CN212856448U

CN212856448U - Automatic spin coating machine for uniform-glue chromium plate

Info

Publication number: CN212856448U
Application number: CN202021950474.XU
Authority: CN
Inventors: 李由根; 李娜
Original assignee: Hongcheng Optical Products Co ltd
Current assignee: Hongcheng Optical Products Co ltd
Priority date: 2020-09-09
Filing date: 2020-09-09
Publication date: 2021-04-02
Anticipated expiration: 2030-09-09

Abstract

The utility model discloses an even automatic spin coating machine of chromium version of gluing, including frame, rotary device and bear the dish, rotary device installs in the frame, and rotary device's output with bear the dish and be connected and order about this and bear the dish and rotate, bear the sunken portion of placing that is formed with even gluey chromium version assorted rectangle of top surface of dish, set up in the portion of placing and run through the suction hole that bears the dish and be connected with external evacuating device through sucking the hole. The utility model discloses in the in-service use, thereby can through place even gluey chromium version on this portion of placing realized that the block to this even gluey chromium version is fixed, simultaneously, can also adsorb even gluey chromium version through the hole of inhaling that is located the portion of placing, make the utility model discloses an in the working process of the automatic spin coating machine of even gluey chromium version, thereby not only can drive even gluey chromium version rotation through rotary device and make the rubber coating to even gluey chromium version more even, even gluey chromium version is adsorbed in the portion of placing and is difficult to being thrown away so that impaired by steadily moreover.

Description

Automatic spin coating machine for uniform-glue chromium plate

Technical Field

The utility model relates to a technical field of semiconductor production, concretely relates to automatic spin coating machine of even gluey chromium version.

Background

With the continuous progress of science and technology in China, semiconductor integrated circuits are applied more and more in the liquid crystal display industry or the touch screen industry, a mask plate is needed in the production and manufacturing process of the semiconductor integrated circuits, and a photoresist mask plate is used as a base plate of the mask plate, so that the photoresist mask plate has an important position in the production of the semiconductor integrated circuits.

As is known, a photomask is a graphic master used in a common photoetching process of a micro-nano processing technology. The photoresist mask is a hard mask material, and is a mainstream photosensitive material (equivalent to photosensitive film for photography) produced by current and future fine processing photomasks. In the actual production process, the glue homogenizing chromium plate is a rectangular base plate, so that the gluing process of the glue homogenizing chromium plate is far more difficult than that of a round wafer, the phenomenon of inconsistent glue surface color is easily caused by uneven glue thickness in the gluing process, and meanwhile, the spin coater is in high-speed spin coating or quick start and stop during gluing, so that the safety of the glue homogenizing chromium plate in the two states needs to be protected, and the pollution problem needs to be considered when the base plate is taken and placed.

Therefore, there is a need for a spin coater for coating chrome plate with uniform glue to solve the above problems.

Disclosure of Invention

The utility model provides an automatic spin coater for uniform-glue chromium plates, aiming at the defects of the prior art.

The utility model discloses a realize that the technical scheme that above-mentioned purpose adopted is:

the utility model provides an automatic spin coater of chromium version is glued to spin-coating, includes frame, rotary device and bears the dish, rotary device install in the frame, rotary device's output with bear the dish and connect and order about this and bear the dish and rotate, bear the sunken portion of placing that is formed with the rectangle that evenly glues chromium version assorted of top surface of dish, it runs through to have seted up in the portion of placing bear the dish inhale the hole and pass through inhale the hole and be connected with external evacuating device.

Further improvement is made, bear the top surface of dish and still offer and be used for even gluey chromium version on unnecessary gluey water conservancy diversion in order to leave bear a plurality of guiding gutters of dish, the guiding gutter arrange in the week side of placing the portion, just the one end of guiding gutter with the angular position of placing the portion is linked together.

The further improvement is that the top surface of the placing part is also provided with a first convex ring which is used for jacking the top surface of the even glue chromium plate to protrude out of the placing part in an upward protruding manner.

In a further improvement, a second convex ring is also convexly arranged on the top surface of the placing part, which is surrounded by the first convex ring, and a plurality of notches penetrating through the side wall of the second convex ring are formed in the second convex ring.

The automatic spin coating machine for the uniform-glue chromium plate further comprises a sealing ring for preventing the air leakage of the vacuum pumping device during vacuum pumping, an annular placing groove is formed in the bottom surface of the bearing disc, and the sealing ring is placed in the placing groove.

The improved spin coater for the uniform-glue chromium plate further comprises a heating plate and a conducting ring, wherein the heating plate is used for heating the uniform-glue chromium plate placed on the placing part, the conducting ring is used for connecting the heating plate with an external power supply, the heating plate is connected with the external power supply through the conducting ring, an accommodating space used for installing the heating plate is arranged on the bearing plate, the accommodating space is located under the placing part, the heating plate is placed in the accommodating space, and the conducting ring is sleeved on a rotating shaft of the rotating device.

The automatic spin coater for the uniform-glue chromium plate further comprises a lifting device used for jacking the uniform-glue chromium plate, the lifting device is connected with the output end of the rotating device, the bearing disc is placed on the lifting device, and the bearing disc is provided with a lifting hole for the output end of the lifting device to stretch.

In a further improvement, the number of the lifting holes is at least four, and the lifting holes are uniformly arranged on the peripheral side of the first convex ring.

In a further improvement, the bearing disc is further provided with a plurality of locking holes for locking the bearing disc at the output end of the rotating device, and the locking holes are uniformly distributed on the periphery of the first convex ring.

In a further improvement, the top surface of the first convex ring is flush with the top surface of the second convex ring.

The utility model has the advantages that: because rotary device install in the frame, and rotary device's output with bear the dish and be connected and order about this and bear the dish and rotate, meanwhile, bear the sunken portion of placing that is formed with the even rectangle that glues chromium edition phase-match of top surface of dish, and set up in this portion of placing and run through the suction hole that bears the dish and be connected with external evacuating device through this suction hole. Consequently in actual use, thereby can place even gluey chromium version on this portion of placing through thereby having realized fixed to the block of this even gluey chromium version, simultaneously, can also adsorb even gluey chromium version through the hole of inhaling that is located the portion of placing, make the utility model discloses an in the working process of the automatic spin coating machine of even gluey chromium version, thereby not only can drive even gluey chromium version rotation through rotary device and make the rubber coating to even gluey chromium version more even, even gluey chromium version is adsorbed in the portion of placing steadily throughout and is difficult to being thrown away so that impaired moreover.

The present invention will be further described with reference to the accompanying drawings and the following detailed description.

Drawings

FIG. 1 is a schematic view of the overall structure of the automatic spin coater for spin-coating chromium plates;

fig. 2 is a schematic perspective view of the carrying tray of the present invention;

fig. 3 is a front view of the carrier tray of the present invention;

fig. 4 is a schematic side view of the carrying tray of the present invention.

In the figure: 100. the spin coater for the uniform-coating chrome plate comprises a machine frame 10, a rotating device 20, a bearing disc 30, a placing part 31, a suction hole 31a, a flow guide groove 32, a first convex ring 311, a second convex ring 312, a sealing ring 40, a placing groove 30a, a heating plate 50, a conducting ring 60, an accommodating space 30b, a lifting hole 30c, a locking hole 30d, a clamping part 33, a lifting device 70 and a notch 312a.

Detailed Description

The following description is only a preferred embodiment of the present invention, and does not limit the scope of the present invention.

Referring to fig. 1 to 4, an automatic spin coater 100 for spin coating a chrome plate includes a frame 10, a rotating device 20, and a carrier plate 30. The rotating device 20 is installed on the frame 10, the output end of the rotating device 20 is connected with the bearing disc 30 and drives the bearing disc 30 to rotate, the top surface of the bearing disc 30 is concavely provided with a placing part 31 which is matched with the uniform glue chrome plate and has a rectangular shape, and a suction hole 31a which penetrates through the bearing disc 30 is formed in the placing part 31 and is connected with an external vacuum extractor through the suction hole 31a. It is preferable that the suction hole 31a is located at a central position of the placing portion 31, i.e., at an intersection of two diagonal lines of the placing portion 31, so as to maintain the stability of the leveling chrome plate during the rotation of the carrier tray 30, but not limited thereto. For example, the cross-section of the carrier plate 30 is circular, so that when the rotating device 20 rotates the carrier plate 30, the carrier plate 30 can rotate more smoothly without being subjected to a great wind resistance, but not limited thereto.

Referring to fig. 2 and 3, the top surface of the carrier plate 30 is further provided with a plurality of guiding grooves 32 for guiding the redundant glue on the glue homogenizing chrome plate to leave the carrier plate 30, the guiding grooves 32 are disposed on the periphery of the placing portion 31, and one end of the guiding grooves 32 is communicated with the corner of the placing portion 31. For example, there are four flow guide slots 32, and the diagonal lines of the flow guide slots 32 and the placing portion 31 are located on the same straight line, so that when the carrier tray 30 is driven by the rotating device 20 to rotate, the excess glue flows away from the flow guide slots 32.

