CN210803975U

CN210803975U - High-flatness large-size sucker

Info

Publication number: CN210803975U
Application number: CN201922158941.9U
Authority: CN
Inventors: 刘栋; 张雷
Original assignee: Yuanneng Zhichuang Jiangsu Semiconductor Co ltd
Current assignee: Yuanneng Zhichuang Jiangsu Semiconductor Co ltd
Priority date: 2019-12-05
Filing date: 2019-12-05
Publication date: 2020-06-19
Anticipated expiration: 2029-12-05

Abstract

The utility model provides a high plane degree jumbo size sucking disc, its includes sucking disc and lower sucking disc, it forms the vacuum cavity to go up between sucking disc and the lower sucking disc, it includes the base plate adsorption panel to go up the sucking disc, the base plate adsorption panel includes a plurality of air vents that communicate to the vacuum cavity structure, the lower sucking disc surface is equipped with the backup pad. The supporting plate structure ensures that the whole supporting area of the sucker is large enough and bears most of stress deformation, thereby reducing the influence of external factors on the flatness of the working surface of the sucker.

Description

High-flatness large-size sucker

Technical Field

The utility model relates to an exposure machine technical field specifically is applied to exposure machine's sucking disc.

Background

The laser direct writing type exposure is used for printing a composition with characteristics on the surface of a substrate, and compared with the traditional image direct transfer technology of exposure of a mask plate, a film negative film and the like, the direct writing type exposure technology has high productivity and high contraposition precision. Has very important function in the field of semiconductor and PCB production. Meanwhile, due to the optical characteristics of the laser direct writing type exposure machine, the workpiece needs to ensure better flatness to ensure the exposure quality, and high requirements are provided for the flatness of a sucker bearing the workpiece.

At present, most of direct-writing exposure suckers in the market mainly adopt small sizes, and most of direct-writing exposure suckers adopt sucker pad structures. The sucker pad is made of glass fiber plates or other high polymer materials, and the materials have the defects of difficult large-size processing, poor flatness, poor wear resistance and the like. With the rapid development of the PCB industry and the formation of the 5G standard, the demand for large-sized laser direct writing type exposure machines is higher and higher, and the old sucker structure cannot meet the demand for large size and high flatness. The utility model provides a high plane degree super large size sucking disc has characteristics such as the size is big, the plane degree is high, bearing capacity is strong.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the problem that the existing laser direct writing type exposure machine sucker is small in size and poor in flatness, and providing a high-flatness super-large-size sucker.

In order to achieve the purpose, the technical scheme adopted by the invention is as follows: the utility model provides a jumbo size sucking disc, its includes sucking disc and lower sucking disc, it forms the vacuum cavity to go up between sucking disc and the lower sucking disc, it includes the base plate adsorption panel to go up the sucking disc, the base plate adsorption panel includes a plurality of air vents that communicate to the vacuum cavity structure, the lower sucking disc surface is equipped with the backup pad.

Furthermore, the supporting plate is arranged in the middle of the lower sucker.

Furthermore, the upper sucker and the lower sucker are connected through a fastening structure, and the opening of the fastening structure is completely positioned on the lower sucker.

Further, the vent hole is of a hole structure with a large lower part and a small upper part.

Furthermore, the lower sucker is provided with a plurality of supporting upright posts, and the supporting upright posts bear the upper sucker.

Compared with the prior art, the utility model discloses the sucking disc has set up backup pad structure under, has guaranteed that the holistic supported area of sucking disc is enough big to undertake most atress deformation, thereby reduced the influence of external factors to the plane degree of sucking disc working surface. Moreover, the vent hole adopts a structure with a large lower part and a small upper part, which is also beneficial to improving the flatness.

Drawings

Fig. 1 is a schematic view of the structure of the suction cup of the present invention.

Fig. 2 is a schematic diagram of the back structure of the suction cup of the present invention.

Fig. 3 is a schematic view of the vacuum profile structure of the present invention.

Fig. 4 is a schematic view of the suction cup vent of the present invention.

Fig. 5 is a schematic view of the lower suction cup and the supporting column of the present invention.

Detailed Description

The utility model relates to a high plane degree super large size sucking disc.

