CN210417677U - Medium-large MO source cylindrical steel cylinder - Google Patents

Abstract

The utility model discloses a medium-large MO source cylinder type steel bottle, which is characterized in that the steel bottle comprises a cylindrical steel bottle body which is provided with an MO source packaging space, the upper end part of the steel bottle body is respectively provided with an air inlet pipe and an air outlet pipe which are communicated with the MO source packaging space, and the air inlet pipe and the air outlet pipe are respectively provided with an air inlet valve and an air outlet valve, wherein the inner side wall of the bottom of the steel bottle body adopts an arc-shaped curved surface, and the outlet of the air inlet pipe is correspondingly matched with the center of the arc-shaped curved surface, so that a high-; the volume range of the MO source packaging space is 5000-10000 mL; the utility model discloses keeping the steel bottle outward appearance for cylindric prerequisite under, through improving steel bottle body bottom inside wall, can effectively improve the supply saturation in MO source, the result of use when ensureing follow-up implementation and application.

Description

Medium-large MO source cylindrical steel cylinder

Technical Field

The utility model belongs to the technical field of MO source packaging container, concretely relates to medium and large-scale MO source cylinder type steel bottle.

Background

MO source (metalorganic source) refers to a high-purity metal organic compound (typical main materials include trimethyl gallium, triethyl gallium, trimethyl indium, triethyl indium, trimethyl aluminum, etc.) used as a basic material in MOCVD epitaxial technology, and in the foreign literature, MO source is also generally called "precursor of MOCVD", and is currently widely used in LED epitaxial wafer manufacturing industry.

As described in the background of the invention of chinese patent publication No. CN109852948A, MO cells need to be stored in MO cylinder supply equipment with high cleanliness and high packaging effect while being protected by inert gas. As further mentioned in CN109852948A, the crystal size, the stacking degree and the material height of the MO source in the storage tank all affect the MO source concentration of the MO source steel cylinder, which can also be referred to as MO source supply saturation, and further affect the use effect of the MO source in the implementation.

Therefore, the market is eagerly seeking a technical solution to improve the above technical problems. Meanwhile, based on years of research and accumulated development experience of the inventor in the field of MO source steel cylinder products, the inventor decides to respectively provide corresponding solutions for MO source steel cylinders with different volume specifications, and further improves the problem of flow saturation of the MO source steel cylinders.

Disclosure of Invention

In view of this, the utility model aims at providing a medium-and-large-sized MO source cylinder type steel bottle is keeping the steel bottle outward appearance for cylindric prerequisite under, through improving steel bottle body bottom inside wall, can effectively improve the supply saturation in MO source, the result of use when ensureing follow-up implementation and using.

The utility model adopts the technical scheme as follows:

a middle-large MO source cylindrical steel cylinder comprises a cylindrical steel cylinder body provided with an MO source packaging space, wherein the upper end part of the steel cylinder body is respectively provided with an air inlet pipe and an air outlet pipe which are communicated with the MO source packaging space, and the air inlet pipe and the air outlet pipe are respectively provided with an air inlet valve and an air outlet valve; the volume of the MO source packaging space ranges from 5000-.

Preferably, the arc-shaped curved surface comprises a plane unit positioned in the center and an arc-shaped curved surface unit positioned on the periphery of the plane unit, wherein the outer diameter of the arc-shaped curved surface is 3.5-6 times of the diameter of the plane unit.

Preferably, the cylinder body height is 1.8-3 times the cylinder body outer diameter.

Preferably, the intake pipe includes that fixed sealing connects as an organic whole and is located the outside outer pipeline section of admitting air of MO source encapsulation space and being located the inside interior pipeline section of admitting air of MO source encapsulation space, wherein, the interior pipeline section of admitting air is including the first vertical portion that is located the top and the vertical portion of second that is located the below, first vertical portion with through kink body coupling between the vertical portion of second, just the export of the vertical portion of second is located on the central axis of camber curved surface and with camber curved surface center corresponds the cooperation, is used for steel bottle body bottom forms high-efficient tympanic bulla convection region.

Preferably, the second upright length is 4-8 times the first upright length.

Preferably, a pressure sensor joint is further arranged at the upper end part of the steel cylinder body between the air inlet pipe and the air outlet pipe, and is used for detecting the flow pressure of the MO source in the MO source packaging space; meanwhile, the central axis of the pressure sensor joint is superposed with the central axis of the arc-shaped curved surface.

Preferably, the range of an air valve included angle between the central axis of the air inlet valve and the central axis of the air outlet valve is 10-30 degrees, and the outer air inlet pipe section and the air outlet pipe are both vertical.

