CN208758224U - A kind of polycrystalline silicon reduction furnace base plate sweeper and its purging system - Google Patents
A kind of polycrystalline silicon reduction furnace base plate sweeper and its purging system Download PDFInfo
- Publication number
- CN208758224U CN208758224U CN201821100644.8U CN201821100644U CN208758224U CN 208758224 U CN208758224 U CN 208758224U CN 201821100644 U CN201821100644 U CN 201821100644U CN 208758224 U CN208758224 U CN 208758224U
- Authority
- CN
- China
- Prior art keywords
- seal closure
- base plate
- polycrystalline silicon
- reduction furnace
- sweeper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Silicon Compounds (AREA)
Abstract
A kind of polycrystalline silicon reduction furnace base plate sweeper is disclosed in the utility model, including seal closure, the seal closure is downward opening cavity body structure, top is provided with multiple purging gas jets in the seal closure, the opening down setting of the purging gas jets, the seal closure are provided with gas vent on side wall, are provided with sealing mechanism on the seal closure open at one end, the seal closure is connect by sealing mechanism with chassis of reducing furnace, and the cavity that sealing is formed between seal closure and chassis of reducing furnace is made.The utility model is high to the silicon powder cleaning efficiency on polycrystalline silicon reduction furnace base plate and cleaning is thorough, moreover it is possible to reduce pollution of the silicon powder to indoor environment.
Description
Technical field
The utility model relates to cleaning equipment field more particularly to a kind of polycrystalline silicon reduction furnace base plate sweeper and its cleanings
System.
Background technique
Improved Siemens are the mainstream technologys for producing polysilicon, and core equipment is reduction furnace.The work of reduction furnace is former
Reason is the mixed air by energization high temperature silicon core by silicon-containing gas (common silicon-containing gas is trichlorosilane and silane) with hydrogen
Precursor reactant, which generates elementary silicon and is deposited on silicon core, forms polysilicon, finally using polycrystalline silicon rod as extraction product.In reduction furnace
In operational process, two kinds of elementary silicon deposition reactions mainly occur, one is the heteropical deposit occurred in high temperature silicon wicking surface reaction,
Another kind is the homogeneous deposition reaction occurred in the gas phase.Homogeneous deposition reacts the silicon powder that will form micro/nano level, and silicon powder can be rich
Collection is on chassis of reducing furnace surface, these silicon powder purity are good, granularity is small, has very high utility value.It is rich after polycrystalline silicon rod extraction
The silicon powder needs for combining in chassis of reducing furnace are cleaned, currently, open type manual cleaning method is mostly used to clear up chassis silicon powder, the party
That there are cleaning efficiencies is low for method, cleaning is not thorough, pollutes the problems such as indoor environment, ashes easy to pollute.
Utility model content
The purpose of this utility model is to provide a kind of polycrystalline silicon reduction furnace base plate sweeper and purging systems, for solving
Silicon powder on manual cleaning chassis existing in the prior art, cleaning efficiency is low, cleaning is not thorough and pollutes asking for indoor environment
Topic.
In order to solve the above technical problems, the technical solution adopted in the utility model is as follows: a kind of polycrystalline silicon reduction furnace base plate
Sweeper, including seal closure, the seal closure are downward opening cavity body structure, are provided in the seal closure at top multiple
Gas jets are purged, the opening down setting of the purging gas jets, the seal closure is provided with gas vent on side wall, described close
Sealing mechanism is provided on sealing cover open at one end, the seal closure is connect by sealing mechanism with chassis of reducing furnace, and seal closure is made
The cavity of sealing is formed between chassis of reducing furnace.
Preferably, the seal closure includes linking arm, L shape support rod and flexible membrane, and the linking arm lower end is circumferentially equal
It is even to be provided with multiple support rods, it is connected between each support rod by flexible membrane, the support rod includes support rail and support
Vertical bar, described each support rail one end are connect with linking arm hinge, and the other end is connected with downwards vertical supporting rod, and each support is horizontal
Automatic telescopic link is provided between bar and linking arm, described each automatic telescopic link one end is connect with linking arm hinge, the other end with
Each support rail hinge connection.
Preferably, the automatic telescopic link is Telescopic rod structure that is electronic, pneumatically or hydraulically controlling.
Preferably, the flexible membrane cladding is arranged on the inside of support rod.
Preferably, the linking arm is retractable structure.
Preferably, the sealing mechanism is the magnet that seal closure open at one end is arranged in.
Preferably, each purging gas jets are distributed in a ring at the top of seal closure.
