CN213053559U - Chemical vapor deposition CVD outer tube - Google Patents
Chemical vapor deposition CVD outer tube Download PDFInfo
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- CN213053559U CN213053559U CN201922315384.7U CN201922315384U CN213053559U CN 213053559 U CN213053559 U CN 213053559U CN 201922315384 U CN201922315384 U CN 201922315384U CN 213053559 U CN213053559 U CN 213053559U
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- quartz plate
- outer tube
- butt joint
- fixed
- vapor deposition
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Abstract
The utility model discloses a chemical meteorology deposit CVD outer tube, including quartz plate, butt joint outer tube, top cap, counter weight edge, internal orifice, quartz plate, outer to the interface, quartz plate and butt joint outer tube welding structure as an organic whole, butt joint outer tube front end is fixed with the top cap, quartz plate is the annular, and is located the quartz plate external fixation and is equipped with the counter weight edge, it has the internal orifice to open on the quartz plate, is located the quartz plate internal close-door neighbour internal orifice department is fixed with the quartz plate, the quartz plate overlap joint is on the quartz plate internal slope face, quartz plate and quartz plate welded fastening.
Description
Technical Field
The utility model relates to a quartzy technical field especially relates to a chemical meteorological deposit CVD outer tube.
Background
The existing chemical vapor deposition outer pipe is small in size, simple in processing, but poor in durability, and is not beneficial to operation due to the fact that the original seal head adopts the round sealing head, meanwhile, the butt joint of the original flange adopts a direct butt joint mode, usability and the outer pipe cannot meet the existing use requirements, and therefore the applicant designs the novel chemical vapor deposition CVD outer pipe according to needs.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a chemical vapor deposition CVD outer tube to solve the problem that proposes among the above-mentioned background art.
The utility model aims at realizing through the following technical scheme: the utility model provides a chemical vapor deposition CVD outer tube, includes quartz plate, butt joint outer tube, top cap, counter weight edge, internal orifice, quartz plate, outer to the interface, quartz plate and butt joint outer tube welding structure as an organic whole, butt joint outer tube front end is fixed with the top cap.
Furthermore, the quartz plate is annular, and a counterweight edge is fixedly arranged outside the quartz plate.
Furthermore, an inner opening is formed in the quartz plate, a quartz plate is located in the quartz plate and is close to the inner opening, a quartz plate is fixed at the inner opening, the quartz plate is in lap joint with the inner inclined surface of the quartz plate, and the quartz plate are fixed in a welding mode.
Furthermore, a through hole is formed in the quartz plate, and the through hole is smaller than the caliber of the inner opening.
Further, the top cap is the arc, arc radius 300mm, the top cap passes through welding mode with the butt joint outer tube to be fixed, and is located the circular arc transition zone that the junction of top cap and butt joint outer tube is fixed with R35.
Furthermore, the quartz plate is provided with an outer butt joint, a slope angle is formed on the outer butt joint, and the slope angle and the horizontal direction form an angle of 40 degrees.
Furthermore, the inner inclined plane of the quartz plate is in a wide mouth shape, and the inclined plane forms 40 degrees with the horizontal direction.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses a main pipe body expander of butt joint outer tube, originally adopt and utilize German Arnold expander, independently research and development expander technology is operated, independently research and development expander technology, makes the female pipe enlarge to phi 450 6 1300 by phi 200 9 3500, and it is big to have overcome female pipe wall thickness in the processing, and the expander time is long, easily produces the problem of devitrification and granule. The end socket is improved into the existing flat bottom and the method of pasting, the original end socket can not meet the appearance requirement, the wall thickness is thick, an operator can not enable the thickness of the arc top to meet the drawing requirement, the circular V-shaped bending method is adopted to be in butt joint with the pipe body, the arc of the top plate is ensured to be flat and smooth, and the arc is synchronous with the international advanced level. The butt joint of the main body pipe of the outer pipe and the quartz plate is improved by adopting a flange winding mode for the quartz plate and the butt joint outer pipe and a flange winding process for the large flange of the pipe body. The utility model discloses a diameter is big, and the body wall thickness requires that the plane degree is high, and the transparency is high, and whole is bulky.
Drawings
Fig. 1 is an overall schematic view of the present invention.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, rather than all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without creative work belong to the protection scope of the present invention based on the embodiments of the present invention.
As shown in figure 1, the chemical vapor deposition CVD outer tube comprises a quartz plate 1, a butt joint outer tube 2, a top cover 3, a counterweight edge 4, an inner opening 5, a quartz plate 6 and an outer butt joint opening 7, wherein the quartz plate 1 and the butt joint outer tube 2 are welded into an integral structure, and the top cover 3 is fixed at the front end of the butt joint outer tube 2.
