CN212238338U - Spray plate detection system - Google Patents
Spray plate detection system Download PDFInfo
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- CN212238338U CN212238338U CN202020424981.3U CN202020424981U CN212238338U CN 212238338 U CN212238338 U CN 212238338U CN 202020424981 U CN202020424981 U CN 202020424981U CN 212238338 U CN212238338 U CN 212238338U
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- main pipeline
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Abstract
The utility model discloses a plural number spouts the dish and connects in parallel in a main line with plural number secondary line respectively, and this detecting system installs in this secondary line and this main line, and this detecting system contains at least: the device comprises a pump, a frequency converter, a plurality of first automatic switches, a pressure gauge, a first flow meter and a controller, wherein the first automatic switches are utilized to open the communication between a main pipeline and a plurality of secondary pipelines and input liquid, a standard fluid pressure value and a standard fluid flow value of the main pipeline are obtained, a standard resistance value is obtained according to the ratio of the standard fluid pressure value to the standard fluid flow value, then a plurality of second automatic switches are utilized to only open the communication between one secondary pipeline and the main pipeline, other secondary pipelines are closed, a fluid pressure value and a fluid flow value of the main pipeline are obtained, a resistance value is obtained according to the ratio of the two values, and if the resistance value is higher than the standard resistance value, the phenomenon that one spray disc is blocked is judged.
Description
Technical Field
The utility model relates to a detect the detecting system who spouts the dish and whether take place to block up abnormal phenomenon with automatic mode.
Background
In a general circuit board or wafer process, such as a wet process of electroplating, etching, etc., it may be necessary to uniformly spray various solutions on a processed object; the liquid spraying device for circuit board manufacture procedure in the prior art comprises a circulation groove and a plurality of spraying discs; the circulating tank is internally provided with liquid to be sprayed, such as electroplating liquid, etching liquid, photoresist liquid, cleaning liquid and the like; the spray plate comprises a plurality of nozzles; the spray plate is connected with the circulation tank by a single pipeline, and a pump is arranged on the pipeline and used for pushing the liquid in the circulation tank to the spray plate, and then the liquid is sprayed out from each nozzle of the spray plate to the circulation tank.
Because the wet process is performed in the circulation tank, the residual sludge or scraps after the wet process can block the nozzle, so that the pressure in the nozzle is abnormal, and the abnormal process occurs. Therefore, the efficiency of each spray plate will be different, and the production yield will be reduced. Moreover, because the spray tray and the pipeline are arranged in the machine, the machine operator cannot inspect the spray tray in real time, and therefore cannot effectively confirm whether the plurality of nozzles of the spray tray are blocked, so that the machine operator cannot respond in real time and cannot perform real-time maintenance treatment on the machine.
SUMMERY OF THE UTILITY MODEL
In view of this, the present invention provides a system for detecting whether an abnormal blockage occurs in a spray tray in an automatic manner.
The technical means adopted by the utility model are as follows.
The utility model discloses well plural number spouts the dish and connects in parallel in a main line with plural number secondary line respectively, and this plural number spouts the dish and is equipped with an at least nozzle, and this detecting system installs in this secondary line and this main line, and it contains at least: a pump connected to the main pipeline for providing liquid to the spraying discs via the main pipeline and the secondary pipelines and spraying out via the nozzles; a frequency converter connected to the pump for controlling the frequency of the pump; a plurality of first automatic switches respectively arranged between the plurality of spray disks and the plurality of auxiliary pipelines; a pressure gauge disposed on the main pipeline for obtaining a fluid pressure value; a first flowmeter, disposed on the main pipeline, for obtaining a fluid flow value; and a controller, which is respectively connected with the plurality of first automatic switches, the pressure gauge and the first flowmeter, can control the opening or closing of the first automatic switches, and receives the fluid pressure value and the fluid flow value to judge whether the plurality of spray disks are blocked or not.
In a preferred aspect, a detection pipeline and a second and a third automatic switches are further provided, the second automatic switch is disposed on the main pipeline, the third automatic switch is disposed on the detection pipeline, and the main pipeline and the second automatic switch are connected in parallel between the pump and the plurality of sub-pipelines.
In a preferred aspect, a second flow meter is further disposed in the detection pipeline, and the second flow meter is connected to the controller.
In a preferred aspect, the pipe diameter of the detection pipeline is smaller than the pipe diameter of the main pipeline.
In a preferred embodiment, the plurality of spray trays are disposed in a circulation tank, the circulation tank contains liquid, a circulation pipeline is connected to the circulation tank and the pump, and the pump provides the liquid in the circulation tank to the main pipeline.
In a preferred aspect, a fourth automatic switch is disposed on the circulation line.
