CN203583003U - Filter for all-closed automatic cleaning device - Google Patents
Filter for all-closed automatic cleaning device Download PDFInfo
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- CN203583003U CN203583003U CN201320668464.0U CN201320668464U CN203583003U CN 203583003 U CN203583003 U CN 203583003U CN 201320668464 U CN201320668464 U CN 201320668464U CN 203583003 U CN203583003 U CN 203583003U
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- stainless steel
- tank
- filter
- hay tank
- cleaning device
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Abstract
The utility model discloses a filter for an all-closed automatic cleaning device. The filter is suitable for sweeping volatile matters such as SiO generated in a Czochralski silicon single crystal production process. The filter for the all-closed automatic cleaning device, disclosed by the utility model, mainly comprises a filter tank (2), a stainless steel blowpipe (3) and a filter net (4), wherein the filter tank (2) is of a cylinder structure, the bottom of the filter tank is designed into an inverted conical bottom surface, the top of the filter tank is designed into a pressing buckle flange (5), one end of the stainless steel blowpipe (3) is arranged in the filter tank (2), the other end of the stainless steel blowpipe (3) is linked with a compressed air tank (8) through a flange cover (5), and uniformly distributed air holes are formed in the pipe wall of one end of the stainless steel blowpipe (3), which is arranged in the filter tank (2). The cylindrical filter net (4) made of a stainless steel net and a stainless steel batten is fixed on a hung support (6) at the upper in the filter tank (2). The filter is linked with an external vacuum sweeping system to ensure that the volatile matters such as SiO are swept in an all-closed manner under the condition of no contact with air, so that the sweeping time is shortened, the sweeping efficiency is increased, and the personal injury and the environment pollution are prevented.
Description
Technical field
The utility model belongs to crystal for straight drawing monocrystal production technical field, relates generally to a kind of totally-enclosed automatic cleaning device strainer.
Background technology
At present, the main method of manufacture order crystal silicon is to adopt Czochralski method (vertical pulling method) to manufacture, this method is that polysilicon is put in quartz crucible, heat fused, then molten silicon temperature is controlled in cooling, give certain condensate depression, the silicon single crystal of a particular crystal orientation (calling seed crystal) is contacted with molten silicon, the pulling speed making progress by adjusting melt temperature and seed crystal, get rid of the dislocation that fusion process produces, then reduce pulling speed and temperature, single crystal is grown to major diameter, when crystal diameter reaches aimed dia, by adjusting pulling rate and temperature, make single crystal enter equal diameter growth.When growing into last stage, now, the not yet completely dissolve of melt in quartz crucible, by increasing the pulling speed of crystal and the heat providing to melt being provided, crystal diameter is reduced gradually, finally form the cone of a tail shape, when enough hour of the point of cone, crystal will depart from melt, thereby completes the process of growth of crystal.
The process of growth of whole silicon single crystal is all carried out in the furnace chamber that has inert protective gas in airtight, because the temperature of melt in production process is higher, therefore, can produce a large amount of volatile matters such as SiO in process of production.To the current processing mode of this volatile matter, be, in the rear end of single crystal growing furnace, a strainer is installed, strainer is comprised of hay tank and filtering net, and strainer is arranged between device vacuum system and single crystal growing furnace.During normal production, after the volatile matter of generation filters by strainer, most of volatile matter can be attached on the filtering net in hay tank.In crystal pulling, finish after apparatus cools, manually open hay tank, take out filtering net, use hairbrush and suction device to clean hay tank, meanwhile, rinse filtering net well airing, and then pack in hay tank, cover hay tank upper lid.But, it is easily oxidized that the volatile matters such as SiO that crystal pulling process produces run into air, therefore, when hay tank is opened, volatile matter in tank runs into the danger that is easy to blast after air, and the doping agent that particularly will mix a large amount of doping agents and use when producing the monocrystalline of super-low resistivity mainly contains antimony, arsenic, the element of three kinds of high volatilities of phosphorus, the oxide compound that in crystal pulling process, these three kinds of materials produce all has inflammable and explosive characteristic and contains a large amount of hazardous and noxious substances.When stove hay tank is cleaned, slight friction all very easily causes volatile matter blast, thereby causes personnel's injury and environmental pollution.
