CN210261976U - Cylindrical MO source steel cylinder - Google Patents
Cylindrical MO source steel cylinder Download PDFInfo
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- CN210261976U CN210261976U CN201921221783.0U CN201921221783U CN210261976U CN 210261976 U CN210261976 U CN 210261976U CN 201921221783 U CN201921221783 U CN 201921221783U CN 210261976 U CN210261976 U CN 210261976U
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Abstract
The utility model discloses a cylindrical MO source steel cylinder, which comprises a cylindrical steel cylinder body provided with an MO source packaging space, wherein the upper end part of the steel cylinder body is respectively provided with an air inlet pipe and an air outlet pipe which are communicated with the MO source packaging space, and the air inlet pipe and the air outlet pipe are respectively provided with an air inlet valve and an air outlet valve; the air inlet pipe comprises an outer air inlet pipe section and an inner air inlet pipe section, wherein the outer air inlet pipe section and the inner air inlet pipe section are fixedly, hermetically and integrally connected and are positioned outside the MO source packaging space; the utility model discloses a carry out simple improvement to self structure, can effectively improve the flow saturation in MO source, the result of use when ensureing follow-up implementation and application.
Description
Technical Field
The utility model belongs to the technical field of MO source packaging container, concretely relates to cylinder type MO source steel bottle.
Background
MO Source (Metalorganic Source) refers to a high-purity metal organic compound (typical main materials include trimethyl gallium, triethyl gallium, trimethyl indium, triethyl indium, trimethyl aluminum, etc.) used as a basic material in MOCVD epitaxial technology, and in the foreign literature, MO Source is also generally called "precursor of MOCVD", and is currently widely used in LED epitaxial wafer manufacturing industry.
As described in the background of the invention of chinese patent publication No. CN109852948A, MO cells need to be stored in MO cylinder supply equipment with high cleanliness and high packaging effect while being protected by inert gas. As further mentioned in CN109852948A, the crystal size, the stacking degree and the material height of the MO source in the storage tank all affect the MO source concentration of the MO source steel cylinder, which can also be called as MO source flow saturation, and further seriously affect the use effect of the MO source in the implementation.
Therefore, the market is eagerly seeking a technical solution to improve the above technical problems. Meanwhile, based on years of research and accumulated development experience of the inventor in the field of MO source steel cylinder products, the inventor decides to respectively provide corresponding solutions for MO source steel cylinders with different volume specifications, and further improves the problem of flow saturation of the MO source steel cylinders.
Disclosure of Invention
In view of this, the utility model aims at providing a cylinder type MO source steel bottle through carrying out simple improvement to self structure, can effectively improve the flow saturation in MO source, the result of use when ensureing follow-up implementation and application.
The utility model adopts the technical scheme as follows:
a cylindrical MO source steel cylinder comprises a cylindrical steel cylinder body provided with an MO source packaging space, wherein the upper end part of the steel cylinder body is respectively provided with an air inlet pipe and an air outlet pipe which are communicated with the MO source packaging space, and the air inlet pipe and the air outlet pipe are respectively provided with an air inlet valve and an air outlet valve; the intake pipe includes that fixed sealing connects as an organic whole and is located the outside pipeline section of admitting air outward in MO source encapsulation space and being located the inside pipeline section of admitting air in MO source encapsulation space, wherein, in the MO source encapsulation space still fixed welding have with the parallel tympanic bulla convection baffle of steel bottle body bottom plate, tympanic bulla convection baffle runs through the pipeline section of admitting air in makes the entry of the pipeline section of admitting air in is located tympanic bulla convection baffle top, the export of the pipeline section of admitting air in is located tympanic bulla convection baffle below, simultaneously be equipped with a plurality of tympanic bulla convection mouths on the tympanic bulla convection baffle.
Preferably, the inner air inlet pipe section is bent, and an air inlet included angle is formed between the inner air inlet pipe section and the bottom plate of the steel cylinder body; wherein the bubbling convection baffle penetrates through the bent section of the inner air inlet pipe section.
Preferably, the included intake angle is in the range of 40-70 degrees.
Preferably, the volume of the MO source encapsulation space is 1000 mL.
Preferably, an adjusting groove for improving the flow saturation of the MO source is arranged on the inner side of the bottom plate of the steel cylinder body corresponding to the center of the bottom of the MO source packaging space, and the adjusting groove is correspondingly matched with the outlet of the inner gas inlet pipe section to form a bubbling convection space.
Preferably, the section of the adjusting groove is in a semicircular shape.
Preferably, a pressure sensor joint is further arranged at the upper end part of the steel cylinder body between the air inlet pipe and the air outlet pipe, and is used for detecting the flow pressure of the MO source in the MO source packaging space; meanwhile, the central axis of the pressure sensor joint coincides with the central axis of the adjusting groove.
Preferably, the range of an air valve included angle between the central axis of the air inlet valve and the central axis of the air outlet valve is 10-30 degrees, and the outer air inlet pipe section and the air outlet pipe are both vertical.
