CN209857482U - Waterway system and semiconductor production equipment - Google Patents
Waterway system and semiconductor production equipment Download PDFInfo
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- CN209857482U CN209857482U CN201920219579.9U CN201920219579U CN209857482U CN 209857482 U CN209857482 U CN 209857482U CN 201920219579 U CN201920219579 U CN 201920219579U CN 209857482 U CN209857482 U CN 209857482U
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Abstract
The utility model relates to a waterway system and semiconductor production equipment, which comprises a water inlet pipeline, a water outlet pipeline and cooling equipment, wherein the water inlet pipeline is connected with a water inlet of the cooling equipment, and the water outlet pipeline is connected with a water outlet of the cooling equipment; the water inlet pipeline also comprises a valve and an air inlet device arranged on the water inlet pipeline between the valve and the cooling equipment; the water outlet pipeline is also provided with a detector which is a device capable of detecting the water flow condition in the water pipeline. The waterway system can prevent the cooling water caused by direct water passing from leaking to damage the electric parts, and can detect whether water exists in the drainage pipeline, thereby judging whether the cooling water in the pipeline is drained completely.
Description
Technical Field
The utility model relates to a water route circulating device especially relates to a water route system and semiconductor production equipment.
Background
In semiconductor and solar cell processing equipment, large volumes of cooling water are often used to cool the equipment. In order to ensure that the water in the waterway does not pollute other parts when the equipment is assembled and disassembled, the waterway system on the equipment is usually designed to be complicated. Because the electrical part and the waterway exist on the equipment at the same time, if the waterway leaks, the electrical part is burnt.
When equipment maintenance, if can not be with the water clean up in the water route, reveal very easily, cause the electric part to damage.
Currently, methods of waterway cleaning may use cooling water inside the gas purge component. However, since the parts and the water paths are all opaque parts, it is difficult to judge whether the cooling water is dried. Therefore, the prior art ensures that water in the waterway is cleaned up by increasing the purging time. However, the manner of ensuring that the water in the water circuit is cleaned up by increasing the purge time will result in increased maintenance time.
Therefore, it is necessary to provide a new water path system for draining water.
SUMMERY OF THE UTILITY MODEL
Objects of the invention
The utility model provides a waterway system and semiconductor production equipment can prevent that direct logical water and the cooling water that leads to reveals, and damages electric spare, can detect whether exist water among the drainage pipe to judge whether arrange to the greatest extent of cooling water in the pipeline.
(II) technical scheme
In order to achieve the above object, the utility model discloses a main technical scheme include:
a waterway system, comprising: the cooling system comprises a water inlet pipeline, a water outlet pipeline and cooling equipment, wherein the water inlet pipeline is connected with a water inlet of the cooling equipment, and the water outlet pipeline is connected with a water outlet of the cooling equipment; the water inlet pipeline also comprises a valve and an air inlet device arranged on the water inlet pipeline between the valve and the cooling equipment; the water outlet pipeline is also provided with a detector which is a device capable of detecting the water flow condition in the water pipeline.
When the waterway system needs to be maintained, gas with certain pressure is introduced into the waterway system through the air inlet of the air inlet device. And water in the waterway system is discharged through the water outlet under the sweeping action of the pressure gas. The detector detects whether continuous or discontinuous water flow and water drops exist in the water pipeline, and determines that water in the water pipeline system is drained completely. Inefficiency caused by extending the purge time when it is impossible to determine whether water in the waterway system is drained cleanly is avoided. Meanwhile, leakage and faults caused by unclean purging of the waterway system can be avoided.
In another possible solution, the cooling device comprises a plurality of cooling devices, and the plurality of cooling devices are respectively connected with a water inlet pipeline and a water outlet pipeline; the system also comprises a valve island which is simultaneously arranged on a plurality of water inlet pipelines; the air inlet device arranged on the water inlet pipeline between the valve and the cooling device is arranged on the valve island.
Preferably, the water outlet pipe is further provided with a water outlet valve and a one-way valve, the one-way valve is arranged between the water outlet valve and the cooling device, and the one-way valve is used for controlling fluid to flow from the cooling device to the water outlet valve.
The system also comprises a main water outlet pipe, wherein the water outlet pipelines on the plurality of cooling devices are all communicated with the main water outlet pipe;
the main water outlet pipe is provided with a main water outlet valve.
Preferably, the detector is a proximity switch.
