CN214174077U - Device and system for detecting purity of cleaning fluid - Google Patents
Device and system for detecting purity of cleaning fluid Download PDFInfo
- Publication number
- CN214174077U CN214174077U CN202023133134.0U CN202023133134U CN214174077U CN 214174077 U CN214174077 U CN 214174077U CN 202023133134 U CN202023133134 U CN 202023133134U CN 214174077 U CN214174077 U CN 214174077U
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- cleaning
- purity
- cleaning liquid
- detecting
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- 238000004140 cleaning Methods 0.000 title claims description 230
- 239000012530 fluid Substances 0.000 title claims description 8
- 239000007788 liquid Substances 0.000 claims description 126
- 239000011521 glass Substances 0.000 claims description 50
- 239000000758 substrate Substances 0.000 claims description 50
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 42
- 238000001514 detection method Methods 0.000 claims description 38
- 238000003860 storage Methods 0.000 claims description 30
- 238000004519 manufacturing process Methods 0.000 claims description 29
- 239000000523 sample Substances 0.000 claims description 18
- 239000012535 impurity Substances 0.000 claims description 15
- 230000003749 cleanliness Effects 0.000 claims description 12
- 238000004891 communication Methods 0.000 claims description 9
- 238000001914 filtration Methods 0.000 claims description 9
- 239000002245 particle Substances 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 238000005406 washing Methods 0.000 description 31
- 238000010586 diagram Methods 0.000 description 20
- 239000007921 spray Substances 0.000 description 7
- 241000894006 Bacteria Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011012 sanitization Methods 0.000 description 1
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- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The embodiment of the utility model discloses purity detection device and system of washing liquid. The device for detecting the purity of the cleaning fluid comprises a cleaning calandria, wherein the cleaning calandria is used for circulating the cleaning fluid for cleaning a glass substrate, a counter is configured on a circulation path of the cleaning calandria, the counter is used for counting the number of impurity particles contained in the cleaning fluid flowing through the cleaning calandria and outputting statistical data, a controller is in communication connection with the counter and used for controlling the cleaning calandria to be conducted according to the statistical data. The embodiment of the utility model provides a technical scheme is through the detection to the washing liquid purity that washs glass substrate usefulness, improves the purity of the washing liquid that glass substrate's belt cleaning device's washing glass substrate used, and there is impurity in the liquid that has solved current glass substrate's belt cleaning device's washing glass substrate usefulness, arouses that glass substrate is difficult to by the sanitization, or causes the problem of damage to glass substrate.
Description
Technical Field
The embodiment of the utility model provides a relate to belt cleaning device technical field, especially relate to a purity detection device and system of washing liquid.
Background
In the existing display panel preparation process, in order to reduce the defects of an imaging device caused by bacteria, foreign matters and the like, a glass substrate needs to be cleaned before being coated. The liquid for cleaning the glass substrate of the prior glass substrate cleaning device has impurities, which induces that the glass substrate is difficult to clean, and even larger impurity particles can damage the glass substrate.
The problem that the cleaning liquid for cleaning the glass substrate in the existing glass substrate cleaning device has impurities, so that the glass substrate is difficult to clean or the glass substrate is damaged is a problem to be solved urgently in the industry.
SUMMERY OF THE UTILITY MODEL
The embodiment of the utility model provides a purity detection device and system of washing liquid to there is impurity in the liquid that is used for wasing the glass substrate among the belt cleaning device of solving current glass substrate, arouses that the glass substrate is difficult to by the sanitization, or causes the problem of damage to the glass substrate.
In order to realize the technical problem, the utility model discloses a following technical scheme:
an embodiment of the utility model provides a purity detection device of washing liquid, include:
the cleaning exhaust pipe is used for circulating cleaning liquid for cleaning the glass substrate;
a counter is arranged on the circulation path of the cleaning exhaust pipe; the counter is used for counting the number of impurity particles contained in the cleaning liquid flowing through the cleaning calandria and outputting statistical data;
and the controller is in communication connection with the counter and is used for controlling the cleaning of the discharge pipes to be conducted according to the statistical data.
As a preferable mode of the device for detecting the cleanliness of the cleaning liquid, the cleaning drain pipe includes a first side end, and the counter is disposed at the first side end.
