CN210847544U - Cooling equipment - Google Patents
Cooling equipment Download PDFInfo
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- CN210847544U CN210847544U CN201921595848.8U CN201921595848U CN210847544U CN 210847544 U CN210847544 U CN 210847544U CN 201921595848 U CN201921595848 U CN 201921595848U CN 210847544 U CN210847544 U CN 210847544U
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- Prior art keywords
- cooling
- container
- cooling container
- liquid
- discharge
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- 238000001816 cooling Methods 0.000 title claims abstract description 135
- 239000007788 liquid Substances 0.000 claims abstract description 71
- 238000011010 flushing procedure Methods 0.000 claims abstract description 25
- 238000005406 washing Methods 0.000 claims abstract description 20
- 238000007599 discharging Methods 0.000 claims abstract description 4
- 238000001514 detection method Methods 0.000 claims description 8
- 239000007921 spray Substances 0.000 claims description 7
- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000000498 cooling water Substances 0.000 description 4
- 239000013049 sediment Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model relates to an auxiliary assembly technical field of semiconductor manufacturing especially relates to a cooling arrangement for the discharge of cooling board emission, include: the cooling container is internally provided with a cooling device and is connected with the machine table through an input pipeline and used for cooling the discharged liquid conveyed by the input pipeline; a discharge pipe connected to the discharge port of the cooling container, for discharging the discharged liquid when the temperature of the discharged liquid is lower than a first preset value; and the group of flushing nozzles are arranged at the top of the cooling container and are used for flushing the bottom of the cooling container after the discharged liquid is exhausted. The utility model discloses technical scheme's beneficial effect lies in: through set up washing terminals in the cooling vessel, regularly clear up the deposit in the cooling vessel to prevent that deposit from blockking up the emission that influences the discharge liquid, thereby ensure the normal operating of board, and promote the life of cooling vessel.
Description
Technical Field
The utility model relates to an auxiliary assembly technical field that semiconductor was made especially relates to a cooling arrangement.
Background
In the process of acid tank machine, chemical liquid over the service life is required to be discharged to the factory for recycling, and among a plurality of discharge liquids, H over the service life3PO4(phosphoric acid) cannot be discharged directly to the plant system because of its high temperature, due to high temperature H3PO4The liquid may damage the waste liquid recovery pipeline of the plant systemCausing safety hazards, it is discharged from the process tank to a cooling tank and then subjected to high temperature H by circulating cooling water flowing in the cooling tank3PO4The liquid is cooled, and when the temperature is lower than a certain value, the drain valve is opened to drain the liquid.
In the prior art, H is due to high temperature3PO4The liquid will dissolve many silicon oxides (Si-Oxide) in H during the process reaction3PO4The liquid separates out when its temperature decreases, forming crystals that deposit on the bottom of the cooling vessel (the hatched portion in fig. 1 is a deposit), which over time can lead to clogging of the discharge outlet, H3PO4The liquid can not be completely discharged, thereby influencing the next acid changing action and the normal operation of the whole machine.
Disclosure of Invention
In view of the above problems in the prior art, a cooling apparatus is now provided.
The specific technical scheme is as follows:
the utility model discloses a cooling arrangement for the discharge of cooling board emission, include:
a cooling container, a cooling device is arranged in the cooling container, and the cooling container is connected with the machine table through an input pipeline and is used for cooling the discharged liquid conveyed by the input pipeline;
a discharge pipe connected to a discharge port of the cooling container, for discharging the discharge liquid when the temperature of the discharge liquid is lower than a first preset value;
and the group of flushing nozzles are arranged at the top of the cooling container and are used for flushing the bottom of the cooling container after the discharged liquid is exhausted.
Preferably, the cooling device further comprises a liquid level detection control pipeline respectively connected with the cooling container and the discharge pipeline, and a first liquid level meter is arranged in the detection control pipeline and used for controlling the liquid level in the cooling container.
Preferably, a second liquid level meter is further arranged in the cooling container and used for detecting and displaying the liquid level in the cooling container.
Preferably, the discharge pipe is provided with a discharge valve which is opened when the temperature of the discharge liquid in the cooling container is lower than the first preset value.
Preferably, the cooling apparatus further comprises a temperature sensor disposed between the discharge valve and the discharge port of the cooling container, for detecting a temperature of the discharge liquid discharged from the cooling container.
Preferably, a group of the flushing nozzles is connected with at least one pneumatic valve;
when the liquid level in the cooling container reaches a second preset value, the pneumatic valve is closed, and all the flushing nozzles stop working; and/or
And when the temperature in the cooling container reaches a third preset value, the pneumatic valve is closed, and all the flushing nozzles stop working.
Preferably, the spray region of the rinse spray head comprises a region in front of the discharge opening.
Preferably, the washing nozzles are ring-shaped to provide a thorough washing of the cooling container around and in the corner areas.
Preferably, the washing nozzle is a cylindrical pipeline, and a plurality of spraying holes are formed in the circumferential direction of the cylindrical pipeline.
Preferably, a flow meter is arranged on the flushing nozzle.
The utility model discloses technical scheme's beneficial effect lies in: through set up washing terminals in the cooling vessel, regularly clear up the deposit in the cooling vessel to prevent that deposit from blockking up the emission that influences the discharge liquid, thereby ensure the normal operating of board, and promote the life of cooling vessel.
Drawings
FIG. 1 is a schematic diagram of a cooling apparatus according to the prior art;
fig. 2 is a schematic structural diagram of a cooling apparatus in an embodiment of the present invention;
fig. 3 is a top view of a rinse head in an embodiment of the present invention;
fig. 4 is a cross-sectional view of a rinse nozzle in an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict.
The present invention will be further described with reference to the accompanying drawings and specific embodiments, but the present invention is not limited thereto.
The utility model provides a cooling device for the discharge of cooling board emission, as shown in figure 2, include:
the cooling device comprises a cooling container 1, wherein a cooling device 2 is arranged in the cooling container 1, the cooling device 2 is connected with a cooling water tank 7, the cooling container 1 is connected with a machine table through an input pipeline 3, the input pipeline 3 is used for conveying the discharged liquid in an acid liquid tank of the machine table into the cooling container 1, and the cooling device 2 is used for cooling the discharged liquid in the cooling container 1;
a discharge pipe 4 connected to the discharge port 10 of the cooling container 1, the discharge pipe 4 being provided with a discharge valve 40, the discharge valve 40 being opened to discharge the discharge liquid when the temperature of the discharge liquid is lower than a first preset value;
and a group of flushing nozzles 5 arranged at the top of the cooling container 1, wherein the spraying area comprises the front area of the discharge port 10 and is used for flushing the bottom of the cooling container 1 after the discharge liquid is discharged to be empty so as to prevent sediment from depositing at the bottom of the cooling container.
Specifically, in the present embodiment, the cooling container 1 is used for accommodating H discharged from the machine station3PO4Liquid, the cooling device 2 is a circulating cooling pipe for conveying cooling water in the cooling water tank 7 into the cooling container 1 and H3PO4The liquid is used for heat exchange, and other cooling liquids can be used for cooling. The cooling device 2 may also be an air cooling device or other cooling devices known in the art, and is not limited herein. H3PO4The liquid is discharged from the machine through the inlet pipe 3 into the cooling container 1 for cooling when the liquid is H3PO4When the temperature of the liquid is lower than a first predetermined value, for example lower than 50 ℃, the discharge valve 40 is automatically opened to cool the H in the container 13PO4And (6) discharging the liquid. Due to H3PO4Crystals are separated out during the cooling process of the liquid, so that sediments are formed on the bottom plate of the cooling container 1, therefore, a group of flushing nozzles 5 are arranged on the top of the inner wall of the cooling container 1, after the discharged liquid in the cooling container 1 is emptied, the flushing nozzles 5 are opened, the cooling container 1 is flushed by flushing liquid, and pure water is preferably sprayed to the front area of the discharge port 10 to clean the sediments at the bottom of the cooling container 1, so that the discharge port 10 is prevented from being blocked by the sediments, and the normal operation of a machine table is ensured.
In a preferred embodiment, the washing nozzle 5 is annular, and a plurality of spray holes are formed in the circumferential direction of the washing nozzle 5. As shown in fig. 4, the washing nozzle 5 in this embodiment is a cylindrical pipe having a plurality of spray holes formed in the circumferential direction, and the shape of the washing nozzle 5 may be changed according to the shape of the cooling container 1. Fig. 3 shows a top view of the washing nozzles 5 in the cooling container 1. in this embodiment, the whole set of washing nozzles 5 is designed as a ring to achieve overall cleaning of the periphery and corner areas of the cooling container 1, thereby achieving better cleaning effect.
In a preferred embodiment, as shown in fig. 2, the cooling apparatus further comprises a liquid level detection control pipeline 6 respectively connected to the cooling container 1 and the discharge pipeline 4, wherein a first liquid level meter 60 is disposed in the detection control pipeline 6 for controlling the liquid level in the cooling container 1;
and a second liquid level meter is also arranged in the cooling container 1 and is used for detecting and displaying the liquid level in the cooling container 1.
Specifically, in this embodiment, cooling arrangement includes two level gauges, and the second level gauge sets up in cooling container 1, and the second level gauge is pressure level gauge, has digital display's function, and the staff is fed back through the digit to the liquid level in the mainly used detection cooling container 1 to the staff in the staff knows the liquid level situation in the cooling container 1. First level gauge 60 sets up in liquid level detection control pipeline 6, and first level gauge 60 is the capacitanc level gauge, triggers first level gauge 60 when the liquid level in detecting control pipeline 6 reaches a preset height, and first level gauge 60 feeds back the high information feedback of liquid level to the ooff valve of input pipeline, and the ooff valve is closed, stops the board to the discharge drainage in the cooling container 1 to prevent that the discharge in the cooling container 1 from spilling over.
In a preferred embodiment, the cooling apparatus further comprises a temperature sensor disposed between the discharge valve 40 and the discharge port 10 of the cooling container 1 for detecting the temperature of the discharge liquid discharged from the cooling container 1;
a group of flushing nozzles 5 is connected with at least one pneumatic valve;
when the liquid level in the cooling container 1 reaches a second preset value, the pneumatic valve is closed, and a group of flushing nozzles 5 stop working; and/or
When the temperature inside the cooling container 1 reaches a third preset value, the pneumatic valve is closed and the set of flushing nozzles 5 stops working.
Specifically, in the present embodiment, the signal input terminals of the pneumatic valves are connected to the temperature sensor and the second level gauge and/or the first level gauge, respectively, and the pneumatic valves are immediately turned off when the temperature or the liquid level of the cooling tank 1 is excessively high. The reason why the flushing nozzle 5 is controlled by the temperature is that the cooling container 1 in the embodiment cools the phosphoric acid liquid, and the pure water sprayed by the flushing nozzle 5 reacts with the residual phosphoric acid liquid in the cooling container 1 to release heat, so that the temperature in the cooling container 1 rises, and in order to avoid potential safety hazards caused by overhigh temperature in the cooling container 1, when the temperature sensor feeds back overhigh temperature, flushing is stopped and a machine alarm is triggered.
In a preferred embodiment, the rinsing nozzle 5 is provided with a flow meter (float meter) for controlling the flow rate of pure water ejected from the rinsing nozzle 5. The purpose of installing the flowmeter on the washing nozzle 5 is to visually manage the washing effect, so that the washing capacity of the washing nozzle 5 can be ensured in the long-term use process, and meanwhile, the abnormal condition of the washing nozzle is monitored.
Further, in the present embodiment, two pneumatic valves (51, 52 shown in fig. 2) are used to control a set of the flushing nozzles 5, and the reason for using the two pneumatic valves is to prevent the single pneumatic valve from failing to close the flushing nozzles 5, which results in continuous water supply to the machine station, thereby triggering an alarm of too high temperature or too high liquid level in the cooling container 1.
The utility model discloses technical scheme's beneficial effect lies in: through set up washing terminals in the cooling vessel, regularly clear up the deposit in the cooling vessel to prevent that deposit from blockking up the emission that influences the discharge liquid, thereby ensure the normal operating of board, and promote the life of cooling vessel.
The above description is only an example of the preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and those skilled in the art should be able to realize the equivalent alternatives and obvious variations of the present invention.
Claims (10)
1. A cooling apparatus for cooling a discharge liquid discharged from a machine table, comprising:
a cooling container, a cooling device is arranged in the cooling container, and the cooling container is connected with the machine table through an input pipeline and is used for cooling the discharged liquid conveyed by the input pipeline;
a discharge pipe connected to a discharge port of the cooling container, for discharging the discharge liquid when the temperature of the discharge liquid is lower than a first preset value;
and the group of flushing nozzles are arranged at the top of the cooling container and are used for flushing the bottom of the cooling container after the discharged liquid is exhausted.
2. The cooling apparatus as claimed in claim 1, further comprising a liquid level detection control pipe connected to the cooling container and the discharge pipe, respectively, wherein a first liquid level gauge is provided in the detection control pipe for controlling the liquid level in the cooling container.
3. The cooling apparatus as claimed in claim 1, wherein a second liquid level gauge is further provided in the cooling container for detecting and displaying the liquid level in the cooling container.
4. The cooling apparatus as claimed in claim 1, wherein a drain valve is provided on the drain line to open when the temperature of the drain in the cooling vessel is below the first predetermined value.
5. The cooling apparatus as claimed in claim 4, further comprising a temperature sensor disposed between the drain valve and the drain of the cooling vessel for detecting a temperature of the drain discharged from the cooling vessel.
6. The cooling apparatus of claim 1, wherein a set of the rinse heads is connected to at least one pneumatic valve;
when the liquid level in the cooling container reaches a second preset value, the pneumatic valve is closed, and all the flushing nozzles stop working; and/or
And when the temperature in the cooling container reaches a third preset value, the pneumatic valve is closed, and all the flushing nozzles stop working.
7. The cooling apparatus of claim 1, wherein the spray region of the rinse spray head comprises a forward region of the discharge opening.
8. The cooling apparatus as claimed in claim 1, wherein the washing nozzles are ring-shaped to provide a thorough washing of the cooling vessel around and in the corner areas.
9. The cooling apparatus as claimed in claim 1, wherein the washing nozzle is a cylindrical pipe having a plurality of spray holes formed in a circumferential direction thereof.
10. The cooling apparatus as claimed in claim 1, wherein a flow meter is provided on the rinse nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921595848.8U CN210847544U (en) | 2019-09-24 | 2019-09-24 | Cooling equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921595848.8U CN210847544U (en) | 2019-09-24 | 2019-09-24 | Cooling equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210847544U true CN210847544U (en) | 2020-06-26 |
Family
ID=71304229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921595848.8U Active CN210847544U (en) | 2019-09-24 | 2019-09-24 | Cooling equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210847544U (en) |
-
2019
- 2019-09-24 CN CN201921595848.8U patent/CN210847544U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 430205 No.18, Gaoxin 4th Road, Donghu Development Zone, Wuhan City, Hubei Province Patentee after: Wuhan Xinxin Integrated Circuit Co.,Ltd. Country or region after: China Address before: 430205 No.18, Gaoxin 4th Road, Donghu Development Zone, Wuhan City, Hubei Province Patentee before: Wuhan Xinxin Semiconductor Manufacturing Co.,Ltd. Country or region before: China |