The utility model discloses produced technological effect: the controller is used for automatically controlling the opening and closing of each automatic switch, and the values measured by the pressure gauge and the flow meter are used as the basis for detecting whether the nozzle of the spray disk is blocked, so that the aim of automatic detection is fulfilled.
Drawings
Fig. 1 is a schematic structural diagram of a first embodiment of the middle detection system of the present invention.
Fig. 2 is a schematic structural diagram of a second embodiment of the middle detection system of the present invention.
Fig. 3 is a schematic diagram illustrating a second embodiment of the detection system according to the present invention.
Description of the figure numbers:
First automatic switch 431
Second automatic switch 432
Third automatic switch 433
Fourth automatic switch 434
A recycle line 52.
Detailed Description
Referring to fig. 1, the present invention discloses a plural number spraying plate 1 is connected in parallel to a main pipeline 3 by plural number secondary pipelines 2 respectively, the plural number spraying plate 1 is provided with at least one nozzle 11, the detecting system is installed on the secondary pipelines 2 and the main pipeline 3, the detecting system at least comprises: a pump 41, a frequency converter 42, a plurality of first automatic switches 431, a pressure gauge 44, a first flowmeter 451 and a controller 46.
The pump 41 is connected to the main pipeline 3 and can provide liquid to the plurality of spray disks 1 through the main pipeline 3 and the plurality of sub pipelines 2, and the liquid is sprayed by the nozzles 11. The plurality of spray trays 1 are disposed in a circulation tank 51, the circulation tank 51 contains liquid, a circulation pipeline 52 is connected to the circulation tank 51 and the pump 41, and the pump 41 provides the liquid in the circulation tank 51 to the main pipeline 3.
The frequency converter 42 is connected to the pump 41 for controlling the operation frequency of the pump 41.
The second switches 431 are respectively disposed between the spray trays 1 and the sub-pipes 2.
The pressure gauge 44 is disposed on the main pipeline 3 for obtaining a fluid pressure value; the first flow meter 451 is disposed on the main pipeline 3 for obtaining a fluid flow value; the controller 46 is connected to the first automatic switches 431, the pressure gauge 44 and the first flow meter 451 respectively, and can control the on/off of the first automatic switches 431 and receive the fluid pressure value and the fluid flow value.
As the pipe diameter of the main pipeline for the general spray disk is about 2 inches or more, and the flow meter cannot measure a small flow rate under a large pipe diameter, and needs to be externally connected with a detection pipeline with a small pipe diameter, as shown in fig. 2, a detection pipeline 47, a second flow meter 452, and a second and a third automatic switches 432, 433 are further provided, the second automatic switch 432 is disposed on the main pipeline 3, the third automatic switch 433 is disposed on the detection pipeline 47, the main pipeline 3 and the second automatic switch 432 are connected in parallel with the detection pipeline 47 and the third automatic switch 433 between the pump 41 and the plurality of secondary pipelines 2, the second flow meter 452 is disposed on the detection pipeline 47, and the second and third automatic switches 432, 433 and the second flow meter 452 are respectively connected with the controller 46.
When the spraying device is used integrally, the plurality of spraying discs 1 are arranged in a circulation tank body 51, the circulation pipeline 52 is connected with the circulation tank body 51 and the pump 41, a fourth automatic switch 434 is arranged on the circulation pipeline 52, and the fourth automatic switch 434 is connected with the controller 46; firstly, turning on the first, second and fourth automatic switches 431, 432 and 434 and turning off the third automatic switch 433 to turn on the communication between the main pipeline 3 and the plurality of secondary pipelines 2; the pump 41 is used to supply the liquid in the circulation tank 51 to the main pipeline 3, the plurality of sub pipelines 2, the plurality of spray trays 1 and the nozzles 11; by means of the pressure gauge 44And the first flow meter 451 respectively obtains a standard fluid pressure value P of the main pipeline 3SAnd a standard fluid flow value QSThe controller 46 obtains a standard resistance value (P) by the ratio of the standard fluid pressure value to the standard fluid flow valueS/QS)。
Turning on the communication between the main pipeline 3 and one of the secondary pipelines 2, and turning off the other secondary pipelines, turning on the leftmost first automatic switch 431 and the third and fourth automatic switches 433 and 434, and turning on the other first automatic switches 431 and the second automatic switches 432 as shown in fig. 3; the pump 41 is used to supply the liquid in the circulation tank 51 to the detection pipeline 47, one of the sub pipelines 2, one of the spray disks 1 and the nozzle 11; obtaining a fluid pressure value P1 and a fluid flow rate value Q1 of the detection pipeline 47 by using the pressure gauge 44 and the second flow meter 452, respectively, and obtaining a resistance value (P1/Q1) by the controller 46 according to the ratio of the fluid pressure value to the fluid flow rate value; and comparing the resistance value (P1/Q1) with the standard resistance value (P1/Q1) by the controller 46S/QS) If the resistance value (P1/Q1) is higher than the standard resistance value (P1/Q1)S/QS) Judging that the nozzle 11 of one of the spray disks 1 is blocked, if the resistance value (P1/Q1) is less than the standard resistance value (P1/Q1)S/QS) Then the nozzle 11 of one of the spray disks 1 is determined to be free from blockage.
