CN210398366U

CN210398366U - MO source conical steel cylinder with stable flow saturation

Info

Publication number: CN210398366U
Application number: CN201921221867.4U
Authority: CN
Inventors: 薛亮; 郑江
Original assignee: Changshu Pharmaceutical Machinery Co Ltd
Current assignee: Changshu Pharmaceutical Machinery Co Ltd
Priority date: 2019-07-31
Filing date: 2019-07-31
Publication date: 2020-04-24
Anticipated expiration: 2029-07-31

Abstract

The utility model discloses a MO source conical surface steel bottle with stable flow saturation, including the steel bottle body that is equipped with MO source encapsulation space, steel bottle body upper end is equipped with intake pipe and outlet duct with MO source encapsulation space intercommunication respectively, installs admission valve and air outlet valve on intake pipe and the outlet duct respectively simultaneously, wherein, steel bottle body bottom adopts conical surface steel bottle substructure, conical surface steel bottle substructure includes the cambered surface center bottom that is located the bottom center and the conical surface bottom that extends along cambered surface center bottom an organic whole; the conical steel cylinder bottom structure is fixedly welded on a steel cylinder base matched with the conical steel cylinder bottom structure in a shape corresponding to the conical steel cylinder bottom structure, and an outlet of the air inlet pipe is correspondingly matched with the bottom of the center of the cambered surface and used for forming a high-efficiency bubbling convection area at the bottom of the conical surface; the utility model discloses a conical surface steel bottle substructure forms high-efficient tympanic bulla convection current region bottom the conical surface, can effectively improve the flow saturation in MO source, ensures the result of use when follow-up implementation is used.

Description

MO source conical steel cylinder with stable flow saturation

Technical Field

The utility model belongs to the technical field of MO source packaging container, concretely relates to MO source conical surface steel bottle with stable flow saturation.

Background

MO Source (Metalorganic Source) refers to a high-purity metal organic compound (typical main materials include trimethyl gallium, triethyl gallium, trimethyl indium, triethyl indium, trimethyl aluminum, etc.) used as a basic material in MOCVD epitaxial technology, and in the foreign literature, MO Source is also generally called "precursor of MOCVD", and is currently widely used in LED epitaxial wafer manufacturing industry.

As described in the background of the invention of chinese patent publication No. CN109852948A, MO cells need to be stored in MO cylinder supply equipment with high cleanliness and high packaging effect while being protected by inert gas. As further mentioned in CN109852948A, the crystal size, the stacking degree and the material height of the MO source in the storage tank all affect the MO source concentration of the MO source steel cylinder, which can also be called as MO source flow saturation, and further seriously affect the use effect of the MO source in the implementation.

Therefore, the market is eagerly seeking a technical solution to improve the above technical problems. Meanwhile, based on years of research and accumulated development experience of the inventor in the field of MO source steel cylinder products, the inventor decides to respectively provide corresponding solutions for MO source steel cylinders with different volume specifications, and further improves the problem of flow saturation of the MO source steel cylinders.

Disclosure of Invention

In view of this, the utility model aims at providing a MO source conical surface steel bottle with stable flow saturation, through conical surface steel bottle substructure, form high-efficient tympanic bulla convection region bottom the conical surface, can effectively improve the flow saturation of MO source, the result of use when ensureing follow-up implementation and application.

The utility model adopts the technical scheme as follows:

an MO source conical steel cylinder with stable flow saturation comprises a steel cylinder body provided with an MO source packaging space, wherein the upper end part of the steel cylinder body is respectively provided with an air inlet pipe and an air outlet pipe which are communicated with the MO source packaging space, and the air inlet pipe and the air outlet pipe are respectively provided with an air inlet valve and an air outlet valve; the conical surface steel cylinder bottom structure is fixedly welded on a steel cylinder base matched with the conical surface steel cylinder bottom structure in a corresponding mode, the outlet of the air inlet pipe is matched with the bottom of the center of the cambered surface in a corresponding mode, and a high-efficiency bubbling convection area is formed at the bottom of the conical surface.

Preferably, the upper end of the bottom of the conical surface is integrally connected with the steel cylinder body through an arc transition surface, and the arc transition surface is used as a welding position with the steel cylinder base.

Preferably, the volume of the MO source encapsulation space is 2500 mL.

Preferably, the intake pipe includes that fixed sealing connects as an organic whole and is located the outside pipeline section of admitting air of MO source encapsulation space and being located the inside interior pipeline section of admitting air of MO source encapsulation space, wherein, interior pipeline section of admitting air is the form of buckling, just the export of interior pipeline section of admitting air with cambered surface center bottom corresponds the cooperation and is in the conical surface bottom forms high-efficient tympanic bulla convection region.

Preferably, a pressure sensor joint is further arranged at the upper end part of the steel cylinder body between the air inlet pipe and the air outlet pipe, and is used for detecting the flow pressure of the MO source in the MO source packaging space; meanwhile, the central axis of the pressure sensor joint coincides with the central axis of the bottom of the center of the cambered surface.

Preferably, the range of an air valve included angle between the central axis of the air inlet valve and the central axis of the air outlet valve is 10-30 degrees, and the outer air inlet pipe section and the air outlet pipe are both vertical.

The utility model discloses a set up by the cambered surface center bottom that is located the bottom center and along the integrative conical surface bottom that extends of cambered surface center bottom and form conical surface steel bottle bottom structure, can form high-efficient tympanic bulla convection region in the conical surface bottom on the one hand, this high-efficient tympanic bulla convection region can effectively avoid MO source to take place crystal form size, pile up degree and material height scheduling problem in the MO source encapsulation space of steel bottle body, can effectively improve the flow saturation of MO source, ensure the result of use when the follow-up implementation is used; on the other hand, the structural design of cambered surface center bottom can ensure its firm welding effect with the steel bottle base again, simultaneously the utility model discloses simple structure, easily machine-shaping.

Drawings

FIG. 1 is a schematic structural diagram of an MO source conical steel cylinder 100 with stable flow saturation according to an embodiment of the present invention;

fig. 2 is a top view of fig. 1.

Detailed Description

The embodiment of the utility model discloses MO source conical surface steel bottle with stable flow saturation, including the steel bottle body that is equipped with MO source encapsulation space, steel bottle body upper end is equipped with intake pipe and outlet duct with MO source encapsulation space intercommunication respectively, installs admission valve and air outlet valve on intake pipe and the outlet duct respectively simultaneously, wherein, steel bottle body bottom adopts conical surface steel bottle substructure, conical surface steel bottle substructure includes the cambered surface center bottom that is located the bottom center and the conical surface bottom that extends along cambered surface center bottom an organic whole; the conical surface steel cylinder bottom structure is fixedly welded on a steel cylinder base matched with the conical surface steel cylinder bottom structure in a corresponding mode, and an outlet of the air inlet pipe is matched with the bottom of the center of the cambered surface in a corresponding mode and used for forming a high-efficiency bubbling convection area at the bottom of the conical surface.

The embodiment of the utility model provides a through setting up the conical surface steel bottle bottom structure that is formed by the cambered surface center bottom that is located the bottom center and the conical surface bottom that extends along cambered surface center bottom an organic whole, can form high-efficient tympanic bulla convection current region in the conical surface bottom on the one hand, this high-efficient tympanic bulla convection current region can effectively avoid the MO source to take place crystal form size, pile up degree and material height scheduling problem in the MO source encapsulation space of steel bottle body, can effectively improve the flow saturation of MO source, the result of use when ensureing to implement the application; on the other hand, the structural design of cambered surface center bottom can ensure its firm welding effect with the steel bottle base again, simultaneously the utility model discloses simple structure, easily machine-shaping.

In order to make the technical solutions in the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall belong to the protection scope of the present invention.

Referring to fig. 1 and 2, an MO source conical cylinder 100 with stable flow saturation includes a cylinder body 120 having an MO source enclosure space 110 and a cylinder base 130, and preferably, in this embodiment, the volume of the MO source enclosure space 110 is 2500 mL;

in the present embodiment, the upper end of the cylinder body 120 is respectively provided with an air inlet pipe 140 and an air outlet pipe 150 which are communicated with the MO source enclosure space 110, and the air inlet pipe 140 and the air outlet pipe 150 are respectively provided with an air inlet valve 160a and an air outlet valve 160b, preferably, in the present embodiment, the air inlet pipe 140 comprises an outer air inlet pipe section 141 which is fixedly and hermetically connected as a whole and is located outside the MO source enclosure space 110 and an inner air inlet pipe section 142 which is located inside the MO source enclosure space 110, wherein the inner air inlet pipe section 142 is bent;

