CN210974924U - Novel single crystal furnace - Google Patents
Novel single crystal furnace Download PDFInfo
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- CN210974924U CN210974924U CN202020455495.8U CN202020455495U CN210974924U CN 210974924 U CN210974924 U CN 210974924U CN 202020455495 U CN202020455495 U CN 202020455495U CN 210974924 U CN210974924 U CN 210974924U
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- single crystal
- furnace
- crystal furnace
- furnace body
- crucible
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- 239000013078 crystal Substances 0.000 title claims abstract description 78
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 38
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 38
- 239000010439 graphite Substances 0.000 claims abstract description 38
- 238000003860 storage Methods 0.000 claims abstract description 20
- 239000010453 quartz Substances 0.000 claims abstract description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000004140 cleaning Methods 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 5
- 230000001681 protective effect Effects 0.000 claims description 4
- 238000004321 preservation Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 abstract description 23
- 239000011261 inert gas Substances 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 238000001816 cooling Methods 0.000 abstract description 5
- 230000005540 biological transmission Effects 0.000 abstract description 2
- 239000001307 helium Substances 0.000 description 17
- 229910052734 helium Inorganic materials 0.000 description 17
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 17
- 239000002994 raw material Substances 0.000 description 4
- 238000011084 recovery Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to a novel single crystal furnace, hold in the palm, graphite heater and base including single crystal furnace body, quartz crucible, graphite crucible, quartz crucible places in graphite crucible holds in the palm, and graphite crucible holds in the palm the bottom and is provided with crucible support shaft, graphite heater position graphite crucible holds in the palm the outside, the top of single crystal furnace body is provided with attaches the furnace chamber, be provided with intake pipe and blast pipe on the lateral wall that attaches the furnace chamber, be provided with air transfer pump, electronic valve, gas flowmeter in the intake pipe, be provided with the gas receiver on the input of intake pipe, the input of gas receiver and the output intercommunication of blast pipe, be provided with the compressor on the lateral wall of gas receiver, be provided with the condenser pipe in the gas receiver, the condenser pipe is connected with the compressor. The design of the gas transmission pump and the gas storage tank can ensure that the inert gas can be recycled, thereby saving the manufacturing cost and protecting the environment; the design of the compressor and the condenser pipe on the gas storage box can shorten the blowing-out cooling time, thereby improving the production efficiency.
Description
Technical Field
The utility model relates to a technical field of single crystal growing furnace, more specifically say, relate to a novel single crystal growing furnace.
Background
The single crystal furnace is a device which melts polysilicon material by a graphite heater in an inert gas (mainly nitrogen and helium) environment and grows dislocation-free single crystals by a Czochralski method. The polycrystalline silicon material is heated and melted, and the temperature is proper. The drawing of a single crystal ingot is completed through the steps of seed crystal immersion, fusion welding, seeding, shouldering, shoulder rotation, warp waiting, ending and the like. In the production preparation process, the furnace is removed after the completion of the ending for about 6 hours, the crystal is taken out, the volatile matters in the furnace are removed, and the crystal is scrubbed by alcohol.
At present, in the preparation process, inert gas is generally directly discharged after the furnace is shut down, and no recovery device is used, so that great waste is caused, the production cost is increased, and the environment is polluted; and the crystal is generally taken after natural cooling after the furnace is shut down, although the operation is simple, the natural cooling time is longer, and the production efficiency is reduced. The utility model discloses a new solution is proposed to above problem.
SUMMERY OF THE UTILITY MODEL
Aiming at the problems in the prior art, the utility model aims to provide a novel single crystal furnace to solve the technical problems in the background art.
In order to solve the above problems, the utility model adopts the following technical proposal.
A novel single crystal furnace comprises a single crystal furnace body, a quartz crucible, a graphite crucible holder, a graphite heater and a base, wherein the quartz crucible is placed in the graphite crucible holder, a crucible holder shaft is arranged at the bottom of the graphite crucible holder, the graphite heater is positioned outside the graphite crucible holder, the bottom end of the graphite heater is fixed at the bottom of the inner wall of the single crystal furnace body, an auxiliary furnace chamber is arranged at the top of the single crystal furnace body and is communicated with the inside of the single crystal furnace body, an air inlet pipe and an exhaust pipe are arranged on the side wall of the auxiliary furnace chamber, the output end of the air inlet pipe and the input end of the exhaust pipe are communicated with the inside of the auxiliary furnace chamber, an air conveying pump, an electronic valve and a gas flow meter are arranged on the air inlet pipe, an air storage tank is arranged at the input end of the air inlet pipe, the input end of the air storage tank, the condensation pipe is connected with the compressor, and the single crystal furnace body and the gas storage box are fixed on the base through the support rod group.
