CN210713993U

CN210713993U - Clean factory building

Info

Publication number: CN210713993U
Application number: CN201921297704.4U
Authority: CN
Inventors: 李强; 罗桥
Original assignee: China Electronics Engineering Design Institute Co Ltd; SY Technology Engineering and Construction Co Ltd
Current assignee: China Electronics Engineering Design Institute Co Ltd; SY Technology Engineering and Construction Co Ltd
Priority date: 2019-08-12
Filing date: 2019-08-12
Publication date: 2020-06-09
Anticipated expiration: 2029-08-12

Abstract

The utility model provides a clean factory building, this clean factory building include two at least toilet that arrange side by side and the interval set up, and every toilet is including the return air layer, intermediate level, the static pressure case that stack gradually to and be used for communicateing the return air layer and the return air double-layered way of static pressure case. The middle layer is provided with a floor slab with holes and communicated with the air return layer, and the upper part of the middle layer is communicated with the static pressure box through a fan filtering unit arranged on the suspended ceiling; the static pressure case is used for carrying clean air for the intermediate level and guarantees that the intermediate level forms the clean district that meets the requirements, and the return air layer is used for retrieving the air in the clean district. The clean room also comprises a common supporting room which is arranged between any two adjacent clean rooms and used for accommodating the purifying air-conditioning unit, and the purifying air-conditioning unit is used for processing outdoor air into clean air and sending the clean air to the static pressure box. Through setting up two at least clean rooms of arranging side by side and interval setting to reduce the area of clean factory building, enlarge the clean district area of single clean factory building.

Description

Clean factory building

Technical Field

The utility model relates to a factory building technical field especially relates to a clean factory building.

Background

The clean room usually adopts a three-layer sandwich structure, and the three-layer sandwich structure comprises an upper sandwich layer, a middle sandwich layer and a lower sandwich layer from top to bottom in sequence. Wherein the upper interlayer is used as a static pressure box to send the air after adjusting the temperature and the humidity and filtering the micro-dust to the middle layer by a fan. Referring to fig. 1, the middle layer includes a clean area 1 as a process area, and a bottom plate of the clean area 1 is a floor with holes, so that air blown by a fan passes through the clean area 1 and then is introduced into the lower interlayer through holes in the floor with holes. The lower interlayer is used as an air return layer, an air return channel 2 which is communicated with the upper interlayer and the lower interlayer is arranged between the lower interlayer and the upper interlayer, and the collected air is sent back to the upper interlayer through the air return channel 2, so that the recycling of clean air is realized. Meanwhile, in order to arrange auxiliary facilities such as a clean air conditioning unit, a transformer substation, and a changing room serving the clean area 1, a support area 3 is generally provided outside the clean area 1 to accommodate the auxiliary facilities such as the clean air conditioning unit, the transformer substation, and the changing room. When the denuded zone 1 is large in scale, the area demand for the support zone 3 is also increased, and therefore the support zones 3 are sometimes arranged on both long sides of the denuded zone 1.

However, the width of the clean area 1 is usually not more than 90m due to the air flow structure of the clean area, and the length of the clean room is not too long, otherwise, the fire-fighting aspect and the plane transportation distance are too long. Therefore, clean plants cannot generally be too large in scale (area) (not more than 3 ten thousand square meters). If necessary, only one clean workshop can be additionally built, the floor area is large, and the building cost is high.

SUMMERY OF THE UTILITY MODEL

The utility model provides a clean factory building to improve the area in clean district among the single clean factory building, reduce the area occupied of clean factory building.

The utility model provides a clean factory building, this clean factory building include two at least toilet that arrange side by side and the interval set up, and every toilet is including range upon range of return air layer, intermediate level, static pressure case and return air double-layered way in proper order. Wherein, the intermediate level has clean district, and the below in clean district is through band hole floor and return air layer intercommunication, and the top in clean district has the furred ceiling and installs on the furred ceiling and the fan filter unit who communicates with the static pressure case. The static pressure case is used for carrying clean air for the clean district, and the return air layer is used for retrieving the air in the clean district, and the return air double-layered is used for communicateing return air layer and static pressure case. The clean room also comprises a common supporting room which is arranged between any two adjacent clean rooms and is used for accommodating a purifying air conditioning unit, wherein the purifying air conditioning unit is used for processing outdoor air into clean air and sending the clean air to the plenum box.