A kind of polycrystalline silicon reduction furnace base plate sweeper and purging system, including clear described in any one of claims 1 to 7
Device is swept, the sweeper is connected on a sliding rail, and moving trolley is provided on the sliding rail, and the moving trolley can be moved along sliding rail,
The sweeper is connected on moving trolley, and the sliding rail is arranged along each chassis of reducing furnace arranged direction, is going back sliding rail setting respectively
The surface of former furnace hearth plate, the sweeper are connected with purging air feed system and silicon powder collection device, the row by pipeline
Mule carriage and purging air feed system are connected respectively to a controller.
Further preferably, infrared inductor is provided on the sliding rail, the infrared inductor connects controller.
Still more preferably, gas-solid separating device is provided between the sweeper and silicon powder collection device.
Possessed by the utility model the utility model has the advantages that
1) sweeper in the utility model uses seal closure, by the way that purging gas jets are arranged at the top of seal closure, close
Exhaust outlet is set on sealing cover side wall, when being cleaned using the sweeper to chassis of reducing furnace, seal closure and chassis of reducing furnace it
Between form seal cavity structure, chassis of reducing furnace is cleaned by the high pressure gas that purging gas jets spray, while silicon powder
It being discharged with gas from exhaust outlet, while cleaning to chassis of reducing furnace, realizes the recycling of silicon powder, sweeping efficiency is high,
And solve the problems, such as that silicon powder pollutes environment.
2) folding structure is set by seal closure, sweeper can collapse folding when not in use, thus prevent ash
Dirt enters in seal closure, and then prevents from polluting silicon powder when silicon powder recycles.
3) the utility model can be with the silicon powder in automatic identification and cleaning polycrystalline silicon reduction furnace base plate, and cleaning is thorough and clears up
It is high-efficient, moreover it is possible to reduce pollution of the silicon powder to indoor environment.
Detailed description of the invention
Structural front view when Fig. 1 is sweeper unfolded state in the utility model.
Structural front view when Fig. 2 is sweeper closed state in Fig. 1.
Fig. 3 is the structural block diagram of purging system in the utility model.
In figure: 1, linking arm, 2, automatic telescopic link, 3, seal closure, 301, support rail, 302, vertical supporting rod, 303, branch
Strut, 304, flexible membrane, 4, gas vent, 5, sealing mechanism, 6, purging gas jets, 7, infrared inductor, 8, chassis of reducing furnace, 9,
Sweeper, 10, silicon powder collection device, 11, gas-solid separating device, 12, purging air feed system, 13, sliding rail, 14, moving trolley.
Specific embodiment
The utility model is further described in the following with reference to the drawings and specific embodiments.
A kind of polycrystalline silicon reduction furnace base plate sweeper as depicted in figs. 1 and 2, including seal closure 3, the seal closure 3 are
Downward opening cavity body structure, the seal closure 3 is interior to be provided with multiple purging gas jets 6 at top, the purging gas jets 6
Opening down setting, the seal closure 3 are provided with gas vent 4 on side wall, are provided with sealing on 3 open at one end of seal closure
Mechanism 5, the seal closure 3 are connect by sealing mechanism 5 with chassis of reducing furnace 8, and shape between seal closure 3 and chassis of reducing furnace 8 is made
At the cavity of sealing.
The seal closure 3 of sweeper 9 is a cavity body structure that Open Side Down, and the sealing mechanism 5 of 3 bottom of seal closure setting makes close
A closed cavity body structure is formed between sealing cover 3 and chassis of reducing furnace 8.Seal closure 3 is connected to purging air feed system 12, is led to
It crosses the down-set purging gas jets 6 of 3 inner top of seal closure and sprays purge gass into cavity, dust is blown afloat into fluidisation state, from
The gas vent 4 of 3 side of seal closure is discharged, and achievees the purpose that clear up chassis of reducing furnace 8.It is same being cleaned to chassis of reducing furnace
When, the recycling of silicon powder is realized, sweeping efficiency is high, and solves the problems, such as that silicon powder pollutes environment.
Preferably, the seal closure 3 includes linking arm 1, L shape support rod 303 and flexible membrane 304,1 lower end of linking arm
Multiple support rods 303 have been uniformly arranged in the circumferential direction, have been connected between each support rod 303 by flexible membrane 304, the support rod
303 include support rail 301 and vertical supporting rod 302, and described each 301 one end of support rail is connect with 1 hinge of linking arm, the other end
It is connected with vertical supporting rod 302 downwards, automatic telescopic link 2 is provided between each support rail 301 and linking arm 1, it is described each
2 one end of automatic telescopic link is connect with 1 hinge of linking arm, and the other end is connect with each 301 hinge of support rail.
When automatic telescopic link 2 extends, each support rod 303 is rotated down, and the seal closure 3 of sweeper 9, which is open, to be closed；Automatically it stretches
When contracting bar 2 is shunk, each support rod 303 is rotated up reset, and the opening of seal closure 3 is opened, can be carried out to chassis of reducing furnace 8 clearly
Reason.Flexible flexible membrane is connected between each support rod 303, therefore seal closure 3 can fold in this way, do not using
When can fold up, keep seal closure 3 inside cleaning.
