CN210834097U - Optical test system - Google Patents
Optical test system Download PDFInfo
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- CN210834097U CN210834097U CN201921786506.4U CN201921786506U CN210834097U CN 210834097 U CN210834097 U CN 210834097U CN 201921786506 U CN201921786506 U CN 201921786506U CN 210834097 U CN210834097 U CN 210834097U
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Abstract
The utility model provides an optical test system, including the laser instrument, a power supply, the structure is adjusted to the light path, the sample bears the structure, first focusing lens, optical splitter and treater, the sample bears the structure and includes sample room and sample platform, the sample platform sets up in the sample room, the sample platform is used for bearing the sample, the structure is adjusted to the light path, the sample bears the structure and sets gradually in the outgoing light path of laser instrument, power and sample electric connection, first focusing lens, the optical splitter, the treater sets gradually on the outgoing light path of the exciting light of sample, the optical splitter is located the back focal plane of first focusing lens. The laser, the light path adjusting structure, the sample bearing structure, the first focusing lens, the light splitter and the processor are used for carrying out photoluminescence test on the sample; the power supply, the sample bearing structure, the first focusing lens, the light splitter and the processor are used for carrying out electroluminescence test on the sample, so that photoluminescence test and electroluminescence test can be carried out on the sample simultaneously, and the test efficiency is improved.
Description
Technical Field
The utility model relates to a photoelectric device tests technical field, especially relates to an optical testing system.
Background
For semiconductor photoelectric materials, important and irreplaceable means for evaluating the performance of the semiconductor photoelectric materials and understanding various internal mechanisms are photoluminescence and electroluminescence measurement. Photoluminescence measurement is to excite semiconductor photoelectric material with laser emitted by a laser and measure the luminescence property and spectral characteristics of the semiconductor photoelectric material by a spectroscopy method, so as to obtain the relevant information of the semiconductor photoelectric material. The electroluminescence measurement is to inject current or voltage into the semiconductor photoelectric material to excite the semiconductor photoelectric material to generate photons, and measure the luminescence property and the spectral characteristics of the semiconductor photoelectric material by a spectroscopy method, thereby obtaining the relevant information of the semiconductor photoelectric material. The existing optical test system only carries out single test, but only can carry out single photoluminescence test or single electroluminescence test, if the photoluminescence test and the electroluminescence test need to be carried out simultaneously, a test sample needs to be converted back and forth between the two systems, so the test process is relatively complex, and the test efficiency is greatly reduced.
SUMMERY OF THE UTILITY MODEL
In order to solve the defects of the prior art, the utility model provides an optical test system can carry out photoluminescence test and electroluminescence test simultaneously, has promoted efficiency of software testing.
The utility model provides a concrete technical scheme does: the utility model provides an optical test system, optical test system includes laser instrument, power, light path regulation structure, sample bearing structure, first focusing lens, beam splitter and treater, sample bearing structure includes sample room and sample platform, the sample platform sets up in the sample room, the sample platform is used for bearing the sample, light path regulation structure, sample bearing structure set gradually in on the emergent light path of laser instrument, the power with sample electric connection, first focusing lens, beam splitter, treater set gradually in on the emergent light path of the exciting light of sample, the beam splitter is located first focusing lens's back focal plane, the central wavelength of laser instrument is less than the photoluminescence wavelength of sample.
Furthermore, the optical test system further comprises an optical filter, and the optical filter, the light path adjusting structure and the sample bearing structure are sequentially arranged on the emergent light path of the laser.
Furthermore, the light path adjusting structure comprises a reflector and a second focusing lens, the reflector and the second focusing lens are sequentially arranged on the emergent light path of the laser, and the sample is positioned on the back focal plane of the second focusing lens.
Further, the processor comprises a photoelectric detector and a computer, wherein the photoelectric detector and the computer are sequentially arranged on an emergent light path of exciting light of the sample.
Further, the processor also comprises an amplifier, and the photoelectric detector, the amplifier and the computer are sequentially arranged on an emergent light path of exciting light of the sample.
Further, the amplifier is a lock-in amplifier.
Further, the light splitter is a monochromator.