In the above scheme, at least two clean rooms are arranged side by side and are arranged at intervals, and a shared supporting room for accommodating and purifying the air conditioning unit is arranged between any two adjacent clean rooms, so that the occupied area of a clean plant is reduced, and the clean area of a single clean plant is enlarged. The shared supporting room between the two clean rooms is shared by any two adjacent clean rooms, so that the area utilization rate of the shared supporting room is improved, and the construction cost is reduced. Through setting up the purification air conditioning unit, the outdoor air is handled as clean air after adjusting temperature and humidity and filtering to clean air is sent to the static pressure case. Clean air is conveyed to the clean area by adopting the static pressure box, so that the clean area of the middle layer is ensured to form a clean production area meeting the requirements.

In a specific implementation mode, at least one clean channel communicated with two adjacent clean areas is further arranged in the common supporting chamber, so that personnel exchange and cargo transportation between the two clean areas are facilitated, and the staged construction and the extension and production expansion of a clean workshop are facilitated.

In a particular embodiment, each denuded zone of the at least two access zones has two opposing sidewalls along the direction of alignment of the at least two cleanrooms; two ports of each clean channel in the at least one clean channel are respectively positioned on the side walls of two adjacent clean zones.

In a specific embodiment, the area of each of the two sidewalls is S1, and the sum of the areas on each sidewall proximate the channel is S2; wherein S2 is less than or equal to 15 percent of S1, so as to ensure the cleanliness in each clean zone.

In a specific embodiment, each clean tunnel is provided with a first fire door for opening and closing each clean tunnel so that the clean tunnel is closed when a part of the clean room is used, thereby allowing each clean room to work independently.

In a particular embodiment, some or all of the at least one purge passageway is provided with an automated conveyor to facilitate transport of items by workers through the automated conveyor.

In a specific embodiment, a bottom layer refuge walkway and a safety evacuation stair communicated with the bottom layer refuge walkway are further arranged in the common supporting room, and the safety evacuation stair is communicated with the clean room, so that in case of emergency, workers can leave the clean plant through the safety evacuation stair and the bottom layer refuge walkway of the common supporting room, and the fire fighting pressure is relieved.

In a specific embodiment, a second fireproof door for opening and closing the safety evacuation stair is arranged at the entrance of the safety evacuation stair, so that the safety evacuation stair is closed when the safety evacuation stair and the bottom layer refuge walkway are not used, and the cleanliness of the clean passage and the clean area is ensured.

In a specific embodiment, the clean area is provided with a perforated floor which separates the clean area from the return air layer, and the perforated floor is provided with a through hole which is communicated with the clean area and the return air layer so as to realize the communication between the clean area and the return air layer.

In one embodiment, the width of the common support chamber is 24m-36m along the arrangement direction of at least two clean rooms, so that the width of the common support chamber is reduced and the space utilization rate of the common support chamber is improved.

Drawings

FIG. 1 is a schematic view of a clean room in the prior art;

fig. 2 is a schematic plan view of a clean room provided in an embodiment of the present invention;

fig. 3 is a schematic cross-sectional view of a clean room according to an embodiment of the present invention;

FIG. 4 is a schematic plan view of another clean room according to an embodiment of the present invention;

FIG. 5 is a schematic plan view of another clean room according to an embodiment of the present invention;

fig. 6 is a schematic plan view of another clean room according to an embodiment of the present invention.

Reference numerals:

10-clean room 11-clean zone 111-side wall

12-static pressure box 13-return air layer 14-return air channel

15-purifying air conditioning unit 16-transformer substation 17-dressing room

20-common support Chamber 30-Single support Chamber 40-clean aisle

41-automatic conveyer 50-bottom refuge walkway

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer, the present invention will be described in further detail with reference to the accompanying drawings.

For the convenience of understanding the clean factory building provided by the embodiment of the present invention, the application scenario thereof will be explained first. The clean workshop is applied to the technical field of industrial processing and manufacturing, and provides a sterile and dustless manufacturing environment through the clean workshop so as to meet the processing requirements of certain devices. The following describes the clean room provided by the embodiments of the present invention in detail with reference to the accompanying drawings.

Referring to fig. 2, the clean room according to the embodiment of the present invention includes at least two clean rooms, and at least two clean rooms 10 are arranged side by side along the width direction. Wherein, clean factory building has two length longer and the relative long limit in position and connects two long limits and two relative minor faces in position respectively, and clean factory building's length direction indicates the extending direction on long limit, and clean factory building's width direction indicates the extending direction of minor face. In the specific determination of the number of clean rooms 10, the number of clean rooms 10 may be any of at least two of 2, 3, 4, 5, 6, 7, and the like. The clean room building shown in fig. 2 includes 4 clean rooms 10. It should be understood that the number of clean rooms 10 is not limited to the 4 shown in fig. 2. With continued reference to fig. 2, two clean rooms 10 are arranged side by side, and any two adjacent clean rooms 10 are disposed at an interval so as to leave a space for disposing a common support room 20 between any two adjacent clean rooms 10, wherein the common support room 20 is used for disposing auxiliary facilities such as a clean air conditioning unit 15, a transformer station 16, a changing room 17, a bottom layer refuge walkway, and a safe evacuation stairway communicated with the bottom layer refuge walkway.

In providing each clean room 10, referring to fig. 3, each clean room 10 includes a return air layer 13, an intermediate layer, and a plenum 12 stacked from bottom to top (referring to the clean room in fig. 3). Wherein the intermediate layer has a region of higher cleanliness, which is a denuded zone 11. The static pressure box 12 is used for conveying clean air to the clean area 11, and the return air layer 13 is communicated with the clean area 11 to recover the air of the clean area 11. In addition, the middle layer is also provided with a return air channel 14 which is communicated with the return air layer 13 and the static pressure box 12, so that the air recovered by the return air layer 13 is transmitted to the static pressure box 12 through the return air channel 14. Static pressure box 12 in turn delivers clean air to clean zone 11, which circulates between static pressure box 12, clean zone 11, and return air layer 13, thereby increasing the efficiency of air utilization.

In particular, as shown in fig. 3, the clean zone 11 has two opposing end faces in the vertical direction (with reference to the position shown in fig. 3), one of which is located below as the bottom face of the clean zone 11 and the other of which is located above as the ceiling of the clean zone 11. The lower end surface is the ground of a clean area 11 and is used for placing production equipment such as machine tools, robots and the like. When specifically setting up, clean district 11 separates with the return air layer 13 that is located clean district 11 below through foraminiferous floor, is provided with the through-hole that is used for communicateing clean district 11 and return air layer 13 on the foraminiferous floor to realize return air layer 13 and clean district 11's intercommunication. The floor slab with holes is a conventional plate body structure for supporting and isolating in the prior art. The number and size of the through holes on the floor with holes are determined by combining the space area of the clean area 11, and are not limited herein. In addition, the upper end face is a suspended ceiling of the clean area 11, which is used for supporting and shielding the static pressure box 12 above the clean area 11. When the structure is specifically arranged, the clean area 11 further has two opposite side walls 111 in the width direction of the clean room, and the two side walls 111 can be used as a support structure for supporting a suspended ceiling. Static pressure box 12 is a box structure conventional in the art for stabilizing wind speed and ventilation. The plenum box 12 may be secured to the ceiling of the plenum box 12 by bolting, hoisting, or the like. A fan filtering unit communicated with the static pressure box 12 is installed on the suspended ceiling, and air in the static pressure box 12 is treated by the fan filtering unit and then is introduced into the clean area 11, so that the cleanliness of the air output from the static pressure box 12 is improved. Wherein, above-mentioned fan filter unit is conventional fan filter equipment among the prior art. Referring to fig. 3, a return air duct 14 for communicating the return air layer 13 and the plenum box 12 is provided on each side wall 111. Wherein the return air duct 14 is a duct for ventilation which is conventional in the art. The air recovered by the return air layer 13 is treated and then transferred to the plenum box 12 through a return air duct 14.

Referring to fig. 2 and fig. 3, the clean room provided by the embodiment of the present invention further includes a purifying air conditioning unit 15 for purifying the outdoor air into clean air and delivering the clean air to the static pressure box 12, wherein the purifying air conditioning unit 15 is a device for purifying air in the prior art. Purify through the outdoor air of the purification air conditioning unit 15 that sets up to transmit clean air to static pressure case 12 through the pressurization mode, static pressure case 12 handles the back to clean air's velocity of flow, lets in clean district 11 through fan filter unit, so that the air of clean district 11 is clean air. And the air return layer 13 makes the air in the clean area 11 realize flowing through retrieving the air in the clean area 11, makes the air in the clean area 11 keep updating constantly to guarantee the cleanliness factor in the clean area 11.

When the clean air conditioning unit 15 is specifically placed, referring to fig. 2 and 3, the clean room further includes a common support room 20 disposed between any two adjacent clean rooms 10 and configured to accommodate the clean air conditioning unit 15. By providing a plurality of clean rooms 10 and arranging the plurality of clean rooms 10 in parallel and at intervals, a space for providing the common support room 20 is left between two adjacent clean rooms 10. When the common support chamber 20 is provided, referring to fig. 3, it includes an upper layer, a middle layer and a lower layer, wherein the upper layer of the common support chamber 20 (which is located at the middle of the upper part of the common support chamber 20 with reference to the clean room shown in fig. 3) is located at the same level as the static pressure tank 12; the intermediate layer of the common support chamber 20 is located at the same level as the denuded zone 11; the lower layer in the common support chamber 20 is the same as the return air layer 13.

The clean air conditioning unit 15 placed in the common supporting room 20 is used to assist the supply of clean air of the two clean rooms 10 adjacent to the common supporting room 20. Specifically, the number of the clean air conditioning units 15 in each common support room 20 is two, one of which is used for supplying clean air to one clean room 10 of two adjacent clean rooms 10, and the other is used for supplying clean air to the other clean room 10. When placing two sets of purification air conditioning units 15, it is possible to place two sets of purification air conditioning units 15 together, specifically, two sets of purification air conditioning units 15 are placed in a mixed manner. One of the clean air conditioning units 15 may be placed on one side of the common support room 20 and on the other side of the common support room 20 through the other clean air conditioning unit 15. In a word, when two groups of purification air conditioning units 15 are specifically placed, the principle is to reduce the occupied space of the purification air conditioning units 15 as much as possible and improve the area utilization rate of the common support room 20.

In the specific determination of the width of each common support chamber 20, the width of each common support chamber 20 may be set to 24m to 36m, and specifically, the area of each common support chamber 20 may be set to any value between 24m to 26m, such as 24m, 26m, 28m, 30m, 32m, 34m, 36 m. It should be understood that the width of the common supporting room 20 is related to the area of the clean area 11, and when the area of the clean area 11 is larger, the amount of clean air required is larger, so that the number of air conditioners in the cleaning air conditioning unit 15 is increased, and the air conditioners occupied by the cleaning air conditioning unit 15 are larger, so that the larger common supporting room 20 is provided to accommodate the cleaning air conditioning unit 15 with the larger occupied area. When the area of the clean area 11 is small, the amount of clean air required is small, so that the number of air conditioners in the cleaning air conditioning unit 15 is small, and the space occupied by the cleaning air conditioning unit 15 is small, so that the cleaning air conditioning unit 15 with a small occupied area can be accommodated by arranging a small common support room 20.

In addition, referring to fig. 2 and 3, of the at least two clean rooms 10, a common support room 20 is respectively present at opposite sides of the clean room 10 located at the middle position (of the at least two clean rooms 10, the other clean rooms 10 except the two clean rooms 10 located at the outermost position) to place the clean air conditioning unit 15, thereby facilitating the placement of the clean air conditioning unit 15.

Referring to fig. 2, of the two clean rooms 10 located at the outermost side among the at least two clean rooms 10, one single-side support room 30 is provided at the outer side of each clean room 10 (the side of the clean room 10 facing away from the common support room 20) for placing the clean air conditioning units 15 so that two separate spaces for placing the clean air conditioning units 15 are also provided in the two clean rooms 10 located at the outermost side, whereby the place for placing the clean air conditioning units 15 can be increased to facilitate the placement of the clean air conditioning units 15. In the specific determination of the width of the single-sided support chamber 30, the width of the single-sided support chamber 30 may be set to 15m to 18m, and specifically, the width of the single-sided support chamber 30 may be any value between 15m to 18m, such as 15m, 16m, 17m, 18m, etc.

Referring to fig. 2 and 3, a substation 16 may be provided in the common support room 20 to adjust the power supply voltage delivered to the clean room to be converted to the operating voltage of the clean air conditioning unit 15.

With continued reference to fig. 2 and 3, a changing room 17 is also provided in common support room 20 to facilitate work garment changes by workers before entering clean zone 11, thereby ensuring cleanliness of clean zone 11.

Referring to fig. 4, the clean room according to the embodiment of the present invention further includes a clean passage 40 connecting at least two clean rooms 10, so as to facilitate the flow of workers and goods between two adjacent clean areas 11. In the specific arrangement, referring to fig. 4, two ports of each clean channel 40 are respectively located on the side walls 111 of two adjacent clean zones 11, that is, a clean channel 40 communicating two adjacent clean zones 11 is disposed in the common support chamber 20, one end of the clean channel 40 is communicated with one clean zone 11, the other end of the clean channel 40 is communicated with the other clean zone 11, and an opening is opened on the side wall 111 of each clean zone 11 of two adjacent clean zones 11 to serve as a port of the clean channel 40. When the clean passages 40 are specifically provided, the number of the clean passages 40 may be 1, 2, 3, 4, or the like. Referring to fig. 2, two clean tunnels 40 are provided between adjacent two clean rooms 10, and it should be understood that the number of clean tunnels 40 is not limited to the two shown in fig. 2. In the specific determination of the position of the clean tunnel 40, the specific position of the clean tunnel 40 may be specifically determined according to the placement position of the equipment, the transportation position of the goods, and the like within the clean room 10.

When the opening size of the clean channel 40 in each clean zone 11 is specifically determined, the area of the side wall 111 of the clean channel 40 opening on the clean zone 11 is S1, and the sum of the port areas of all the clean channels 40 on the side wall 111 is S2, wherein S2 is less than or equal to 15% of S1. By making the area of the port of the clean channel 40 less than 15% of the area of the side wall 111 on the clean area 11, the cleanliness in the clean area 11 is ensured, and the air in the clean area 11 is prevented from being out of compliance with the processing requirements due to the large area of the clean channel 40. In specifically determining the sum S2 of the opening areas of the clean passages 40 on the side wall 111 of each denuded zone 11, the sum S2 of the opening areas of the clean passages 40 may be set to any value of 5% S1, 7% S1, 9% S1, 10% S1, 11% S1, 13% S1, 15% S1, or the like, which is equal to or less than 15% S1.

Referring to fig. 5, when the clean tunnel 40 is specifically provided, an automatic conveying device 41 may be provided for some clean tunnels 40 or all clean tunnels 40 of the plurality of clean tunnels 40, and when it is necessary to convey articles such as workpieces, equipment, etc. from one clean zone 11 to another clean zone 11, the articles may be conveyed by the automatic conveying device 41, thereby facilitating the circulation of the articles between two adjacent clean zones 11. During the setting, automatic conveying device 41 can be for hoisting the slide rail, and is concrete, sets up a slide rail between two adjacent clean districts 11, and the both ends of this slide rail are located two adjacent clean districts 11 respectively, and sliding connection has hoisting device on the slide rail, through hoisting device with article such as hoist and mount work piece, goods, later through hoisting device slide rail on the slide rail to article circulate in two adjacent clean districts 11. It should be understood that the above only illustrates one way of providing the automatic transfer device 41, and that other arrangements may be used in addition to this. For example, a conveyor belt may be used. It should be understood that whether the clean tunnel 40 is installed with the automatic transfer device 41 is determined according to the function of the clean tunnel 40, and the clean tunnel 40 is opened for goods circulation, and the automatic transfer device 41 may be installed in the clean tunnel 40; when the clean tunnel 40 is opened for the passage of workers, the automatic transfer device 41 may not be provided.

In addition, a first fire door may be provided at a port of each clean tunnel 40, and the first fire door may be closed when the clean tunnel 40 is not used. In addition, when only a part of the clean rooms 10 are used, the number of the open clean rooms 10 may be determined according to the actual situation by closing the first fire door to separate the clean room 10 in use from the clean room 10 not in use, thereby preventing the clean room 10 in use from interfering with the clean room 10 not in use.

Referring to fig. 6, a bottom layer refuge walkway 50 and a safety evacuation stairway communicated with the bottom layer refuge walkway 50 are further arranged in the common supporting room 20, wherein the bottom layer refuge walkway 50 is arranged at a lower layer (located at the same layer as the return air layer 13) in the common supporting room 20, two opposite ports of the bottom layer refuge walkway 50 are respectively communicated with the outside of the clean workshop, and the bottom layer refuge walkway 50 is communicated with the clean passage 40 through the safety evacuation stairway, so that in case of emergency such as fire, accident and the like in the clean area 11, workers can rapidly leave the clean area 11 through the safety evacuation stairway and leave the clean workshop through the bottom layer refuge walkway 50 to relieve fire pressure. It should be understood that the evacuation stairway is not limited to the arrangement communicating with the bottom-layer refuge walkway 50, and the evacuation stairway may also communicate with the clean area 11, so that workers working in the clean area 11 can directly enter the evacuation stairway from the clean area 11 and enter the bottom-layer refuge walkway 50 through the evacuation stairway.