As shown in fig. 1, the suction cup comprises an upper suction cup 1 and a lower suction cup 2, wherein the upper suction cup 1 is fixedly connected with the lower suction cup 2. Preferably, the upper sucker 1 and the lower sucker 2 are made of metal materials, so that the structure is stable, the large-size and high-flatness sucker can be conveniently manufactured, and the effective vacuum absorption area can reach more than 0.7m by 1 m. Meanwhile, the sucker is made of metal materials, so that the abrasion resistance of the sucker is very high, and the service life of the sucker is prolonged by 2-3 times compared with that of a common high polymer material sucker.

As shown in figure 2, the upper sucker 1 is connected with the lower sucker 2 through a fixing part, and the connection is tight, the fixing part of the upper sucker 1 and the fixing part of the lower sucker 2 are all located at the back of the lower sucker 2, so that the working surface of the upper sucker 1 in figure 1 is ensured to have no fixing part, thereby ensuring the extremely high flatness of the working surface of the sucker, which can be less than 80um/0.7m². The fixing member may be a screw or the like.

The supporting plate 3 is located below the lower sucker 2 and is mounted on the lower sucker 2, preferably located in the center of the lower sucker 2, and plays a role in supporting the lower sucker 2. The supporting plate 3 ensures that the supporting area of the whole sucker is large enough, and the supporting plate 3 bears load, so that the supporting plate 3 bears most stress deformation, and the influence of external factors on the flatness of the working surface of the sucker is reduced.

As shown in fig. 3, the upper suction cup 1 and the lower suction cup 2 form a hollow vacuum cavity structure, the vacuum cavity is connected to a vacuum source through an adapter 4 installed on the lower suction cup 2, and dense vent holes 7 are distributed on the upper suction cup 1 to ensure the rapidness and high efficiency of vacuum suction.

As shown in fig. 4, the vent hole 7 has a structure with a large lower part and a small upper part, and the lower part of the vent hole 7 is provided with a large hole, so that vacuum can be conveniently and quickly established; the upper part is a small hole to prevent the air hole from leaking too much air to cause insufficient vacuum pressure when directly exposed outside. If the vent hole is too large, the processed workpiece can sink to influence the flatness, so the small hole structure at the upper part of the vent hole 7 is also beneficial to improving the flatness.

As shown in figure 5, the periphery of the lower sucker 2 and the middle supporting upright post 8 support the upper sucker 1 together, so that the flatness of the upper sucker 1 is ensured. Because the upper sucker 1 and the lower sucker 2 are both of metal structures and are connected and fastened into a whole, the sucker has strong load capacity. The back of the lower sucker 2 is also provided with a supporting plate 3, the back can be conveniently expanded with a plurality of accessories to increase the function of the sucker, and the flatness can be ensured to be less than 150 um/0.7m even if twenty kilograms of offset load exists²。

Through the utility model discloses a series of rational design can guarantee that the sucking disc has the oversize who is greater than 0.7 x 1.0m, guarantees to be less than 80um 0.7m²High flatness and stable structure without influence of installation surface. Meanwhile, the wear-resistant coating has extremely high wear resistance and extremely strong load capacity, and is convenient for providing various new function expansions.

Claims

1. The utility model provides a high plane degree jumbo size sucking disc, its includes sucking disc and lower sucking disc, go up and form the vacuum cavity between sucking disc and the lower sucking disc, its characterized in that, it includes the base plate adsorption panel to go up the sucking disc, the base plate adsorption panel includes a plurality of air vents that communicate to the vacuum cavity structure, the lower sucking disc surface is equipped with the backup pad.

2. A high flatness large size chuck according to claim 1 wherein: the supporting plate is arranged in the middle of the lower sucker.

3. A high flatness large size chuck as claimed in claim 1 wherein: the upper sucker and the lower sucker are connected through a fastening structure, and the opening of the fastening structure is completely located on the lower sucker.

4. A high flatness large size chuck as claimed in claim 1 wherein: the vent hole is of a hole structure with a large lower part and a small upper part.

5. A high flatness large size chuck as claimed in claim 1 wherein: the lower sucker is provided with a plurality of supporting upright posts, and the supporting upright posts bear the upper sucker.