CN210261977U - Mounting structure of MO source steel bottle - Google Patents

Abstract

The utility model discloses an installation structure of MO source steel bottle, including the steel bottle body that is equipped with MO source encapsulation space, be equipped with intake pipe and outlet duct that communicates with MO source encapsulation space on the steel bottle body respectively, the intake pipe includes that fixed welding is as an organic whole and is located the outer air inlet pipe section outside MO source encapsulation space and is located the interior air inlet pipe section inside MO source encapsulation space, wherein, interior air inlet pipe section is the bending form, and the export of interior air inlet pipe section corresponds the cooperation with steel bottle body central part and forms the tympanic bulla convection region; the wall thickness of the inner air inlet pipe section is smaller than that of the outer air inlet pipe section, and the outer diameter of the inner air inlet pipe section is smaller than the inner diameter of the outer air inlet pipe section; the utility model discloses a fixed welded structure of the outer pipeline section of admitting air of sectional type and the interior pipeline section of admitting air has not only reduced the material cost of intake pipe, has greatly simplified the manufacturing procedure of intake pipe moreover, further effectively reduces the processing cost.

Description

Mounting structure of MO source steel bottle

Technical Field

The utility model belongs to the technical field of MO source packaging container, concretely relates to mounting structure of MO source steel bottle.

Background

MO Source (Metalorganic Source) refers to a high-purity metal organic compound (typical main materials include trimethyl gallium, triethyl gallium, trimethyl indium, triethyl indium, trimethyl aluminum, etc.) used as a basic material in MOCVD epitaxial technology, and in the foreign literature, MO Source is also generally called "precursor of MOCVD", and is currently widely used in LED epitaxial wafer manufacturing industry.

In the MO source steel cylinder structure shown in chinese patent publication No. CN109852948A, the conventional MO source steel cylinder inlet pipe is integrally formed, and in order to ensure the installation strength, the wall thickness is usually set to 1.2mm or more, which not only wastes the material of the inlet pipe section in the MO source sealing space, but also causes difficulty in processing when the MO source steel cylinder is applied to a large MO source sealing space.

Further, as described in the background of the invention of the chinese patent publication No. CN109852948A, since MO cells need to be stored in MO cylinder supply equipment having high cleanliness and high packing effect while being protected by inert gas. As further mentioned in CN109852948A, the crystal size, the stacking degree and the material height of the MO source in the storage tank all affect the MO source concentration of the MO source steel cylinder, which can also be called as MO source flow saturation, and further seriously affect the use effect of the MO source in the implementation.

Therefore, the market is eagerly seeking a technical solution to improve the above technical problems. Meanwhile, based on years of research and accumulated development experience of the inventor in the field of MO source steel cylinder products, the inventor decides to respectively provide corresponding solutions for MO source steel cylinders with different volume specifications, and further improves the problem of flow saturation of the MO source steel cylinders.

Disclosure of Invention

In view of this, the utility model aims at providing a mounting structure of MO source steel bottle through the outer pipeline section of admitting air of sectional type and the fixed welded structure of the interior pipeline section of admitting air, has not only reduced the material cost of intake pipe, has greatly simplified the manufacturing procedure of intake pipe moreover, further effectively reduces the processing cost.

The utility model adopts the technical scheme as follows:

an installation structure of an MO source steel cylinder comprises a steel cylinder body provided with an MO source packaging space, wherein an air inlet pipe and an air outlet pipe communicated with the MO source packaging space are respectively arranged on the steel cylinder body, the air inlet pipe comprises an outer air inlet pipe section fixedly welded into a whole and positioned outside the MO source packaging space and an inner air inlet pipe section positioned inside the MO source packaging space, the inner air inlet pipe section is bent, and an outlet of the inner air inlet pipe section is correspondingly matched with the central part of the steel cylinder body to form a bubbling convection area; the wall thickness of the inner air inlet pipe section is smaller than that of the outer air inlet pipe section, and the outer diameter of the inner air inlet pipe section is smaller than the inner diameter of the outer air inlet pipe section; the steel cylinder body between the air inlet pipe and the air outlet pipe is also provided with a pressure sensor joint for detecting the flow pressure of the MO source in the MO source packaging space; meanwhile, the central axis of the pressure sensor joint coincides with the central axis of the steel cylinder body.

Preferably, the fixed welding connection mode adopts inert gas shielded welding.

Preferably, the wall thickness of the outer air inlet pipe section ranges from 1mm to 2mm, and the wall thickness of the inner air inlet pipe section ranges from 0.5 mm to 1 mm.

Preferably, the steel cylinder body comprises an arc-shaped steel cylinder cover and an arc-shaped steel cylinder bottom which are symmetrically distributed, and the arc-shaped steel cylinder cover and the arc-shaped steel cylinder bottom are integrally formed and connected through a middle cylinder steel cylinder; an air inlet pipe and an air outlet pipe which are communicated with the MO source packaging space are respectively arranged on the arc steel cylinder cover, and an air inlet valve and an air outlet valve are respectively arranged on the air inlet pipe and the air outlet pipe; the arc-shaped steel cylinder bottom is fixedly welded on the steel cylinder support frame, and the outlet of the air inlet pipe is correspondingly matched with the central part of the arc-shaped steel cylinder bottom to form a high-efficiency bubbling convection area in the MO source packaging space.