The proximity switch 3 can obtain water pipe signals without contacting the water pipe, and the feedback value of the proximity switch when water exists in the water discharging pipe is different from the feedback value of the water discharging pipe when the water does not exist, so that whether water exists in the water discharging pipe or not can be judged by judging the feedback quantity of the proximity switch, and whether the water in the water path is discharged completely or not can be judged. Recording the feedback value of the proximity switch 3 as C before water is supplied, when the equipment water channel needs maintenance, compressed air enters the water inlet pipeline from the compressed air interface, cooling water is discharged through the main water outlet pipeline under the pressure of the compressed air, recording the feedback value of the proximity switch 3 in real time, and when the feedback value is C, indicating that the cooling water in the pipeline is completely discharged.
In an optional scheme, the air inlet device further comprises a pressure gauge;
the pressure gauge is arranged on a pipeline between an air inlet of the air inlet device and the valve island.
And an exhaust valve is also arranged on the valve island.
On the other hand, the utility model also provides a semiconductor production facility, including the aforesaid waterway system.
(III) advantageous effects
The utility model has the advantages that: when the cooling pipeline needs to be maintained, the cooling equipment can be blown and swept through the air inlet device, cooling water in the cooling equipment is removed, meanwhile, the water flow condition of the water outlet pipeline can be detected through the detector, the cooling water leakage caused by direct water passing can be prevented, the electric part is damaged, whether water exists in the drainage pipeline can be detected, and therefore whether the cooling water in the pipeline is drained is judged.
Whether water exists in the drainage pipeline is judged by judging the feedback quantity of the proximity switch, and whether the water in the water channel is drained completely can be judged. Simultaneously, can also the real-time supervision cooling pipeline whether have bubble or impurity to make and remind or the police dispatch newspaper, prevent the condition that the cooling effect descends, can in time overhaul the pipeline.
Drawings
Fig. 1 is a schematic view of a waterway system according to an embodiment of the present invention.
[ description of reference ]
1. A compressed air interface; 2. a pressure gauge; 3. a proximity switch; 4. a one-way valve; 5. a valve island; 6. a water inlet valve; 7. a water outlet valve; 8. an exhaust valve; 9. a main water inlet valve; 10. a main water outlet valve; 11. a water inlet pipeline; 12. a water outlet pipeline; 13. a cooling device; 14. and a second cooling device.
Detailed Description
For better explanation of the present invention, the following detailed description of the present invention is provided for understanding.
As shown in fig. 1, the present embodiment provides a waterway system, which includes a water inlet pipeline 11, a water outlet pipeline 12 and a cooling device. The water inlet pipeline 11 is connected with the water inlet of the cooling device 13, and the water outlet pipeline 12 is connected with the water outlet of the cooling device 13. The water inlet pipeline 11 also comprises a valve. An air inlet device is arranged on the water inlet pipeline 11 between the valve and the cooling device 13. The outlet conduit 12 is also provided with a detector, which is a device capable of detecting the flow of water in the water conduit.
In practical application, gas with a certain pressure is introduced into the water path system through the gas inlet of the gas inlet device. And water in the waterway system is discharged through the water outlet under the sweeping action of the pressure gas. The detector detects whether continuous or discontinuous water flow and water drops exist in the water pipeline, and determines that water in the water pipeline system is drained completely. Inefficiency caused by extending the purge time when it is impossible to determine whether water in the waterway system is drained cleanly is avoided. Meanwhile, leakage and faults caused by unclean purging of the waterway system can be avoided.
Specifically, the detector continuously detects the signal in the water pipe. If no water passes through the water outlet pipeline, the feedback signal received by the detector is a fixed value C. And if water passes through the water outlet pipeline, the feedback signal received by the detector is not C. Therefore, the detector of the embodiment of the application can judge the water flow condition in the water outlet pipeline by judging the feedback data received by the detector within a certain time period.
If continuous or discontinuous water flow, water drops, air bubbles or impurities exist in the water outlet pipeline, the feedback signal received by the detector is an unstable value. In the embodiment of the application, the flow state in the water outlet pipeline is determined by judging the feedback data received by the detector.
Before the water passage system is filled with water, a detector acquires a fixed feedback value C when the water pipe is in a water-free state.
In the process of continuous water passing of the waterway system, the signal in the water pipe can be detected in real time through the detector, if the fed-back numerical value is unstable, the situation that bubbles or impurities exist in the waterway is indicated, and a prompt or an alarm can be given.
When the water path system needs to be maintained, gas with certain pressure is introduced into the water path system through the air inlet of the air inlet device, the cooling equipment is purged, and cooling water in the cooling equipment is discharged. Meanwhile, whether continuous or discontinuous water flow and water drops exist in the water outlet pipeline is detected through the detector, and the water in the water path system is determined to be drained completely, so that whether the cooling water of the cooling pipeline is drained completely is judged, the cooling water leakage caused by direct water passing can be prevented, electric parts are damaged, and the low efficiency caused by prolonging the purging time when the water in the water path system cannot be determined to be drained completely is avoided.
The air inlet device comprises compressed air and a compressed air interface, and when the air inlet device performs air blowing on the cooling equipment, the compressed air enters the water inlet pipeline from the compressed air interface, so that cooling water is discharged through the water outlet pipeline under the pressure of the compressed air.
Optionally, a water inlet valve 6 is provided on the water inlet line 11.
The water outlet pipeline 12 is provided with a water outlet valve 7 and a one-way valve 4, the one-way valve 4 is arranged between the water outlet valve 7 and the cooling device 13, the water outlet valve 7 is arranged at one end close to the cooling pipeline in the cooling device 13, the one-way valve is far away from one end of the cooling pipeline, and the opening direction of the one-way valve 4 is opened towards the drainage direction, so that the one-way valve is used for controlling fluid to flow from the cooling device to the water outlet valve.
The water outlet pipe 12 of the cooling pipe 13 is connected through a check valve, so that the water in the water outlet pipe 12 can be prevented from returning to the cooling pipe 13.
Preferably, the detector is a proximity switch 3.
The proximity switch 3 is arranged outside the water outlet pipeline 12 or outside the pipeline between the water outlet valve and the one-way valve on the water outlet pipe.
The proximity switch 3 can obtain a water pipe signal without contacting the water pipe outside the pipeline, and the feedback value of the proximity switch when water exists in the drainage pipeline is different from the feedback value when the drainage pipeline is anhydrous, so that whether water exists in the drainage pipeline can be judged by judging the feedback quantity of the proximity switch, and whether the water in the water pipeline is drained completely is judged.
Recording the feedback value of the proximity switch 3 as C before water is supplied, when the cooling pipeline 13 needs maintenance, purging the cooling pipeline 13 of the water channel system through an air inlet of the air inlet device, draining water in the cooling pipeline 13, allowing compressed air to enter the water inlet pipeline from the compressed air interface 1, discharging the cooling water through the water outlet pipeline under the pressure of the compressed air, recording the feedback value of the proximity switch 3 in real time, and when the feedback value is C, indicating that the cooling water in the cooling pipeline 13 is drained.
In the process of water passage of the water passage system, the proximity switch 3 can also detect the flowing state of cooling water in the water passage in real time, if the value fed back by the proximity switch 3 is unstable and changes all the time, the situation that bubbles or impurities exist in the water passage is indicated, a prompt or an alarm can be given, the situation that the cooling effect is reduced is prevented, and the pipeline is overhauled.
In another possible solution, the cooling device comprises a plurality of cooling devices, and the plurality of cooling devices are respectively connected with one water inlet pipeline and one water outlet pipeline; the waterway system also comprises a valve island 5, and the valve island 5 is simultaneously arranged on a plurality of water inlet pipelines; the air inlet device arranged on the water inlet pipeline between the valve and the cooling device is arranged on the valve island.
A plurality of cooling pipelines are arranged in parallel, and the water inlet pipeline of each cooling pipeline is communicated with the main water inlet pipe and the compressed air interface through the valve island 5.
The main water inlet pipeline is provided with a main water inlet valve 9. In practical applications, multiple cooling lines are required in semiconductor and solar cell processing equipment, and multiple cooling lines can be branched by the valve island 5. A plurality of cooling pipelines are provided with a main water inlet valve through a main water inlet pipe. Each cooling pipeline is provided with a water outlet valve and a one-way valve; the water outlet pipe of each cooling pipeline is provided with a one-way valve, so that water in the main water outlet pipeline can be prevented from entering the circulating water channel when the pressure of the compressed air is unstable.
When a certain part of the equipment or one of the water paths needs to be maintained, the part or the water path needs to be swept to remove cooling water, only one of the water inlet valve and the water outlet valve which need to be maintained is opened, and the water inlet valve and the water outlet valve of other cooling pipelines which do not need to be maintained are closed, so that one of the cooling pipelines is maintained.
Optionally, the cooling circulation pipeline further includes a main water outlet pipe, when the cooling circulation pipeline includes a plurality of water outlet pipes, the plurality of water outlet pipes are all communicated with the main water outlet pipe, and the main water outlet pipe is provided with a main water outlet valve 10.
In a preferred scheme, the air inlet device also comprises a pressure gauge 2. The pressure gauge 2 is arranged on a pipeline between the compressed air valve 1 and the valve island 5 in the air inlet of the air inlet device.