The utility model discloses the fixed tympanic bulla convection baffle that sets up in MO source encapsulation space is proposed for the first time, the tympanic bulla convection baffle runs through interior air inlet pipe section for the entry of interior air inlet pipe section is located tympanic bulla convection baffle top, the export of interior air inlet pipe section is located tympanic bulla convection baffle below, through experimental verification discovery, inert gas through the intake pipe input can effectively improve the steam pressure in MO source under the separation effort of tympanic bulla convection baffle, and then can improve the flow saturation in MO source, the result of use when ensureing to implement the application;
the utility model discloses still further creatively provide and set up and correspond the complex regulation recess with interior intake pipe section export in MO source encapsulation space bottom, can form high-efficient tympanic bulla convection current space through this cooperation structure that corresponds, effectively increase intake pipe input inert gas and MO source encapsulation space's area of contact for MO source flow saturation in the MO source encapsulation space obtains effectively improving, avoids as far as possible because the MO source concentration and the degree of consistency that crystal form size, bulk density and material height etc. factor lead to MO source encapsulation space receive negative effects, ensure the utility model discloses in the subsequent result of use when implementing the application.
Drawings
FIG. 1 is a schematic structural view of a cylindrical MO source steel cylinder 10 according to an embodiment of the present invention;
FIG. 2 is a top view of FIG. 1;
FIG. 3 is an enlarged view of the structure at A in FIG. 1;
fig. 4 is an enlarged view of the structure at B in fig. 1.
Detailed Description
The embodiment of the utility model discloses a cylindrical MO source steel bottle, which comprises a cylindrical steel bottle body provided with an MO source packaging space, wherein the upper end part of the steel bottle body is respectively provided with an air inlet pipe and an air outlet pipe which are communicated with the MO source packaging space, and the air inlet pipe and the air outlet pipe are respectively provided with an air inlet valve and an air outlet valve; the intake pipe includes that fixed sealing connects as an organic whole and is located the outside outer pipeline section of admitting air in MO source encapsulation space and is located the inside interior pipeline section of admitting air in MO source encapsulation space, wherein, still fixed weld has the tympanic bulla convection baffle parallel with steel bottle body bottom plate in the MO source encapsulation space, the tympanic bulla convection baffle runs through interior pipeline section of admitting air and makes the entry of the interior pipeline section of admitting air be located tympanic bulla convection baffle top, the export of interior pipeline section of admitting air is located tympanic bulla convection baffle below, be equipped with a plurality of tympanic bulla convection mouths on the tympanic bulla convection baffle simultaneously.
The embodiment of the utility model provides a propose for the first time at MO source encapsulation space internal fixation and set up tympanic bulla convection baffle, the tympanic bulla convection baffle runs through interior intake pipe section of admitting air for the entry of interior intake pipe section is located tympanic bulla convection baffle top, the export of interior intake pipe section is located tympanic bulla convection baffle below, inert gas through the intake pipe input is under the separation effort of tympanic bulla convection baffle, can effectively improve the steam pressure in MO source, and then can improve the flow saturation in MO source, the result of use when ensureing follow-up implementation and applying.
In order to make the technical solutions in the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall belong to the protection scope of the present invention.
Referring to fig. 1 and 2, a cylindrical MO source steel cylinder 10 includes a cylindrical steel cylinder body 12 having an MO source enclosure space 11, preferably, in the present embodiment, the volume of the MO source enclosure space is 1000 mL;
in this embodiment, the upper end of the steel cylinder body 12 is provided with an inlet pipe 13 and an outlet pipe 14 respectively communicated with the MO source enclosure 11, and the inlet pipe 13 and the outlet pipe 14 are provided with an inlet valve 15a and an outlet valve 15b respectively; the air inlet pipe 13 comprises an outer air inlet pipe section 131 and an inner air inlet pipe section 132, wherein the outer air inlet pipe section 131 and the inner air inlet pipe section 132 are fixedly, hermetically and integrally connected and are located outside the MO source packaging space 11, and the inner air inlet pipe section 132 is located inside the MO source packaging space 11, wherein please refer to fig. 3, a bubbling convection partition plate 122 parallel to the steel cylinder body bottom plate 121 is further fixedly welded in the MO source packaging space 11, the bubbling convection partition plate 122 penetrates through the inner air inlet pipe section 132 so that an inlet 133 of the inner air inlet pipe section 132 is located above the bubbling convection partition plate 122, an outlet 134 of the inner air inlet pipe section 132 is located below the bubbling convection partition plate 122, and a plurality of;
preferably, in the present embodiment, the inner air inlet pipe section 132 is bent and forms an air inlet included angle with the cylinder body bottom plate 121, and preferably, in the present embodiment, the air inlet included angle ranges from 40 degrees to 70 degrees; wherein, the bubbling convection baffle 122 penetrates through the bending section of the inner air inlet pipe section 132, further facilitating the bubbling convection effect;
preferably, as shown in fig. 4, in the present embodiment, an adjusting groove 123 for increasing the flow saturation of the MO source is disposed on the inner side of the bottom plate 121 of the cylinder body corresponding to the center of the bottom of the MO source enclosure space 11, and the adjusting groove 123 is correspondingly matched with the outlet 134 of the inner gas inlet pipe section 132 to form the bubbling convection space 16; further preferably, in the present embodiment, the cross section of the adjustment groove 123 is in a semicircular shape;
preferably, in the present embodiment, a pressure sensor connector 17 is further disposed at the upper end of the steel cylinder body 12 between the inlet pipe 13 and the outlet pipe 14 for detecting the flow pressure of the MO source in the MO source enclosure 11; meanwhile, the central axis of the pressure sensor joint 17 coincides with the central axis of the adjusting groove 123;
preferably, in the present embodiment, the valve angle between the central axis of the inlet valve 15a and the central axis of the outlet valve 15b ranges from 10 degrees to 30 degrees, and the outer inlet pipe segment 131 and the outlet pipe 14 are both vertical.
