CN210365962U - Turning device - Google Patents

Abstract

The application discloses a turning device, which is used for taking off a carrier hung on a hanger or hanging the carrier on the hanger. This turning device includes: the material receiving mechanism is used for receiving the carriers; the lifting mechanism is used for driving the hanging tool to move up and down or driving the receiving mechanism to move up and down when the receiving mechanism is in a first state so as to enable the carrier to be separated from the hanging tool or enable the carrier to be in butt joint with the hanging tool; and the turnover mechanism is connected with the material receiving mechanism and is used for driving the material receiving mechanism to turn over between a first state and a second state different from the first state. The carrier hung on the hanger can be fixed on the material receiving mechanism through the material receiving mechanism in the first state, and then the lifting mechanism drives the hanger to move or drives the material receiving mechanism to move, so that the carrier is separated from the hanger; when the carrier is separated from the hanger, the material receiving mechanism can be driven to turn from the first state to the second state through the turning mechanism, and then the carrier fixed on the material receiving mechanism can be turned from the first state to the second state.

Description

Turning device

Technical Field

The application belongs to the technical field of carry the carrier, concretely relates to turning device for changing the position of carrier.

Background

The carrier can be used for bearing the workpieces to be processed, and the carrier bearing the workpieces to be processed can be conveyed into the processing equipment through the transfer mechanism. The workpieces processed by the processing equipment can be continuously carried on the carrier, and can be conveyed back to the transfer mechanism from the processing equipment and then conveyed to downstream equipment by the transfer mechanism so as to carry out operations of loading, unloading and the like on the workpieces.

For example, when the workpiece to be processed is a silicon wafer, the system for processing and transporting the silicon wafer may include a mainframe and a transfer mechanism. The mainframe can be used for preparing common silicon wafers (i.e., unprocessed silicon wafers), so that the silicon wafers have high-efficiency conductivity. The transfer mechanism can be used for providing a common silicon chip for the host machine or receiving the silicon chip from the host machine and carrying the prepared silicon chip to be transferred to downstream equipment.

In order to save space, the carrier for bearing the silicon wafer can vertically enter and exit the host machine in the transfer mechanism. However, when loading and unloading the silicon wafers, the carrier needs to be horizontally placed so as to take down the processed silicon wafers and place a new batch of ordinary silicon wafers into the carrier.

Therefore, a corresponding turnover mechanism is needed to take the carrier off from the transfer mechanism and turn the carrier to a state convenient for processing of downstream equipment, or turn the carrier to a state convenient for receiving by the transfer mechanism.

SUMMERY OF THE UTILITY MODEL

The application provides a turning device to solve the technical problem of turning over a carrier between different states.

In order to solve the technical problem, the application adopts a technical scheme that: a turnover device is provided for taking off a carrier hung on a hanger or hanging the carrier on the hanger. The turning device comprises: the material receiving mechanism is used for receiving the carriers; the lifting mechanism is used for driving the hanger to move up and down or driving the receiving mechanism to move up and down when the receiving mechanism is in a first state, so that the carrier is separated from the hanger or the carrier is in butt joint with the hanger; the turnover mechanism is connected with the material receiving mechanism and used for driving the material receiving mechanism to turn over between the first state and a second state different from the first state.

Optionally, the receiving mechanism includes a receiving platform and a fixing component, the receiving platform is used for receiving the carrier, and the fixing component is used for fixing the carrier on the receiving platform.

Optionally, the fixed assembly comprises a fixed part, a first fixed driving part and a second fixed driving part; when the material receiving platform does not receive the carrier, the fixing piece is not higher than the material receiving surface of the material receiving platform, which is used for contacting the carrier, and is far away from the material receiving surface of the material receiving platform; when the material receiving platform receives the carrier, the first fixed driving piece drives the fixing piece to move towards the material receiving surface until the fixing piece protrudes out of the carrier, and the second fixed driving piece drives the fixing piece to move towards the carrier until the fixing piece has a projection on the carrier along a direction perpendicular to the material receiving surface.

Optionally, a material supporting assembly is arranged on one side of the material receiving platform corresponding to the lower end of the carrier, and the material supporting assembly comprises a supporting plate and a material supporting driving member; the material supporting driving piece is used for driving the supporting plate to enable the supporting plate to extend out from a position which is not higher than the material receiving surface of the material receiving platform.

Optionally, the receiving platform is a conveyor belt assembly.

Optionally, the turnover mechanism includes a turnover frame and a turnover driving assembly; the receiving mechanism is rotationally arranged on the turnover rack through a first rotating shaft, and the turnover driving assembly is used for driving the receiving mechanism to rotate around the first rotating shaft.

Optionally, the tumble drive assembly includes a tumble drive, a tumble guide, and a link; one end of the connecting rod is connected with the material receiving mechanism through a second rotating shaft, and the other end of the connecting rod is connected with the overturning guide piece through a third rotating shaft in a sliding manner; the turnover guide piece extends towards the hanger, and the turnover driving piece is used for driving the third rotating shaft to drive the connecting rod to move along the turnover guide piece, so that the connecting rod pushes the material receiving mechanism to rotate around the first rotating shaft.

Optionally, a first buffer piece is arranged on the upper surface, facing the material receiving mechanism, of the turnover rack; and/or a second buffer piece is arranged on the side surface, close to the first rotating shaft, of the turnover machine frame.