In this embodiment, the quartz plate 1 is annular, and a counterweight edge 4 is fixedly disposed outside the quartz plate 1.
In this embodiment, the quartz plate 1 is provided with an inner opening 5, a quartz plate 6 is fixed in the quartz plate 1 adjacent to the inner opening 5, the quartz plate 6 is lapped on an inner inclined surface of the quartz plate 1, and the quartz plate 6 is welded and fixed with the quartz plate 1.
In this embodiment, the quartz plate 6 is provided with a through hole, and the through hole is smaller than the caliber of the inner opening 5.
In this embodiment, top cap 3 is the arc, arc radius 300mm, top cap 3 passes through welded mode with butt joint outer tube 2 and fixes, and is located the circular arc transition zone that top cap 3 and butt joint outer tube 2's junction is fixed with R35.
In this embodiment, the quartz plate 1 is provided with an outer butt joint 7, and a slope angle is formed on the outer butt joint 7, and the slope angle forms an angle of 40 degrees with the horizontal direction.
In this embodiment, the inner inclined surface of the quartz plate 1 is in a wide mouth shape, and the inclined surface is 40 degrees from the horizontal direction.
The utility model discloses a butt joint of quartz plate, butt joint outer tube adopts and twines the flange mode and connect, obviously improve original interface seal for twining the flange, twine quartz strip piece on former pipe promptly, make body and flange an organic whole, all reach an-class level from outward appearance and usability.
The pipe consists of a main pipe body, a top plate and a flange, wherein the flange surface is a sealing surface, the flatness is required to be less than 1mm, and air leakage is prevented. The top cover is arc-shaped, so that gas can be diffused from top to bottom more uniformly, the tube is equivalent to a large-scale sealed container, quartz parts necessary in the CVD process, such as a quartz boat, a heat-insulating tube, an inner tube and the like, are arranged in the tube, and gas required by the quartz parts is slowly filled into the tube body under the action of pressure through the nozzle and is diffused to each part of the tube body from top to bottom. Slowly depositing on the surface of the silicon wafer under the action of temperature. Because the used gas is toxic and harmful gas, the sealing surface flange is ensured to be matched with the silica gel O ring for use when in use, and the inner part is ensured to be 1 multiplied by 10-3The vacuum state of the CVD process is airtight, and the CVD process chemical vapor deposition is completed.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (4)
1. A chemical vapor deposition CVD outer tube, characterized by: comprises a quartz plate (1), a butt joint outer tube (2), a top cover (3), a counterweight edge (4), an inner opening (5), a quartz plate (6) and an outer butt joint opening (7), the quartz plate (1) and the butt joint outer tube (2) are welded into an integral structure, a top cover (3) is fixed at the front end of the butt joint outer tube (2), the quartz plate (1) is annular, a balance weight edge (4) is fixedly arranged outside the quartz plate (1), an inner opening (5) is arranged on the quartz plate (1), a quartz plate (6) is fixed in the quartz plate (1) and is close to the inner opening (5), the quartz plate (6) is lapped on the inner inclined plane of the quartz plate (1), the quartz plate (6) is welded and fixed with the quartz plate (1), the quartz plate (1) is provided with an outer butt joint (7), a slope angle is formed on the outer butt joint (7), and the slope angle and the horizontal direction form an angle of 40 degrees.
2. A chemical vapor deposition CVD outer tube according to claim 1, wherein: the quartz plate (6) is provided with a through hole, and the through hole is smaller than the caliber of the inner opening (5).
3. A chemical vapor deposition CVD outer tube according to claim 1, wherein: top cap (3) are the arc, arc radius 300mm, top cap (3) are fixed through welding mode with butt joint outer tube (2), and are located top cap (3) and the junction of butt joint outer tube (2) and are fixed with the circular arc transition region of R35.
4. A chemical vapor deposition CVD outer tube according to claim 1, wherein: the inner inclined plane of the quartz plate (1) is in a wide-mouth shape, and the inclined plane forms 40 degrees with the horizontal direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922315384.7U CN213053559U (en) | 2019-12-21 | 2019-12-21 | Chemical vapor deposition CVD outer tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922315384.7U CN213053559U (en) | 2019-12-21 | 2019-12-21 | Chemical vapor deposition CVD outer tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213053559U true CN213053559U (en) | 2021-04-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922315384.7U Active CN213053559U (en) | 2019-12-21 | 2019-12-21 | Chemical vapor deposition CVD outer tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213053559U (en) |
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2019
- 2019-12-21 CN CN201922315384.7U patent/CN213053559U/en active Active
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