Utility model content
In view of existing problem in prior art, the utility model design has proposed a kind of totally-enclosed automatic cleaning device strainer, do not need to open hay tank, the volatile matters such as a large amount of SiO that can automatic cleaning after monocrystalline silicon production finishes produce, to solve the volatile matters such as SiO, run into the danger that air is easily blasted, and the personnel that cause injure and environmental pollution, also alleviate workman's labour intensity simultaneously.For achieving the above object, the concrete technical scheme that the utility model is taked is: a kind of totally-enclosed automatic cleaning device strainer is mainly to consist of hay tank, filtering net, stainless steel blowpipe; Wherein hay tank is the cylindrical structure of making of stainless material, by filtering tank body and blind flange, combines.Hay tank height is 80～120cm, and diameter is 40～60cm; Hay tank bottom design bottom surface in an inverted cone, bell diameter is 60mm; By connecting tube, be connected with outside vacuum dedusting system; Design one suspension strut of 1cm place, below, position, hay tank internal upper part hole, for hanging filtering net; The top design of hay tank be press fastening type blind flange, match with filtering tank body, wear ring is installed for sealing on blind flange, hay tank two style structure is convenient to change filtering net and inner maintenance; The upper and lower opposite position of hay tank respectively has a hole for connecting with imported valve and main pump magnetic valve; Hay tank top flange lid central position has circular hole, and the stainless steel blowpipe of diameter 20mm inserts in hay tank by this hole; In circular hole, establish sealing groove, rubber seal ring is installed for sealing; Length in stainless steel blowpipe insertion hay tank is apart from bottom filtering net 10cm; Stainless steel blowpipe bottom adopts sealing design, and the upper and lower end face of stainless steel blowpipe tube wall in hay tank has the pore that equally distributed diameter is 2mm; The upper end of stainless steel blowpipe is connected with the outside do-nothing system of pressing by blind flange; Adopt the cylindrical filtering net suspension that stainless (steel) wire and stainless steel lath turn to be fixed in the suspension strut of hay tank internal upper part.Described a kind of totally-enclosed automatic cleaning device strainer, wherein the bevel angle of hay tank bottom back taper is 30o; Described a kind of totally-enclosed automatic cleaning device strainer, the upper and lower end face of stainless steel blowpipe tube wall being wherein arranged in hay tank has the pore that equally distributed diameter is 2mm.Described a kind of totally-enclosed automatic cleaning device strainer, wherein cylindrical filtering net diameter is 30～40cm.
The utility model has been realized the automatic cleaning function of strainer, connect use with external vacuum dust-removal system and pressure do-nothing system, can make open closed remote control, a key control of valve, reduced the required manpower of cleaning stove, alleviated labour intensity, shorten the cleaning time of single crystal growing furnace, improved the sweeping efficiency of single crystal growing furnace, avoided personnel's injury and environmental pollution.
Accompanying drawing explanation:
Fig. 1 is structural representation of the present utility model.
In figure: 1, imported valve; 2, hay tank; 3, stainless steel blowpipe; 4, filtering net; 5, blind flange; 6, suspension strut; 7, press vacant duct valve; 8, press air body tank; 9, main pump magnetic valve; 10, main pump; 11, vacuum cleaning pipeline valve; 12, vacuum dedusting system.
Embodiment
Below in conjunction with accompanying drawing, provide embodiment of the present utility model as follows:
As shown in Figure 1, a kind of totally-enclosed automatic cleaning device described in the utility model is mainly to consist of hay tank 2, stainless steel blowpipe 3, filtering net 4 with strainer; Wherein hay tank 2 is the cylindrical structures that adopt stainless material to make, the height of hay tank 2 is 80～120cm, diameter is 40～60cm, the bottom design bottom surface in an inverted cone of hay tank 2, bell diameter is 60mm, and bevel angle is 30o, the top design of hay tank 2 be press fastening type blind flange 5, be convenient to change and the interior maintenance of tank, and be beneficial to sealing.The upper and lower opposite position of hay tank 2 respectively has a hole for connecting with outside imported valve 1 and main pump magnetic valve 9.Diameter is the inside that stainless steel blowpipe 3 one end of 20mm are arranged on hay tank 2,10cm place, bottom apart from filtering net 4, stainless steel blowpipe 3 bottoms adopt sealing design, on the tube wall of the stainless steel blowpipe 3 of hay tank 2 inside and lower surface, have the circular hole that equally distributed diameter is 2mm, the other end of stainless steel tube 3, connects with pressing air body tank 8 through blind flange 5 centers; Adopt the cylindrical filtering net 4 that stainless (steel) wire and stainless steel lath are made to hang in the suspension strut 6 that is fixed on hay tank 2 below, position, internal upper part hole 1cm, filtering net 4 diameters are 30～40cm.When normal crystal pulling, press vacant duct valve 7 and vacuum cleaning pipeline valve 11 in closing condition, imported valve 1 and main pump magnetic valve 9 are opened, and single crystal growing furnace inner exhaust gas and volatile matter discharge out of the furnace after the filtering net 4 in hay tank 2 filters.In crystal pulling, finish after certain hour, close imported valve 1 and main pump magnetic valve 9, stop the running of main pump 10, then hay tank 2 and filtering net 4 are cleaned.When cleaning hay tank 2, open vacuum dedusting system 12, open vacuum cleaning pipeline valve 11, and then open and press vacant duct valve 7, press pressure air body in air body tank 8 to the high-voltage pulse air that passes into 5～6kg in hay tank 2, gas blows out by the hole on stainless steel tube 3, the volatile matter on filtering net 4 and hay tank 2 inwalls can be blown off.The volatile matter blowing off falls on hay tank 2 taper bottom surfaces, bottom, by vacuum cleaning system 12, is all sucked into outside tank, reaches the object of automatic cleaning hay tank 2 and filtering net 4.
