CN210763162U

CN210763162U - Wafer transfer device

Info

Publication number: CN210763162U
Application number: CN201921450090.9U
Authority: CN
Inventors: 刘青彦; 黄建友; 杨清明
Original assignee: CHENGDU KINGBRI FREQUENCY TECHNOLOGY CO LTD
Current assignee: CHENGDU KINGBRI FREQUENCY TECHNOLOGY CO LTD
Priority date: 2019-09-02
Filing date: 2019-09-02
Publication date: 2020-06-16
Anticipated expiration: 2029-09-02

Abstract

The utility model provides a wafer transfer device relates to the wafer processing field. Currently, the wafer transfer between trays with different specifications is generally manual operation, which is not only inefficient, but also may contaminate or damage the wafer. The utility model discloses a base side slides and is equipped with the body frame, be equipped with fixture on the base, the base side is equipped with a transport mechanism at least, be equipped with at least one on the body frame and inhale piece mechanism, fixture fixes and fixes a position the material dish, transport mechanism transports the wafer to the relevant position, inhale in piece mechanism absorbs the wafer and puts into the material dish on the fixture, accomplish the transfer to the wafer, not only work efficiency is high to the possibility of having avoided the wafer to receive pollution or damage.

Description

Wafer transfer device

Technical Field

Relate to the wafer processing field, concretely relates to wafer transfer device.

Background

The quartz crystal resonator is a piezoelectric device made of piezoelectric quartz (crystal), and not only has high stable physicochemical properties, but also has very low elastic vibration loss.

At present, the specification of a used trimming machine is generally incompatible with the specification of a material tray used in a front-end process, and before the trimming equipment is used, a wafer needs to be manually transferred from the material tray used in the front-end process to the trimming material tray special for the equipment, so that the wafer is transferred between the two material trays with different specifications, the operation is complex, the efficiency is low, and the wafer is possibly polluted or damaged by manual operation.

Disclosure of Invention

The utility model aims at developing a wafer transfer device, replacing the manual work and shifting the wafer between the material dish of different specifications, improving work efficiency, avoid the wafer to be contaminated or damage to solve the problem of mentioning in the above-mentioned background art.

The utility model discloses a following technical scheme realizes:

wafer transfer device, including the base, the base side slides and is equipped with the body frame, be equipped with fixture on the base, the base side is equipped with a transport mechanism at least, be equipped with at least one on the body frame and inhale piece mechanism, fixture fixes and fixes a position the material dish, and transport mechanism transports the wafer to the relevant position, inhales piece mechanism and absorbs the wafer and put into the material dish on the fixture in, accomplish the transfer to the wafer.

Furthermore, fixture includes two grip blocks of locating on the base, has at least one grip block and base sliding connection.

Furthermore, a plurality of positioning columns are respectively arranged on the clamping plates, the two clamping plates move oppositely, and the material tray is clamped and positioned by the plurality of positioning columns.

Further, still be equipped with the cylinder on the base, the cylinder is connected with the grip block of sliding on locating the base.

Furthermore, the conveying mechanism comprises a conveying plate, and the conveying plate is arranged on the side face of the base in a sliding mode.

Furthermore, a lifting frame is arranged at one end of the conveying plate, a lifting basket is arranged on the lifting frame, and a plurality of material trays which are arranged at certain intervals are vertically arranged in the lifting basket.

Furthermore, the lifting basket comprises two side plates which are vertically arranged, a plurality of supporting tables are vertically arranged on the side plates at equal intervals, and two ends of the material tray are respectively located on the supporting tables of the two side plates.

Furthermore, the main frame is a door-shaped frame, and the bottom of the main frame is arranged on two sides of the base in a sliding manner.

Further, the sucking disc mechanism is including locating the hold-in range on the body frame and the servo system of drive hold-in range, be equipped with at least one wafer sucking disc that has raising and lowering functions on the hold-in range.

Furthermore, the synchronous belt is provided with at least one cylinder, the cylinder is provided with a wafer sucker, and the cylinder drives the wafer sucker to lift.

The utility model has the advantages that:

the utility model discloses a transport mechanism carries the raw materials dish to relevant position, through the material dish centre gripping location of fixture with new specification, inhales piece mechanism and absorbs the wafer by the raw materials dish to the material dish of new specification on, accomplish the transfer to the wafer, use mechanical equipment efficiency higher to avoid causing the pollution or damaging the wafer.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a view of the structure of the present invention;

FIG. 2 is a top view of FIG. 1;

FIG. 3 is a view of a basket structure;

reference numerals: 1. a base; 2. a clamping plate; 3. a first cylinder; 4. a positioning column; 5. a main frame; 6. a structural panel; 7. a second cylinder; 8. a wafer chuck; 9. a transport plate; 10. a fixed block; 11. a screw rod; 12. a lifting frame; 13. lifting a basket; 14. a side plate; 15. a support table; 16. material dish placing area.

Detailed Description

In the following, only certain exemplary embodiments are briefly described. As those skilled in the art can appreciate, the described embodiments may be modified in various different ways, without departing from the spirit or scope of the invention. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.

In the creation of the present invention, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise the first and second features being in direct contact, or may comprise the first and second features being in contact, not directly, but via another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly above and obliquely above the second feature, or simply meaning that the first feature is at a lesser level than the second feature.

Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

As shown in fig. 1-3, this embodiment discloses a wafer transfer device, including base 1, the slip of 1 side of base is equipped with the body frame 5, is equipped with fixture on the base 1, fixture can carry out the centre gripping to first material dish, and 1 side of base still is equipped with transport mechanism, and transport mechanism is used for transporting the second material dish, for the wafer of treating the centre gripping in the second material dish, the slip is equipped with on the body frame 5 and inhales piece mechanism, and piece mechanism inhales the first material dish on fixture with the wafer in the second material dish in, accomplishes the transfer to the wafer.

Specifically, fixture includes two grip blocks 2 of locating on base 1, be equipped with slide rail and the slider of mutually supporting on grip block 2 bottom and the base 1 respectively, make two grip blocks 2 can be on base 1 in opposite directions or opposite movement.

Four positioning columns 4 are respectively arranged on the clamping plate 2, two positioning columns 4 are respectively arranged on two sides of the same clamping plate 2, two positioning columns 4 on the same side of the same clamping plate 2 are in a group, in the same group of positioning columns 4, a connecting line of the centers of the two positioning columns 4 is a positioning line, the included angle between the positioning line and the sliding direction of the clamping plate 2 is forty-five degrees, two positioning lines on the same clamping plate 2 are symmetrical in the middle of the clamping plate 2, the positioning lines on the two clamping plates 2 are symmetrical in the middle of the two clamping plates 2, and a rectangular material disc placing area 16 is formed between the eight positioning columns 4 on the two clamping plates 2. Two grip blocks 2 draw close each other, and material dish is placed the district 16 and is contracted, and after two grip blocks 2 contacted, the material dish was placed the district 16 and is the same with the big or small specification of material dish, and the extreme point of the location line on two grip blocks 2 contacts with the limit of material dish respectively, and reference column 4 contacts with the limit of material dish.

The base 1 is further provided with two first cylinders 3, the two first cylinders 3 are respectively connected with the side faces of the two clamping plates 2, and the two first cylinders 3 can respectively drive the two clamping plates 2 to move.

Transport mechanism includes two transport plate 9 of locating 1 both sides of base, transport plate 9 bottom and lower part are equipped with slide rail and slider of mutually supporting respectively, and transport plate 9 lower part is equipped with by motor drive's lead screw 11, and transport plate 9 bottom is equipped with lead screw 11 complex fixed block 10, and lead screw 11 is threaded connection with fixed block 10, and motor drive lead screw 11 rotates, and lead screw 11 orders about fixed block 10 and drives transport plate 9 motion.

One end of each of the two conveying plates 9 is provided with a lifting frame 12, the lifting frames 12 can lift, lifting baskets 13 are arranged on the lifting frames 12, and the lifting trays are containers for containing material trays.

The lifting basket 13 is cuboid cavity structure, two relative sides of lifting basket 13 are open structure, and two relative sides are curb plate 14 respectively in addition, and same position is equipped with a plurality of supporting platforms 15 that the level was arranged respectively on two curb plates 14, and a plurality of supporting platforms 15 on the same curb plate 14 are equidistant from top to bottom and are arranged, and the material dish level that is located the lifting basket 13 is arranged, and the material dish both ends are located supporting platform 15.