After the cooling water channel is assembled, the main water inlet valve 9, the main water outlet valve 10 and the exhaust valve 8 are closed, the water inlet valve 6, the water outlet valve 7 and the compressed air valve 1 are opened, after the pressure of the pressure gauge 2 is stabilized, the compressed air valve 1 is closed, the control system of the equipment can record the numerical value of the pressure gauge 2 and time, the design requirement is that the pressure value reduction value of the pressure gauge is smaller than B in the time of A, the pressure gauge is qualified, the equipment operator can be prompted to open the main water inlet valve 9 and the main water outlet valve 10, and the equipment starts to feed water. If the pressure value of the pressure gauge is reduced to a value greater than B in the period A, the leakage point of the equipment waterway is indicated, the waterway needs to be overhauled, and an operator is prompted to forbid the equipment from being filled with water.
Optionally, an exhaust valve 8 is further disposed on the valve island 5.
The cooling circulation circuit shown in fig. 1 further includes a second cooling circuit 14; if the cooling line 13 needs to be repaired, the cooling water in the cooling line 13 needs to be removed. At this time, the water inlet valve and the water outlet valve of the cooling pipeline other than the cooling pipeline 13 may be closed, for example, the water inlet valve, the water outlet valve and the exhaust valve 8 of the second cooling pipeline 14 are closed, the compressed air valve 1, the main water inlet valve 9 and the main water outlet valve 10 are opened, the compressed air enters the water channel, the cooling water is discharged through the main water outlet pipeline under the pressure of the compressed air, the feedback value of the proximity switch 3 is recorded, when the feedback value is C, it indicates that the cooling water in the pipeline is completely discharged, the compressed air valve 1 is closed, the exhaust valve 7 is opened, the residual pressure in the pipeline is released, and at this time, the next maintenance operation may be performed. When the feedback value of the proximity switch 3 is not C, compressed air needs to be continuously introduced for purging until the feedback value of the proximity switch 3 is C. The tail end of each circulating water path is provided with a one-way valve, so that when the pressure of the compressed air is unstable, water in the main water outlet pipeline enters the circulating water paths.
On the other hand, the utility model also provides a semiconductor production facility, including above-mentioned water route system.
Finally, it should be noted that: the above-mentioned embodiments are only used for illustrating the technical solution of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.
Claims (7)
1. A waterway system is characterized by comprising a water inlet pipeline, a water outlet pipeline and cooling equipment, wherein the water inlet pipeline is connected with a water inlet of the cooling equipment, and the water outlet pipeline is connected with a water outlet of the cooling equipment; the water inlet pipeline also comprises a valve and an air inlet device arranged on the water inlet pipeline between the valve and the cooling equipment; the water outlet pipeline is also provided with a detector which is a device capable of detecting the water flow condition in the water outlet pipeline.
2. The waterway system of claim 1, wherein the cooling device comprises a plurality of cooling devices connected to at least one of the inlet pipes and at least one of the outlet pipes, respectively; the system also comprises a valve island which is simultaneously arranged on a plurality of water inlet pipelines; the air inlet device arranged on the water inlet pipeline between the valve and the cooling device is arranged on the valve island.
3. The waterway system of claim 1 or 2, wherein the outlet pipe is further provided with an outlet valve and a one-way valve, the one-way valve is arranged between the outlet valve and the cooling device, and the one-way valve is used for controlling the fluid to flow from the cooling device to the outlet valve.
4. The waterway system of claim 2, further comprising a main outlet pipe, the outlet pipes of the plurality of cooling devices each being in communication with the main outlet pipe;
the main water outlet pipe is provided with a main water outlet valve.
5. The waterway system of claim 2, wherein the air inlet device further comprises a pressure gauge;
the pressure gauge is arranged on a pipeline between an air inlet of the air inlet device and the valve island.
6. The waterway system of claim 2, wherein the valve island further comprises an exhaust valve.
7. A semiconductor manufacturing facility, comprising a waterway system according to any one of claims 1 to 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920219579.9U CN209857482U (en) | 2019-02-21 | 2019-02-21 | Waterway system and semiconductor production equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920219579.9U CN209857482U (en) | 2019-02-21 | 2019-02-21 | Waterway system and semiconductor production equipment |
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| Publication Number | Publication Date |
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| CN209857482U true CN209857482U (en) | 2019-12-27 |
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| CN201920219579.9U Active CN209857482U (en) | 2019-02-21 | 2019-02-21 | Waterway system and semiconductor production equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114110433A (en) * | 2021-11-30 | 2022-03-01 | 内蒙古蒙牛乳业（集团）股份有限公司 | Safety maintenance device and method |
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2019
- 2019-02-21 CN CN201920219579.9U patent/CN209857482U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114110433A (en) * | 2021-11-30 | 2022-03-01 | 内蒙古蒙牛乳业（集团）股份有限公司 | Safety maintenance device and method |
| CN114110433B (en) * | 2021-11-30 | 2023-11-24 | 内蒙古蒙牛乳业（集团）股份有限公司 | Safety maintenance device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210202 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: Room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right |