As a preferable scheme of the device for detecting the purity of the cleaning liquid, the cleaning rack pipe further comprises a second side end, the second side end is provided with a non-resistance probe, and the non-resistance probe is used for detecting non-resistance data;
the controller is in communication connection with the non-resistance probe and is used for controlling the conduction of the cleaning calandria according to non-resistance data and/or statistical data.
As a preferable scheme of the purity detection device of the cleaning solution, the purity detection device of the cleaning solution further comprises a change-over valve;
the switching valve is arranged between the cleaning exhaust pipe and the input exhaust pipe;
when the non-resistance data is lower than or equal to the first threshold and the statistical data is smaller than or equal to the second threshold, the switching valve is used for communicating the cleaning calandria with the input calandria;
the switching valve is used to disconnect the cleaning drain from the input drain when the non-resistance data is above a first threshold and/or the statistical data is above a second threshold.
As a preferable scheme of the device for detecting the purity of the cleaning liquid, the device for detecting the purity of the cleaning liquid further comprises a spray head;
the sprayer is arranged on the side wall of the cleaning exhaust pipe and used for spraying cleaning liquid and cleaning the glass substrate.
As a preferable scheme of the device for detecting the purity of the cleaning liquid, the device for detecting the purity of the cleaning liquid further comprises at least one water storage tank;
the water storage tank is used for collecting the cleaning liquid output by the cleaning discharge pipe.
As a preferable scheme of the device for detecting the purity of the cleaning liquid, the device for detecting the purity of the cleaning liquid further comprises a water suction pump;
the water pump is arranged corresponding to the water storage tank; the suction pump is used for providing power for the cleaning liquid in the water storage tank.
As a preferable scheme of the device for detecting the purity of the cleaning liquid, the device for detecting the purity of the cleaning liquid further comprises a filtering module;
the filtering module is arranged at the input end of the water storage tank and used for filtering and cleaning the cleaning liquid output by the discharge pipe and discharging the filtered cleaning liquid to the water storage tank.
An embodiment of the utility model provides a purity detecting system of washing liquid, include: production equipment, a production server and a purity detection device for the cleaning liquid in any scheme;
the production equipment is used for cleaning the glass substrate;
the cleaning solution purity detection device is used for detecting the purity state of the cleaning solution of the production equipment;
the production server is used for uploading the purity state data of the cleaning liquid of the production equipment.
As a preferable aspect of the system for detecting the purity of the cleaning liquid, the system for detecting the purity of the cleaning liquid further includes: a memory and a front-end server;
the cleaning calandria of the cleaning solution purity detection device also comprises a second side end, the second side end is provided with a non-resistance probe, and the non-resistance probe is used for detecting non-resistance data;
the memory is used for storing the statistical data and the non-resistance data output by the cleanliness detection device of the cleaning liquid;
and the front-end server is used for interacting with the terminal according to the statistical data and the non-resistance data output by the cleanliness detection device of the cleaning liquid.
The utility model has the advantages that: the counter is arranged on the circulation path of the cleaning calandria, the counter counts the number of impurity particles contained in the cleaning liquid flowing through the cleaning calandria and outputs statistical data, the controller is in communication connection with the counter, and the controller controls the cleaning calandria to be conducted according to the statistical data. The glass substrate cleaning device has the advantages that the purity of the cleaning liquid for cleaning the glass substrate is improved through the detection of the purity of the cleaning liquid for cleaning the glass substrate, and the problems that the glass substrate is difficult to clean or is damaged due to the fact that impurities exist in the cleaning liquid for cleaning the glass substrate in the existing glass substrate cleaning device are solved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a device for detecting the purity of a cleaning fluid according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of another apparatus for detecting purity of cleaning fluid according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of another cleaning liquid purity detection apparatus according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of another cleaning liquid purity detection apparatus according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of another apparatus for detecting purity of cleaning fluid according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of another cleaning liquid purity detection apparatus according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of another apparatus for detecting purity of cleaning fluid according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of another cleaning liquid purity detection apparatus according to an embodiment of the present invention;
fig. 9 is a schematic structural diagram of a system for detecting purity of a cleaning solution according to an embodiment of the present invention;
fig. 10 is a schematic structural diagram of another cleaning liquid purity detection system according to an embodiment of the present invention.
Detailed Description
The advantages and features of the present invention and the methods of accomplishing the same will become apparent with reference to the following detailed description of the embodiments taken in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and the embodiments are provided only to accomplish the disclosure of the present invention and to enable those skilled in the art to sufficiently understand the scope of the present invention, and the present invention is limited only by the scope of the claims. Like reference numerals denote like constituent elements throughout the specification.
Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of a device for detecting purity of cleaning fluid according to an embodiment of the present invention. Referring to fig. 1, the embodiment of the utility model provides a purity detection device of washing liquid is including wasing calandria 1, counter 2 and controller 3, wash calandria 1 and be used for the circulation to wash the washing liquid of glass substrate, dispose counter 2 on wasing the circulation route of calandria 1, counter 2 is used for making statistics of the quantity of the impurity granule that contains in the washing liquid that flows through washing calandria 1, and output statistical data, controller 3 and counter 2 communication connection, controller 3 is used for according to statistical data, control washs calandria 1 and switches on.
Specifically, the cleaning liquid flows through the cleaning pipe bank 1, the cleaning liquid for cleaning the glass substrate can be water or other cleaning liquid, and can be recycled in application, impurities may exist in the recycled cleaning liquid, the counter 2 is configured on the flow path of the cleaning pipe bank 1, when the impurities flow through the flow path of the cleaning pipe bank 1, the counter 2 can count the impurities flowing through the cleaning pipe bank 1 in unit time, and output the statistical data of the counter 2 to the controller 3, the controller 3 compares the received statistical data with a preset threshold value, when the statistical data is smaller than or equal to the preset threshold value, the controller 3 controls the cleaning pipe bank 1 to be conducted, and the cleaning liquid in the cleaning pipe bank 1 can clean the glass substrate.
The beneficial effect of this embodiment does: the counter is arranged on the circulation path of the cleaning calandria, the counter counts the number of impurity particles contained in the cleaning liquid flowing through the cleaning calandria and outputs statistical data, the controller is in communication connection with the counter, and the controller controls the cleaning calandria to be conducted according to the statistical data. The glass substrate cleaning device has the advantages that the purity of the cleaning liquid for cleaning the glass substrate is improved through the detection of the purity of the cleaning liquid for cleaning the glass substrate, and the problems that the glass substrate is difficult to clean or is damaged due to impurities in the cleaning liquid for cleaning the glass substrate of the conventional glass substrate cleaning device are solved.
As a preferred scheme of the cleanliness detection device for cleaning solution, fig. 2 is a schematic structural diagram of another cleanliness detection device for cleaning solution provided by an embodiment of the present invention. On the basis of the above embodiment, referring to fig. 2, the cleaning pipe bank 1 of the device for detecting the purity of the cleaning liquid provided by the embodiment of the present invention includes a first side end 11, and the counter 2 is disposed at the first side end 11.
Specifically, counter 2 sets up in the first side end 11 that washs calandria 1, sets up like this and makes counter 2 can detect the purity of the washing liquid that washs 1 circulation of calandria, can guarantee to wash the velocity of flow of the interior washing liquid of calandria 1 again, avoids counter 2 to influence the velocity of flow of the interior washing liquid of washing calandria 1 to improve the cleaning efficiency who washs the glass substrate.
As a preferred scheme of the device for detecting the purity of the cleaning liquid, fig. 3 is a schematic structural diagram of another device for detecting the purity of the cleaning liquid provided by an embodiment of the present invention. On the basis of the above embodiment, referring to fig. 3, the cleaning drain pipe 1 further includes a second side end 12, the second side end 12 is configured with a non-resistance probe 4, and the non-resistance probe 4 is used for detecting non-resistance data; the controller 3 is in communication connection with the non-resistance probe 4, and the controller 3 is used for controlling the conduction of the cleaning calandria 1 according to non-resistance data and/or statistical data.
Specifically, the non-resistance probe 4 is arranged at the second side end 12 of the cleaning calandria 1, the non-resistance probe 4 can detect small impurities in the cleaning liquid flowing through the cleaning calandria 1 and send non-resistance data to the controller 3, the controller 3 judges whether the non-resistance data meets a preset condition according to the received non-resistance data, and if the received non-resistance data meets the preset condition, the cleaning calandria 1 is controlled to be conducted; or the controller 3 judges that the statistical data meet the preset conditions, and the controller 3 controls the cleaning exhaust pipe 1 to be conducted; or, the controller 3 controls the cleaning pipe bank 1 to be conducted by judging that the non-resistance data meet the preset condition and the statistical data uploaded to the controller 3 by the counter 2 is less than or equal to the preset threshold value.
