CN210823347U

CN210823347U - Semiconductor mask box storage device

Info

Publication number: CN210823347U
Application number: CN201921749187.XU
Authority: CN
Inventors: 江明煌
Original assignee: Yuandi Industry Co ltd
Current assignee: Yuandi Industry Co ltd
Priority date: 2019-10-18
Filing date: 2019-10-18
Publication date: 2020-06-23
Anticipated expiration: 2029-10-18

Abstract

A storage device for semiconductor mask boxes comprises a base, a lifting member, a motor and an up-and-down displacement platform. The base is provided with a fixed seat and a bearing component, and the fixed seat is locked on the bearing component; the lifting component is connected with the base through two fixing pieces and is provided with a connecting block, a sliding rail and a sliding block, two opposite sides of the connecting block are correspondingly provided with grooves for fixing the sliding rail, the sliding block is arranged on the sliding rails in a sliding manner, the sliding blocks on the two opposite sides of the connecting block are respectively locked and fixed on the first displacement component and the second displacement component, and the top of the first displacement component is fixed at the bottom of the upper displacement platform and the lower displacement platform; the motor is electrically connected with the lifting component to output power, so that the first displacement component moves up and down, and the relative sliding between the sliding block and the sliding rail is utilized to drive the upper displacement platform and the lower displacement platform to move up and down. Therefore, when the semiconductor mask box storage equipment ascends and descends, the problem that the equipment is unbalanced and damaged can be avoided.

Description

Semiconductor mask box storage device

Technical Field

The present invention relates to a storage device for semiconductor mask boxes, and more particularly to a storage device for semiconductor mask boxes that can prevent the device from being unbalanced or dislocated when the device is ascending or descending.

Background

Masks are commonly used in semiconductor manufacturing processes for photolithography, and are typically fabricated using a flat quartz or glass plate with a layer of chromium deposited on one side of the quartz or glass plate. In photolithography, a pattern on a mask is transferred to a wafer. At this stage, line widths must be made smaller and smaller in order to manufacture smaller electronic components to increase the density of integrated circuits. However, in the case of the line width being gradually reduced, the contamination occurring in the optical path is more easily transferred to the wafer, resulting in a decrease in the wafer yield. Thus, it is particularly sensitive to defects caused by high precision reticles, and therefore, maintaining the reticles clean and stored is an important issue.

In photolithography, the mask plays an important role, and Haze contamination (Haze defect) is a major factor in the yield reduction. The main component of haze contamination of a photomask is ammonium sulfate, and this type of contamination comes from a photomask protective film and also has other factors such as residual substances in a photomask cleaning process, storage environment and time of the photomask, process environment or relationship between exposure dose and number of defects. Secondly, in addition to the problem of keeping the mask clean, storage of the mask is also an important issue, and the conventional mask storage box can reduce damage to the mask caused by collision or shaking.

However, the number of the available equipment for storing the masks is small, and the height of the slide rail is easy to become tighter and tighter due to the frequent need of ascending and descending the equipment after a period of time, so that the axis of the motor is easy to break. In addition, the conventional mask storage equipment has only one side of the slide rail, which is likely to cause the unbalance problem of the equipment.

In view of the above, the inventor of the present invention invests in many research and development energies and spirits, and continuously breaks through and innovates in the field, and is expected to solve the deficiencies of the known technology by a novel technical means, and not only bring a better product to the society, but also promote the industrial development.

SUMMERY OF THE UTILITY MODEL

The main objective of the present invention is to provide a semiconductor mask storage device, which has symmetrical slide rails and slider design, and can achieve the purpose of balancing the device in the operation process. In addition, the sliding rail system is locked on the displacement component, so that the problem of sliding rail position dislocation caused by the ascending and descending process of equipment can be avoided, and the problem of motor axis fracture can be further solved.

To achieve the above object, the present invention provides a semiconductor reticle pod apparatus, comprising: the base is provided with a fixed seat and a bearing component, and the fixed seat is fixed on the bearing component; the lifting component is provided with a connecting block, a plurality of sliding rails and a plurality of sliding blocks, the connecting block is provided with a plurality of grooves for fixing the sliding rails, the sliding blocks are arranged on the sliding rails in a sliding manner and are respectively fixed on a first displacement component and a second displacement component, and the second displacement component is fixed on the base; the motor is electrically connected with the lifting component to output power, so that the first displacement component and the connecting block of the lifting component move up and down; and the upper and lower displacement platforms are connected with the top of the first displacement component of the lifting component and drive the upper and lower displacement platforms to displace up and down by the relative sliding of the sliding blocks and the sliding rails.

