laser beam machining head, observation mirror group, collimator and a light source of optic fibre in, observation mirror group is used for observing through horizontal light formation of image that 45 speculum was come, collimator is located 45 the opposite side of speculum and with the coaxial setting of coupling mirror group, coupling mirror group is located focuses on the light beam the position of the virtual focus of double-end QBH fiber splice, the light source sets up the focus position of laser beam machining head. The utility model discloses can be effectual, safe with the accurate coupling of the laser beam that the laser instrument launches to the minor diameter fiber core footpath in, and coupling efficiency is up to more than 95%.
Description
[ technical field ] A method for producing a semiconductor device
The utility model belongs to the technical field of laser coupling debugging, especially, relate to a fiber laser debugging device of high coupling efficiency.
[ background of the invention ]
Laser processing is applied more and more widely in manufacturing industry, such as laser cutting, laser welding and the like, and the principle of the laser processing equipment is that a laser generating device emits a beam of laser, the laser is coupled into an optical fiber, a joint at the end part of the optical fiber is inserted into a laser processing head, the laser beam is introduced into the laser processing head through the optical fiber, and the laser beam is collimated and focused to the surface of a workpiece to realize cutting or welding. Among them, the optical fiber connector plays a very important role. Before the optical fiber coupling device is used, normal transmission and accurate control can be realized only by coupling, debugging and coupling laser beams into the optical fiber core diameter through a coupling mirror group; because the diameter of the optical fiber is smaller, the traditional coupling debugging method is that an optical power meter is directly arranged at the focal position of a laser processing head, then a three-dimensional adjusting mechanism of a coupling lens group is adjusted, and when the maximum power detected by the optical power meter is detected, the debugging is successful; however, with the development of science and technology, the demand of high-power laser is more and more, the diameter of the optical fiber core is smaller and smaller, the debugging method can only be applied to the optical fiber with the diameter of more than 300um, and for the optical fiber with the diameter of 50-300 um, the method is not applicable, and the optical fiber can be burnt by laser beams due to slight deviation. Therefore, how to couple the laser beam into the optical fiber core diameter with such a small diameter becomes a big problem.
Therefore, it is necessary to provide a new fiber laser debugging device with high coupling efficiency to solve the above problems.
[ Utility model ] content
The utility model discloses a main aim at provides a fiber laser debugging device of high coupling efficiency, can be effectual, safe with the accurate coupling of the laser beam that the laser instrument launches to the minor diameter fiber core footpath, and coupling efficiency is up to more than 95%.
The utility model discloses a following technical scheme realizes above-mentioned purpose: the utility model provides a high coupling efficiency's optic fibre laser debugging device, its is arranged in the optical fiber core footpath of laser coupling to a laser beam machining head that jets out, and it includes 45 speculum, coupling mirror group, is equipped with double-end QBH fiber splice, laser beam machining head, observation mirror group, collimator and a light source of optic fibre in, it is used for observing through to observe mirror group 45 horizontal light formation of image that the speculum came over, collimator is located 45 the opposite side of speculum and with the coaxial setting of coupling mirror group, coupling mirror group is located focuses on the light beam the position of double-end QBH fiber splice virtual focus, the light source sets up the focus position of laser beam machining head.
Further, the laser and the coupling mirror group are located on the same side of the 45 ° reflecting mirror and are distributed in 90 °.
Further, a collimating lens group is arranged between the laser and the 45-degree reflecting mirror; divergent light emitted by the laser forms collimated parallel light through the collimating mirror group, then is reflected into the coupling mirror group through the 45-degree reflecting mirror, and is focused to a virtual focus position of the double-end QBH optical fiber connector through the coupling mirror group.
Further, the observation mirror group is located between the collimating mirror group and the 45 ° reflecting mirror.
Further, the double-end QBH fiber connector wherein the QBH fiber connector of one end with the coaxial setting of coupling mirror group, the QBH fiber connector of the other end is pegged graft in the QBH fiber interface at laser beam machining top.
Further, one surface of the 45-degree reflector is plated with a laser reflection film, and the other surface of the 45-degree reflector is a quartz polished surface; the surface of the 45-degree reflector 3 plated with the laser reflecting film faces the laser and the coupling mirror group; the quartz polishing surface of the 45-degree reflector is arranged towards the collimator.
Further, the light source and the collimator are different in color.