As a preferred embodiment of the device for detecting the purity of the cleaning liquid, fig. 4 is a schematic structural diagram of another device for detecting the purity of the cleaning liquid provided by an embodiment of the present invention. On the basis of the above embodiment, referring to fig. 4, the apparatus for detecting the purity of the cleaning liquid further includes a changeover valve 5; the change-over valve 5 is arranged between the cleaning exhaust pipe 1 and the input exhaust pipe 6; when the non-resistance data is lower than or equal to the first threshold and the statistical data is lower than or equal to the second threshold, the switching valve 5 is used for communicating the cleaning calandria 1 with the input calandria 6; the switching valve 5 is used to disconnect the cleaning drain 1 from the input drain 6 when the non-resistance data are higher than a first threshold value and/or the statistical data are higher than a second threshold value.
Specifically, a switch valve may be provided at the input end of the input pipe 6, and when the switch valve is opened, the input end of the input pipe 6 inputs cleaning solution such as straight water or circulating water, and when the switch valve is closed, the input end of the input pipe 6 does not input cleaning solution. The operating mode of the purity detection device of the cleaning liquid can be controlled by controlling the switching valve 4 through the controller. The switching valve 4 and the on-off valve are both opened, the cleaning liquid flows into the cleaning exhaust pipe 1 from the input exhaust pipe 6, when the non-resistance data and the statistical data of the non-resistance probe 4 and the counter 2 arranged on the circulation path of the cleaning exhaust pipe 1 both meet the preset conditions, the switching valve 5 can be set to communicate the cleaning exhaust pipe 1 with the input exhaust pipe 6 when the non-resistance data is lower than or equal to the first threshold value and the statistical data is lower than or equal to the second threshold value. When the non-resistance data is higher than the first threshold value or the statistical data is larger than the second threshold value, the change-over valve 5 disconnects the cleaning exhaust pipe 1 from the input exhaust pipe 6, or when the non-resistance data is higher than the first threshold value and the statistical data is larger than the second threshold value, the change-over valve 5 disconnects the cleaning exhaust pipe 1 from the input exhaust pipe 6, so that when the purity of the cleaning liquid does not meet the preset condition, the cleaning liquid is stopped from continuing to be introduced into the cleaning exhaust pipe 1, the damage to the cleaned glass substrate due to the fact that the purity of the cleaning liquid does not meet the requirement is reduced, and the yield of the glass substrate cleaning is improved.
As a preferred embodiment of the device for detecting the purity of a cleaning liquid, fig. 5 is a schematic structural diagram of another device for detecting the purity of a cleaning liquid provided by an embodiment of the present invention. On the basis of the above embodiment, referring to fig. 5, the device for detecting the purity of the cleaning solution further includes a spray head 7; the spray head 7 is arranged on the side wall of the cleaning exhaust pipe 1, and the spray head 7 is used for spraying cleaning liquid and cleaning the glass substrate.
Specifically, the shower nozzle 7 can spray the washing liquid in the washing calandria 1 through the shower nozzle 7, increases the abluent region of washing liquid ability, improves cleaning efficiency.
As a preferred embodiment of the device for detecting the purity of the cleaning liquid, fig. 6 is a schematic structural diagram of another device for detecting the purity of the cleaning liquid provided by an embodiment of the present invention. On the basis of the above embodiment, referring to fig. 6, the device for detecting the purity of the cleaning liquid further comprises at least one water storage tank 8; the water storage tank 8 is used for collecting the cleaning liquid output by the cleaning drain pipe 1.
Specifically, the utility model discloses not limiting the quantity of water storage box 8, see fig. 6, when the number of water storage box 8 was 1, can set up that the output that the multichannel washd calandria 1 converges into a water storage box 8, fig. 6 exemplarily shows that glass substrate belt cleaning device includes 1 water storage box 8, including the condition of wasing calandria 1 all the way. The water storage tanks 8 can be arranged in one-to-one correspondence with the cleaning calandria 1, the water storage tanks 8 can collect circulating water output by the output end of the cleaning calandria 1 corresponding to the water storage tanks 8, and the water storage tanks 8 can also collect cleaning liquid sprayed by the spray heads 7 and used for cleaning the glass substrate.
