CN210420136U - Sputtering coating system with flying clamp - Google Patents
Sputtering coating system with flying clamp Download PDFInfo
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- CN210420136U CN210420136U CN201921083819.3U CN201921083819U CN210420136U CN 210420136 U CN210420136 U CN 210420136U CN 201921083819 U CN201921083819 U CN 201921083819U CN 210420136 U CN210420136 U CN 210420136U
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Abstract
The utility model discloses a take flight fixture sputter coating system, this novel take flight fixture sputter coating system includes sputter coating system, drying cabinet and reaction box, the one end of coating system is equipped with first intake pipe and second intake pipe, the one end of first intake pipe and second intake pipe is equipped with pressure transmitter respectively, pressure transmitter and gas holder connection, the other end of first intake pipe and second intake pipe in proper order with drying cabinet, detection case, electrolysis box and reaction box, be equipped with the barometer on the detection case, be equipped with the water tank between electrolysis box and the reaction box, the terminal surface of reaction box is equipped with exhaust outlet and gas backflow case, the backflow case passes through pipe and gas holder connection; this novel take flight fixture sputter coating system stable in structure, the leakproofness is good, and waste gas is easily got rid of and the residual gas reuse of being convenient for saves the resource, is fit for using widely.
Description
Technical Field
The utility model relates to a take flight fixture sputter coating system belongs to filming equipment technical field.
Background
The sputtering coating is one of physical vapor deposition, a general sputtering method can be used for preparing various materials such as metal, semiconductor, insulator and the like, and has the advantages of simple equipment, easy control, large coating area, strong adhesive force and the like.
In order to solve the problems of the prior art, the utility model discloses a sputtering coating system with a flying fixture, which comprises a sputtering coating system, a drying box and a reaction box, wherein one end of the coating system is provided with a first intake pipe and a second intake pipe, one ends of the first intake pipe and the second intake pipe are respectively provided with a pressure transmitter, the pressure transmitter is connected with a gas storage tank, the other ends of the first intake pipe and the second intake pipe are sequentially connected with the drying box, a detection box, an electrolytic box and the reaction box, the detection box is provided with a barometer, a water tank is arranged between the electrolytic box and the reaction box, the end surface of the reaction box is provided with a waste gas outlet and a gas return box, and the return box is connected with the gas storage tank through a guide pipe; this novel take flight fixture sputter coating system stable in structure, the leakproofness is good, and waste gas is easily got rid of and the residual gas reuse of being convenient for saves the resource, is fit for using widely.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects in the prior art, the sputtering coating system with the flying clamp comprises a sputtering coating system, a drying box and a reaction box, wherein one end of the coating system is provided with a first air inlet pipe and a second air inlet pipe, one end of the first air inlet pipe and one end of the second air inlet pipe are respectively provided with a pressure transmitter, the pressure transmitter is connected with an air storage tank, the other ends of the first air inlet pipe and the second air inlet pipe are sequentially connected with the drying box, a detection box, an electrolytic box and the reaction box, a barometer is arranged on the detection box, a water tank is arranged between the electrolytic box and the reaction box, the end face of the reaction box is provided with a waste gas outlet and a gas backflow box, and the backflow box is connected with the.
Preferably, the first air inlet pipe and the second air inlet pipe are respectively provided with a gas flow control valve.
Preferably, the drying box, the detection box, the electrolysis box and the reaction box are connected through sealed conduits.
Preferably, the periphery of the inner wall of the sputtering coating system is provided with adsorption cotton.
Preferably, hydrogen or argon is introduced into the first air inlet pipe and the second air inlet pipe.
The utility model discloses a take flight fixture sputter coating system, this novel take flight fixture sputter coating system includes sputter coating system, drying cabinet and reaction box, the one end of coating system is equipped with first intake pipe and second intake pipe, the one end of first intake pipe and second intake pipe is equipped with pressure transmitter respectively, pressure transmitter and gas holder connection, the other end of first intake pipe and second intake pipe in proper order with drying cabinet, detection case, electrolysis box and reaction box, be equipped with the barometer on the detection case, be equipped with the water tank between electrolysis box and the reaction box, the terminal surface of reaction box is equipped with exhaust outlet and gas backflow case, the backflow case passes through pipe and gas holder connection; this novel take flight fixture sputter coating system stable in structure, the leakproofness is good, and waste gas is easily got rid of and the residual gas reuse of being convenient for saves the resource, is fit for using widely.
Drawings
The present invention will be further explained with reference to the drawings and examples.
FIG. 1 is a schematic structural view of a sputtering coating system with a flying fixture according to the present invention;
wherein 1, sputtering coating system; 2. a gas storage tank; 3. a first intake pipe; 4. a second intake pipe; 5. a gas flow control valve; 6. a pressure transmitter; 7. a drying oven; 8. a detection box; 9. an electrolytic tank; 10. a reaction box; 11. a water tank; 12. an exhaust gas outlet; 13. adsorbing cotton; 14. a barometer; 15. and a return tank.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. The attached drawings are simplified schematic diagrams, and merely illustrate the basic structure of the present invention in a schematic manner, and thus show only the components related to the present invention.
