CN204690160U - A kind of czochralski crystal growing furnace volatile matter clearing apparatus - Google Patents
A kind of czochralski crystal growing furnace volatile matter clearing apparatus Download PDFInfo
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- CN204690160U CN204690160U CN201520360611.7U CN201520360611U CN204690160U CN 204690160 U CN204690160 U CN 204690160U CN 201520360611 U CN201520360611 U CN 201520360611U CN 204690160 U CN204690160 U CN 204690160U
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- filtering chamber
- crystal growing
- growing furnace
- pipeline
- volatile matter
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Abstract
The utility model discloses a kind of czochralski crystal growing furnace volatile matter clearing apparatus, and comprise support and be arranged on the filtering chamber on support, the side of filtering chamber is provided with inlet mouth, and opposite side is provided with venting port, and the bottom of filtering chamber connects conical flow guiding cylinder and the cylinder that gathers dust successively; The inner horizontal of described filtering chamber is provided with multiple filter core, the air outlet place of filter core is provided with pulse backblowing pipeline, the inlet end of pulse backblowing pipeline is connected with compressed air line, and on pulse backblowing pipeline, is provided with ball valve, pulse valve and pressure maintaining valve successively along airintake direction; The exhaust ports of described filtering chamber is connected with gas exhaust duct, and gas exhaust duct is provided with gas ring vacuum pump.The czochralski crystal growing furnace volatile matter clearing apparatus that the utility model provides efficiently solve cleaning single crystal growing furnace and more renew cartridge staff is damaged and the problem of environmental pollution, improve sweeping efficiency simultaneously.
Description
Technical field
the utility model belongs to Czochralski method mono-crystal furnace growing single-crystal silicon technical field, is specifically related to a kind of czochralski crystal growing furnace volatile matter clearing apparatus.
Background technology
at present, the main growth methods of semi-conductor and sun power industry silicon single-crystal used is vertical pulling method, and the equipment that this method is used is single crystal growing furnace.The polysilicon of solid block is encased in the quartz crucible in single crystal growing furnace, with the graphite heater in single crystal growing furnace, heat fused is carried out to polysilicon, in-furnace temperature is up to 1500 DEG C, through seeding after fusing, shouldering, isometrical, ending, the processes such as blowing out draw out silicon single crystal rod, whole process need 40-60 hour, whole process melts the oxide compound of the silicon in silicon, what the oxide compound of various doping agent etc. continued evaporates, deposit on the furnace wall of single crystal growing furnace and all parts of graphite field, crystal pulling terminates rear needs and cleans each parts of single crystal growing furnace, to carry out the growth of next heat.On the other hand, the demand of heavily doped n type single crystal silicon is increasing, and the doping agent that heavily doped N-type monocrystalline uses mainly contains antimony, arsenic, phosphorus three kinds of elements.The oxide compound that in crystal pulling process, these three kinds of materials produce is malicious objectionable impurities, and after silicon single crystal rod has drawn, when personnel clean each parts of single crystal growing furnace and each parts of thermal field, processing ease causes injury and the environmental pollution of personnel improperly.General simple and easy suction cleaner or the sack cleaner of using of single crystal growing furnace cleaning is carried out, uses the filter core of certain hour rear dust collector and sack cleaner also to need to carry out hand sweeping, produce secondary pollution.
Utility model content
For solving the problems of the technologies described above, the utility model provides a kind of czochralski crystal growing furnace volatile matter clearing apparatus, this device efficiently solve cleaning single crystal growing furnace and more renew cartridge staff is damaged and the problem of environmental pollution, improve sweeping efficiency simultaneously.