Preferably, the bottom of the single crystal furnace body is provided with a cleaning opening, and a furnace bottom protection disc is arranged on the upper cover of the cleaning opening.
In any of the above schemes, preferably, the two ends of the bottom of the furnace bottom protection disc are symmetrically provided with hydraulic arms, the telescopic ends of the hydraulic arms are fixed at the bottom of the furnace bottom protection disc, and the fixed ends of the hydraulic arms are fixed on the base.
In any of the above schemes, preferably, the base is provided with a variable frequency motor, the bottom end of the crucible supporting shaft penetrates through the furnace bottom protection disc and is fixed at the output end of the variable frequency motor, and the crucible supporting shaft is movably connected with the furnace bottom protection disc.
In any of the above schemes, preferably, the sealing ring is used for sealing between the crucible supporting shaft and the furnace bottom protection disc.
In any of the above schemes, preferably, a heat-insulating cylinder is arranged between the graphite heater and the inner wall of the single crystal furnace body.
In any of the above schemes, preferably, the bottom of the side wall of the single crystal furnace body is provided with an air outlet pipe, the air outlet pipe is provided with an electronic valve, and the input end of the air outlet pipe is communicated with the inside of the single crystal furnace body.
In any of the above embodiments, preferably, an electrode is connected to an end of the graphite heater extending out of the single crystal furnace body.
Compared with the prior art, the utility model has the advantages of:
the design of the gas transmission pump and the gas storage tank of the utility model can input inert gas helium into the single crystal furnace body and is communicated with the gas storage tank through the exhaust pipe, and the inert gas can be recovered into the gas storage tank, so that the inert gas helium can be repeatedly utilized in the whole processing process, the manufacturing cost is saved, and the environment is protected; the design of the compressor and the condenser pipe on the gas storage box can slowly input cooled inert gas helium into the single crystal furnace body after the furnace is shut down, so that the cooling speed in the single crystal furnace body is accelerated, the furnace shutdown cooling time is shortened, and the production efficiency is improved; the design of the furnace bottom protective disc and the hydraulic arm can automatically realize the opening and closing of the single crystal furnace body, so that raw materials can be conveniently placed in the single crystal furnace body or the single crystal furnace body can be conveniently cleaned, and the use is convenient; the design of the air discharge pipe can open the air discharge pipe while inputting the inert gas helium, because the density of the air is greater than that of the helium, the air can be discharged from the air discharge pipe, and when the furnace is filled with the helium, the air discharge pipe is closed, so that the mixing of the air and the helium in the single crystal furnace body can be reduced, and the recovery purity of the helium is ensured; the design of the heat preservation cylinder can reduce the heat loss in the quartz crucible, improve the heating efficiency and improve the production efficiency.
Drawings
FIG. 1 is a schematic view of the overall structure of a single crystal furnace according to the present invention;
fig. 2 is a schematic structural view of the gas storage tank.
The reference numbers in the figures illustrate:
1. the device comprises a single crystal furnace body, 2, a quartz crucible, 3, a graphite crucible support, 4, a graphite heater, 5, a base, 6, a crucible support shaft, 7, an attached furnace chamber, 8, an air inlet pipe, 9, an exhaust pipe, 10, an air conveying pump, 11, an air flow meter, 12, an air storage box, 13, a compressor, 14, a condensation pipe, 15, a cleaning port, 16, a furnace bottom protection disc, 17, a hydraulic arm, 18, a variable frequency motor, 19, a heat preservation cylinder, 20, an air discharge pipe, 21 and an electrode.
Detailed Description
The technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiment of the present invention; obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by those skilled in the art without any inventive work are within the scope of the present invention based on the embodiments of the present invention.
Example 1:
referring to fig. 1-2, a novel single crystal furnace comprises a single crystal furnace body 1, a quartz crucible 2, a graphite crucible holder 3, a graphite heater 4 and a base 5, wherein the quartz crucible 2 is placed in the graphite crucible holder 3, a crucible support shaft 6 is arranged at the bottom of the graphite crucible holder 3, the graphite heater 4 is arranged outside the graphite crucible holder 3, the bottom end of the graphite heater 4 is fixed at the bottom of the inner wall of the single crystal furnace body 1, an auxiliary furnace chamber 7 is arranged at the top of the single crystal furnace body 1, the auxiliary furnace chamber 7 is communicated with the inside of the single crystal furnace body 1, an air inlet pipe 8 and an air outlet pipe 9 are arranged on the side wall of the auxiliary furnace chamber 7, the output end of the air inlet pipe 8 and the input end of the air outlet pipe 9 are communicated with the inside of the auxiliary furnace chamber 7, an air pump 10, an electronic valve and a gas flow meter 11 are arranged on the air inlet pipe 8, an air storage tank 12 is arranged on, the side wall of the gas storage box 12 is provided with a compressor 13, a condenser pipe 14 is arranged in the gas storage box 12, the condenser pipe 14 is connected with the compressor 13, and the single crystal furnace body 1 and the gas storage box 12 are fixed on the base 5 through a support rod group.