Then only opening the connection between the auxiliary pipeline and the main pipeline in a plurality of times, and comparing the obtained resistance value with the standard resistance value to judge whether the spray disk connected with the auxiliary pipeline is blocked or not; the utility model discloses utilize the controller automatic control each automatic switch open and close to utilize the value that manometer and flowmeter measurationed, whether the nozzle that spouts the dish is the basis of blockking as detecting, with the purpose that reaches automated inspection.
In addition, when the nozzles 11 of at least one spray plate 1 need to be closed fixedly due to production requirements, the fluid pressure of the main pipeline will be increased to reduce the overall flow rate, which results in inconsistent production conditions and affects the production yield, so the frequency converter 42 is needed to control the operating frequency of the pump 41 to adjust the fluid pressure to a constant value, so that the flow rate will not be affected by the constant value, and the production stability is maintained.
Claims (8)
1. The utility model provides a spout dish detecting system, its characterized in that, the plural number spouts the dish and connects in parallel in a main line with plural number secondary line respectively, and the plural number spouts the dish and is equipped with at least a nozzle, and this detecting system installs in this secondary line and this main line, and it contains at least:
a pump connected to the main pipeline for providing liquid to the spraying discs via the main pipeline and the secondary pipelines and spraying out via the nozzles;
a frequency converter connected to the pump for controlling the frequency of the pump;
a plurality of first automatic switches respectively arranged between the plurality of spray disks and the plurality of auxiliary pipelines;
a pressure gauge disposed on the main pipeline for obtaining a fluid pressure value;
a first flowmeter, disposed on the main pipeline, for obtaining a fluid flow value; and
and the controller is respectively connected with the plurality of first automatic switches, the pressure gauge and the first flowmeter, can control the first automatic switches to be turned on or turned off, and receives the fluid pressure value and the fluid flow value to judge whether the plurality of spray disks are blocked or not.
2. The spray disk detection system of claim 1, wherein a detection pipeline and a second and a third automatic switches are provided, the second automatic switch is disposed on the main pipeline, the third automatic switch is disposed on the detection pipeline, and the main pipeline and the second automatic switch, the detection pipeline and the third automatic switch are connected in parallel between the pump and the plurality of sub-pipelines.
3. The spray tray detection system of claim 2, wherein the second and third automatic switches are connected to the controller.
4. The spray disk detection system of claim 2 wherein a second flow meter is disposed in the detection line.
5. The spray disk detection system of claim 4, wherein the second flow meter is coupled to the controller.
6. The spray disk detection system of claim 4, wherein the pipe diameter of the detection pipeline is smaller than that of the main pipeline.
7. The spray tray detection system according to any one of claims 1 to 6, wherein a plurality of spray trays are disposed in a circulation tank, the circulation tank contains liquid, a circulation pipeline is connected to the circulation tank and the pump, and the pump provides the liquid in the circulation tank to the main pipeline.
8. The system of claim 7, wherein the recirculation circuit is configured with a fourth automatic switch, and the fourth automatic switch is connected to the controller.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202020424981.3U CN212238338U (en) | 2020-03-27 | 2020-03-27 | Spray plate detection system |
Applications Claiming Priority (1)
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CN202020424981.3U CN212238338U (en) | 2020-03-27 | 2020-03-27 | Spray plate detection system |
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CN212238338U true CN212238338U (en) | 2020-12-29 |
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CN202020424981.3U Expired - Fee Related CN212238338U (en) | 2020-03-27 | 2020-03-27 | Spray plate detection system |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113441449A (en) * | 2020-03-27 | 2021-09-28 | 先丰通讯股份有限公司 | Spray plate detection system and detection method thereof |
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2020
- 2020-03-27 CN CN202020424981.3U patent/CN212238338U/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113441449A (en) * | 2020-03-27 | 2021-09-28 | 先丰通讯股份有限公司 | Spray plate detection system and detection method thereof |
CN113441449B (en) * | 2020-03-27 | 2022-12-09 | 先丰通讯股份有限公司 | Spray plate detection system and detection method thereof |
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Granted publication date: 20201229 |