The technical scheme that the utility model adopts is: a kind of czochralski crystal growing furnace volatile matter clearing apparatus, comprise support and be arranged on the filtering chamber on support, the side of filtering chamber is provided with inlet mouth, and opposite side is provided with venting port, and the bottom of filtering chamber connects conical flow guiding cylinder and the cylinder that gathers dust successively; The inner horizontal of described filtering chamber is provided with multiple filter core, the air outlet place of filter core is provided with pulse backblowing pipeline, the inlet end of pulse backblowing pipeline is connected with compressed air line, and on pulse backblowing pipeline, is provided with ball valve, pulse valve and pressure maintaining valve successively along airintake direction; The exhaust ports of described filtering chamber is connected with gas exhaust duct, and gas exhaust duct is provided with gas ring vacuum pump.
Further optimization, described horizontally disposed filter core has four.
Further optimization, to be gathered dust cylinder by fast de-clamp connection in the bottom of described conical flow guiding cylinder.
Compared with prior art, the utility model at least has following advantage and beneficial effect:
The single crystal growing furnace clearing apparatus that the utility model provides, efficiently solve cleaning single crystal growing furnace, especially heavy doping single crystal growing furnace, the personnel that cause injure the problem with environmental pollution, achieve multiple stage single crystal growing furnace to clean simultaneously simultaneously, reduce the manpower of cleaning needed for stove, improve stove sweeping efficiency, avoid more renew cartridge more to the full extent and change the harm to personnel and environment when to gather dust tin.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the arrangement schematic diagram of filter core in the utility model;
Reference numeral: 1, support, 2, filtering chamber, 3, inlet mouth, 4, conical flow guiding cylinder, 5, gather dust cylinder, 6, filter core, 7, pulse backblowing pipeline, 8, ball valve, 9, pulse valve, 10, pressure maintaining valve, 11, gas exhaust duct, 12, gas ring vacuum pump, 13, soon de-clip.
Embodiment
For making content of the present utility model become apparent, below in conjunction with specific embodiment, the utility model is described in detail.
As shown in the figure, a kind of czochralski crystal growing furnace volatile matter clearing apparatus, the filtering chamber 2 comprising support 1 and be arranged on support 1, the side of filtering chamber 2 is provided with inlet mouth 3, and opposite side is provided with venting port, and the bottom of filtering chamber 2 connects conical flow guiding cylinder 4 and the cylinder 5 that gathers dust successively; The inner horizontal of described filtering chamber 2 is provided with multiple filter core 6, the air outlet place of filter core 6 is provided with pulse backblowing pipeline 7, the inlet end of pulse backblowing pipeline 7 is connected with compressed air line, and on pulse backblowing pipeline 7, is provided with ball valve 8, pulse valve 9 and pressure maintaining valve 10 successively along airintake direction; The exhaust ports of described filtering chamber 2 is connected with gas exhaust duct 11, and gas exhaust duct 11 is provided with gas ring vacuum pump 12.
In order to make the utility model have better result of use, described horizontally disposed filter core 6 has four, and the bottom of described conical flow guiding cylinder 4 connects by fast de-clip 13 cylinder 5 that gathers dust.
In the technical program, in accompanying drawing, arrow represents the flow direction of volatile matter etc.When single crystal growing furnace blowing out is cleaned, start gas ring vacuum pump 12 in figure, suction device inlet mouths 3 such as single crystal growing furnace volatile matters, in filtering chamber 2, large-size particles quartz slag etc. enters into through conical flow guiding cylinder 4 cylinder 5 that gathers dust, small size particle filters through filter core 6, and clean gas enters air through gas exhaust duct 11.When process certain hour after, pressurized air through compressed air line, through ball valve 8, pressure maintaining valve 10, pulse valve 9, the pressurized air of dried and clean is blown in filter core 6 air outlet, filter core 6 is purged, keeps the cleaning of filter core 6, postpone the time of more renew cartridge 6 and extend the life-span of filter core 6.When after collection for some time, by taking off clip 13 soon, change the cylinder 5 that gathers dust, the continuation realizing clearing apparatus runs.
Technical scheme cited by the utility model and embodiment be not restriction, be equal to the technical scheme cited by the utility model and embodiment or effect same approach all in the scope that the utility model is protected.