In the embodiment, the bottom of the single crystal furnace body 1 is provided with a cleaning opening 15, and a furnace bottom protection disc 16 is covered on the cleaning opening 15. The design of the cleaning opening 15 can place raw materials into the single crystal furnace body 1 or clean the single crystal furnace body 1, and is convenient to operate and use.
In this embodiment, the two ends of the bottom of the furnace bottom protection disc 16 are symmetrically provided with hydraulic arms 17, the telescopic ends of the hydraulic arms 17 are fixed at the bottom of the furnace bottom protection disc 16, and the fixed ends of the hydraulic arms 17 are fixed on the base 5. The hydraulic arm 17 is designed to automatically open and close the single crystal furnace body 1, so that manual operation is reduced, and the working efficiency is improved.
In this embodiment, a variable frequency motor 18 is arranged on the base 5, the bottom end of the crucible supporting shaft 6 penetrates through the furnace bottom protection disc 16 and is fixed on the output end of the variable frequency motor 18, and the crucible supporting shaft 6 is movably connected with the furnace bottom protection disc 16. The design of variable frequency motor 18 can be according to the production demand, the output speed of adjustment variable frequency motor 18, the availability factor of improvement equipment.
In this embodiment, a sealing ring is used to seal the crucible supporting shaft 6 and the furnace bottom protection plate 16. The leakage between the crucible supporting shaft 6 and the furnace bottom protection disc 16 can be reduced, and the reuse rate of inert gas is improved.
In this embodiment, a heat-insulating cylinder 19 is provided between the graphite heater 4 and the inner wall of the single crystal furnace body 1. The heat loss in the quartz crucible 2 can be reduced, and the heating efficiency is improved, thereby improving the production efficiency.
In this embodiment, an air outlet pipe 20 is provided at the bottom of the side wall of the single crystal furnace body 1, an electronic valve is provided on the air outlet pipe 20, and the input end of the air outlet pipe 20 is communicated with the inside of the single crystal furnace body 1. The air discharge pipe 20 can be opened while the inert gas helium is input, air can be discharged from the air discharge pipe 20 because the air density is greater than that of the helium, and when the furnace is filled with the helium, the air discharge pipe 20 is closed, so that the mixing of the air and the helium in the single crystal furnace body 1 can be reduced, and the recovery purity of the helium is ensured.
In this embodiment, an electrode 21 is connected to an end of the graphite heater 4 extending out of the single crystal furnace body 1. The graphite heater 4 can be conveniently connected and heated by external circuits through the electrode 21.
Example 2:
on the basis of the embodiment 1, an operator can open the single crystal furnace body 1 through the hydraulic arm 17, place raw materials in the quartz crucible 2, close the furnace bottom protection disc 16, open the air discharge pipe 20, pump inert gas helium into the single crystal furnace body 1, check the pumping quantity according to the gas flowmeter 11, close the air discharge pipe 20 when the pumping gas quantity is larger than the volume in the single crystal furnace body 1, heat the raw materials in the quartz crucible 2 through the graphite heater 4, seed crystal by seed crystal, stop the furnace after the single crystal is prepared, introduce cooled helium into the single crystal furnace body 1, close the air inlet pipe 8 when the temperature in the single crystal furnace body 1 is reduced to room temperature, pump air into the single crystal furnace through the air discharge pipe 20, collect helium into the gas storage tank 12 through the air discharge pipe 9, open the furnace bottom protection disc 16, and take out finished products.
The above description is only the preferred embodiment of the present invention; the scope of the present invention is not limited thereto. Any person skilled in the art should also be able to cover the technical scope of the present invention by replacing or changing the technical solution and the improvement concept of the present invention with equivalents and modifications within the technical scope of the present invention.