The body frame 5 is "door" shape frame, 5 two bottoms of body frame are located two transport plate 9 sides respectively, and 5 two bottom bottoms of body frame and lower part are equipped with slide rail and the slider of mutually supporting respectively, are equipped with the motor in 5 bottoms of body frame, are equipped with drive gear on the motor, are equipped with in the slide rail of 5 bottoms lower parts of body frame with drive gear complex rack, the motor operation makes drive gear move on the rack, drives 5 movements of body frame.

Be equipped with the hold-in range that the level was arranged on body frame 5, the hold-in range is located 1 upper portion of base, still is equipped with the servo of drive hold-in range operation on the body frame 5, is equipped with two structural slab 6 on the hold-in range, be equipped with a second cylinder 7 on the structural slab 6 respectively, the vertical arrangement of second cylinder 7 is equipped with the wafer sucking disc 8 that can absorb the wafer on the piston rod of second cylinder 7.

A plurality of material discs are placed in the basket 13, wafers to be transferred are placed in the material discs, the material discs with new specifications are placed on the two clamping plates 2, the two clamping plates 2 are close to each other until the two clamping plates 2 are contacted, under the action of a plurality of positioning columns 4, a material disc placed on a clamping plate 2 is fixed and positioned, a conveying plate 9 moves towards the inside of a lifting basket 13, the conveying plate 9 moves to the lower part of the material disc in the lifting basket 13, a lifting frame 12 moves downwards to enable the material disc to fall on the conveying plate 9, the conveying plate 9 moves towards a base 1 to draw out the material disc from the lifting basket 13, and the material tray is conveyed to the side of the base 1, the synchronous belt drives the structural plate 6 to move, the structural plate 6 moves to the upper part of the conveying plate 9, the second cylinder 7 drives the wafer sucker 8 to descend, the wafer sucker 8 sucks the wafer, and the wafer is placed in the material tray on the clamping plate 2, so that the wafer is transferred to the material trays with different specifications.

The above-mentioned embodiment is only the preferred embodiment of the present invention, and is not to the limitation of the technical solution of the present invention, as long as the technical solution can be realized on the basis of the above-mentioned embodiment without creative work, all should be regarded as falling into the protection scope of the right of the present invention.

Claims

1. Wafer transfer apparatus, comprising:

a main frame (5) is arranged on the side surface of the base (1) in a sliding manner;

the clamping mechanism is arranged on the base (1);

the side surface of the base (1) is provided with at least one conveying mechanism;

the sheet suction mechanism is arranged on the main frame (5) in a sliding manner;

the clamping mechanism clamps and positions the material tray, and the sheet sucking mechanism sucks the wafer on the conveying mechanism into the material tray.

2. The wafer transfer device according to claim 1, characterized in that the holding mechanism comprises two holding plates (2) arranged on the base (1), at least one holding plate (2) being slidably connected to the base (1).

3. The wafer transfer device according to claim 2, wherein the holding plates (2) are respectively provided with a plurality of positioning posts (4), two holding plates (2) move oppositely, and the plurality of positioning posts (4) hold and position the material tray.

4. The wafer transfer device according to claim 3, characterized in that the base (1) is further provided with a cylinder, and the cylinder is connected with a clamping plate (2) slidably arranged on the base (1).

5. The wafer transfer device according to claim 1, wherein the transport mechanism comprises a transport plate (9), and the transport plate (9) is slidably disposed on a side surface of the susceptor (1).

6. The wafer transfer device according to claim 5, wherein one end of the transportation plate (9) is provided with a lifting frame (12), a lifting basket (13) is arranged on the lifting frame (12), and a plurality of material trays arranged at a certain distance are vertically arranged in the lifting basket (13).

7. The wafer transfer device according to claim 6, characterized in that the basket (13) comprises two vertically arranged side plates (14), the side plates (14) are provided with a plurality of supporting platforms (15) at equal intervals in the vertical direction, and two ends of the material tray are respectively positioned on the supporting platforms (15) of the two side plates (14).

8. The wafer transfer device according to claim 1, characterized in that the main frame (5) is a "door" frame, and the bottom of the main frame (5) is slidably arranged on both sides of the base (1).

9. The wafer transfer device according to claim 8, wherein the sheet suction mechanism comprises a timing belt disposed on the main frame (5) and a servo system for driving the timing belt, and the timing belt is provided with at least one wafer chuck (8) having a lifting function.

10. The wafer transfer device according to claim 9, wherein the timing belt is provided with at least one air cylinder, the air cylinder is provided with a wafer chuck (8), and the air cylinder drives the wafer chuck (8) to move up and down.