With continued reference to fig. 2 and fig. 3, the top surface of the placing portion 31 is further provided with a first protruding ring 311 protruding upward for jacking up the top surface of the even glue chrome plate to protrude from the placing portion 31, so that no edge glue is accumulated after the even glue chrome plate is glued. For example, the height of the first convex ring 311 is mainly for jacking up the top surface of the uniform chrome plate to slightly protrude from the placing part 31, for example, the height protruding from the placing part 3 is 1mm to 20mm, so as to prevent the excessively protruding uniform chrome plate from disturbing the wind. Meanwhile, the top surface of the placing portion 31 surrounded by the first convex ring 311 is further provided with a second convex ring 312 protruding upward, the second convex ring 312 is provided with a plurality of notches 312a penetrating through the side wall thereof, the suction hole 31a is surrounded by the second convex ring 312, and the top surface of the first convex ring 311 is flush with the top surface of the second convex ring 312, so that the carrier tray 30 is simultaneously supported by the first convex ring 311 and the second convex ring 312, and when the suction hole 31a sucks the carrier tray 30, the suction force can be uniformly distributed in the space surrounded by the first convex ring 311, but the invention is not limited thereto. For example, the first convex ring 311 and the second convex ring 312 may be circular rings, quadrilateral rings, etc., and thus are not further limited herein.

Referring to fig. 4, the spin coater 100 further includes a sealing ring 40 for preventing air leakage during vacuum pumping of the vacuum apparatus, and the bottom surface of the carrier plate 30 is provided with an annular groove 30a, and the sealing ring 40 is placed in the groove 30a, so that good sealing performance between the vacuum apparatus and the carrier plate 30 can be ensured.

Referring to fig. 1, the automatic spin coater 100 for uniform chrome plate further includes a heating plate 50 for heating the uniform chrome plate placed on the placing portion 31 and a conductive ring 60 for connecting the heating plate 50 with an external power source, the heating plate 50 is connected with the external power source through the conductive ring 60, the bearing plate 30 is provided with an accommodating space 30b for installing the heating plate 50, the accommodating space 30b is located under the placing portion 31, the heating plate 50 is placed in the accommodating space 30b, and the conductive ring 60 is sleeved on the rotating shaft of the rotating device 20, so that in the actual working process, the external power source can be connected with the heating plate 50 through the conductive ring 60, so that the heating plate 50 heats the uniform chrome plate placed on the placing portion 31, and the automatic spin coater 100 for uniform chrome plate can meet and the use requirement of the glue solution with special temperature requirement, thereby obtaining a desired film-forming effect, but is not limited thereto.

Referring to fig. 1, the spin coater 100 further includes a lifting device 70 for lifting the spin coating chromium plate, the lifting device 70 is connected to the output end of the rotating device 20, the carrier plate 30 is disposed on the lifting device 70, and the carrier plate 30 is provided with a lifting hole 30c for extending and retracting the output end of the lifting device 70. Specifically, the number of the lifting holes 30c is at least four, and the lifting holes 30c are uniformly arranged on the periphery of the first convex ring 311, so that in actual use, the uniform glue chromium plate can be placed on the placing part 31 or ejected out of the uniform glue chromium plate after gluing can be realized through the output end of the lifting device 70, and the condition that the uniform glue chromium plate is damaged or polluted due to manual picking and placing of the uniform glue chromium plate is avoided.

Referring to fig. 2 and 3, the bearing plate 30 is further provided with a plurality of locking holes 30d for locking the bearing plate 30 to the output end of the rotating device 20, and the locking holes 30d are uniformly arranged on the periphery of the first convex ring 311, so that in actual use, the bearing plate 30 can be locked to the lifting device 70 by passing through the locking holes 30d through screws, but not limited thereto. As shown in fig. 4, the bottom of the carrier tray 30 is further recessed to form a engaging portion 33, the engaging portion 33 is rectangular, the engaging portion 33 is matched with the output end of the lifting device 70, the locking hole 30d is located right above the engaging portion 33, and the locking hole 30d is communicated with the engaging portion 33 and the placing portion 31, so that the carrier tray 30 and the output end of the lifting device 70 can be further stably connected in actual use. For example, the lifting device 70 may be a pneumatic cylinder or other linear driving device commonly used by those skilled in the art, and is not further limited herein.

It should be noted that the present invention is a single-piece structure of the carrier plate 30, so as to enhance the structural stability of the carrier plate 30, but not limited thereto.

The utility model has the advantages that: because the rotating device 20 is installed on the frame 10, and the output end of the rotating device 20 is connected with the bearing disc 30 and drives the bearing disc 30 to rotate, meanwhile, the top surface of the bearing disc 30 is concavely formed with a rectangular placing part 31 matched with the glue homogenizing chromium plate, and the placing part 31 is internally provided with a suction hole 31a penetrating through the bearing disc 30 and is connected with an external vacuum extractor through the suction hole 31a. Consequently in actual use, thereby can place even gluey chromium version on this portion 31 of placing through it is fixed to have realized the block of this even gluey chromium version, simultaneously, can also adsorb even gluey chromium version through the hole 31a of inhaling that is located the portion 31 of placing, make the utility model discloses an in the automatic spin coating machine 100's of even gluey chromium version the working process, thereby not only can drive even gluey chromium version rotation through rotary device 20 and make the rubber coating to even gluey chromium version more even, even gluey chromium version is adsorbed steadily throughout in the portion 31 of placing and is difficult to being thrown away so that impaired moreover.

The utility model discloses not limited to above-mentioned embodiment, adopt with the utility model discloses the same or similar structure, device, technology or method of above-mentioned embodiment, and the other that obtain is used for even gluey automatic spin coating machine of chromium version, all is within the protection scope of the utility model.

Claims

1. The utility model provides an even automatic spin coating machine of gluey chromium version which characterized in that: including frame, rotary device and bear the dish, rotary device install in the frame, rotary device's output with bear the dish and connect and order about this and bear the dish and rotate, bear the sunken portion of placing that is formed with and even gluey chromium version assorted rectangle of top surface of dish, it runs through to have seted up in the portion of placing bear the suction hole of dish and pass through the suction hole is connected with external evacuating device.

2. The automatic spin coating machine for the uniform chromium plate according to claim 1, which is characterized in that: bear the top surface of dish and still seted up and be used for with even gluey chromium version on unnecessary gluey water conservancy diversion in order to leave bear a plurality of guiding gutters of dish, the guiding gutter arrange in the week side of placing portion, just the one end of guiding gutter with the angular position of placing portion is linked together.

3. The automatic spin coating machine for the uniform chromium plate according to claim 1, which is characterized in that: the top surface of the placing part is also provided with a first convex ring which is used for jacking the top surface of the uniform glue chromium plate to protrude out of the placing part in an upward protruding manner.

4. The automatic spin coating machine for the uniform chromium plate according to claim 3, wherein: the top surface of the placing part surrounded by the first convex ring is also provided with a second convex ring in an upward convex manner, and the second convex ring is provided with a plurality of notches penetrating through the side wall of the second convex ring.

5. The automatic spin coating machine for the uniform chromium plate according to claim 1, which is characterized in that: the vacuum pumping device is characterized by further comprising a sealing ring for preventing the vacuum pumping device from leaking air during vacuum pumping, an annular placing groove is formed in the bottom surface of the bearing disc, and the sealing ring is placed in the placing groove.

6. The automatic spin coating machine for the uniform chromium plate according to claim 1, which is characterized in that: the heating plate is used for heating the even-glue chromium plate on the placing part and is used for conducting the conducting ring for connecting the heating plate with an external power supply, the heating plate is connected with the external power supply through the conducting ring, the containing space for installing the heating plate is arranged on the bearing plate and is located under the placing part, the heating plate is placed in the containing space, and the conducting ring is sleeved on the rotating shaft of the rotating device.

7. The automatic spin coating machine for the uniform chromium plate according to claim 3, wherein: the lifting device is used for jacking the uniform glue chromium plate, the lifting device is connected with the output end of the rotating device, the bearing disc is placed on the lifting device, and the bearing disc is provided with a lifting hole for the output end of the lifting device to stretch.

8. The automatic spin coating machine for the uniform chromium plate according to claim 7, wherein: the lifting holes are at least four and are uniformly arranged on the peripheral side of the first convex ring.

9. The automatic spin coating machine for the uniform chromium plate according to claim 3, wherein: the bearing disc is further provided with a plurality of locking holes used for locking the bearing disc at the output end of the rotating device, and the locking holes are uniformly distributed on the peripheral side of the first convex ring.

10. The automatic spin coating machine for the uniform chromium plate according to claim 4, wherein: the top surface of the first convex ring is flush with the top surface of the second convex ring.