Specifically, the width of the bottom evacuation walkway 50 is 3m to 4m, and specifically, the width of the bottom evacuation walkway 50 may be any value between 3m to 4m, such as 3m, 3.2m, 3.5m, 3.7m, 4.0m, and the like. The height of the bottom layer refuge walkway 50 can be set to 2.8m-3.2m, and specifically, the height of the bottom layer refuge walkway 50 can be any value between 2.8m-3.2m, such as 2.8m, 2.9m, 3.0m, 3.1m, 3.2m, and the like. The second fireproof door can be arranged at the entrance of the safety evacuation stair, the second fireproof door is closed when the bottom layer refuge walkway 50 and the safety evacuation stair are not used, and the second fireproof door is opened when the safety evacuation stair and the bottom layer refuge walkway 50 are used.

In the above scheme, at least two clean rooms 10 arranged side by side and spaced are arranged, and a common support room 20 for accommodating the purification air conditioning unit 15 is arranged between any two adjacent clean rooms 10, so that the floor area of the clean room is reduced, and the clean area 11 of a single clean room is enlarged. The two adjacent clean rooms 10 share the common support room 20 between the two clean rooms 10, so that the area utilization rate of the common support room 20 is improved, and the construction cost is reduced. By arranging the purifying air conditioning unit 15, the outdoor air is processed into clean air after being subjected to temperature and humidity adjustment and filtration, and the clean air is sent to the static pressure box 12. Clean air is supplied to the clean area 11 by using the static pressure box 12, so that the clean area 11 of the middle layer is ensured to form a clean production area meeting the requirements.

The above embodiments are only specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily think of changes or substitutions within the technical scope of the present invention, and all should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A clean factory building, characterized by, includes:

the clean rooms are arranged in parallel and are arranged at intervals, and each clean room comprises a return air layer, an intermediate layer, a static pressure box and a return air channel which are sequentially stacked; the middle layer is provided with a clean area, the lower part of the clean area is communicated with the air return layer through a perforated floor slab, and the upper part of the clean area is provided with a suspended ceiling and a fan filtering unit which is arranged on the suspended ceiling and is communicated with the static pressure box; the static pressure box is used for conveying clean air to the clean area; the air return layer is used for recovering air in the clean area; the return air channel is used for communicating the return air layer with the static pressure box;

the common supporting room is arranged between any two adjacent clean rooms and is used for accommodating the purifying air conditioning unit; the purifying air conditioning unit is used for processing outdoor air into clean air and sending the clean air to the static pressure box.

2. The clean room building of claim 1, wherein at least one clean channel is further provided in the common support chamber to connect two adjacent clean zones.

3. The clean room building of claim 2, wherein each clean zone of the at least two clean zones has two opposite sidewalls along the arrangement direction of the at least two clean rooms; and two ports of each clean channel in the at least one clean channel are respectively positioned on the side walls of two adjacent clean zones.

4. The cleanroom building of claim 3 wherein each of the two side walls has an area of S1, and the sum of the port areas of the cleanway on each side wall is S2; wherein S2 is less than or equal to 15 percent of S1.

5. The clean room as claimed in claim 2, wherein each clean passage is provided with a first fire door for opening and closing the clean passage.

6. The clean room as claimed in claim 2, wherein part or all of the at least one clean tunnel is provided with an automatic transfer device.

7. The clean factory building according to any one of claims 2 to 6, wherein a bottom refuge walkway and safety evacuation stairs communicating with the bottom refuge walkway are further provided in the common support room, and the safety evacuation stairs communicate with the clean room.

8. The clean factory building of claim 7, wherein a second fire door for opening and closing the evacuation stairway is provided at an entrance of the evacuation stairway.

9. The clean factory building according to claim 1, wherein, the clean area is provided with a perforated floor slab separating the clean area from the return air layer, and the perforated floor slab is provided with a through hole communicating the clean area and the return air layer.

10. The clean room building of claim 1, wherein the width of the common support room along the arrangement direction of the at least two clean rooms is 24m-36 m.