Further, the photoluminescence wavelength of the sample is the wavelength corresponding to the band gap or the characteristic structure of the sample.
Further, the sample support structure further comprises a vacuum pump connected to the sample chamber.
Further, the sample support structure further comprises a refrigerator coupled to the sample chamber.
The utility model provides an optical test system includes laser instrument, power, light path regulation structure, sample bearing structure, first focusing lens, spectrometer and treater, laser instrument, light path regulation structure, sample bearing structure, first focusing lens, spectrometer and treater are used for carrying out photoluminescence to the sample and testing; the power supply, the sample bearing structure, the first focusing lens, the light splitter and the processor are used for carrying out electroluminescence test on the sample, so that photoluminescence test and electroluminescence test can be carried out on the sample simultaneously, and the test efficiency is improved.
Drawings
The technical solution and other advantages of the present invention will become apparent from the following detailed description of the embodiments of the present invention with reference to the accompanying drawings.
FIG. 1 is a schematic diagram of an optical test system.
Detailed Description
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the specific embodiments set forth herein. Rather, these embodiments are provided to explain the principles of the invention and its practical application to thereby enable others skilled in the art to understand the invention for various embodiments and with various modifications as are suited to the particular use contemplated. In the drawings, like reference numerals will be used to refer to like elements throughout.
Referring to fig. 1, the optical testing system provided in this embodiment includes a laser 1, a power supply 2, an optical path adjusting structure 3, a sample carrying structure, a first focusing lens 5, a beam splitter 6, and a processor 7. The sample bearing structure comprises a sample chamber 41 and a sample stage 42, wherein the sample stage 42 is arranged in the sample chamber 41, and the sample stage 42 is used for bearing the sample 8. The light path adjusting structure 3 and the sample bearing structure are sequentially arranged on an emergent light path of the laser 1, namely, laser emitted by the laser 1 sequentially passes through the light path adjusting structure 3 and the sample bearing structure. The power supply 2 is electrically connected with the sample 8, the first focusing lens 5, the optical splitter 6 and the processor 7 are sequentially arranged on an emergent light path of exciting light of the sample 8, namely, light generated by exciting the sample 8 sequentially passes through the first focusing lens 5, the optical splitter 6 and the processor 7. The beam splitter 6 is located in the back focal plane of the first focusing lens 5 and the central wavelength of the laser 1 is less than the photoluminescence wavelength of the sample 8.
Specifically, the material of the sample 8 in this embodiment is a semiconductor photoelectric material, for example, the sample 8 is a battery made of a semiconductor photoelectric material. The laser 1 is used for emitting laser light and exciting the sample 8 to realize photoluminescence, wherein the central wavelength of the laser 1 is smaller than the photoluminescence wavelength of the semiconductor photoelectric material, and here, the photoluminescence wavelength of the sample 8 is the wavelength corresponding to the band gap or the characteristic structure of the sample 8. The power supply 2 is used for injecting current or voltage into the sample 8 and exciting the sample 8 to realize electroluminescence, a lead is fixed on the sample table 42, and the power supply 2 is electrically connected with the sample 8 through the lead. Preferably, the power supply 2 is a source meter.
The laser 1, the light path adjusting structure 3, the sample bearing structure, the first focusing lens 5, the optical splitter 6 and the processor 7 are used for carrying out photoluminescence test on a sample 8. The power supply 2, the sample bearing structure, the first focusing lens 5, the optical splitter 6 and the processor 7 are used for carrying out electroluminescence test on the sample 8, so that photoluminescence test and electroluminescence test can be simultaneously carried out on the sample 8 in the same optical test system, and the back-and-forth switching between an independent photoluminescence test system and an independent electroluminescence test system is not needed, so that the test efficiency is greatly improved.
The optical test system in this embodiment further includes an optical filter 9, where the optical filter 9, the optical path adjusting structure 3, and the sample bearing structure are sequentially disposed on the emergent optical path of the laser 1, that is, the laser emitted by the laser 1 sequentially passes through the optical filter 9, the optical path adjusting structure 3, and the sample bearing structure. The optical filter 9 is used for filtering the laser and filtering out natural light.
