CN207577056U - A kind of single crystal growing furnace scavenging air compresses rifle - Google Patents
A kind of single crystal growing furnace scavenging air compresses rifle Download PDFInfo
- Publication number
- CN207577056U CN207577056U CN201721529632.2U CN201721529632U CN207577056U CN 207577056 U CN207577056 U CN 207577056U CN 201721529632 U CN201721529632 U CN 201721529632U CN 207577056 U CN207577056 U CN 207577056U
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- CN
- China
- Prior art keywords
- gathering arrester
- single crystal
- dust gathering
- gun barrel
- crystal growing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Abstract
A kind of single crystal growing furnace scavenging air compresses rifle, including gun body, dust gathering arrester, air compressor and dedusting fan.Gun body runs through dust gathering arrester, and is set at the central axes of dust gathering arrester.Air compressor is connected by pipeline with gun body；Dedusting fan is connected by pipeline with dust gathering arrester.The utility model by telescopic gun body into single crystal growing furnace on from lower compressed-air blows, each graphite device surface floating dust in furnace body and stove is removed in a manner of purging, is conducive to further improve the cleannes of furnace body, advantage is provided for drawing high-quality monocrystalline.Meanwhile single crystal furnace body is closed by dust gathering arrester, is isolated, coordinate dedusting fan repeated collection floating dust, advantageously ensure that purging effect, and avoid causing secondary pollution to operating environment.
Description
Technical field
The utility model is related to thermal field of single crystal furnace cleaning technology fields more particularly to a kind of single crystal growing furnace scavenging air to compress
Rifle.
Background technology
Single crystal growing furnace is a kind of in inert gas environment, and the thermal field formed with graphite device melts the polycrystalline materials such as polysilicon
Change, with the equipment of Grown by CZ Method dislocation-free monocrystalline.The cleannes of thermal field have very big shadow to yield and quality of finished product etc.
It rings, therefore before production, it is necessary to which single crystal furnace body and thermal field graphite device are adequately cleaned.Existing thermal field of single crystal furnace cleaning
In technical solution, the cleaning after only being removed to graphite device, and after assembling, furnace body and device surface have remained part floating dust
Particle deviates so as to resistivity occur, destroys the problems such as dislocation-free single crystal growth, influences product quality.
Utility model content
The utility model provides a kind of single crystal growing furnace scavenging air compression rifle, insufficient to solve the above-mentioned prior art.By can
Flexible gun body blows compressed gas by upper into single crystal growing furnace under, and each graphite device in furnace body and stove is removed in a manner of purging
Surface floating dust is conducive to further improve the cleannes of furnace body, and advantage is provided for drawing high-quality monocrystalline.Meanwhile pass through
Dust gathering arrester is closed single crystal furnace body, is isolated, and coordinates dedusting fan repeated collection floating dust, advantageously ensures that purging effect,
And it avoids causing secondary pollution to operating environment.
In order to realize the purpose of this utility model, intend using following technology：
A kind of single crystal growing furnace scavenging air compresses rifle, which is characterized in that including gun body, dust gathering arrester, air compressor and dedusting
Wind turbine, the gun body run through the dust gathering arrester, are set at the central axes of the dust gathering arrester, the air compressor passes through pipeline
It is connected with the gun body, the dedusting fan is connected by pipeline with the dust gathering arrester.
Further, the gun body includes interior gun barrel and outer gun barrel, passes through sealing ring and the dust at the top of the outer gun barrel
Cover sealing is fixed, and is connect fixation with being set to the telescoping mechanism of the dust gathering arrester upper surface at the top of the interior gun barrel, is made in described
Gun barrel is Telescopic Fixed in the outer gun barrel.
Further, the air compressor is connected by pipeline with the interior gun barrel, and pulse valve is equipped at connecting line.
Further, the interior gun barrel and outer gun barrel bottom are equipped with several gas vents.
Further, the dust gathering arrester bottom is equipped with rubber baffle ring.
Further, the dedusting fan is equipped with disposal box using dedusting fan during centrifugation, the port of export.
The beneficial effects of the utility model are：
1st, the utility model blows compressed gas by upper into single crystal growing furnace by telescopic gun body under, with the side of purging
Formula removes each graphite device surface floating dust in furnace body and stove, is conducive to further improve the cleannes of furnace body, is drawing high-quality
Monocrystalline provides advantage.