the bottom of the steel cylinder body adopts a conical steel cylinder bottom structure 200, and the conical steel cylinder bottom structure 200 comprises an arc surface center bottom 210 positioned in the center of the bottom and a conical surface bottom 220 integrally extending along the arc surface center bottom 210; the conical cylinder bottom structure 200 is fixedly welded on the cylinder base 130 which is correspondingly matched with the shape of the conical cylinder bottom structure, and the outlet 143 of the inner gas inlet pipe section 142 is correspondingly matched with the cambered surface center bottom 210 to form a high-efficiency bubbling convection area 300 at the conical surface bottom 220;

preferably, in this embodiment, the upper end of the conical bottom 220 is integrally connected to the cylinder body 120 via the arc transition surface 230, and the arc transition surface 230 serves as a welding position with the cylinder base 130;

preferably, in this embodiment, a pressure sensor joint 170 is further disposed at the upper end of the cylinder body 120 between the outer gas inlet pipe section 141 and the gas outlet pipe section 150 for detecting the flow pressure of the MO source in the MO source enclosure 110; meanwhile, the central axis of the pressure sensor joint 170 coincides with the central axis of the cambered surface center bottom 210;

preferably, in this embodiment, the valve angle between the central axis of the inlet valve 160a and the central axis of the outlet valve 160b ranges from 10 degrees to 30 degrees, and the outer inlet pipe section 141 and the outlet pipe section 150 are vertical.

In the following implementation and application of the embodiment, the MO source conical steel cylinder 100 is placed in the constant temperature water bath, then the air inlet valve 160a and the air outlet valve 160b are opened, the inert gas is input into the MO source packaging space 110 through the air inlet pipe 140, and the MO source in the MO source packaging space 110 generates a bubbling effect, so that the MO source is evaporated, a mixture of the MO source saturated steam and the inert gas is conveyed to a corresponding process through the air outlet pipe 150, and the flow and pressure change of the MO source in the MO source conical steel cylinder 100 can be immediately judged through the pressure sensor joint 170; the MO source vapor of the present embodiment can realize good bubbling convection in the MO source encapsulation space 110, thereby avoiding the MO source accumulation and effectively improving the flow saturation of the MO source.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. An MO source conical steel cylinder with stable flow saturation is characterized by comprising a steel cylinder body provided with an MO source packaging space, wherein the upper end part of the steel cylinder body is respectively provided with an air inlet pipe and an air outlet pipe which are communicated with the MO source packaging space, and the air inlet pipe and the air outlet pipe are respectively provided with an air inlet valve and an air outlet valve; the conical surface steel cylinder bottom structure is fixedly welded on a steel cylinder base matched with the conical surface steel cylinder bottom structure in a corresponding mode, the outlet of the air inlet pipe is matched with the bottom of the center of the cambered surface in a corresponding mode, and a high-efficiency bubbling convection area is formed at the bottom of the conical surface.

2. The tapered cylinder for a MO source with stable flow saturation according to claim 1, wherein the upper end of the bottom of the tapered surface is integrally connected to the cylinder body through a circular arc transition surface, and the circular arc transition surface serves as a welding position with the cylinder base.

3. The tapered cylinder for a MO source with constant flow saturation of claim 1, wherein the volume of said MO source enclosure space is 2500 mL.

4. The tapered cylinder for a MO source with stable flow saturation according to claim 1, wherein the gas inlet tube comprises an outer gas inlet tube section and an inner gas inlet tube section, the outer gas inlet tube section and the inner gas inlet tube section are fixedly and hermetically connected into a whole and located outside the MO source encapsulation space, the inner gas inlet tube section is bent, and an outlet of the inner gas inlet tube section and the bottom of the center of the arc surface are correspondingly matched to form a high-efficiency bubbling convection region at the bottom of the tapered surface.

5. The tapered cylinder for a MO source having a stable flow saturation as claimed in claim 1, wherein a pressure sensor connector is further provided at the upper end of said cylinder body between said inlet pipe and said outlet pipe for detecting the flow pressure of the MO source in said MO source enclosure space; meanwhile, the central axis of the pressure sensor joint coincides with the central axis of the bottom of the center of the cambered surface.

6. The tapered cylinder for a source of MO gas with stable flow saturation of claim 4, wherein the valve angle between the central axis of said inlet valve and the central axis of said outlet valve is in the range of 10-30 degrees, and said outer inlet tube section and said outlet tube section are vertical.