Furthermore, the observation mirror group comprises a triple prism for steering the light beam reflected by the 45-degree reflecting mirror, a zoom mirror group with adjustable focal length, a focusing mirror, a reticle and an ocular lens capable of moving axially.
Furthermore, the magnification of the observation mirror group is 4-8 times, and the axial adjusting range of the ocular lens is more than or equal to 15 mm.
Compared with the prior art, the utility model relates to a high coupling efficiency's optic fibre laser debugging device's beneficial effect lies in: the coupling efficiency can reach more than 95 percent, and the device is suitable for optical fibers with the core diameter more than or equal to 50um, and is used for respectively carrying out two-time observation on the end face of the optical fiber and the end face of the crystal head, and quantitatively measuring errors by using an observation mirror; the debugging operation is simple, and the method can be used for debugging industrial laser equipment; the collimating lens group does not need an adjusting mechanism, and all assembly tolerances are compensated by the three-dimensional adjusting mechanism of the coupling lens group at one time; the structure design is simple, the device volume is small, the debugging is convenient, and the debugging efficiency is improved; the axial coupling precision of the laser focusing beam and the optical fiber core diameter is visually adjusted, the operation is simple, and the precision is high; the coupling efficiency is high, the water cooling requirement and the laser power loss are reduced, and the processing capacity of the laser processing head is improved.
[ description of the drawings ]
Fig. 1 is a schematic structural diagram of an embodiment of the present invention;
fig. 2 is a schematic diagram of a partially enlarged structure of a double-ended QBH fiber connector according to an embodiment of the present invention;
FIG. 3 is a schematic structural view of an observation lens group according to an embodiment of the present invention;
the figures in the drawings represent:
100 fiber laser debugging device with high coupling efficiency; 101 a light beam;
1, a laser; 2 a collimating lens group; a 345 ° mirror; 4 coupling lens group; 5 double-end QBH fiber connector; 6 observation mirror group, 61 prism, 62 zoom mirror group, 63 focusing mirror, 64 reticle and 65 ocular; 7 collimator.
[ detailed description ] embodiments
Example (b):
referring to fig. 1-3, the present embodiment is a fiber laser debugging device 100 with high coupling efficiency, which is used for coupling laser emitted from a laser 1 into a fiber core diameter of a laser processing head, and includes a 45 ° reflector 3, a coupling mirror group 4, a double-ended QBH fiber connector 5 with fibers inside, the laser processing head (not identified in the figure), an observation mirror group 6, a collimator 7, and a light source (not identified in the figure), wherein the observation mirror group 6 and the coupling mirror group 4 are located on the same side of the 45 ° reflector 3 and distributed at 90 °, the collimator 7 is located on the other side of the 45 ° reflector 3 and coaxial with the coupling mirror group 4, the coupling mirror group 4 is located at a position for focusing a light beam to a virtual focus of the double-ended QBH fiber connector 5, and the light source is located at a focus position of the laser processing head.
This device mainly used debugging coupling mirror group 4's locating position and angle for during the laser beam that the laser jetted out can focus on the optic fibre core footpath of double-end QBH fiber splice 5, export to the workpiece surface through the mirror group in the laser beam machining head again, after the debugging was accomplished, can use and realize laser beam machining.
The laser 1 and the coupling mirror group 4 are located on the same side of the 45-degree reflecting mirror 3 and are distributed at 90 degrees, and a collimating mirror group 2 is arranged between the laser 1 and the 45-degree reflecting mirror 3. Divergent light emitted by the laser 1 forms collimated parallel light through the collimating mirror group 1, then is reflected into the coupling mirror group 4 through the 45-degree reflecting mirror 3, and is focused to a virtual focus position of the double-end QBH fiber joint 5 through the coupling mirror group 4.
The observation mirror group 6 is positioned between the collimating mirror group 2 and the 45-degree reflecting mirror 3.
In this embodiment, the QBH fiber connector at one end of the double-end QBH fiber connector 5 is coaxially arranged with the coupling mirror group 4, and the QBH fiber connector at the other end is inserted into the QBH fiber interface at the top of the laser processing head.
In this embodiment, the light source is a white light source, and the collimator 7 is a red collimator. In other embodiments, the light source and the collimator 7 may also be light sources of other colors, and only need to be different in color, such as a blue light source and a red light collimator, or a red light source and a blue light collimator, or a red light source and a violet light collimator, or a violet light source and a red light collimator.