Preferably, the fixed circular arc handle that is located steel bottle body upper end is equipped with the admission valve and the gas outlet valve periphery, wherein, circular arc handle diameter is greater than steel bottle body external diameter, the circular arc handle is through the fixed welding of a plurality of fixed framves of buckling steel bottle body upper end.

The utility model discloses under the prerequisite of keeping the steel bottle outward appearance cylindric, adopt the structural design of camber to steel bottle body bottom inside wall, make the export of intake pipe and camber center correspond the cooperation for form high-efficient tympanic bulla convection region in steel bottle body bottom, this high-efficient tympanic bulla convection region can effectively avoid the MO source to take place problems such as crystal form size, pile up degree and material height in the MO source encapsulation space of steel bottle body, can effectively improve the supply saturation of MO source, ensure the result of use when the follow-up implementation is used; simultaneously the utility model discloses a cylinder type steel bottle body adopts integrated into one piece structural design, does not need extra mounting structure, and processing and installation procedure are simple convenient, and low in manufacturing cost is particularly suitable for being applied to MO source encapsulation space volume scope in the MO source steel bottle of 5000 + 10000 mL.

Drawings

FIG. 1 is a schematic structural view of a medium-large MO source cylindrical steel cylinder 10 according to an embodiment of the present invention;

fig. 2 is a top view of fig. 1.

Detailed Description

The embodiment of the utility model discloses a medium-large MO source cylinder type steel bottle, including the steel bottle body that is equipped with MO source encapsulation space and is cylindric, steel bottle body upper end is equipped with intake pipe and outlet duct with MO source encapsulation space intercommunication respectively, installs admission valve and air outlet valve on intake pipe and the outlet duct respectively simultaneously, wherein, steel bottle body bottom inside wall adopts the camber, and the export of intake pipe corresponds the cooperation with camber center for form high-efficient tympanic bulla convection region in steel bottle body bottom; the volume of the MO source packaging space is in the range of 5000-10000 mL.

The embodiment of the utility model provides a under the prerequisite of keeping steel bottle outward appearance cylindric, adopt the structural design of camber to steel bottle body bottom inside wall, make the export of intake pipe and camber center correspond the cooperation for form high-efficient tympanic bulla convection region in steel bottle body bottom, this high-efficient tympanic bulla convection region can effectively avoid the MO source to take place crystal form size, pile up degree and material height scheduling problem in the MO source encapsulation space of steel bottle body, can effectively improve the supply saturation of MO source, ensure the result of use when the follow-up implementation is used; simultaneously the utility model discloses cylinder type steel bottle body adopts integrated into one piece structural design, does not need extra mounting structure, and processing and installation are simple convenient, and low in manufacturing cost is particularly suitable for being applied to MO source encapsulation space volume scope in the MO source steel bottle of 5000 + 10000 mL.

In order to make the technical solutions in the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall belong to the protection scope of the present invention.

Referring to fig. 1 and 2, a middle-large MO source cylindrical steel cylinder 10 includes a cylindrical steel cylinder body 12 having an MO source enclosure space 11, wherein the volume of the MO source enclosure space 11 is 5000-; particularly preferably, in the present embodiment, the volume of the MO source encapsulation space 11 is 7500 mL;

in this embodiment, the upper end of the steel cylinder body 12 is respectively provided with an inlet pipe 13 and an outlet pipe 14 which are communicated with the MO source encapsulation space 11, and the inlet pipe 13 and the outlet pipe 14 are respectively provided with an inlet valve 15a and an outlet valve 15b, wherein the inner side wall of the bottom of the steel cylinder body 12 adopts an arc-shaped curved surface 20; preferably, in the present embodiment, the curved surface 20 includes a plane unit 20a located at the center and a curved surface unit 20b located at the periphery of the plane unit 20a, wherein the curved surface outer diameter D10 is 3.5-6 times the plane unit diameter D20; the height H10 of the steel cylinder body is 1.8-3 times of the outer diameter D30 of the steel cylinder body;

particularly preferably, in the present embodiment, the outer diameter D10 of the arc-shaped curved surface is 138.5mm, the diameter D20 of the planar unit is 27mm, the height H10 of the cylinder body is 356mm, and the outer diameter D30 of the cylinder body is 145 mm;

preferably, in the present embodiment, the air inlet pipe 13 includes an outer air inlet pipe segment 131 fixedly and hermetically connected as a whole and located outside the MO source enclosure 11, and an inner air inlet pipe segment 132 located inside the MO source enclosure 11, wherein the inner air inlet pipe segment 132 includes a first vertical portion 132a located above and a second vertical portion 132c located below, the first vertical portion 132a and the second vertical portion 132c are integrally connected through a bending portion 132b, and an outlet 133 of the second vertical portion 132c is located on a central axis of the curved arc surface 20 and correspondingly matched with a center of the curved arc surface 20, so as to form the efficient bubbling convection region 30 at the bottom of the cylinder body 12; preferably, in the present embodiment, the second upright length L20 is 4 to 8 times the first upright length L10; specifically, in the present embodiment, the first upright length L10 is 37mm, and the second upright length L20 is 206 mm;

