CN212620587U - Long-distance angle focusing device suitable for optical and similar measurement systems - Google Patents
Long-distance angle focusing device suitable for optical and similar measurement systems Download PDFInfo
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- CN212620587U CN212620587U CN202020980984.5U CN202020980984U CN212620587U CN 212620587 U CN212620587 U CN 212620587U CN 202020980984 U CN202020980984 U CN 202020980984U CN 212620587 U CN212620587 U CN 212620587U
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- 238000005259 measurement Methods 0.000 title claims abstract description 25
- 230000003287 optical effect Effects 0.000 title claims description 19
- 238000006073 displacement reaction Methods 0.000 claims abstract description 31
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Abstract
The utility model provides a be applicable to optics and similar measurement system long distance angle and to light device, includes fixed platform, moving platform and displacement measurement sensor, install displacement measurement sensor on fixed platform and the moving platform respectively, the device still includes laser interference system, laser interference system includes laser collimation light source, first spectroscope, right angle total reflection prism, second spectroscope, focusing mirror and camera, light collimation light source, first spectroscope, second spectroscope, focusing mirror and camera are located fixed platform, right angle total reflection prism is located moving platform, laser collimation light source, first spectroscope, right angle total reflection prism, second spectroscope, focusing mirror and camera connect gradually and form the light path. The utility model provides an effectively promote measurement accuracy's long distance angle of being applicable to optics and similar measurement system and put the light device.
Description
Technical Field
The utility model relates to an angle is to light device.
Background
When optical or other similar displacement sensors are used for measuring the rotation diameter and the rotation error of a large circular measured piece, two precise displacement sensors which are oppositely arranged can be adopted, as shown in figure 1. When the measured circle is rotated about its center, the two displacement sensors record the axial displacement of the inner or outer diameter (as shown in FIG. 1) of the object relative to the sensors, respectively, and the sum of the displacement amounts of the two sensors reflects the magnitude of the deviation of the measured circle from its theoretical value.
In such a device, how to ensure that the main axes of two oppositely placed displacement measurement sensors are completely overlapped is the key for realizing accurate measurement. In the prior art, the main shafts of two displacement measuring sensors which are placed in opposite directions can not be completely overlapped, and the measuring accuracy is low.
Disclosure of Invention
In order to overcome the lower not enough of measurement accuracy when having the gyration diameter of measuring large-scale circular measured piece, gyration error, the utility model provides an effectively promote measurement accuracy's be applicable to optics and similar measurement system long distance angle and put the light device.
The utility model provides a technical scheme that its technical problem adopted is:
the utility model provides a be applicable to optics and similar measurement system long distance angle and to light device, includes fixed platform, moving platform and displacement measurement sensor, install displacement measurement sensor on fixed platform and the moving platform respectively, the device still includes laser interference system, laser interference system includes laser collimation light source, first spectroscope, right angle total reflection prism, second spectroscope, focusing mirror and camera, light collimation light source, first spectroscope, second spectroscope, focusing mirror and camera are located fixed platform, right angle total reflection prism is located moving platform, laser collimation light source, first spectroscope, right angle total reflection prism, second spectroscope, focusing mirror and camera connect gradually and form the light path.
Further, the first beam splitter is arranged in the emergent direction of the laser collimation light source, the refraction direction of the first beam splitter is opposite to the incident direction of the right-angle total reflection prism, the emergent direction of the right-angle total reflection prism is opposite to the incident direction of the second beam splitter, and the reflection direction of the first beam splitter and the reflection direction of the second beam splitter are overlapped and connected with the camera light path through the focusing mirror.
The camera is connected with a display screen for displaying the interference fringes.
The beneficial effects of the utility model are that: effectively improve measurement accuracy.
Drawings
FIG. 1 is a schematic diagram of an inverted placement displacement sensor measuring gyration diameter and error.
Fig. 2 is a schematic diagram of the peaks shown by the confocal dispersive sensor.
Fig. 3 is a schematic view of the device for adjusting the angle of the same optical axis.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
Referring to fig. 3, a long-distance angular light-focusing device suitable for optical and similar measuring systems comprises a fixed platform 10, a movable platform 11 and displacement measuring sensors 2 and 3, displacement measuring sensors 2 and 3 are respectively arranged on the fixed platform 10 and the movable platform 11, the device also comprises a laser interference system, the laser interference system comprises a laser collimation light source 4, a first spectroscope 5, a right-angle total reflection prism 7, a second spectroscope 6, a focusing mirror 8 and a camera 9, the light collimation light source 4, the first spectroscope 5, the second spectroscope 6, the focusing mirror 8 and the camera 9 are positioned on a fixed platform 10, the right-angle total reflection prism 7 is positioned on the mobile platform 11, and the laser collimation light source 4, the first spectroscope 5, the right-angle total reflection prism 7, the second spectroscope 6, the focusing mirror 8 and the camera 9 are sequentially connected to form a light path 12.
Further, the first beam splitter 5 is arranged in the emergent direction of the laser collimation light source 4, the refraction direction of the first beam splitter 5 is opposite to the incident direction of the right-angle total reflection prism 7, the emergent direction of the right-angle total reflection prism 7 is opposite to the second beam splitter 6, the reflection direction of the first beam splitter 5 is overlapped with the reflection direction of the second beam splitter 6, and the first beam splitter 5 is connected with the light path of the camera 9 through the focusing mirror 8.
The coincidence of the main optical axes of the two displacement measuring sensors is determined by four degrees of freedom, namely the left-right and pitching angle degrees of freedom and the xy transverse degree of freedom. The utility model describes a when closely transferring two displacement measurement sensor's optical axis to coaxial back, remove one of them displacement measurement sensor again and keep away from another displacement measurement sensor, how measure and adjust about one of them displacement measurement sensor and pitch angle to keep the axiality of two sensors.
Taking an optical displacement sensor based on the principle of confocal dispersion as an example, the displacement measuring sensor in fig. 1 is replaced by a confocal dispersive optical displacement sensor, and when the distance between two displacement sensors meets the condition of twice working distance plus positive and negative working ranges of the sensors, light emitted from the first displacement sensor can enter the second displacement sensor. If the working distance is defined as L and the working range is defined as D, the distance satisfying this condition can be described as: 2L + -D, for a precise displacement sensor, L is generally about 10mm, and D is generally within 2 mm; by adjusting a two-dimensional angle adjusting device and a two-dimensional straight line adjusting device which are connected with one or two displacement sensors, the light-sensitive plane of the light emitted by one sensor in the other sensor can be optimally imaged, and the sharpest peak can be seen on the sensor at the moment, as shown in fig. 2.
When the size of the workpiece to be measured is large, such as the inner diameter or the outer diameter of the large cylindrical bearing sleeve 1 (in this case, the distance between the two sensors may exceed 2000mm), the distance between the two sensors is far beyond the maximum distance 2L + D for satisfying the light adjustment. At this time, other methods are needed to assist in order to ensure that the optical axes of the two sensors are still completely consistent or within an allowable error range.
Fig. 3 is a schematic view of the apparatus. In the system, after the optical axes of a measuring head 1 (a displacement measuring sensor) and a measuring head 2 (a displacement measuring sensor) are adjusted at a short distance (the distance is between 2L +/-D), a left-right and pitching fine adjustment system of a mobile platform is adjusted, laser interference fringes on a display screen connected with a camera are observed, and the number and the orientation of the interference fringes on the display screen are recorded. At the moment, the distance between the movable platform and the fixed platform is pulled apart until the distance between the two measuring heads can just measure the inner diameter or the outer diameter of the large round object (the outer diameter measurement is shown in the figure), the laser interference fringes on the display screen are observed, the left and right and pitching fine adjustment frames on the movable platform are adjusted until the laser interference fringes on the display screen are consistent with those before moving, and at the moment, the optical axes of the two sensors are parallel or within an allowable error range.
The core of the device is composed of a laser interference system arranged on a fixed platform and a movable platform, a beam of collimated laser emitted by a laser collimated light source is divided into two parts after passing through a first beam splitter, one part is continuously transmitted along the original direction, and the part of the laser is a measuring beam; another part is folded by 90 deg. and propagated to right, and this part is the reference beam. After reaching the right-angle reflecting prism together with the mobile platform, the measuring light beam is reflected twice and then reflected by 180 degrees and then propagates along the original reverse direction. The measuring light and the reference light are superposed at the second spectroscope, and the superposed light is imaged on a photosensitive surface of the camera through a focusing lens. If the two beams are perfectly parallel, the interference formed on the camera will be uniform in brightness, and if there is a small angle between the two, a straight line interference fringe will be formed on the photosensitive surface of the camera, as shown in fig. 3. The interference fringes on the photosensitive surface of the camera can be displayed by a display screen connected with the camera.
For convenient observation and recording, several interference fringes can be present before the stage moves, and the number and orientation of the fringes can be recorded. When the measuring head 1 is moved, the right-angle reflecting prism connected with the moving platform also moves together, interference fringes on the screen can change along with the change of the parallelism between the measuring light and the interference light, and the pitching and left-right fine adjustment frames on the moving platform are adjusted, so that the number and the orientation of the interference fringes are consistent with those of the front of the moving platform. The optical axis of the measuring head 1 connected with the moving platform is parallel to the optical axis of the measuring head 2.
When the measuring head 1 moves along with the moving platform, the optical axis of the measuring head 1 deviates from the original direction due to the linearity error of the moving guide rail, the optical axis error between the two measuring heads generated due to the motion error of the linear guide rail can be compensated through the method, the angle adjusting precision of the method is not influenced by the distance between the two measuring heads, and if the angle adjusting precision is evaluated by the common interference fringe measuring precision of 1/10 lambda (lambda is the laser wavelength here), the angle adjusting precision of the method is 0.0006 degrees.
Claims (3)
1. The utility model provides a be applicable to optics and similar measurement system long distance angle and put light device, includes fixed platform, moving platform and displacement measurement sensor, install displacement measurement sensor on fixed platform and the moving platform respectively, its characterized in that: the device further comprises a laser interference system, wherein the laser interference system comprises a laser collimation light source, a first spectroscope, a right-angle total reflection prism, a second spectroscope, a focusing mirror and a camera, the light collimation light source, the first spectroscope, the second spectroscope, the focusing mirror and the camera are located on a fixed platform, the right-angle total reflection prism is located on a moving platform, and the laser collimation light source, the first spectroscope, the right-angle total reflection prism, the second spectroscope, the focusing mirror and the camera are sequentially connected to form a light path.
2. The long distance angular focusing device suitable for optical and similar measuring system as claimed in claim 1, wherein the exit direction of said laser collimation light source is arranged with said first beam splitter, the refraction direction of said first beam splitter is opposite to the incident direction of said right angle total reflection prism, the exit direction of said right angle total reflection prism is opposite to the second beam splitter, the reflection direction of said first beam splitter and the reflection direction of said second beam splitter are overlapped and connected to the camera optical path through the focusing mirror.
3. A long range angular light focusing device suitable for use in optical and similar measurement systems as claimed in claim 1 or 2, wherein said camera is connected to a display screen for displaying interference fringes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020980984.5U CN212620587U (en) | 2020-06-02 | 2020-06-02 | Long-distance angle focusing device suitable for optical and similar measurement systems |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020980984.5U CN212620587U (en) | 2020-06-02 | 2020-06-02 | Long-distance angle focusing device suitable for optical and similar measurement systems |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212620587U true CN212620587U (en) | 2021-02-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020980984.5U Expired - Fee Related CN212620587U (en) | 2020-06-02 | 2020-06-02 | Long-distance angle focusing device suitable for optical and similar measurement systems |
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| Country | Link |
|---|---|
| CN (1) | CN212620587U (en) |
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2020
- 2020-06-02 CN CN202020980984.5U patent/CN212620587U/en not_active Expired - Fee Related
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210226 |
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| CF01 | Termination of patent right due to non-payment of annual fee |