In the embodiment, when the subsequent application is carried out, the cylindrical MO source steel cylinder 10 is placed in the constant temperature water bath, then the air inlet valve 15a and the air outlet valve 15b are opened, the inert gas is input into the MO source packaging space 11 through the air inlet pipe 13, and the MO source in the MO source packaging space 11 generates a bubbling effect, so that the MO source is evaporated, a mixture of the saturated steam of the MO source and the inert gas is conveyed to a corresponding process through the air outlet pipe 14, and the flow and pressure change of the MO source in the cylindrical MO source steel cylinder 10 can be immediately judged through the pressure sensor connector 17; the MO source steam of this embodiment can realize good tympanic bulla convection current in MO source encapsulation space 11, avoids the MO source to pile up, can effectively improve the flow saturation of MO source.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (8)
1. A cylindrical MO source steel cylinder is characterized by comprising a cylindrical steel cylinder body provided with an MO source packaging space, wherein the upper end part of the steel cylinder body is respectively provided with an air inlet pipe and an air outlet pipe which are communicated with the MO source packaging space, and the air inlet pipe and the air outlet pipe are respectively provided with an air inlet valve and an air outlet valve; the intake pipe includes that fixed sealing connects as an organic whole and is located the outside pipeline section of admitting air outward in MO source encapsulation space and being located the inside pipeline section of admitting air in MO source encapsulation space, wherein, in the MO source encapsulation space still fixed welding have with the parallel tympanic bulla convection baffle of steel bottle body bottom plate, tympanic bulla convection baffle runs through the pipeline section of admitting air in makes the entry of the pipeline section of admitting air in is located tympanic bulla convection baffle top, the export of the pipeline section of admitting air in is located tympanic bulla convection baffle below, simultaneously be equipped with a plurality of tympanic bulla convection mouths on the tympanic bulla convection baffle.
2. The cylinder type MO source steel cylinder as claimed in claim 1, wherein said inner gas inlet pipe section is bent and forms a gas inlet angle with the bottom plate of said steel cylinder body; wherein the bubbling convection baffle penetrates through the bent section of the inner air inlet pipe section.
3. The cylinder type MO source steel cylinder as claimed in claim 2, wherein the included angle of gas inlet is in the range of 40-70 degrees.
4. The cylindrical MO source cylinder of claim 1, wherein the MO source enclosure volume is 1000 mL.
5. The cylinder type MO source steel cylinder as claimed in claim 1, wherein an adjusting groove for increasing the flow saturation of the MO source is provided on the inner side of the bottom plate of the steel cylinder body corresponding to the center of the bottom of the MO source enclosure space, and the adjusting groove is correspondingly matched with the outlet of the inner gas inlet pipe section to form a bubbling convection space.
6. The cylinder type MO source steel cylinder as claimed in claim 5, wherein the cross-section of said regulating groove is in the shape of a half circle.
7. The cylinder type MO source steel cylinder of claim 5, wherein a pressure sensor connector is further provided at the upper end of said steel cylinder body between said inlet pipe and said outlet pipe for detecting the flow pressure of MO source in said MO source enclosure space; meanwhile, the central axis of the pressure sensor joint coincides with the central axis of the adjusting groove.
8. The cylindrical MO source steel cylinder as claimed in claim 1, wherein an included angle between the central axis of the gas inlet valve and the central axis of the gas outlet valve is in a range of 10-30 degrees, and the outer gas inlet pipe section and the gas outlet pipe are vertical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921221783.0U CN210261976U (en) | 2019-07-31 | 2019-07-31 | Cylindrical MO source steel cylinder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921221783.0U CN210261976U (en) | 2019-07-31 | 2019-07-31 | Cylindrical MO source steel cylinder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210261976U true CN210261976U (en) | 2020-04-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921221783.0U Active CN210261976U (en) | 2019-07-31 | 2019-07-31 | Cylindrical MO source steel cylinder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210261976U (en) |
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2019
- 2019-07-31 CN CN201921221783.0U patent/CN210261976U/en active Active
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