2nd, the utility model is closed single crystal furnace body by dust gathering arrester, is isolated, and coordinates dedusting fan repeated collection
Floating dust advantageously ensures that purging effect, and avoids causing secondary pollution to operating environment.
Description of the drawings
Fig. 1 shows the utility model structure diagram.
Fig. 2 shows the utility model lance body structure schematic diagrames.
Specific embodiment
As depicted in figs. 1 and 2, a kind of single crystal growing furnace scavenging air compression rifle, including gun body 1, dust gathering arrester 2, air compressor 3
With dedusting fan 4, the gun body 1 runs through the dust gathering arrester 2, is set at the central axes of the dust gathering arrester 2, the air compression
Machine 3 is connected by pipeline with the gun body 1, and the dedusting fan 4 is connected by pipeline with the dust gathering arrester 2.The rifle
Body 1 blows the compressed gas at the air compressor 3 into single crystal growing furnace, by the high flow rate of compressed gas, in furnace body into
Row purging, to remove floating dust.The dust gathering arrester 2 passes through the drifting dust wind for collecting the floating dust purged out by the gun body 1
The air inducing effect of machine 4, floating dust is removed from furnace body.
The gun body 1 includes interior gun barrel 11 and outer gun barrel 12, and interior 11 top of gun barrel is with being set on the dust gathering arrester 2
The connection of telescoping mechanism 5 on surface is fixed, and makes the interior gun barrel 11 Telescopic Fixed in the outer gun barrel 12.Under natural conditions, institute
Interior gun barrel 11 is stated to be contracted in the outer gun barrel 12.Change the retracted position of the telescoping mechanism 5 by modes such as pressings, with band
Interior 11 bottom of gun barrel is moved from the outer 12 bottom exposure of gun barrel, so as to change the gun body 1 below the dust gathering arrester 2
Length ensures that the gun body 1 can be purged to bottom of furnace body.
The interior gun barrel 11 and 12 bottom of outer gun barrel are equipped with several gas vents 13.High flow rate compressed gas is from the exhaust
It is blown out at hole 13, to its outside, furnace body/graphite device purges.
The air compressor 3 is connected by pipeline with the interior gun barrel 11, and pulse valve 6 is equipped at connecting line.It is described
Pulse valve 6 is used to quickly regulate and control the open/close states of the compressed gas in the interior gun barrel 11, and it is in intermittent progress to make purge.
Gap between purge twice is conducive to the dedusting fan 4 and dust is taken away furnace body.
It is sealed and fixed by sealing ring between 12 top of outer gun barrel and the dust gathering arrester 2, to avoid by the gun body 1
Floating dust under purging enters from the gap of the two junction in operating environment.
2 bottom of dust gathering arrester is equipped with rubber baffle ring 21.The rubber baffle ring 21 is used for closed furnace body or open top.Together
When, the flexible materials such as described 2 preferred rubber of dust gathering arrester to ensure the sealing in purge, isolation performance, avoid floating dust pair
The pollution of operating environment.
The dedusting fan 4 is equipped with disposal box 7 using dedusting fan during centrifugation, the port of export.The disposal box 7 is used to store
Floating dust.
Illustrate that specific embodiment of the present invention is as follows in conjunction with the embodiments：
S1：Isolation cleaning
According to existing thermal field of single crystal furnace clean specification, by each graphite device of thermal field according to：Guide shell → heat shielding → support ring
→ above insulation cover → three-part crucible → crucible chassis → middle insulation cover → graphite axis → heater → lower insulation cover → chassis is suitable
Sequence is taken out successively, the cleaning tool required in code requirement, is polished respectively it, the cleanings such as dust suction.
S2：Assembling purging
After above-mentioned graphite device is removed, the dust gathering arrester 2 is covered at the top of hollow single crystal furnace body, make the rubber
Baffle ring 21 is sheathed on the outside of furnace body, and the dust gathering arrester 2 is good in furnace body to ensure in purge fully with being contacted at the top of furnace body
Sealing performance.
