CN218591297U - Filter element replacing device of cleaning machine - Google Patents

Abstract

The utility model discloses a cleaner filter element replacing device, which comprises a first cleaning chamber, a second cleaning chamber, a circulating pipeline and an upper computer, wherein the second cleaning chamber is positioned inside the first cleaning chamber and is communicated with the first cleaning chamber; the inlet of the circulating pipeline is communicated with the first cleaning chamber, and the outlet of the circulating pipeline is communicated with the second cleaning chamber; the circulating pipeline is connected with a circulating pump, a heater and a filtering pipeline, the filtering pipeline is formed by connecting multiple paths of filtering pipe branches in parallel, the filtering pipe branches are connected with a filter, two sides of the filter are respectively connected with a switch valve, a liquid inlet of the filter is connected with a water inlet pipeline, a water inlet valve is connected on the water inlet pipeline, a liquid outlet of the filter is connected with a water drainage pipeline, and the water drainage pipeline is connected with a water drainage valve; the upper computer is respectively connected with the circulating pump, the heater, the switch valve, the water inlet valve and the water discharge valve. The utility model discloses can renew cartridge under the cleaning machine normal operating, and adopt independent circulation line to wash new filter core, avoid causing the pollution to the purge chamber, save wash time and water consumption simultaneously.

Description

Filter element replacing device of cleaning machine

Technical Field

The utility model belongs to the technical field of the semiconductor equipment technique and specifically relates to a cleaning machine filter core changes device is related to.

Background

In the related art, the wafer processing and manufacturing process is complex and has many processing procedures, and these procedures usually leave impurities such as chemical agents, particles, metals and the like on the surface of the wafer, so that the wafer needs to be cleaned in time so as to avoid affecting the surface quality of the silicon wafer and the subsequent processing procedures, which affect the quality of the wafer. There are two types of common wafer cleaning machines at present: one is single-wafer cleaning and the other is tank cleaning. No matter which kind of cleaning machine platform, all need to install the filter and filter the chemical liquid medicine to guarantee its cleanliness factor, avoid polluting the wafer because of chemical liquid medicine does not reach standard.

Taking a traditional tank type cleaning machine as an example, the chemical liquid circulation working principle is as follows:

1) Chemical liquid in the outer tank flows through the heater and the filter through the circulating pump and finally enters the inner tank;

2) The chemical liquid in the inner tank continuously overflows to the outer tank because the circulating pump continuously supplies liquid to the inner tank;

3) The chemical liquid medicine in the outer tank flows into the inner tank through the circulating pump, so that the circulation of the chemical liquid medicine is completed, and the chemical liquid medicine is continuously heated and filtered in the circulating process.

In the above-mentioned circulation abluent in-process, the heater can be continuously to the chemical liquid medicine heating, maintains the temperature unchangeable in the cell body, and the filter can filter the chemical liquid medicine, maintains the higher cleanliness factor of chemical liquid medicine in the cell body. However, as the service life of the filter is prolonged, the filtered dirt is continuously accumulated in the filter, and if the filter is not replaced in time, the filtering effect and the pressure of the filtered water flow are affected, so that the normal filter needs to be replaced regularly, and the replacement method is as follows:

1) The filter housing is disassembled and the inner filter element is taken out by hand;

2) Taking out the new filter element, and installing the new filter element into the filter by hand;

3) The shell of the filter is installed back, water is filled in the tank body, and the chemical liquid medicine circulation action is executed to flush out the dirt introduced in the filter and the installation;

in order to improve the circulating flushing effect, a short circulating time is generally needed to accelerate the replacement frequency of the chemical liquid medicine in the tank body and the circulating pipeline. When the filter works, chemical liquid medicine enters the filter through the liquid inlet pipeline of the filter, flows out of the filter after being filtered by the filter element, enters the shell of the filter, and finally flows out of the filter through the liquid outlet pipeline of the filter, as shown in figure 2.

However, when the filter is replaced in the existing mode, the following problems are inevitable:

(1) the purity of the soaking liquid (water) of the filter used for replacing the new filter is inconsistent with that of the chemical liquid used in a factory, the filter cannot be directly used, and a long time is needed for circularly washing the new filter element for use;

(2) the filter element is required to be contacted by hands when being replaced, so the filter element is polluted to a certain degree, and the filter element can be used after being installed and needing long-time circular washing;

(3) the dirt in the filter element is removed by adopting a circulating flushing mode, the dirt in the filter element is easily introduced into the tank body, the tank body is further polluted, and the cleaning difficulty of the filter element and the tank body is increased.

Disclosure of Invention

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a device is changed to cleaning machine filter core can change the filter core under the condition of cleaning machine normal work, and adopts independent inlet channel to wash new filter core, and the sewage after the washing is discharging through independent drainage tube way, does not flow through the purge chamber, can avoid causing the pollution to the purge chamber, can save wash-out time and water consumption simultaneously.

According to the utility model, the filter element replacing device of the cleaning machine comprises a first cleaning chamber, a second cleaning chamber, a circulating pipeline, a filtering pipeline and an upper computer, wherein the second cleaning chamber is positioned inside the first cleaning chamber and is communicated with the first cleaning chamber; the inlet of the circulating pipeline is communicated with the first cleaning chamber, and the outlet of the circulating pipeline is communicated with the second cleaning chamber; the circulating pipeline is connected with a circulating pump and a heater; the filter pipeline is connected to a circulating pipeline, the filter pipeline is formed by connecting multiple filter pipeline branches in parallel, each filter pipeline branch is connected with a filter, pipelines on two sides of the filter are respectively connected with a switch valve, a water inlet pipeline is connected to a pipeline between one switch valve and the filter, a water inlet valve is connected to the water inlet pipeline, a water drainage pipeline is connected to a pipeline between the other switch valve and the filter, and a water drainage valve is connected to the water drainage pipeline; the upper computer is electrically connected with the circulating pump, the heater, the switch valve, the water inlet valve and the water discharge valve through a control circuit respectively.

The embodiment is provided with a plurality of filter pipe branches connected in parallel, each filter pipe branch is connected with a filter, each filter pipe branch is connected with a water inlet pipeline and a water drainage pipeline, the water inlet pipeline is provided with a water inlet valve, the water drainage pipeline is provided with a water drainage valve, when the water purifier is used, the water inlet pipeline is connected with a plant pure water supply system, the water drainage pipeline is connected with a plant pure water drainage system, each water inlet pipeline, the pipeline between the two switch valves and the water drainage pipeline can form an independent water inlet pipeline and a water drainage pipeline, when the filter on the filter pipe branch needs to replace the filter element, only the switch valve on the pipeline is needed to be closed, the switch valve on any other filter pipe branch is opened, the chemical liquid medicine of the cleaning machine can be continuously filtered, at the moment, a worker can replace the filter element of the filter element needing to be replaced, after the replacement is completed, the new filter element is washed by the independent water drainage pipeline and the water inlet pipeline formed by the pipeline between the two switch valves and the water drainage pipeline, and the new filter element is washed, and the working efficiency is improved under the condition that the cleaning machine normally works. In addition, because the flushing of the filter element does not occupy the circulating pipeline of the chemical liquid, the flushing dirt is prevented from being brought into the first cleaning chamber and the second cleaning chamber, the cleaning chambers are polluted, and the flushing dirt does not flow through the cleaning chambers, so that the cleaning chambers do not need to be flushed again, only the filter element of the filter needs to be flushed, the flushing time is greatly saved, the using amount of pure water is saved, and the reduction of the production cost is facilitated.

In some embodiments, the circulation pipeline is connected with a liquid particle counter, and the liquid particle counter is electrically connected with the upper computer. The liquid particle counter of the embodiment is used for detecting the cleanliness of chemical liquid in the circulating pipeline.

In some embodiments, the circulation pipeline is connected with a flow meter, and the flow meter is electrically connected with the upper computer. The flow meter of the embodiment is used for detecting the liquid flow in the circulating pipeline.

In some embodiments, the utility model discloses still include alarm module, alarm module with upper computer electrical connection. When the filter element needs to be replaced, the alarm module of the embodiment sends out an alarm signal and timely informs workers to replace the filter element.

In some embodiments, the switch valve, the water inlet valve and the water discharge valve all adopt pneumatic valves. Other types of valves may be used depending on the application.

In some embodiments, the filter pipe branch of the present invention is formed by connecting a first filter pipe branch and a second filter pipe branch in parallel, the filter includes a first filter and a second filter, the switch valve includes a first switch valve, a second switch valve, a third switch valve and a fourth switch valve, the water inlet pipeline includes a first water inlet pipe branch and a second water inlet pipe branch, the water outlet pipeline includes a first water outlet pipe branch and a second water outlet pipe branch, the water inlet valve includes a first water inlet valve and a second water inlet valve, and the water outlet valve includes a first water outlet valve and a second water outlet valve; the first switch valve, the first filter and the second switch valve are all connected to the first filter pipe branch, and the first switch valve and the second switch valve are respectively positioned on two sides of the first filter; the first water inlet pipe branch is connected between the first filter and the first switch valve, the first water inlet valve is connected to the first water inlet pipe branch, the first drainage pipe branch is connected to a pipeline between the second switch valve and the first filter, and the first drainage valve is connected to the first drainage pipe branch; the third switch valve, the second filter and the fourth switch valve are connected to the second filter pipe branch, the third switch valve and the fourth switch valve are respectively positioned on two sides of the second filter, and the third switch valve and the fourth switch valve are respectively positioned on two sides of the second filter; the second water inlet pipe branch is connected to a pipeline between the third switch valve and the second filter, and the second water outlet pipe branch is connected to a pipeline between the fourth switch valve and the second filter. This embodiment adopts two filter tube branch roads to realize changing the filter core under the condition that does not influence the normal work of cleaning machine, has improved work efficiency, and washes the circulation line of new filter core and do not pass through the purge chamber, has avoided causing the pollution to the purge chamber, and has reduced the water consumption and the washing time of washing new filter core, greatly reduced the manufacturing cost of enterprise.

Drawings

Fig. 1 is a schematic view of the overall structure of a filter element replacing device of a cleaning machine according to an embodiment of the present invention;

fig. 2 is a schematic diagram of a filter pipeline structure of a filter element replacing device of a cleaning machine according to an embodiment of the present invention.

Reference numerals:

100: a first cleaning chamber; 200: a second cleaning chamber; 300: a silicon wafer;

400: circulation line, 401: a circulation pump; 402: a heater;

500: filtration line, 501: first filter tube leg, 5011: first switching valve, 5012: second switching valve, 5013: first filter, 502: second filtration tube branch, 5021: third on-off valve, 5022: fourth switching valve, 5023: a second filter;

601: first inlet pipe branch, 6011: a first water inlet valve; 602: second water inlet pipe branch, 6021: a second water inlet valve;

701: first drain branch, 7011: first drain valve, 702: second drain branch, 7021: and a second drain valve.

Detailed Description

Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.

The following disclosure provides many different embodiments, or examples, for implementing different features of the invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present disclosure provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize the applicability of other processes and/or the use of other materials.

The following describes a filter element replacing device of a cleaning machine according to an embodiment of the present invention, which comprises a first cleaning chamber 100, a second cleaning chamber 200, a circulation pipeline 400, a filtering pipeline 500 and an upper computer, wherein the second cleaning chamber 200 is located inside the first cleaning chamber 100 and is communicated with the first cleaning chamber 100; the inlet of the circulation pipeline 400 is communicated with the first cleaning chamber 100, and the outlet of the circulation pipeline 400 is communicated with the second cleaning chamber 200; the circulating pipeline 400 is connected with a circulating pump 401 and a heater 402; the filtering pipeline 500 is connected to the circulating pipeline 400, the filtering pipeline 500 is formed by connecting multiple filtering pipe branches in parallel, each filtering pipe branch is connected with a filter, pipelines on two sides of the filter are respectively connected with a switch valve, a water inlet pipeline is connected to a pipeline between one switch valve and the filter, a water inlet valve is connected to the water inlet pipeline, a water drainage pipeline is connected to a pipeline between the other switch valve and the filter, and a water drainage valve is connected to the water drainage pipeline; the upper computer is respectively and electrically connected with the circulating pump 401, the heater 402, the switch valve, the water inlet valve and the water discharge valve through a control circuit, the upper computer is used for controlling the opening or closing of the switch valve, the water inlet valve and the water discharge valve, the switch valve, the water inlet valve and the water discharge valve are all pneumatic valves, and the upper computer is further used for controlling the working or non-working of the circulating pump 401 and the heater 402.

Referring to fig. 1 and 2, in order to determine whether the filter element of the filter needs to be replaced more accurately, in some embodiments, the utility model discloses be connected with a liquid particle counter on the circulation pipeline 400, the liquid particle counter with the host computer is electrically connected. The liquid particle counter is used for detecting the particle number in the chemical liquid medicine in the circulating pipeline 400, and transmitting a detection result to the upper computer, the upper computer judges whether the filter element of the filter needs to be replaced according to the received data, and if the particle number in the chemical liquid medicine is higher than a certain particle number value set inside the upper computer, the filter element of the filter needs to be replaced. In some embodiments, a flow meter may also be connected to the circulation pipeline 400, so as to collect the flow rate of the chemical liquid in the circulation pipeline 400, and transmit the flow rate information to the upper computer, the upper computer determines whether the filter element of the filter is replaced according to the received information, if the power of the circulation pump 401 is not changed, when the flow rate of the chemical liquid in the circulation pipeline 400 is lower than the flow rate value set inside the upper computer, it indicates that the filter filtering function is decreased, the filter element of the filter needs to be replaced, so as to ensure that the chemical liquid flowing into the cleaning chamber meets the process requirements.

Referring to fig. 1, in order to make the filter core of the filter change that the staff can be timely, in some embodiments, the utility model discloses still include alarm module, when the host computer judges that the filter core of filter needs to be changed, then control alarm module and send alarm signal to show alarm signal on the display screen of host computer, in order to remind the staff in time to change the filter core of filter, guarantee silicon chip 300's cleaning quality.

Referring to fig. 1 and fig. 2, a working principle of the filter element replacing device of the cleaning machine based on the above embodiment is illustrated by taking two filtering pipelines 500 as an example, the embodiment adopts a liquid particle counter to detect a filtering function of a filter element, an upper computer adopts a desktop computer, one heater 402 is provided, two filtering pipe branches are provided, the filtering pipe branches are formed by connecting a first filtering pipe branch 501 and a second filtering pipe branch 502 in parallel, the filter includes a first filter 5013 and a second filter 5023, the switch valves include a first switch valve 5011, a second switch valve 5012, a third switch valve 5021 and a fourth switch valve 5022, the water inlet pipeline includes a first water inlet pipe branch 601 and a second water inlet pipe branch 602, the water outlet pipeline includes a first water outlet pipe branch 701 and a second water outlet pipe branch 702, the water inlet valve includes a first water inlet valve 6011 and a second 6021, and the water outlet valve includes a first water inlet valve 7011 and a second water outlet valve 7021; the first switch valve 5011, the first filter 5013 and the second switch valve 5012 are connected to the first filtering pipe branch 501, and the first switch valve 5011 and the second switch valve 5012 are located on two sides of the first filter 5013 respectively; the first water inlet pipe branch 601 is connected between a first filter 5013 and a first switch valve 5011, a first water inlet valve 6011 is connected to the first water inlet pipe branch 601, a first water drainage pipe branch 701 is connected to a pipeline between a second switch valve 5012 and the first filter 5013, and a first water drainage valve 7011 is connected to the first water drainage pipe branch 701; a third on/off valve 5021, a second filter 5023, and a fourth on/off valve 5022 are connected to the second filtering pipe branch 502, a third on/off valve 5021 and a fourth on/off valve 5022 are respectively located at both sides of the second filter 5023, and a third on/off valve 5021 and a fourth on/off valve 5022 are respectively located at both sides of the second filter 5023; the second water inlet pipe branch 602 is connected to a pipe between the third switching valve 5021 and the second filter 5023, and the second water outlet pipe branch 702 is connected to a pipe between the fourth switching valve 5022 and the second filter 5023.

The initial state of the device is as follows: the switch valve, the water inlet valve and the water discharge valve are all in a closed state, the filter on the first filtering pipe branch 501 is provided with a filter element, and the filter on the second filtering pipe branch 502 is free of the filter element.

Step S1: the silicon wafer 300 to be cleaned is placed in the second cleaning chamber 200, and then the upper computer is powered on, and the upper computer controls the first switching valve 5011 and the second switching valve 5012 to be opened, and controls the circulating pump 401 and the heater 402 to operate.

Step S2: the chemical liquid in the first cleaning chamber 100 enters the first filtering pipe branch 501 through the circulating pipeline 400, then enters the second cleaning chamber 200 through the circulating pipeline 400 after being filtered by the first filter 5013, cleans the silicon wafer 300 in the second cleaning chamber 200, overflows to the first cleaning chamber 100 after the chemical liquid in the second cleaning chamber 200 is full, then enters the second cleaning chamber 200 after being filtered by the circulating pipeline 400 and the first filter 5013 on the first filtering pipe branch 501, and the steps are repeated;

and step S3: when the particle number acquired by the liquid particle counter is higher than a first particle number value set inside the upper computer, the upper computer controls the alarm module to send an alarm signal, wherein the alarm signal can be that the filter element is about to expire and is displayed on a display screen of the upper computer so as to remind an operator that the filter element of the first filter 5013 is about to reach the replacement date, and the operator receives the alarm signal that the filter element is about to expire and then installs the filter element on the second filter 5023 in time; the worker controls the second water inlet valve 6021 and the second water discharge valve 7021 to open through the upper computer, pure water in the plant pure water supply system enters the second filter pipe branch 502 through the second water inlet pipe branch 602, then flows through the filter element of the second filter 5023 to flush the filter element in the second filter 5023, then flows into the second water discharge pipe branch 702 through the second water discharge valve 7021, and is discharged to the plant pure water drainage system from the second water discharge pipe branch 702, the process is repeated, the filter element in the second filter 5023 is flushed, after the filter element in the second filter 5023 is flushed, the worker controls the second water inlet valve 6021 to close through the upper computer, and after residual liquid in the second filter pipe branch 502 and the filter element of the second filter 5023 is emptied, the worker controls the second water discharge valve 7021 to close through the upper computer. Because the second filtering pipe branch 502 and the first filtering pipe branch 501 are parallel pipelines, when the second filter 5023 is provided with a filter element, the first filtering pipe branch 501 works normally, namely the cleaning machine works normally;

and step S4: when the particle number of the chemical liquid medicine detected by the liquid particle counter is higher than a second particle number value set by the control system, the control system controls the alarm module to send out an alarm signal again, the alarm signal is 'please replace the filter element in time', the alarm signal is transmitted to a display screen of the upper computer to be displayed, after a worker sees the alarm signal, the upper computer controls the third switch valve 5021 and the fourth switch valve 5022 to be opened, and then the upper computer controls the first switch valve 5011 and the second switch valve 5012 to be closed, so that the first filter 5013 is switched to the second filter 5023. The chemical liquid in the first cleaning chamber 100 enters the second cleaning chamber 200 through the circulation line 400 and the second filtering pipe branch 502, wherein the second filter 5023 filters the chemical liquid when passing through the second filtering pipe branch 502, so as to ensure that the chemical liquid entering the second cleaning chamber 200 meets the process requirements.

Step S5: after the first switch valve 5011 and the second switch valve 5012 are closed, a worker can disassemble a filter element of the first filter 5013, after the disassembly is completed, the first water inlet valve 6011 and the first water discharge valve 7011 are opened to wash the filter, after the filter is completely washed, the worker controls the first water inlet valve 6011 to be closed through the upper computer, and after residual liquid in the first filter 5013 and the first filter pipe branch 501 is emptied, the worker controls the first water discharge valve 7011 to be closed through the upper computer.

When the filter cartridge of the second filter 5023 needs to be replaced, the operation method is the same as that from step S3 to step S5.

The utility model discloses two filter cores can make a round trip to switch and use to realized under the condition that the cleaning machine does not stop work, can accomplish the change of filter core, improved work efficiency, in addition, adopt independent circulation pipeline 400 to wash the filter core, the purge chamber is not flowed through to sewage after washing, need not to wash the purge chamber again, has saved washout time and water consumption, has reduced the manufacturing cost of enterprise effectively.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly, e.g., as being fixedly connected, detachably connected, or integrated; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the same embodiment or example must be referred to by the same schematic representation of the above terms. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Moreover, various embodiments or examples and features of various embodiments or examples described in this specification can be combined and combined by one skilled in the art without being mutually inconsistent.

While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims (6)

1. A filter element replacing device of a cleaning machine is characterized by comprising

A first cleaning chamber;

the second cleaning chamber is positioned inside the first cleaning chamber and communicated with the first cleaning chamber;

the inlet of the circulating pipeline is communicated with the first cleaning chamber, and the outlet of the circulating pipeline is communicated with the second cleaning chamber; the circulating pipeline is connected with a circulating pump and a heater;

the filter pipeline is connected to the circulating pipeline and consists of multiple filter pipeline branches in parallel, each filter pipeline branch is connected with a filter, pipelines on two sides of the filter are respectively connected with a switch valve, a water inlet pipeline is connected to the pipeline between one switch valve and the filter, a water inlet valve is connected to the water inlet pipeline, a water drainage pipeline is connected to the pipeline between the other switch valve and the filter, and a water drainage valve is connected to the water drainage pipeline;

and the upper computer is electrically connected with the circulating pump, the heater, the switch valve, the water inlet valve and the drain valve through a control circuit respectively.

2. The filter element replacing device for the cleaning machine as claimed in claim 1, wherein a liquid particle counter is connected to the circulation pipeline, and the liquid particle counter is electrically connected to the upper computer.

3. The apparatus as claimed in claim 1, wherein a flow meter is connected to the circulation line, the flow meter being electrically connected to the upper unit.

4. The cleaning machine filter element replacing device according to claim 1 or 2, further comprising an alarm module, wherein the alarm module is electrically connected with the upper computer.

5. The filter element replacing device for the cleaning machine as claimed in claim 4, wherein the switch valve, the water inlet valve and the water discharge valve are all pneumatic valves.

6. The filter element replacing device for the cleaning machine according to claim 5, wherein the filter pipe branch is formed by connecting a first filter pipe branch and a second filter pipe branch in parallel, the filter comprises a first filter and a second filter, the switch valve comprises a first switch valve, a second switch valve, a third switch valve and a fourth switch valve, the water inlet pipeline comprises a first water inlet pipe branch and a second water inlet pipe branch, the water discharge pipeline comprises a first water discharge pipe branch and a second water discharge pipe branch, the water inlet valve comprises a first water inlet valve and a second water inlet valve, and the water discharge valve comprises a first water discharge valve and a second water discharge valve;

the first switch valve, the first filter and the second switch valve are all connected to the first filter pipe branch, and the first switch valve and the second switch valve are respectively positioned on two sides of the first filter; the first water inlet pipe branch is connected between the first filter and the first switch valve, the first water inlet valve is connected to the first water inlet pipe branch, the first drainage pipe branch is connected to a pipeline between the second switch valve and the first filter, and the first drainage valve is connected to the first drainage pipe branch; the third switch valve, the second filter and the fourth switch valve are connected to the second filtering pipe branch, and the third switch valve and the fourth switch valve are respectively positioned on two sides of the second filter; the second water inlet pipe branch is connected to a pipeline between the third switch valve and the second filter, and the second water outlet pipe branch is connected to a pipeline between the fourth switch valve and the second filter.

Images