preferably, in the present embodiment, the upper end of the cylinder body 12 between the outer gas inlet pipe section 131 and the gas outlet pipe 14 is further provided with a pressure sensor connector 16 for detecting the flow pressure of the MO source in the MO source enclosure 11; meanwhile, the central axis of the pressure sensor joint 16 is superposed with the central axis of the arc-shaped curved surface 20;

preferably, in the present embodiment, the valve included angle between the central axis of the inlet valve 15a and the central axis of the outlet valve 15b ranges from 10 degrees to 30 degrees, and the outer inlet pipe section 131 and the outlet pipe 14 are both vertical;

preferably, in the present embodiment, the arc handle 17 is fixedly disposed at the upper end of the cylinder body 12 and located at the outer periphery of the air inlet valve 15a and the air outlet valve 15b, wherein the diameter D40 of the arc handle is larger than the outer diameter D30 of the cylinder body, and the arc handle 17 is fixedly welded to the upper end of the cylinder body 11 through a plurality of bending fixing brackets 18.

In the implementation and application of the embodiment, the middle-large MO source cylindrical steel cylinder 10 is placed in the constant temperature water bath, then the air inlet valve 15a and the air outlet valve 15b are opened, the inert gas is input into the MO source packaging space 11 through the air inlet pipe 13, and the MO source in the MO source packaging space 11 generates a bubbling effect, so that the MO source is evaporated, a mixture of the saturated steam of the MO source and the inert gas is conveyed to a corresponding process through the air outlet pipe 14, and the flow and pressure change of the MO source in the middle-large MO source cylindrical steel cylinder 10 can be immediately judged through the pressure sensor joint 16; the MO source steam of this embodiment can realize good tympanic bulla convection current in MO source encapsulation space 11, avoids the MO source to pile up, can effectively improve the flow saturation of MO source.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (7)

1. A middle-large MO source cylindrical steel cylinder is characterized by comprising a cylindrical steel cylinder body provided with an MO source packaging space, wherein the upper end part of the steel cylinder body is respectively provided with an air inlet pipe and an air outlet pipe communicated with the MO source packaging space, and the air inlet pipe and the air outlet pipe are respectively provided with an air inlet valve and an air outlet valve; the volume of the MO source packaging space ranges from 5000-.

2. The medium-large MO source cylindrical steel cylinder of claim 1, wherein the arc-shaped curved surface comprises a plane unit at a center and an arc-shaped curved surface unit at a periphery of the plane unit, wherein an outer diameter of the arc-shaped curved surface is 3.5 to 6 times a diameter of the plane unit.

3. The cylinder type cylinder for medium-large MO source according to claim 1, wherein the height of the cylinder body is 1.8 to 3 times the outer diameter of the cylinder body.

4. The medium-large MO source cylindrical steel cylinder according to claim 1, wherein the air inlet pipe comprises an outer air inlet pipe section and an inner air inlet pipe section, the outer air inlet pipe section and the inner air inlet pipe section are fixedly and hermetically connected together and located outside the MO source packaging space, the inner air inlet pipe section comprises a first vertical portion and a second vertical portion, the first vertical portion is located above the second vertical portion, the second vertical portion is integrally connected through a bending portion, an outlet of the second vertical portion is located on a central axis of the arc-shaped curved surface and is correspondingly matched with the center of the arc-shaped curved surface, and the outer air inlet pipe section and the inner air inlet pipe section are located inside the MO source packaging space.

5. The cylinder type steel cylinder for medium-large MO source according to claim 4, wherein the length of the second vertical portion is 4 to 8 times the length of the first vertical portion.

6. The cylinder type steel cylinder with medium-large MO source as claimed in claim 1, wherein a pressure sensor joint is further disposed at the upper end of the steel cylinder body between the gas inlet pipe and the gas outlet pipe for detecting the flow pressure of MO source in the MO source enclosure space; meanwhile, the central axis of the pressure sensor joint is superposed with the central axis of the arc-shaped curved surface.

7. The medium-large MO source cylinder type steel cylinder of claim 1, wherein the steel cylinder body has an upper end portion fixedly provided with an arc handle located at the periphery of the gas inlet valve and the gas outlet valve, wherein the arc handle has a diameter larger than the outer diameter of the steel cylinder body, and the arc handle is fixedly welded at the upper end portion of the steel cylinder body through a plurality of bending fixing frames.

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