The grooves are vertically arranged on the front surface and the back surface of the connecting block so as to form the grooves which are symmetrically arranged.

The upper and lower top ends of the groove are provided with symmetrical convex blocks, so that the sliding blocks can move up and down in a range smaller than the length of the sliding rails.

The convex block is vertically arranged on the sliding rails relative to the connecting block, so that the sliding blocks can abut against the convex block and stop moving up and down.

The device further comprises a fixing piece, wherein one end of the fixing piece is fixedly locked on the bearing component of the base, and the other end of the fixing piece is fixedly locked on the second displacement component.

The surface of the first displacement member is provided with a plurality of clamping grooves which are fixedly arranged on one side of the first displacement member at a fixed interval distance, and a plurality of mask boxes can be stored in the clamping grooves.

The displacement member is provided with an abutting piece, and the abutting piece is fixedly arranged on the other side edge of the first displacement member relative to the clamping grooves.

And a plurality of through holes are arranged on the connecting block and the bearing component.

Drawings

Fig. 1 is an exploded perspective view of the semiconductor reticle pod apparatus of the present invention.

Fig. 2 is a 45 ° perspective side view of the semiconductor reticle pod apparatus of the present invention.

Fig. 3 is a front perspective view of the semiconductor mask cassette apparatus of the present invention.

Fig. 4 is a perspective view of the semiconductor mask box apparatus of the present invention.

Fig. 5 is a schematic view of the vertical displacement action of the lifting member of the present invention.

Fig. 6 is another schematic view of the vertical displacement operation of the lifting member according to the present invention.

Description of the symbols:

1 semiconductor mask box apparatus 10 base

101 fixed seat 102 bearing component

20 lifting component 201 connecting block

202 slide rail 203 slide block

204 groove 205 first displacement member

2051 card slot 2052 abutment

206 second displacement member 207 projection

208 through hole 30 motor

40 and upper and lower displacement platforms 50.

Detailed Description

The following embodiments of the present invention are provided as examples, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present invention. In addition, the present invention can be implemented or applied by other different embodiments without departing from the spirit of the present invention.

Referring to fig. 1, 2 and 3, fig. 1 is a three-dimensional exploded view of the semiconductor mask box apparatus of the present invention; FIG. 2 is a 45 degree perspective side view of the semiconductor reticle pod apparatus of the present invention; and fig. 3 is a perspective front view of the semiconductor mask box apparatus of the present invention.

As shown in fig. 1, 2 and 3, the present invention relates to a semiconductor mask cassette apparatus 1, which comprises a base 10, a lifting member 20, a motor 30 and an up-and-down displacement platform 40. First, the base 10 has a fixing base 101 and a carrying member 102, and the fixing base 101 is fixed on the carrying member 102. Next, the lifting member 20 has a connecting block 201, a plurality of sliding rails 202 and a plurality of sliding blocks 203, a plurality of grooves 204 are correspondingly disposed on an opposite surface of the connecting block 201, the grooves 204 are used for locking the sliding rails 202, one surface of the sliding blocks 203 is slidably disposed on the sliding rails 202, the other surface is fixed on a first displacement member 205 and a second displacement member 206, respectively, and the second displacement member 206 is fixed on the base 10. Furthermore, the motor 30 is electrically connected to the lifting member 20 to output power, so as to drive the first displacement member 205 and the connection block 201 of the lifting member 20 to move up and down. Then, the top of the first displacement member 205 of the lifting member 20 is fixed on the up-down displacement platform 40, and the up-down displacement platform 40 is driven to move up and down by the up-down sliding between the sliding blocks 203 and the sliding rails 202. In addition, the semiconductor mask box apparatus 1 further comprises a fixing member 50, wherein one end of the fixing member 50 is fixed on the bearing member 102 of the base 10, and the other end is fixed on the second displacement member 206.

Referring to fig. 4, fig. 4 is a schematic perspective view of a semiconductor mask box apparatus according to the present invention.