Preferably, the automatic telescopic link 2 is Telescopic rod structure that is electronic, pneumatically or hydraulically controlling.
Preferably, the cladding of flexible membrane 304 setting can form one completely in 303 inside of support rod, flexible membrane 304
Cavity body structure, have good leakproofness.
Preferably, the linking arm 1 is retractable structure.Linking arm 1 is scalable, conveniently puts down sweeper 9 and reduction furnace
Chassis 8 connects, and after the completion of cleaning, is upwards collected through sweeper 9 and leaves chassis of reducing furnace 8.
Preferably, the sealing mechanism 5 is the magnet that 3 open at one end of seal closure is arranged in.
Preferably, each purging gas jets 6 are distributed in a ring at 3 top of seal closure.
A kind of polycrystalline silicon reduction furnace base plate sweeper and purging system, it is preferable that including sweeper 9, the sweeper 9 connects
It connects on a sliding rail 13, moving trolley 14 is provided on the sliding rail 13, the moving trolley 14 can be moved along sliding rail 13, the cleaning
Device 9 is connected on moving trolley 14, and the sliding rail 13 is arranged along each 8 arranged direction of chassis of reducing furnace, is going back the setting of sliding rail 13 respectively
The surface of former furnace hearth plate 8, the sweeper 9 are connected with purging air feed system 12 and silicon powder collection device 10 by pipeline,
The moving trolley and purging air feed system 12 are connected respectively to a controller.
Sweeper 9 is slided into right above chassis of reducing furnace 8 below sliding rail 13 by moving trolley 14, and linking arm 1 extends, will
Sweeper 9 is placed on chassis of reducing furnace 8；It purges air feed system 12 and purge gass is provided, sweeper 9 is in chassis of reducing furnace 8
Dust cleared up；Silicon powder is finally recycled in silicon powder collection device 10, completes entire cleaning work.This purging system by
Controller carries out whole control, and high degree of automation can efficiently complete cleaning work, and recycle to silicon powder, reduces environment
Pollution and the wasting of resources.
Further preferably, infrared inductor 7 is provided on the sliding rail 13, the infrared inductor 7 connects controller.Also
After former furnaceman makees, chassis also keeps high temperature, can be detected by the infrared inductor 7 on sliding rail 13, to start purging system.
Still more preferably, gas-solid separating device 11 is provided between the sweeper 9 and silicon powder collection device 10.Gas-solid
Separator separates gas with silicon powder, the recycling convenient for silicon powder collection device to silicon powder.
The description and the appended drawings of the utility model be considered as it is illustrative and not restrictive, the utility model basis
On, for those skilled in the art according to disclosed technology contents, not needing creative labor can be to some of technology
Feature makes some replacements and deformation, within the protection scope of the present utility model.
Claims (10)
1. a kind of polycrystalline silicon reduction furnace base plate sweeper, which is characterized in that including seal closure, the seal closure is downward opening
Cavity body structure is provided with multiple purging gas jets at top in the seal closure, the opening down setting of the purging gas jets,
The seal closure is provided with gas vent on side wall, and sealing mechanism, the seal closure are provided on the seal closure open at one end
It is connect by sealing mechanism with chassis of reducing furnace, makes the cavity for forming sealing between seal closure and chassis of reducing furnace.
2. a kind of polycrystalline silicon reduction furnace base plate sweeper according to claim 1, which is characterized in that the seal closure includes
Linking arm, L shape support rod and flexible membrane, the linking arm lower end are circumferentially evenly arranged with multiple support rods, each support
Connected between bar by flexible membrane, the support rod includes support rail and vertical supporting rod, described each support rail one end with connect
The connection of arm hinge, the other end are connected with downwards vertical supporting rod, are provided with automatic telescopic between each support rail and linking arm
Bar, described each automatic telescopic link one end are connect with linking arm hinge, and the other end is connect with each support rail hinge.
3. a kind of polycrystalline silicon reduction furnace base plate sweeper according to claim 2, which is characterized in that the automatic telescopic link
For Telescopic rod structure that is electronic, pneumatically or hydraulically controlling.
4. a kind of polycrystalline silicon reduction furnace base plate sweeper according to claim 2, which is characterized in that the flexible membrane cladding
It is arranged on the inside of support rod.
5. a kind of polycrystalline silicon reduction furnace base plate sweeper according to claim 2, which is characterized in that the linking arm is can
Stretching structure.
6. a kind of polycrystalline silicon reduction furnace base plate sweeper according to claim 1, which is characterized in that the sealing mechanism is
The magnet of seal closure open at one end is set.