Preferably, the volume of the MO source encapsulation space is 4000 mL.

Preferably, the range of an air valve included angle between the central axis of the air inlet valve and the central axis of the air outlet valve is 10-30 degrees, and the outer air inlet pipe section and the air outlet pipe are both vertical.

Preferably, a left handle and a right handle which are symmetrically distributed are fixedly arranged on two sides of the arc-shaped steel bottle cap respectively.

The utility model provides a fixed welded structure of outer intake pipe section of sectional type and interior intake pipe section specifically proposes to set up the wall thickness of interior intake pipe section to be less than the wall thickness of outer intake pipe section, and the external diameter of interior intake pipe section sets up to be less than the internal diameter of outer intake pipe section, through this structural design, has not only reduced the material cost of intake pipe, has greatly simplified the manufacturing procedure of intake pipe moreover, further effectively reduced the utility model discloses a processing cost, in addition, the applicant can prove through many times of experimental verification that the novel air admission effect of this implementation can not receive negative effects;

the utility model discloses still further preferably provide and form the MO source encapsulation space that has high-efficient tympanic bulla convection current region by the arc steel bottle lid that integrated into one piece connects, middle part drum steel bottle and the arc steel bottle end, through experimental experiment, the utility model provides an MO source encapsulation space shape can effectively improve the flow saturation in MO source, the result of use when ensureing follow-up implementation to use, the utility model discloses especially, be fit for using in the MO source steel bottle that has great volume MO source encapsulation space.

Drawings

FIG. 1 is a schematic structural view of an MO source steel cylinder 10 according to an embodiment of the present invention;

FIG. 2 is a top view of FIG. 1;

fig. 3 is an enlarged view of the structure at a in fig. 1.

Detailed Description

The embodiment of the utility model discloses a mounting structure of MO source steel bottle, including the steel bottle body that is equipped with MO source encapsulation space, be equipped with intake pipe and outlet duct that communicates with MO source encapsulation space on the steel bottle body respectively, the intake pipe includes that fixed welding is as an organic whole and is located the outer intake pipe section outside MO source encapsulation space and is located the interior intake pipe section inside MO source encapsulation space, wherein, interior intake pipe section is the bending form, and the export of interior intake pipe section corresponds the cooperation with steel bottle body central part and forms the tympanic bulla convection region; the wall thickness of the inner air inlet pipe section is smaller than that of the outer air inlet pipe section, and the outer diameter of the inner air inlet pipe section is smaller than the inner diameter of the outer air inlet pipe section; the steel cylinder body between the air inlet pipe and the air outlet pipe is also provided with a pressure sensor joint for detecting the flow pressure of the MO source in the MO source packaging space; meanwhile, the central axis of the pressure sensor joint coincides with the central axis of the steel cylinder body.

The embodiment of the utility model provides a fixed welded structure of outer intake pipe section and interior intake pipe section of sectional type is provided, specifically provides the wall thickness that sets up the interior intake pipe section into being less than the wall thickness of outer intake pipe section of admitting air, and the external diameter of interior intake pipe section sets up to being less than the internal diameter of outer intake pipe section of admitting air, through this structural design, has not only reduced the material cost of intake pipe, has greatly simplified the manufacturing procedure of intake pipe moreover, further effectively reduces the utility model discloses the processing cost of embodiment, in addition, this applicant can prove through many times experimental verification that the effect of admitting air of this embodiment can not receive negative effects.

In order to make the technical solutions in the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall belong to the protection scope of the present invention.

Referring to fig. 1 and 2, an MO source hyperboloid steel cylinder 10 includes a cylinder body 12 having an MO source enclosure space 11, preferably, in the present embodiment, the volume of the MO source enclosure space 11 is 4000 mL;

in this embodiment, the steel cylinder body 12 includes an arc-shaped steel cylinder cover 121 and an arc-shaped steel cylinder bottom 123 which are symmetrically distributed, and the arc-shaped steel cylinder cover 121 and the arc-shaped steel cylinder bottom 123 are integrally connected through a middle cylindrical steel cylinder 122; an air inlet pipe 13 and an air outlet pipe 14 which are communicated with the MO source packaging space 11 are respectively arranged on the arc-shaped steel bottle cap 121, and an air inlet valve 15a and an air outlet valve 15b are respectively arranged on the air inlet pipe 13 and the air outlet pipe 14; the arc-shaped steel cylinder bottom 123 is fixedly welded on the steel cylinder support frame 16, preferably, in the present embodiment, the air inlet pipe 13 includes an outer air inlet pipe section 131 and an inner air inlet pipe section 132, the outer air inlet pipe section 131 and the inner air inlet pipe section 132 are fixedly welded together and located outside the MO source enclosure space 11, wherein, preferably, in the present embodiment, the fixedly welded connection is formed by inert gas shielded welding; the inner gas inlet pipe section 132 is bent, and the outlet 133 of the inner gas inlet pipe section 132 is correspondingly matched with the central part of the arc-shaped steel cylinder bottom 123 to form a high-efficiency bubbling convection area 200 in the MO source packaging space 11;