The light path adjusting structure 3 includes a reflector 31 and a second focusing lens 32, the reflector 31 and the second focusing lens 32 are sequentially disposed on the emergent light path of the laser 1, that is, the laser emitted by the laser 1 sequentially passes through the optical filter 9, the reflector 31, the second focusing lens 32, and the sample carrying structure. The sample 8 is located on the back focal plane of the second focusing lens 32, the reflector 31 is used for reflecting the light rays filtered by the optical filter 9 onto the second focusing lens 32, and the second focusing lens 32 is used for focusing the light rays incident thereon onto the sample 8, so that the sample 8 is excited to realize photoluminescence.
The processor 7 in this embodiment includes a photodetector 71 and a computer 72, and the photodetector 71 and the computer 72 are sequentially disposed on an emitting light path of the excitation light of the sample 8, that is, the excitation light of the sample 8 sequentially passes through the first focusing lens 5, the beam splitter 6, the photodetector 71 and the computer 72. The first focusing lens 5 is used for focusing the excitation light of the sample 8 on the optical splitter 6, the optical splitter 6 is used for obtaining monochromatic light with a specific wavelength, the photodetector 71 is used for converting an optical signal corresponding to the monochromatic light into an electrical signal and sending the electrical signal to the computer 72, and the computer 72 processes the electrical signal so as to obtain related information of the sample 8, wherein the related information includes a light emitting performance and a spectral characteristic.
Specifically, the beam splitter 6 in the present embodiment is a monochromator, preferably, the beam splitter 6 is a grating monochromator, and the first focusing lens 5 is used for focusing the excitation light of the sample 8 into the slit of the grating monochromator.
In order to improve the quality of the signal, the processor 7 in this embodiment further includes an amplifier 73, and the photodetector 71, the amplifier 73, and the computer 72 are sequentially disposed on the emitting light path of the excitation light of the sample 8, that is, the excitation light of the sample 8 sequentially passes through the first focusing lens 5, the beam splitter 6, the photodetector 71, the amplifier 73, and the computer 72. The amplifier 73 is used for amplifying the electrical signal converted by the photodetector 71 and sending the amplified electrical signal to the computer 72. Preferably, the amplifier 73 is a lock-in amplifier.
In order to realize the test of the sample in the vacuum environment or the low temperature environment, the sample bearing structure further comprises a vacuum pump 43 and a refrigerator 44. The vacuum pump 43 and the refrigerator 44 are respectively connected with the sample chamber 41, the vacuum pump 43 is used for vacuumizing the sample chamber 41 so as to enable the sample 8 to be in a vacuum environment, and the refrigerator 44 is used for refrigerating the sample chamber 41 so as to enable the sample 8 to be in a low-temperature environment.
The following describes in detail the test procedure of the optical test system in the present embodiment.
Taking a sample 8 as a battery as an example, fixing the battery on a sample table 42, respectively connecting the P/N poles of the battery with a power supply 2 through a lead, adjusting a light path, focusing the excitation light of the battery to an optical splitter 6 by a first focusing lens 5, obtaining monochromatic light with a specific wavelength through the optical splitter 6, converting an optical signal corresponding to the monochromatic light into an electrical signal by a photoelectric detector 71, sending the electrical signal to an amplifier 73, amplifying the electrical signal by the amplifier 73, sending the amplified electrical signal to a computer 72, and processing the electrical signal by the computer 72, thereby obtaining the electroluminescent performance and the electroluminescent spectral line of the battery.
When a photoluminescence test is carried out, the power supply 2 is closed, the laser 1 is connected with a laser power supply, the laser 1 is opened, the laser 1 emits laser with the central wavelength smaller than the photoluminescence wavelength of the battery, the light path is adjusted, the laser is filtered by the optical filter 9 to filter natural light, the light filtered by the optical filter 9 is reflected to the second focusing lens 32 by the reflector 31, the light incident on the second focusing lens 32 is focused on the battery by the second focusing lens 32 and excites the battery to generate exciting light, the exciting light of the battery is focused to the light splitter 6 by the first focusing lens 5, monochromatic light with specific wavelength is obtained by the light splitter 6, the optical signal corresponding to the monochromatic light is converted into an electrical signal by the photoelectric detector 71 and is sent to the amplifier 73, the electrical signal is amplified by the amplifier 73 and then is sent to the computer 72, the computer 72 processes the electrical signal, thereby obtaining the photoluminescence performance and photoluminescence spectral line of the battery.