As shown in fig. 1 and 4, the grooves 204 are vertically disposed on the front and back surfaces of the connecting block 201 relative to the base 10 to form the grooves 204 symmetrically disposed. Next, the top and bottom ends of the two sides of the grooves 204 are respectively provided with corresponding protrusions 207, so that the sliding blocks 203 are limited to slide up and down on the sliding rails 202. In addition, as shown in fig. 4, the connection block 201 and the carrying member 102 have a plurality of through holes 208 to reduce the total weight of the semiconductor mask box apparatus 1; the shape and size of the through holes 208 can be changed according to the user's requirement, but the present invention is not limited thereto.

Referring to fig. 5 and 6, fig. 6 is a perspective view of the lifting member of the present invention on another vertical displacement member.

As shown in fig. 5 and 6, the surface of the first displacement member 205 has a plurality of slots 2051, the slots 2051 are fixed at a fixed distance at one side of the first displacement member 205, and a plurality of mask boxes can be stored in the slots 2051, in addition, the first displacement member 205 has an abutting piece 2052, the abutting piece 2052 is arranged at the other side of the first displacement member 205 opposite to the slots 2051, so that the mask boxes are placed in the semiconductor mask box apparatus 1, and when the lifting member 20 is lifted up and down, the mask boxes are not shaken due to vertical vibration. Next, as shown in fig. 5, when the first displacement member 205 moves upwards, the sliding block 203 fixed on the first displacement member 205 is driven to slide on the sliding rails 202; as shown in fig. 6, when the first displacement member 205 moves upward to drive the connection block 201 to move upward, the slide rail 202 on the second displacement member side slides relative to the sliders 203 fixed on the second displacement member 206. Compared with the conventional semiconductor mask storage equipment, the conventional semiconductor mask storage equipment only has the slide rail and the slide block on one side, so that the problem of unbalance is caused when the equipment moves up and down. Furthermore, the front and back surfaces of the connecting block 201 of the present invention have symmetrical sliding rails 202 and sliding blocks 203, so as to avoid the problem of unbalance of the semiconductor mask box device 1 caused by the ascending and descending of the lifting member 20.

However, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, so that all equivalent changes and modifications made by the present invention in the specification and drawings are included in the scope of the present invention, and it is well known that the present invention is also claimed.

Claims

1. A semiconductor reticle pod storage apparatus comprising:

the base is provided with a fixed seat and a bearing component, and the fixed seat is fixed on the bearing component;

the lifting component is provided with a connecting block, a plurality of sliding rails and a plurality of sliding blocks, the connecting block is provided with a plurality of grooves for fixing the sliding rails, the sliding blocks are arranged on the sliding rails in a sliding manner and are respectively fixed on a first displacement component and a second displacement component, and the second displacement component is fixed on the base;

the motor is electrically connected with the lifting component to output power so as to drive the first displacement component and the connecting block of the lifting component to move up and down; and

and the upper and lower displacement platform is connected with the top of the first displacement component of the lifting component and drives the upper and lower displacement platform to move up and down by the relative sliding of the sliding blocks and the sliding rails.

2. The semiconductor reticle pod stocker of claim 1 wherein the grooves are disposed vertically on opposite sides of the connecting block to form the grooves symmetrically disposed with respect to each other.

3. The semiconductor reticle pod storage apparatus of claim 2 wherein the grooves have symmetrical bumps at top and bottom ends thereof to allow the slides to move up and down within a range less than the length of the slide rails.

4. The semiconductor mask cassette storage device of claim 3 wherein the bumps are vertically disposed on the slide rails with respect to the connection block so that the sliders can abut against the bumps and stop moving up and down.

5. The semiconductor mask cassette storage device of claim 1 further comprising a fixing member having one end locked to the carrier member of the base and the other end locked to the second displacement member.

6. The apparatus of claim 1, wherein the first displacement member has a plurality of slots formed in a surface thereof, the slots being disposed at a fixed distance from one side of the first displacement member for storing the plurality of reticle pods therein.

7. The apparatus of claim 6, wherein the displacement member comprises an abutment member fixed to an opposite side of the first displacement member relative to the slots.

8. The semiconductor reticle pod storage apparatus of claim 1 wherein the connection block and the carrier member are provided with a plurality of through holes.