It opens the air compressor 3 and injects compressed gas into the interior gun barrel 11.Compressed gas passes through the interior rifle
The gas vent 13 of pipe 11 and the outer gun barrel 12 is poured in furnace body, and inboard wall of furnace body is purged.Then, by pressing
Telescoping mechanism 5 is stated so that the interior gun barrel 11 to be driven to purge stove successively from top to bottom from exposure vertically downward in the outer gun barrel 12
Internal wall.During purging, from inboard wall of furnace body by the lower dust of purging, in the case where the air inducing of the dedusting fan 4 acts on, by described
The aggregation of dust gathering arrester 2 is discharged by pipeline in the disposal box 7.Simultaneously as the compressed gas discharged in the gun body 1 exists
Under the regulation and control of the pulse valve 6, progress is noncontinuity purging, and the interval purged twice is conducive to the dedusting fan 4 will
Dust takes away furnace body.It is obstructed to the telescoping mechanism 5 contraction, i.e., after described 11 bottom of interior gun barrel reaches bottom of furnace body, completes to blow
It sweeps.The pressing to the telescoping mechanism 5 is released, the interior gun barrel 11 is made to collapse into the outer gun barrel 12, by the utility model
It is taken out at the top of from furnace body.
According to the reverse sequence of dismounting sequence in S1, graphite device is sequentially arranged in single crystal furnace body.Often install one
After device, purging from top to bottom is carried out to furnace body according to aforementioned purge step, until the assembling of the whole graphite devices of completion,
Purging.
Preferably, using each graphite device after isolation cleaning in open cleaning container collection S1.It selects and spacious
Mouth container top opening after the rubber baffle ring 21 is made to be sealed with container opening, uses above-mentioned side to the matched dust gathering arrester 2
After method pre-purges each graphite device in cleaning container, then row assembling.Be conducive to further improve cleaning journey in thermal field
Degree.
Claims (6)
1. a kind of single crystal growing furnace scavenging air compresses rifle, which is characterized in that including gun body（1）, dust gathering arrester（2）, air compressor（3）
And dedusting fan（4）, the gun body（1）Through the dust gathering arrester（2）, it is set to the dust gathering arrester（2）Central axes at, it is described
Air compressor（3）Pass through pipeline and the gun body（1）It is connected, the dedusting fan（4）Pass through pipeline and the dust gathering arrester
（2）It is connected.
A kind of 2. single crystal growing furnace scavenging air compression rifle according to claim 1, which is characterized in that the gun body（1）Including
Interior gun barrel（11）With outer gun barrel（12）, the outer gun barrel（12）Top passes through sealing ring and the dust gathering arrester（2）Sealing is fixed, institute
State interior gun barrel（11）Top is with being set to the dust gathering arrester（2）The telescoping mechanism of upper surface（5）Connection is fixed, and makes the interior gun barrel
（11）It is Telescopic Fixed in the outer gun barrel（12）It is interior.
A kind of 3. single crystal growing furnace scavenging air compression rifle according to claim 2, which is characterized in that the air compressor
（3）Pass through pipeline and the interior gun barrel（11）It is connected, pulse valve is equipped at connecting line（6）.
A kind of 4. single crystal growing furnace scavenging air compression rifle according to claim 2, which is characterized in that the interior gun barrel（11）With
Outer gun barrel（12）Bottom is equipped with several gas vents（13）.
A kind of 5. single crystal growing furnace scavenging air compression rifle according to claim 1, which is characterized in that the dust gathering arrester（2）Bottom
Portion is equipped with rubber baffle ring（21）.
A kind of 6. single crystal growing furnace scavenging air compression rifle according to claim 1, which is characterized in that the dedusting fan（4）
Using dedusting fan during centrifugation, the port of export is equipped with disposal box（7）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721529632.2U CN207577056U (en) | 2017-11-16 | 2017-11-16 | A kind of single crystal growing furnace scavenging air compresses rifle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721529632.2U CN207577056U (en) | 2017-11-16 | 2017-11-16 | A kind of single crystal growing furnace scavenging air compresses rifle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207577056U true CN207577056U (en) | 2018-07-06 |
Family
ID=62731919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721529632.2U Expired - Fee Related CN207577056U (en) | 2017-11-16 | 2017-11-16 | A kind of single crystal growing furnace scavenging air compresses rifle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207577056U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114289408A (en) * | 2021-11-23 | 2022-04-08 | 浙江晶盛机电股份有限公司 | Main shaft oxide cleaning device of hard shaft single crystal furnace |
-
2017
- 2017-11-16 CN CN201721529632.2U patent/CN207577056U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114289408A (en) * | 2021-11-23 | 2022-04-08 | 浙江晶盛机电股份有限公司 | Main shaft oxide cleaning device of hard shaft single crystal furnace |
| CN114289408B (en) * | 2021-11-23 | 2022-11-22 | 浙江晶盛机电股份有限公司 | Main shaft oxide cleaning device of hard shaft single crystal furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180706 Termination date: 20191116 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |