CN113441449B - Spray plate detection system and detection method thereof - Google Patents
Spray plate detection system and detection method thereof Download PDFInfo
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- CN113441449B CN113441449B CN202010231117.6A CN202010231117A CN113441449B CN 113441449 B CN113441449 B CN 113441449B CN 202010231117 A CN202010231117 A CN 202010231117A CN 113441449 B CN113441449 B CN 113441449B
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- main pipeline
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Measuring Volume Flow (AREA)
- Spray Control Apparatus (AREA)
Abstract
The invention is a complex spray plate connected in parallel with a main pipeline by complex auxiliary pipelines, the detecting system is installed on the auxiliary pipelines and the main pipeline, the detecting system at least includes: the device comprises a pump, a frequency converter, a plurality of first automatic switches, a pressure gauge, a first flow meter and a controller, wherein the first automatic switches are utilized to open the communication between a main pipeline and a plurality of secondary pipelines and input liquid, a standard fluid pressure value and a standard fluid flow value of the main pipeline are obtained, a standard resistance value is obtained according to the ratio of the standard fluid pressure value to the standard fluid flow value, then a plurality of second automatic switches are utilized to only open the communication between one secondary pipeline and the main pipeline, other secondary pipelines are closed, a fluid pressure value and a fluid flow value of the main pipeline are obtained, a resistance value is obtained according to the ratio of the two values, and if the resistance value is higher than the standard resistance value, the phenomenon that one spray disc is blocked is judged.
Description
Technical Field
The invention relates to a detection system and a detection method for detecting whether a spray plate is blocked abnormally or not in an automatic mode.
Background
In a general circuit board or wafer process, such as a wet process of plating, etching, etc., it may be necessary to uniformly spray various solutions on the object to be processed; the liquid spraying device used in the circuit board manufacturing process in the prior art comprises a circulating groove and a plurality of spraying discs; the circulating tank is internally provided with liquid to be sprayed, such as electroplating liquid, etching liquid, photoresist liquid, cleaning liquid and the like; the spray plate comprises a plurality of nozzles; the spray plate is connected with the circulation tank by a single pipeline, and a pump is arranged on the pipeline and used for pushing the liquid in the circulation tank to the spray plate, and then the liquid is sprayed out from each nozzle of the spray plate to the circulation tank.
Because the wet process is performed in the circulation tank, the residual sludge or scraps after the wet process can block the nozzle, so that the pressure in the nozzle is abnormal, and the abnormal process occurs. Therefore, the performance of each spray plate will be different, and the production yield will be reduced. Moreover, because the spray tray and the pipeline are arranged in the machine, the machine operator cannot inspect the spray tray in real time, and therefore cannot effectively confirm whether the plurality of nozzles of the spray tray are blocked, so that the machine operator cannot respond in real time and cannot perform real-time maintenance treatment on the machine.
Disclosure of Invention
In view of the above, the present invention provides a system and a method for detecting whether the nozzle plate is blocked or not in an automatic manner.
To achieve the above object, the present invention provides a plurality of spray trays, each of which is connected in parallel to a main pipeline by a plurality of sub-pipelines, each of the plurality of spray trays is provided with at least one nozzle, the detection system is installed in the sub-pipelines and the main pipeline, and at least comprises: a pump connected to the main pipeline for providing liquid to the spraying discs via the main pipeline and the secondary pipelines and spraying out via the nozzles; a frequency converter connected to the pump for controlling the frequency of the pump; a plurality of first automatic switches respectively arranged between the plurality of spray disks and the plurality of auxiliary pipelines; a pressure gauge disposed on the main pipeline for obtaining a fluid pressure value; a first flowmeter, disposed on the main pipeline, for obtaining a fluid flow value; and a controller, which is respectively connected with the plurality of first automatic switches, the pressure gauge and the first flowmeter, can control the opening or closing of the first automatic switches, and receives the fluid pressure value and the fluid flow value to judge whether the plurality of spray disks are blocked or not.
In a preferred aspect, a detection pipeline and a second and a third automatic switches are further provided, the second automatic switch is disposed on the main pipeline, the third automatic switch is disposed on the detection pipeline, and the main pipeline and the second automatic switch are connected in parallel between the pump and the plurality of sub-pipelines.
In a preferred aspect, a second flow meter is further disposed in the detection pipeline, and the second flow meter is connected to the controller.
In a preferred aspect, the pipe diameter of the detection pipeline is smaller than the pipe diameter of the main pipeline.
In a preferred aspect, the plurality of spray trays are disposed in a circulation tank, the circulation tank contains liquid, a circulation pipeline is connected to the circulation tank and the pump, and the pump provides the liquid in the circulation tank to the main pipeline.
In a preferred aspect, a fourth automatic switch is disposed on the circulation line.
The invention also provides a detection method, which at least sequentially comprises the following steps: opening the communication between the main pipeline and the plurality of auxiliary pipelines; inputting liquid into the main pipeline, the plurality of secondary pipelines, the plurality of spray trays and spraying from the nozzles; obtaining a standard fluid pressure value and a standard fluid flow value of the main pipeline, and obtaining a standard resistance value according to the ratio of the standard fluid pressure value to the standard fluid flow value; opening the communication between the main pipeline and one of the secondary pipelines and closing the other secondary pipelines; inputting liquid into the main pipeline, one of the auxiliary pipelines, one of the spray trays and spraying from the nozzle; obtaining a fluid pressure value and a fluid flow value of the main pipeline, and obtaining a resistance value according to the ratio of the fluid pressure value to the fluid flow value; and comparing the resistance value with the standard resistance value, and if the resistance value is higher than the standard resistance value, judging that one of the spray disks is blocked.
In a preferred aspect, the step of inputting the liquid is powered by a pump.
In a preferred aspect, the pump is further connected to a frequency converter for controlling the operating frequency of the pump.
In a preferred aspect, a detection pipeline is further disposed, the detection pipeline and the main pipeline are connected in parallel between the pump and the plurality of sub pipelines, and the detection pipeline inputs liquid to the plurality of sub pipelines for detection.
Drawings
Fig. 1 is a schematic structural diagram of a first embodiment of the detection system of the present invention.
Fig. 2 is a schematic structural diagram of a second embodiment of the detection system of the present invention.
FIG. 3 is a schematic diagram of a second embodiment of the detection system of the present invention.
Description of the figure numbers:
First automatic switch 431
Second automatic switch 432
Third automatic switch 433
Fourth automatic switch 434
A recycle line 52.
Detailed Description
Fig. 1 is a schematic structural diagram of a detection system according to a first embodiment of the present invention. The invention is a plurality of spray trays 1 connect in parallel to a main pipeline 3 with a plurality of secondary pipelines 2 separately, the plurality of spray trays 1 has at least a spray nozzle 11, the detecting system is installed in the secondary pipeline 2 and the main pipeline 3, the detecting system includes at least: a pump 41, a frequency converter 42, a plurality of first automatic switches 431, a pressure gauge 44, a first flow meter 451, and a controller 46.
The pump 41 is connected to the main pipeline 3, and can provide liquid to the plurality of spray trays 1 through the main pipeline 3 and the plurality of sub-pipelines 2, and spray the liquid through the nozzles 11. The plural spray trays 1 are disposed in a circulation tank 51, the circulation tank 51 contains liquid, a circulation pipeline 52 is connected to the circulation tank 51 and the pump 41, and the pump 41 provides the liquid in the circulation tank 51 to the main pipeline 3.
The frequency converter 42 is connected to the pump 41 for controlling the operation frequency of the pump 41.
The second switches 431 are respectively disposed between the spray trays 1 and the sub-pipes 2.
The pressure gauge 44 is disposed on the main pipeline 3 for obtaining a fluid pressure value; the first flow meter 451 is disposed on the main pipeline 3 for obtaining a fluid flow value; the controller 46 is connected to the first automatic switches 431, the pressure gauge 44 and the first flow meter 451 respectively, and can control the first automatic switches 431 to be turned on or off, and receive the fluid pressure value and the fluid flow value.
As the pipe diameter of the main pipeline for the general spray disk is about 2 inches or more, and the flow meter cannot measure a small flow rate under a large pipe diameter, and needs to be externally connected with a detection pipeline with a small pipe diameter, as shown in fig. 2, a detection pipeline 47, a second flow meter 452, and a second and a third automatic switches 432, 433 are further provided, the second automatic switch 432 is disposed on the main pipeline 3, the third automatic switch 433 is disposed on the detection pipeline 47, the main pipeline 3 and the second automatic switch 432 are connected in parallel with the detection pipeline 47 and the third automatic switch 433 between the pump 41 and the plurality of secondary pipelines 2, the second flow meter 452 is disposed on the detection pipeline 47, and the second and third automatic switches 432, 433 and the second flow meter 452 are respectively connected with the controller 46.
When the spraying device is used as a whole, the spraying discs 1 are arranged in a circulation tank 51, the circulation pipeline 52 is connected with the circulation tank 51 and the pump 41, a fourth automatic switch 434 is arranged on the circulation pipeline 52, and the fourth automatic switch 434 is connected with the controller 46; firstly, turning on the first, second and fourth automatic switches 431, 432 and 434 and turning off the third automatic switch 433 to turn on the communication between the main pipeline 3 and the plurality of secondary pipelines 2; the pump 41 is used to supply the liquid in the circulation tank 51 to the main pipeline 3 and the plurality of sub-pipelines2. The plurality of spray plates 1 and the nozzles 11; respectively obtaining a standard fluid pressure value P of the main pipeline 3 by using the pressure gauge 44 and the first flow meter 451 S And a standard fluid flow value Q S The controller 46 obtains a standard resistance value (P) by the ratio of the standard fluid pressure value to the standard fluid flow value S /Q S )。
Turning on the communication between the main pipeline 3 and one of the secondary pipelines 2, and turning off the other secondary pipelines, turning on the leftmost first automatic switch 431 and the third and fourth automatic switches 433 and 434, and turning on the other first automatic switches 431 and the second automatic switches 432 as shown in fig. 3; the pump 41 is used to supply the liquid in the circulation tank 51 to the detection pipeline 47, one of the auxiliary pipelines 2, one of the spray trays 1 and the spray nozzle 11; respectively obtaining a fluid pressure value P1 and a fluid flow rate value Q1 of the detection pipeline 47 by using the pressure gauge 44 and the second flow meter 452, and obtaining a resistance value (P1/Q1) by the controller 46 according to a ratio of the fluid pressure value to the fluid flow rate value; and comparing the resistance value (P1/Q1) with the standard resistance value (P) by the controller 46 S /Q S ) If the resistance value (P1/Q1) is higher than the standard resistance value (P) S /Q S ) Judging that the nozzle 11 of one of the spray disks 1 is blocked, if the resistance value (P1/Q1) is less than the standard resistance value (P1/Q1) S /Q S ) Then the nozzle 11 of one of the spray disks 1 is determined to be free from blockage.
Then only opening the communication between the auxiliary pipelines and the main pipeline in a plurality of times, and comparing the obtained resistance value with the standard resistance value to judge whether the spray plate connected with the auxiliary pipelines is blocked or not; the invention uses the controller to automatically control the on and off of each automatic switch, and uses the values measured by the pressure gauge and the flowmeter as the basis for detecting whether the nozzle of the spray disk is blocked, thereby achieving the purpose of automatic detection.
In addition, when the nozzles 11 of at least one spray plate 1 need to be closed fixedly due to production requirements, the fluid pressure of the main pipeline will be increased to reduce the overall flow rate, which causes inconsistent production conditions and affects the production yield, so that the frequency converter 42 is required to control the operating frequency of the pump 41 to adjust the fluid pressure to a constant value, so that the flow rate will not be affected thereby and the production stability is maintained.
Claims (10)
1. A spray plate detection method is characterized in that a plurality of spray plates are respectively connected in parallel with a main pipeline through a plurality of auxiliary pipelines, the plurality of spray plates are provided with at least one nozzle, and the detection method at least sequentially comprises the following steps:
opening the communication between the main pipeline and the plurality of auxiliary pipelines;
inputting liquid into the main pipeline, the plurality of secondary pipelines, the plurality of spray trays and spraying from the nozzles;
obtaining a standard fluid pressure value and a standard fluid flow value of the main pipeline, and obtaining a standard resistance value according to the ratio of the standard fluid pressure value to the standard fluid flow value;
opening the communication between the main pipeline and one of the auxiliary pipelines, and closing the other auxiliary pipelines;
inputting liquid into the main pipeline, one of the auxiliary pipelines, one of the spray trays and spraying from the nozzle;
obtaining a fluid pressure value and a fluid flow value of the main pipeline, and obtaining a resistance value according to the ratio of the fluid pressure value to the fluid flow value; and
and comparing the resistance value with the standard resistance value, and if the resistance value is higher than the standard resistance value, judging that one of the spray disks is blocked.
2. The method of claim 1 wherein the step of feeding the liquid is powered by a pump.
3. The method as claimed in claim 2, wherein the pump is connected to a frequency converter for controlling the operation frequency of the pump.
4. The spray disk detection method according to claim 2 or 3, wherein a detection pipeline is provided, the detection pipeline and the main pipeline are connected in parallel between the pump and the plurality of secondary pipelines, and the detection pipeline inputs liquid to the plurality of secondary pipelines for detection.
5. The utility model provides a spout dish detecting system, its characterized in that, the plural number spouts the dish and connects in parallel in a main line with plural number secondary line respectively, and the plural number spouts the dish and is equipped with at least a nozzle, and this detecting system installs in this secondary line and this main line, and it contains at least:
a pump connected to the main pipeline for providing liquid to the spraying discs via the main pipeline and the secondary pipelines and spraying out via the nozzles;
a frequency converter connected to the pump for controlling the frequency of the pump;
a plurality of first automatic switches respectively arranged between the plurality of spray disks and the plurality of auxiliary pipelines;
a pressure gauge disposed on the main pipeline for obtaining a fluid pressure value;
a first flow meter, configured on the main pipeline, for obtaining a fluid flow value; and
a controller, which is connected with the first automatic switches, the pressure gauge and the first flowmeter respectively, can control the on or off of the first automatic switches, and receives the fluid pressure value and the fluid flow value to judge whether the spray disks are blocked or not;
the method for detecting the spray plate detection system sequentially comprises the following steps of:
opening the communication between the main pipeline and the plurality of auxiliary pipelines;
inputting liquid into the main pipeline, the plurality of secondary pipelines, the plurality of spray trays and spraying from the nozzles;
obtaining a standard fluid pressure value and a standard fluid flow value of the main pipeline, and obtaining a standard resistance value according to the ratio of the standard fluid pressure value to the standard fluid flow value;
opening the communication between the main pipeline and one of the secondary pipelines and closing the other secondary pipelines;
inputting liquid into the main pipeline, one of the auxiliary pipelines, one of the spray trays and spraying from the nozzle;
obtaining a fluid pressure value and a fluid flow value of the main pipeline, and obtaining a resistance value according to the ratio of the fluid pressure value to the fluid flow value; and
and comparing the resistance value with the standard resistance value, and if the resistance value is higher than the standard resistance value, judging that one of the spray disks is blocked.
6. The system as claimed in claim 5, wherein a detection pipeline is provided, and a second and a third automatic switches are provided, the second automatic switch is disposed on the main pipeline, the third automatic switch is disposed on the detection pipeline, the main pipeline and the second automatic switch are connected in parallel with the detection pipeline and the third automatic switch between the pump and the plurality of sub-pipelines, and the second and the third automatic switches are connected with the controller.
7. The spray disk detection system of claim 6, wherein a second flow meter is disposed in the detection line, the second flow meter being connected to the controller.
8. The spray tray detection system of claim 7, wherein the pipe diameter of the detection pipeline is smaller than that of the main pipeline.
9. The spray tray detection system according to any one of claims 5 to 8, wherein a plurality of spray trays are disposed in a circulation tank, the circulation tank contains liquid, a circulation pipeline is connected to the circulation tank and the pump, and the pump provides the liquid in the circulation tank to the main pipeline.
10. The spray tray detection system of claim 9, wherein a fourth automatic switch is disposed on the circulation line, and the fourth automatic switch is connected to the controller.
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| CN202010231117.6A CN113441449B (en) | 2020-03-27 | 2020-03-27 | Spray plate detection system and detection method thereof |
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| CN202010231117.6A CN113441449B (en) | 2020-03-27 | 2020-03-27 | Spray plate detection system and detection method thereof |
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| CN113441449B true CN113441449B (en) | 2022-12-09 |
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