7. a kind of polycrystalline silicon reduction furnace base plate sweeper according to claim 1, which is characterized in that each purging gas blowout
Mouth is distributed in a ring at the top of seal closure.
8. a kind of purging system of polycrystalline silicon reduction furnace base plate sweeper, which is characterized in that including any in claim 1 to 7
Sweeper described in, the sweeper are connected on a sliding rail, moving trolley are provided on the sliding rail, the moving trolley can edge
Sliding rail movement, the sweeper are connected on moving trolley, and the sliding rail is arranged along each chassis of reducing furnace arranged direction, sets sliding rail
It sets in the surface of each chassis of reducing furnace, the sweeper is connected with purging air feed system by pipeline and silicon powder collects dress
It sets, the moving trolley and purging air feed system are connected respectively to a controller.
9. the purging system of polycrystalline silicon reduction furnace base plate sweeper according to claim 8, which is characterized in that the sliding rail
On be provided with infrared inductor, the infrared inductor connects controller.
10. the purging system of polycrystalline silicon reduction furnace base plate sweeper according to claim 8, which is characterized in that described clear
It sweeps and is provided with gas-solid separating device between device and silicon powder collection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821100644.8U CN208758224U (en) | 2018-07-12 | 2018-07-12 | A kind of polycrystalline silicon reduction furnace base plate sweeper and its purging system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821100644.8U CN208758224U (en) | 2018-07-12 | 2018-07-12 | A kind of polycrystalline silicon reduction furnace base plate sweeper and its purging system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208758224U true CN208758224U (en) | 2019-04-19 |
Family
ID=66129215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821100644.8U Active CN208758224U (en) | 2018-07-12 | 2018-07-12 | A kind of polycrystalline silicon reduction furnace base plate sweeper and its purging system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208758224U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113953292A (en) * | 2021-09-16 | 2022-01-21 | 安徽誉特双节能技术有限公司 | Device for purging inner cylinder during steam turbine maintenance |
-
2018
- 2018-07-12 CN CN201821100644.8U patent/CN208758224U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113953292A (en) * | 2021-09-16 | 2022-01-21 | 安徽誉特双节能技术有限公司 | Device for purging inner cylinder during steam turbine maintenance |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201807495U (en) | Powder recovery device for powder spraying chamber | |
| CN208758224U (en) | A kind of polycrystalline silicon reduction furnace base plate sweeper and its purging system | |
| CN102445085A (en) | High-temperature flue gas and dust dry purification and waste heat recovery process for ore furnace | |
| CN107042183A (en) | Application reclaims filtering plastic powder spraying chamber with whirlwind | |
| CN209013775U (en) | The cleaning plant of exhaust system | |
| CN208254241U (en) | A kind of calcined coke dust recycling and reusing conveying device | |
| CN214486262U (en) | Environmental protection garbage recycling bin for construction | |
| CN104482745A (en) | Drying and de-dusting device for glass bottles | |
| CN205145838U (en) | Production system for dry powder mortar | |
| CN214792706U (en) | Coke-oven plant flue gas waste heat recovery device | |
| CN205042673U (en) | Room of dusting that single -stage was retrieved | |
| CN208642077U (en) | Bag filter | |
| CN209601634U (en) | It is a kind of that the vacuum for being related to VOCs solid material is suitble to turn material system | |
| CN203002551U (en) | Protruding bottom middle air knife double reverse turning bed quick color changing spray room | |
| CN203578066U (en) | Quick color changing powder supply center with automatic powder barrel cleaning function | |
| CN209156193U (en) | A kind of conveyer automatic control system | |
| CN206553569U (en) | Ou Ye stove stock gas dust arresters | |
| CN207614563U (en) | A kind of high temperature heating gas washing de-dusting cycle device | |
| CN208655673U (en) | Surface cleaning apparatus is used in a kind of production of solar panel | |
| CN202638162U (en) | Rotating annular blowing type blockage preventing device for bags of bag filters | |
| CN207786165U (en) | A kind of pitch dust precipitator | |
| CN207462852U (en) | A kind of dust recovery tower | |
| CN206519580U (en) | The gas circulation for melting manufacture for selective laser purifies equipment of working continuously | |
| CN205965307U (en) | Dust recovery device | |
| CN205085085U (en) | Gas is inhaled and is shielded a clear powder device from clear formula |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 810007 No.1, Jinsi Road, Chengdong economic and Technological Development Zone, Xining City, Qinghai Province Patentee after: Asia silicon (Qinghai) Co.,Ltd. Address before: 810007 Qinghai city of Xining Province Economic and Technological Development Zone No. 1 gold Guilu Patentee before: ASIA SILICON (QINGHAI) Co.,Ltd. |