Claims (5)
1. a totally-enclosed automatic cleaning device strainer, is characterized in that: described a kind of totally-enclosed automatic cleaning device is mainly to consist of hay tank (2), stainless steel blowpipe (3), filtering net (4) with strainer; Wherein hay tank (2) is the cylindrical structure of making of stainless material, by filtering tank body and blind flange (5), combines; Hay tank height is 80～120cm, and diameter is 40～60cm, hay tank (2) bottom design bottom surface in an inverted cone, bell diameter is 60mm, hay tank (2) top design be press fastening type blind flange (5), blind flange (5) central position has circular hole; Diameter is the inside that stainless steel blowpipe (3) one end of 20mm is arranged on hay tank (2), and stainless steel blowpipe (3) bottom adopts sealing design, and the upper end of stainless steel blowpipe (3) connects with the outside air body tank (8) of pressing by blind flange (5); Adopt columniform filtering net (4) suspension that stainless (steel) wire and stainless steel lath turn to be fixed in the suspension strut (6) of hay tank (2) internal upper part.
2. a kind of totally-enclosed automatic cleaning device strainer according to claim 1, is characterized in that: wherein the bevel angle of hay tank (2) bottom back taper is 30o.
3. a kind of totally-enclosed automatic cleaning device strainer according to claim 1, is characterized in that: the upper and lower end face of tube wall that is contained in the stainless steel blowpipe (3) in hay tank (2) has the pore that is uniformly distributed that diameter is 2mm.
4. a kind of totally-enclosed automatic cleaning device strainer according to claim 1, is characterized in that: the length of the stainless steel blowpipe (3) that insertion hay tank (2) is inner is 10cm apart from the distance of bottom filtering net (4).
5. a kind of totally-enclosed automatic cleaning device strainer according to claim 1, is characterized in that: the diameter of filtering net (4) is 30～40cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320668464.0U CN203583003U (en) | 2013-10-29 | 2013-10-29 | Filter for all-closed automatic cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320668464.0U CN203583003U (en) | 2013-10-29 | 2013-10-29 | Filter for all-closed automatic cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203583003U true CN203583003U (en) | 2014-05-07 |
Family
ID=50580948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320668464.0U Expired - Fee Related CN203583003U (en) | 2013-10-29 | 2013-10-29 | Filter for all-closed automatic cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203583003U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105200511A (en) * | 2015-10-19 | 2015-12-30 | 天津市环欧半导体材料技术有限公司 | Pre-purging device for furnace mounting and dismounting system in zone-melting silicon single crystal furnace |
| CN115243782A (en) * | 2020-01-28 | 2022-10-25 | 埃尔丁过滤技术有限公司 | Method for dry-filtering a gas flow carrying foreign bodies and filter device for cleaning a raw gas carrying foreign bodies |
-
2013
- 2013-10-29 CN CN201320668464.0U patent/CN203583003U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105200511A (en) * | 2015-10-19 | 2015-12-30 | 天津市环欧半导体材料技术有限公司 | Pre-purging device for furnace mounting and dismounting system in zone-melting silicon single crystal furnace |
| CN115243782A (en) * | 2020-01-28 | 2022-10-25 | 埃尔丁过滤技术有限公司 | Method for dry-filtering a gas flow carrying foreign bodies and filter device for cleaning a raw gas carrying foreign bodies |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140507 Termination date: 20161029 |