The foregoing is directed to embodiments of the present application and it is noted that numerous modifications and adaptations may be made by those skilled in the art without departing from the principles of the present application and are intended to be within the scope of the present application.
Claims (10)
1. The utility model provides an optical test system, its characterized in that, includes laser instrument, power, light path regulation structure, sample bearing structure, first focusing lens, optical splitter and treater, sample bearing structure includes sample room and sample platform, the sample platform sets up in the sample room, the sample platform is used for bearing the sample, light path regulation structure, sample bearing structure set gradually in on the emergent light path of laser instrument, the power with sample electric connection, first focusing lens, optical splitter, treater set gradually in on the emergent light path of the exciting light of sample, the optical splitter is located first focusing lens's back focal plane, the central wavelength of laser instrument is less than the photoluminescence wavelength of sample.
2. The optical testing system of claim 1, further comprising an optical filter, wherein the optical filter, the optical path adjusting structure and the sample bearing structure are sequentially disposed on the emergent light path of the laser.
3. The optical testing system of claim 1, wherein the optical path adjusting structure comprises a reflector and a second focusing lens, the reflector and the second focusing lens are sequentially disposed on an emergent light path of the laser, and the sample is located on a back focal plane of the second focusing lens.
4. The optical testing system of claim 1, wherein the processor comprises a photodetector and a computer, and the photodetector and the computer are sequentially disposed on an exit light path of the excitation light of the sample.
5. The optical testing system of claim 4, wherein the processor further comprises an amplifier, and the photodetector, the amplifier and the computer are sequentially disposed on an exit light path of the excitation light of the sample.
6. The optical test system of claim 5, wherein the amplifier is a lock-in amplifier.
7. An optical test system according to any one of claims 1 to 6, wherein the beam splitter is a monochromator.
8. The optical testing system of claim 7, wherein the photoluminescence wavelength of the sample is a wavelength corresponding to a bandgap or a feature of the sample.
9. The optical testing system of claim 8, wherein the sample support structure further comprises a vacuum pump connected to the sample chamber.
10. The optical testing system of claim 9, wherein the sample support structure further comprises a refrigerator coupled to the sample chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921786506.4U CN210834097U (en) | 2019-10-23 | 2019-10-23 | Optical test system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921786506.4U CN210834097U (en) | 2019-10-23 | 2019-10-23 | Optical test system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112014359A (en) * | 2020-08-27 | 2020-12-01 | 中国电子科技集团公司第十一研究所 | Indium-arsenic-antimony component determination method and device |
| CN117169173A (en) * | 2023-10-12 | 2023-12-05 | 苏州长光华芯光电技术股份有限公司 | Photoluminescence testing device for epitaxial wafer and working method thereof |
| CN117894706A (en) * | 2024-03-15 | 2024-04-16 | 季华实验室 | Multi-mode wafer detection system and method |
-
2019
- 2019-10-23 CN CN201921786506.4U patent/CN210834097U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112014359A (en) * | 2020-08-27 | 2020-12-01 | 中国电子科技集团公司第十一研究所 | Indium-arsenic-antimony component determination method and device |
| CN112014359B (en) * | 2020-08-27 | 2024-04-19 | 中国电子科技集团公司第十一研究所 | Method and device for determining indium, arsenic and antimony components |
| CN117169173A (en) * | 2023-10-12 | 2023-12-05 | 苏州长光华芯光电技术股份有限公司 | Photoluminescence testing device for epitaxial wafer and working method thereof |
| CN117169173B (en) * | 2023-10-12 | 2024-02-23 | 苏州长光华芯光电技术股份有限公司 | Photoluminescence testing device for epitaxial wafer and working method thereof |
| CN117894706A (en) * | 2024-03-15 | 2024-04-16 | 季华实验室 | Multi-mode wafer detection system and method |
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