The observation mirror group 6 includes a triple prism 61 that reflects the light beam reflected from the 45 ° mirror 3 upward, a zoom mirror group 62 whose focal length is adjustable, a focusing mirror 63, a reticle 64, and an eyepiece 65 that is axially movable. The prism 61 is used for steering, so that observation is convenient; the reticle 64 is located at the focal position of the focusing mirror 63. The magnification of the observation mirror group 6 is 4-8 times, and the axial adjusting range of the ocular lens 65 is more than or equal to 15 mm.
One surface of the 45-degree reflector 3 is plated with a laser reflection film, and the other surface is a quartz polished surface. The 45-degree reflecting mirror 3 is arranged with the surface plated with the laser reflecting film facing the laser 1 and the coupling mirror group 4; the quartz polished face of the 45 deg. mirror 3 is disposed facing the collimator 7.
The embodiment of the invention provides a fiber laser debugging method with high coupling efficiency, which comprises the following steps:
1) arranging a coupling mirror group 4 at a virtual focus position of a double-end QBH optical fiber connector 5, coaxially arranging a 45-degree reflecting mirror 3 above the coupling mirror group 4, arranging an observation mirror group 6 on a horizontal light path reflected by the 45-degree reflecting mirror 3, inserting a connector of the double-end QBH optical fiber connector 5 into a QBH optical fiber interface at the top of a laser processing head, and arranging a light source at the focus position of the laser processing head;
in the embodiment, the light source is a white light source, according to the reversibility of light, the light emitted by the white light source passes through the laser processing head to irradiate the end face of the double-end QBH fiber joint 5, at the moment, the fiber end face of the double-end QBH fiber joint 5 is illuminated, and enters the observation mirror group 6 through the coupling mirror group 4 and the 45-degree reflecting mirror 3; the observation mirror group 6 and the coupling mirror group 4 are positioned on the same side of the 45-degree reflecting mirror 3 and are distributed at 90 degrees;
2) adjusting a zoom lens group 62 and an eyepiece 65 in the observation lens group 6 to enable a first circular light spot formed on the end surface of the diameter of the optical fiber core of the double-end QBH optical fiber joint 5 illuminated by the light source to clearly image in the visual field range of the observation lens group 6, and adjusting the placement position of the observation lens group 6 to enable the first circular light spot to be positioned at the midpoint of a differentiation plate in the observation lens group 6, namely the cross position of the + scale;
3) a collimator 7 is coaxially arranged on the other side of the 45-degree reflecting mirror 3 and the coupling mirror group 4; the color of the light beam of the collimator 7 is different from that of the light source;
in this embodiment, the collimator 7 is a red collimator, light emitted by the red collimator is transmitted by the 45 ° reflector 3 and enters the double-end QBH fiber connector 5 through the coupling lens group 4, a part of light is reflected by the end face of the crystal head of the double-end QBH fiber connector 5, and the reflected light enters the observation lens group 6 through the coupling lens group 4 and the 45 ° reflector 3;
4) the axial position of an ocular 65 in the observation mirror group 6 is adjusted, so that a second round light spot formed by the reflection of the end face of the crystal head of the double-end QBH fiber joint 5 forms a clear image; at this time, the image observed in the eyepiece 65 is a red spot;
5) the position and the angle of the coupling mirror are finely adjusted by a three-dimensional adjusting mechanism in the coupling mirror group 4, so that the first circular light spot and the second circular light spot are positioned at the midpoint of a differentiation plate in the observation mirror group 6, namely the crossed position of the plus scale; thus, the optical axis of the coupling mirror group is ensured to be coaxial with the optical fiber of the double-end QBH optical fiber connector 5;
6) the position of the coupling lens group 4 is finely adjusted, so that the position of the coupling lens group 4 needs to be corrected to be positioned at the virtual focus position of the double-end QBH fiber joint 5; the adjusting method comprises two methods:
the method comprises the following steps: because the refractive indexes of red light and laser light for the materials of the lenses of the coupling lens group are different, the theoretical deviation x of the red light and the laser light can be calculated, and then the coupling lens group 4 is adjusted to move the coupling lens group in the axial direction by the distance x; the calculation formula of the theoretical deviation x is as follows:
wherein d is the length of the crystal head in the double-end QBH fiber joint 5, and f is the focal length of the coupling mirror; n is the refractive index of the quartz material, DeIs the beam diameter.
The second method comprises the following steps: and arranging an optical power meter at the focal position of the laser processing head, then axially adjusting the position of the coupling mirror group 4, and when the maximum power detected by the optical power meter is reached, successfully adjusting the position of the corresponding coupling mirror group 4.