As a preferred embodiment of the device for detecting the purity of a cleaning liquid, fig. 7 is a schematic structural diagram of another device for detecting the purity of a cleaning liquid provided by an embodiment of the present invention. On the basis of the above embodiment, referring to fig. 7, the device for detecting the purity of the cleaning liquid further includes a water pump 9, the water pump 9 is disposed corresponding to the water storage tank 8, and the water pump 9 is used for providing power for the cleaning liquid in the water storage tank 8.
Specifically, the cleanliness detection device of washing liquid can be including multistage washing calandria 1, the input that can set up the washing calandria 1 of back one-level passes through suction pump 9 and is connected with water storage box 8, the washing calandria 1 of first level can be connected with input calandria 6, through the ooff valve of opening the input setting of input calandria 6, by washing liquid such as the input straight water of input calandria 6 or circulating water, when the ooff valve closed, the input of input calandria 6 does not have the washing liquid input. The suction pump 9 extracts the cleaning liquid from the water storage tank 8 to the input end of the corresponding next-stage cleaning drainage pipe 1, the suction pump 9 can provide power for the cleaning liquid in the water storage tank 8, and the cleaning liquid can be conveniently sprayed by the spray heads 7 on the side walls of the cleaning drainage pipe 1 to clean the glass substrate to be cleaned.
As a preferred embodiment of the device for detecting the purity of a cleaning liquid, fig. 8 is a schematic structural diagram of another device for detecting the purity of a cleaning liquid according to an embodiment of the present invention. On the basis of the above embodiment, referring to fig. 8, the apparatus for detecting the purity of the cleaning solution further includes a filtering module 10; the filtering module 10 is arranged at the input end of the water storage tank 8, and the filtering module 10 is used for filtering the cleaning liquid output by the cleaning drain pipe 1 and discharging the filtered cleaning liquid to the water storage tank 8.
Specifically, the arrangement enables the cleaning liquid output by the output end of the cleaning calandria 1 to be filtered by the filter module 10 and then stored in the water storage tank 8, so that the purity of the cleaning liquid in the water storage tank 8 is further improved, and the requirement for cleaning the glass substrate is met.
Fig. 9 is a schematic structural diagram of a system for detecting purity of a cleaning liquid according to an embodiment of the present invention. On the basis of the above-mentioned embodiment, refer to fig. 9, the embodiment of the utility model provides a purity detecting system of washing liquid includes the purity detection device 300 of the washing liquid that production facility 100, production server 200 and above-mentioned arbitrary scheme proposed, and production facility 100 is used for wasing the glass substrate, and the purity detection device 300 of washing liquid is used for detecting the purity state of the washing liquid of production facility 100, and production server 200 is used for uploading the purity state data of the washing liquid of production facility 100.
Specifically, the glass substrate is cleaned by the production equipment 100, the purity detection device 300 of the cleaning liquid can detect the purity state of the cleaning liquid used by the production equipment 100 for cleaning the glass substrate, and controls the cleaning pipe 1 to be turned on or off according to the purity state of the cleaning liquid, so as to control the production equipment 100 to clean the glass substrate or stop cleaning the glass substrate, the production server 200 is in communication connection with the controller 3, and the production server 200 can upload the purity state data of the cleaning liquid of the production equipment 100.
As a preferred embodiment of the system for detecting the purity of a cleaning solution, fig. 10 is a schematic structural diagram of another system for detecting the purity of a cleaning solution provided by an embodiment of the present invention. On the basis of the above embodiment, referring to fig. 10, the cleaning solution purity detection system further includes a memory 400 and a front-end server 500; the cleaning rack pipe of the cleaning solution purity detection device 300 further comprises a second side end, wherein the second side end is provided with a non-resistance probe, and the non-resistance probe is used for detecting non-resistance data; the memory 400 is used for storing the statistical data and the non-resistance data output by the cleanliness detection device 300 of the cleaning solution; the front-end server 500 is configured to interact with the terminal according to the statistical data and the non-resistance data output by the cleaning solution purity detection apparatus 300.
Specifically, the memory 400 may store the statistical data and the non-resistance data output by the purity detection apparatus 300 of the cleaning solution, and the front-end server 500 may call the statistical data and the non-resistance data output by the purity detection apparatus 300 of the cleaning solution from the memory 400 and interact with the terminal according to a request of the terminal.
The embodiment of the utility model provides a purity detecting system of washing liquid washs the glass substrate through production facility, and the purity state of the washing liquid of production facility is detected to the purity detection device through the washing liquid to pass the purity state data of production facility's washing liquid on through the production server, realized monitoring and control to the purity state of production facility's washing liquid, improved the cleaning performance to the glass substrate, improved the abluent yields to the glass substrate.
Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but may be manufactured in various forms, and those skilled in the art will understand that the present invention may be embodied in other specific forms without changing the technical spirit or essential features of the invention. It is therefore to be understood that the above described embodiments are illustrative and not restrictive in all respects.
Claims (10)
1. A device for detecting the purity of a cleaning liquid, comprising:
a cleaning calandria for circulating cleaning liquid for cleaning the glass substrate;
a counter is arranged on the circulation path of the cleaning calandria; the counter is used for counting the number of impurity particles contained in the cleaning liquid flowing through the cleaning drain pipe and outputting statistical data;
and the controller is in communication connection with the counter and is used for controlling the cleaning calandria to be conducted according to the statistical data.
2. The apparatus for detecting the purity of a cleaning liquid according to claim 1,
the cleaning exhaust pipe comprises a first side end, and the counter is arranged at the first side end.
3. The apparatus for detecting the purity of a cleaning liquid according to claim 2,
the cleaning rack pipe also comprises a second side end, the second side end is provided with a non-resistance probe, and the non-resistance probe is used for detecting non-resistance data;
the controller is in communication connection with the non-resistance probe and is used for controlling the cleaning discharge pipe to be conducted according to the non-resistance data and/or the statistical data.
4. The cleanliness detecting device of a cleaning solution according to claim 3, further comprising a changeover valve;
the switching valve is arranged between the cleaning calandria and the input calandria;
when the non-resistance data is lower than or equal to a first threshold value and the statistical data is lower than or equal to a second threshold value, the switching valve is used for communicating the cleaning drain pipe with the input drain pipe;
when the non-resistance data is higher than a first threshold value, and/or the statistical data is greater than a second threshold value, the switching valve is used to disconnect the cleaning drain from the input drain.
5. The apparatus for detecting the purity of a cleaning liquid according to claim 1, further comprising a nozzle;
the sprayer is arranged on the side wall of the cleaning exhaust pipe and used for spraying cleaning liquid and cleaning the glass substrate.
6. The apparatus for detecting the purity of a cleaning liquid according to claim 4, further comprising at least one reservoir;
the water storage tank is used for collecting the cleaning liquid output by the cleaning drain pipe.
7. The cleanliness detection device of a cleaning solution according to claim 6, further comprising a suction pump;
the water suction pump is arranged corresponding to the water storage tank; the suction pump is used for providing power for the cleaning liquid in the water storage tank.
8. The apparatus for detecting the purity of a cleaning liquid according to claim 6, further comprising a filter module;
the filtering module is arranged at the input end of the water storage tank and is used for filtering the cleaning liquid output by the cleaning drain pipe and discharging the filtered cleaning liquid to the water storage tank.
9. A system for detecting the purity of a cleaning fluid, comprising: a purity detecting device, a production facility, and a production server for the cleaning liquid according to any one of claims 1 to 8;
the production equipment is used for cleaning the glass substrate;
the purity detection device of the cleaning liquid is used for detecting the purity state of the cleaning liquid of the production equipment;
the production server is used for uploading the purity state data of the cleaning liquid of the production equipment.
10. The cleanliness detection system of claim 9, further comprising: a memory and a front-end server;
the cleaning calandria of the cleaning solution purity detection device further comprises a second side end, the second side end is provided with a non-resistance probe, and the non-resistance probe is used for detecting non-resistance data;
the memory is used for storing statistical data and non-resistance data output by the cleanliness detection device of the cleaning liquid;
and the front-end server is used for interacting with a terminal according to the statistical data and the non-resistance data output by the cleanliness detection device of the cleaning liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023133134.0U CN214174077U (en) | 2020-12-23 | 2020-12-23 | Device and system for detecting purity of cleaning fluid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023133134.0U CN214174077U (en) | 2020-12-23 | 2020-12-23 | Device and system for detecting purity of cleaning fluid |
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| Publication Number | Publication Date |
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| CN214174077U true CN214174077U (en) | 2021-09-10 |
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| CN202023133134.0U Active CN214174077U (en) | 2020-12-23 | 2020-12-23 | Device and system for detecting purity of cleaning fluid |
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| CN (1) | CN214174077U (en) |
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- 2020-12-23 CN CN202023133134.0U patent/CN214174077U/en active Active
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