Claims (3)
1. a czochralski crystal growing furnace volatile matter clearing apparatus, comprise support (1) and be arranged on the filtering chamber (2) on support (1), the side of filtering chamber (2) is provided with inlet mouth (3), opposite side is provided with venting port, the bottom of filtering chamber (2) connects conical flow guiding cylinder (4) and the cylinder that gathers dust (5) successively, it is characterized in that: the inner horizontal of described filtering chamber (2) is provided with multiple filter core (6), the air outlet place of filter core (6) is provided with pulse backblowing pipeline (7), the inlet end of pulse backblowing pipeline (7) is connected with compressed air line, and on pulse backblowing pipeline (7), ball valve (8) is provided with successively along airintake direction, pulse valve (9) and pressure maintaining valve (10), the exhaust ports of described filtering chamber (2) is connected with gas exhaust duct (11), and gas exhaust duct (11) is provided with gas ring vacuum pump (12).
2. a kind of czochralski crystal growing furnace volatile matter clearing apparatus as claimed in claim 1, is characterized in that: described horizontally disposed filter core (6) has four.
3. a kind of czochralski crystal growing furnace volatile matter clearing apparatus as claimed in claim 1, is characterized in that: the bottom of described conical flow guiding cylinder (4) connects by fast de-clip (13) cylinder (5) that gathers dust.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520360611.7U CN204690160U (en) | 2015-05-30 | 2015-05-30 | A kind of czochralski crystal growing furnace volatile matter clearing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520360611.7U CN204690160U (en) | 2015-05-30 | 2015-05-30 | A kind of czochralski crystal growing furnace volatile matter clearing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204690160U true CN204690160U (en) | 2015-10-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520360611.7U Expired - Fee Related CN204690160U (en) | 2015-05-30 | 2015-05-30 | A kind of czochralski crystal growing furnace volatile matter clearing apparatus |
Country Status (1)
| Country | Link |
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| CN (1) | CN204690160U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106669301A (en) * | 2016-09-13 | 2017-05-17 | 沈阳隆基电磁科技股份有限公司 | Vacuum dust removal equipment for single crystal growth furnace |
| CN106890528A (en) * | 2017-03-14 | 2017-06-27 | 张镇龙 | High-temperature dust removal equipment |
| CN109440192A (en) * | 2018-12-27 | 2019-03-08 | 内蒙古中环光伏材料有限公司 | A kind of single crystal fire grate gas port self-purifying device |
| CN111621843A (en) * | 2019-02-28 | 2020-09-04 | 上海新昇半导体科技有限公司 | Crystal pulling mechanism and crystal growing device |
| EP4306683A1 (en) | 2022-07-13 | 2024-01-17 | Siltronic AG | Device for purifying waste gases from a crystal pulling system |
-
2015
- 2015-05-30 CN CN201520360611.7U patent/CN204690160U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106669301A (en) * | 2016-09-13 | 2017-05-17 | 沈阳隆基电磁科技股份有限公司 | Vacuum dust removal equipment for single crystal growth furnace |
| CN106890528A (en) * | 2017-03-14 | 2017-06-27 | 张镇龙 | High-temperature dust removal equipment |
| CN109440192A (en) * | 2018-12-27 | 2019-03-08 | 内蒙古中环光伏材料有限公司 | A kind of single crystal fire grate gas port self-purifying device |
| CN111621843A (en) * | 2019-02-28 | 2020-09-04 | 上海新昇半导体科技有限公司 | Crystal pulling mechanism and crystal growing device |
| EP4306683A1 (en) | 2022-07-13 | 2024-01-17 | Siltronic AG | Device for purifying waste gases from a crystal pulling system |
| WO2024012990A1 (en) | 2022-07-13 | 2024-01-18 | Siltronic Ag | Device for cleaning exhaust gases from a crystal growing system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151007 Termination date: 20170530 |