In the fiber laser debugging device 100 and the debugging method with high coupling efficiency of the embodiment, the coupling efficiency can reach more than 95%, the device is suitable for fibers with core diameters of more than or equal to 50um, the fibers are respectively observed twice on the end face of the fiber and the end face of a crystal head, and errors are quantitatively measured by using an observation mirror; the debugging operation is simple, and the method can be used for debugging industrial laser equipment; the collimating lens group does not need an adjusting mechanism, and all assembly tolerances are compensated by the three-dimensional adjusting mechanism of the coupling lens group at one time; the structure design is simple, the device volume is small, the debugging is convenient, and the debugging efficiency is improved; the axial coupling precision of the laser focusing beam and the optical fiber core diameter is visually adjusted, the operation is simple, and the precision is high; the coupling efficiency is high, the water cooling requirement and the laser power loss are reduced, and the processing capacity of the laser processing head is improved.
What has been described above are only some embodiments of the invention. For those skilled in the art, without departing from the inventive concept, several modifications and improvements can be made, which are within the scope of the invention.
Claims (9)
1. A high coupling efficiency fiber laser debugging device, which is used for coupling laser emitted by a laser into a fiber core diameter on a laser processing head, is characterized in that: it includes 45 speculum, coupling mirror group, is equipped with double-end QBH fiber splice, laser beam machining head, observation mirror group, collimator and a light source of optic fibre in, observe mirror group be used for observing through 45 horizontal light imaging that the speculum reflected and come, collimator is located 45 the opposite side of speculum and with the coaxial setting of coupling mirror group, coupling mirror group is located focuses on the light beam the position of double-end QBH fiber splice virtual focus, the light source sets up the focus position of laser beam machining head.
2. The high coupling efficiency fiber laser debugging apparatus according to claim 1, wherein: the laser and the coupling mirror group are positioned on the same side of the 45-degree reflecting mirror and distributed in 90 degrees.
3. The high coupling efficiency fiber laser debugging apparatus according to claim 1, wherein: a collimating lens group is arranged between the laser and the 45-degree reflecting mirror; divergent light emitted by the laser forms collimated parallel light through the collimating mirror group, then is reflected into the coupling mirror group through the 45-degree reflecting mirror, and is focused to a virtual focus position of the double-end QBH optical fiber connector through the coupling mirror group.
4. The high coupling efficiency fiber laser debugging apparatus according to claim 3, wherein: the observation mirror group is positioned between the collimating mirror group and the 45-degree reflecting mirror.
5. The high coupling efficiency fiber laser debugging apparatus according to claim 1, wherein: wherein the QBH fiber connector of one end of the double-end QBH fiber connector and the coupling mirror group are coaxially arranged, and the QBH fiber connector at the other end is inserted into the QBH fiber connector at the top of the laser processing head.
6. The high coupling efficiency fiber laser debugging apparatus according to claim 1, wherein: the light source and the collimator are different in color.
7. The high coupling efficiency fiber laser debugging apparatus according to claim 1, wherein: the observation mirror group comprises a triple prism for steering light beams reflected by the 45-degree reflecting mirror, a zoom mirror group with adjustable focal length, a focusing mirror, a reticle and an ocular lens capable of moving axially.
8. The high coupling efficiency fiber laser debugging apparatus according to claim 7, wherein: the magnifying power of the observation mirror group is 4-8 times, and the axial adjusting range of the ocular lens is larger than or equal to 15 mm.
9. The high coupling efficiency fiber laser debugging apparatus according to claim 1, wherein: one surface of the 45-degree reflector is plated with a laser reflection film, and the other surface of the 45-degree reflector is a quartz polished surface; the surface of the 45-degree reflector 3 plated with the laser reflecting film faces the laser and the coupling mirror group; the quartz polishing surface of the 45-degree reflector is arranged towards the collimator.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110895364A (en) * | 2019-12-19 | 2020-03-20 | 苏州迅镭激光科技有限公司 | High-coupling-efficiency fiber laser debugging device and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110895364A (en) * | 2019-12-19 | 2020-03-20 | 苏州迅镭激光科技有限公司 | High-coupling-efficiency fiber laser debugging device and method |
| CN110895364B (en) * | 2019-12-19 | 2023-09-15 | 苏州迅镭激光科技有限公司 | High-coupling-efficiency fiber laser debugging device and method |
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