Claims (8)
1. The utility model provides a novel single crystal growing furnace, includes single crystal growing furnace body (1), quartz crucible (2), graphite crucible hold in the palm (3), graphite heater (4) and base (5), its characterized in that: the quartz crucible (2) is placed in a graphite crucible support (3), a crucible support shaft (6) is arranged at the bottom of the graphite crucible support (3), the graphite heater (4) is positioned at the outer side of the graphite crucible support (3), the bottom end of the graphite heater (4) is fixed at the bottom of the inner wall of the single crystal furnace body (1), an attached furnace chamber (7) is arranged at the top of the single crystal furnace body (1), the attached furnace chamber (7) is communicated with the inside of the single crystal furnace body (1), an air inlet pipe (8) and an exhaust pipe (9) are arranged on the side wall of the attached furnace chamber (7), the output end of the air inlet pipe (8) and the input end of the exhaust pipe (9) are communicated with the inside of the attached furnace chamber (7), an air delivery pump (10), an electronic valve and a gas flow meter (11) are arranged on the air inlet pipe (8), an air storage tank (12) is arranged on the input end of the air inlet pipe (8), and the input, the single crystal furnace is characterized in that a compressor (13) is arranged on the side wall of the gas storage box (12), a condenser pipe (14) is arranged in the gas storage box (12), the condenser pipe (14) is connected with the compressor (13), and the single crystal furnace body (1) and the gas storage box (12) are fixed on the base (5) through a support rod set.
2. The novel single crystal furnace of claim 1, wherein: the bottom of the single crystal furnace body (1) is provided with a cleaning opening (15), and a furnace bottom protection disc (16) is covered on the cleaning opening (15).
3. The novel single crystal furnace of claim 2, wherein: the hydraulic arm type furnace bottom protective disc is characterized in that hydraulic arms (17) are symmetrically arranged at two ends of the bottom of the furnace bottom protective disc (16), the telescopic ends of the hydraulic arms (17) are fixed at the bottom of the furnace bottom protective disc (16), and the fixed ends of the hydraulic arms (17) are fixed on the base (5).
4. The novel single crystal furnace of claim 2, wherein: the crucible supporting device is characterized in that a variable frequency motor (18) is arranged on the base (5), the bottom end of the crucible supporting shaft (6) penetrates through the furnace bottom protection disc (16) to be fixed on the output end of the variable frequency motor (18), and the crucible supporting shaft (6) is movably connected with the furnace bottom protection disc (16).
5. The novel single crystal furnace of claim 4, wherein: and a sealing ring is adopted between the crucible supporting shaft (6) and the furnace bottom protection disc (16) for sealing treatment.
6. The novel single crystal furnace of claim 1, wherein: a heat preservation cylinder (19) is arranged between the graphite heater (4) and the inner wall of the single crystal furnace body (1).
7. The novel single crystal furnace of claim 1, wherein: an air discharge pipe (20) is arranged at the bottom of the side wall of the single crystal furnace body (1), an electronic valve is arranged on the air discharge pipe (20), and the input end of the air discharge pipe (20) is communicated with the interior of the single crystal furnace body (1).
8. The novel single crystal furnace of claim 1, wherein: the end part of the graphite heater (4) extending out of the single crystal furnace body (1) is connected with an electrode (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020455495.8U CN210974924U (en) | 2020-04-01 | 2020-04-01 | Novel single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020455495.8U CN210974924U (en) | 2020-04-01 | 2020-04-01 | Novel single crystal furnace |
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| Publication Number | Publication Date |
|---|---|
| CN210974924U true CN210974924U (en) | 2020-07-10 |
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| CN202020455495.8U Active CN210974924U (en) | 2020-04-01 | 2020-04-01 | Novel single crystal furnace |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112779594A (en) * | 2021-01-29 | 2021-05-11 | 程国峰 | Single crystal furnace and use method thereof |
| CN112957869A (en) * | 2021-03-09 | 2021-06-15 | 北京奇峰蓝达光学科技发展有限公司 | Volatile matter treatment system used in crystal growth process |
| CN113337881A (en) * | 2021-05-25 | 2021-09-03 | 宋斐 | Single crystal furnace |
-
2020
- 2020-04-01 CN CN202020455495.8U patent/CN210974924U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112779594A (en) * | 2021-01-29 | 2021-05-11 | 程国峰 | Single crystal furnace and use method thereof |
| CN112779594B (en) * | 2021-01-29 | 2022-05-03 | 内蒙古东立光伏电子有限公司 | Single crystal furnace and use method thereof |
| CN112957869A (en) * | 2021-03-09 | 2021-06-15 | 北京奇峰蓝达光学科技发展有限公司 | Volatile matter treatment system used in crystal growth process |
| CN113337881A (en) * | 2021-05-25 | 2021-09-03 | 宋斐 | Single crystal furnace |
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Address after: 655000 No.83 Cuifeng Road, Qujing Development Zone, Qujing City, Yunnan Province Patentee after: Qujing sunshine new energy Co.,Ltd. Address before: 655000 No.83 Cuifeng Road, Qujing Development Zone, Qujing City, Yunnan Province Patentee before: Qujing sunshine energy silicon material Co.,Ltd. |