in the present embodiment, please further refer to fig. 3, the wall thickness of the inner air inlet pipe section 132 is smaller than that of the outer air inlet pipe section 131, and the outer diameter of the inner air inlet pipe section 132 is smaller than the inner diameter of the outer air inlet pipe section 131, and particularly preferably, in the present embodiment, the wall thickness of the outer air inlet pipe section 131 ranges from 1mm to 2mm, the wall thickness of the inner air inlet pipe section 132 ranges from 0.5 mm to 1mm, and particularly, in the present embodiment, the wall thickness of the outer air inlet pipe section 131 ranges from 1.3mm, and the wall thickness of the inner air inlet pipe section ranges from 0.8 mm;

preferably, in the present embodiment, the height of the MO source encapsulation space 11 is smaller than its width;

preferably, in the present embodiment, a pressure sensor connector 17 is further disposed on the arc-shaped steel cylinder cover 121 between the inlet pipe 13 and the outlet pipe 14 for detecting the flow pressure of the MO source in the MO source enclosure space 11; meanwhile, the central axis of the pressure sensor joint 17 is superposed with the central axis of the arc steel cylinder bottom 123;

preferably, in the present embodiment, the valve included angle between the central axis of the inlet valve 15a and the central axis of the outlet valve 15b ranges from 10 degrees to 30 degrees, and the outer inlet pipe section 131 and the outlet pipe 14 are both vertical;

preferably, in the present embodiment, the arc-shaped cylinder cover 121 is fixed with a left handle 18a and a right handle 18b at two sides thereof, which are symmetrically distributed.

In the embodiment, when the subsequent implementation and application are performed, the MO source hyperboloid steel cylinder 10 is placed in the constant temperature water bath, then the air inlet valve 15a and the air outlet valve 15b are opened, the inert gas is input into the MO source packaging space 11 through the air inlet pipeline 13, a bubbling effect is generated between the inert gas and the MO source in the MO source packaging space 11, so that the MO source is evaporated, a mixture of the saturated steam of the MO source and the inert gas is conveyed to a corresponding process through the air outlet pipe 14, and the change of the flow and pressure of the MO source in the MO source hyperboloid steel cylinder 10 can be immediately judged through the pressure sensor joint 17; the MO source steam of this embodiment can realize good tympanic bulla convection current in MO source encapsulation space 11, avoids the MO source to pile up, can effectively improve the flow saturation of MO source, especially is fit for using in the MO source steel bottle that has great volume MO source encapsulation space.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (7)

1. An installation structure of an MO source steel cylinder is characterized by comprising a steel cylinder body provided with an MO source packaging space, wherein an air inlet pipe and an air outlet pipe which are communicated with the MO source packaging space are respectively arranged on the steel cylinder body; the wall thickness of the inner air inlet pipe section is smaller than that of the outer air inlet pipe section, and the outer diameter of the inner air inlet pipe section is smaller than the inner diameter of the outer air inlet pipe section; the steel cylinder body between the air inlet pipe and the air outlet pipe is also provided with a pressure sensor joint for detecting the flow pressure of the MO source in the MO source packaging space; meanwhile, the central axis of the pressure sensor joint coincides with the central axis of the steel cylinder body.

2. The installation structure of a steel cylinder for MO source as claimed in claim 1, wherein said fixed welding connection mode adopts inert gas shielded welding.

3. The installation structure of a steel cylinder for MO source as claimed in claim 1, wherein the wall thickness of said outer inlet pipe section ranges from 1mm to 2mm, and the wall thickness of said inner inlet pipe section ranges from 0.5 mm to 1 mm.

4. The mounting structure of an MO source steel cylinder according to claim 1, wherein the steel cylinder body comprises an arc steel cylinder cover and an arc steel cylinder bottom which are symmetrically distributed, and the arc steel cylinder cover and the arc steel cylinder bottom are integrally connected by a middle cylinder steel cylinder; an air inlet pipe and an air outlet pipe which are communicated with the MO source packaging space are respectively arranged on the arc steel cylinder cover, and an air inlet valve and an air outlet valve are respectively arranged on the air inlet pipe and the air outlet pipe; the arc-shaped steel cylinder bottom is fixedly welded on the steel cylinder support frame, and the outlet of the air inlet pipe is correspondingly matched with the central part of the arc-shaped steel cylinder bottom to form a high-efficiency bubbling convection area in the MO source packaging space.

5. The installation structure of MO source steel cylinder according to claim 1 or 4, wherein the volume of MO source encapsulation space is 4000 mL.

6. The installation structure of a steel cylinder for MO source as claimed in claim 1 or 4, wherein the valve angle between the central axis of said inlet valve and the central axis of said outlet valve is in the range of 10-30 degrees, and said outer inlet pipe section and said outlet pipe section are vertical.

7. The installation structure of MO source steel cylinder according to claim 4, wherein the arc type steel cylinder cover is fixed with a left handle and a right handle which are symmetrically distributed on both sides respectively.

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