In a first specific embodiment, please refer to fig. 1, which illustrates a sputtering coating system with a flight fixture, comprising a sputtering coating system 1, a drying box 7 and a reaction box 10, wherein one end of the coating system 1 is provided with a first air inlet tube 3 and a second air inlet tube 4, one ends of the first air inlet tube 3 and the second air inlet tube 4 are respectively provided with a pressure transmitter 6, the pressure transmitter 6 is connected with a gas storage tank 2, the other ends of the first air inlet tube 3 and the second air inlet tube 4 are sequentially connected with the drying box 7, a detection box 8, an electrolysis box 9 and the reaction box 10, the detection box 8 is provided with a barometer 14, a water tank 11 is arranged between the electrolysis box 9 and the reaction box 10, an end face of the reaction box 10 is provided with a waste gas outlet 12 and a gas reflux box 15, the reflux box 15 is connected with the gas storage tank 2 through a conduit, the first air inlet tube 3 and the second air, the drying box 7, the detection box 8, the electrolytic box 9 and the reaction box 10 are connected through a sealing conduit, adsorption cotton 13 is arranged around the inner wall of the sputtering coating system 1, and hydrogen or argon is introduced into the first air inlet pipe 3 and the second air inlet pipe 4
The utility model discloses a take flight fixture sputter coating system, this novel take flight fixture sputter coating system includes sputter coating system, drying cabinet and reaction box, the one end of coating system is equipped with first intake pipe and second intake pipe, the one end of first intake pipe and second intake pipe is equipped with pressure transmitter respectively, pressure transmitter and gas holder connection, the other end of first intake pipe and second intake pipe in proper order with drying cabinet, detection case, electrolysis box and reaction box, be equipped with the barometer on the detection case, be equipped with the water tank between electrolysis box and the reaction box, the terminal surface of reaction box is equipped with exhaust outlet and gas backflow case, the backflow case passes through pipe and gas holder connection; this novel take flight fixture sputter coating system stable in structure, the leakproofness is good, and waste gas is easily got rid of and the residual gas reuse of being convenient for saves the resource, is fit for using widely.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications can be made without departing from the scope of the invention.
Claims (5)
1. The utility model provides a take flying fixture sputter coating system, includes sputter coating system (1), drying cabinet (7) and reaction box (10), its characterized in that: one end of coating system (1) is equipped with first intake pipe (3) and second intake pipe (4), first intake pipe (3) are equipped with pressure transmitter (6) respectively with the one end of second intake pipe (4), pressure transmitter (6) are connected with gas holder (2), the other end of first intake pipe (3) and second intake pipe (4) in proper order with drying cabinet (7), detection case (8), electrolysis box (9) and reaction box (10), be equipped with barometer (14) on detection case (8), be equipped with water tank (11) between electrolysis box (9) and reaction box (10), the terminal surface of reaction box (10) is equipped with exhaust outlet (12) and gas backflow case (15), backflow case (15) are connected with gas holder (2) through the pipe.
2. The sputtering coating system with the flying fixture according to claim 1, characterized in that: and the first air inlet pipe (3) and the second air inlet pipe (4) are respectively provided with a gas flow control valve (5).
3. The sputtering coating system with the flying fixture according to claim 1, characterized in that: the drying box (7), the detection box (8), the electrolysis box (9) and the reaction box (10) are connected through a sealing conduit.
4. The sputtering coating system with the flying fixture according to claim 1, characterized in that: and adsorption cotton (13) is arranged around the inner wall of the sputtering coating system (1).
5. The sputtering coating system with the flying fixture according to claim 1, characterized in that: and hydrogen or argon is introduced into the first air inlet pipe (3) and the second air inlet pipe (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921083819.3U CN210420136U (en) | 2019-07-11 | 2019-07-11 | Sputtering coating system with flying clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921083819.3U CN210420136U (en) | 2019-07-11 | 2019-07-11 | Sputtering coating system with flying clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210420136U true CN210420136U (en) | 2020-04-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921083819.3U Active CN210420136U (en) | 2019-07-11 | 2019-07-11 | Sputtering coating system with flying clamp |
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| Country | Link |
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| CN (1) | CN210420136U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113059902A (en) * | 2021-02-26 | 2021-07-02 | 芜湖昌立包装有限公司 | Intelligent ink printing machine of carton processing usefulness |
-
2019
- 2019-07-11 CN CN201921083819.3U patent/CN210420136U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113059902A (en) * | 2021-02-26 | 2021-07-02 | 芜湖昌立包装有限公司 | Intelligent ink printing machine of carton processing usefulness |
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