Optionally, the lifting mechanism is connected with the material receiving mechanism and used for driving the material receiving mechanism to lift and move; or the lifting mechanism is connected with the turnover mechanism and used for driving the turnover mechanism to drive the material receiving mechanism to lift and move; or the lifting mechanism is connected with the hanger and used for driving the hanger to move up and down.

Optionally, the turnover device further comprises a translation mechanism, and the translation mechanism is used for driving the turnover mechanism to drive the material receiving mechanism to approach and depart from the hanger.

The beneficial effect of this application is: according to the embodiment of the application, a carrier hung on a hanger can be fixed on a material receiving mechanism through the material receiving mechanism in a first state (a state convenient for butting the hanger), and then the hanger is driven to descend or the material receiving mechanism is driven to ascend by a lifting mechanism so that the carrier is separated from the hanger; after the carrier is separated from the hanger, the material receiving mechanism can be driven to be turned from a first state to a second state (a state convenient for butting downstream equipment) through the turning mechanism, so that the carrier fixed on the material receiving mechanism is turned, the carrier is convenient to butt with the downstream equipment, and loading and unloading of workpieces are realized; similarly, the carrier can be turned over through reverse operation, and the carrier and the hanger can be conveniently butted.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without inventive efforts, wherein:

fig. 1 is a schematic plan view of a turning device and a transfer mechanism according to an embodiment of the present application, wherein a receiving mechanism of the turning device is in a first state;

fig. 2 is another schematic plan view of the turnover device shown in fig. 1, wherein the receiving mechanism of the turnover device is in a second state;

fig. 3 is a schematic top view of the receiving mechanism of the turnover device shown in fig. 2;

fig. 4 is a schematic plan view of the turning device shown in fig. 1, wherein the receiving mechanism of the turning device is in a first state;

FIG. 5 is a schematic front view of the transfer mechanism of FIG. 1 showing a vehicle suspended from a hanger of the transfer mechanism;

fig. 6 is a right-side schematic view of the relay mechanism shown in fig. 5.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

Please refer to fig. 1, which is a schematic plan view illustrating a turning device and a transfer mechanism according to an embodiment of the present application, wherein a material receiving mechanism of the turning device is in a first state. As shown in the figure, a carrier 100 for receiving a processed workpiece (such as a silicon wafer) is hung on a hanger 210 of a transfer mechanism 200 by a hook 110, and transported to a station corresponding to a turnover device 1000 through the transfer mechanism 200; the tilting device 1000 may be used to take down the carrier 100 suspended in the transfer mechanism 200 and tilt the carrier 100.

It should be noted that the "first state" and the "second state" described in this application are two final states in which the turnover mechanism 500 of the turnover device 1000 drives the material receiving mechanism 300 to move. Specifically, the receiving mechanism 300 in the first state is convenient to be abutted with the transfer mechanism 200, so as to receive or suspend the carrier 100; the receiving mechanism 300 in the second state is convenient for interfacing with a downstream device (not shown) to realize blanking or loading of the carrier 100. In an embodiment, the carrier 100 is vertically suspended on the hanger 210, referring to fig. 1 and fig. 2, at this time, the first state of the material receiving mechanism 300 is a standing state, and the material receiving surface of the material receiving mechanism 300 for receiving the carrier 100 is perpendicular to the horizontal plane and faces the carrier 100; the second state of the receiving mechanism 300 is a horizontal state, and the receiving surface of the receiving mechanism 300 is parallel to the horizontal plane, so that the carrier 100 can be conveniently transferred by the downstream device. In other embodiments, the first state and the second state of the receiving mechanism 300 may be other states according to the specific state of the carrier 100 on the rack 210 and the loading and unloading state of the downstream equipment, and at this time, the receiving surface of the receiving mechanism 300 may form various angles with the horizontal plane.

The hook 110 may be a hollow frame structure disposed at the upper end of the carrier 100; accordingly, the hanger 210 may be provided with a hook structure, such as an L-shape. Thus, the carrier 100 can be hung on the hanger 210 of the transferring mechanism 200 by hooking the L-shaped hook structure with the hollow frame structure. It will be readily appreciated that the L-shaped hook-like structure and the hollow frame-like structure may also be interchanged, i.e.: an L-shaped hook structure is provided on the upper end of the carrier 100, and a hollow frame structure is provided on the hanger 210.

In one embodiment, the turnover device 1000 may include a material receiving mechanism 300, a lifting mechanism 400, and a turnover mechanism 500. The receiving mechanism 300 is configured to dock the transferring mechanism 200 when in the first state, so as to fix the carrier 100 suspended on the hanger 210 to the receiving mechanism 300. The lifting mechanism 400 is configured to drive the rack 210 to descend after the material receiving mechanism 300 is in the first state and receives the carrier 100, or drive the material receiving mechanism 300 and the carrier 100 thereon to ascend, so that the hook 110 and the rack 210 move relatively to each other, and the hanging relationship is released, so that the carrier 100 is conveniently separated from the rack 210. The disengagement of the carrier 100 from the hanger 210 as described herein means at least that the operative relationship between the carrier 100 and the hanger 210 is no longer forceful. The turnover mechanism 500 is connected to the receiving mechanism 300 and is configured to drive the receiving mechanism 300 to turn over between a first state and a second state different from the first state. Thus, the turning device 1000 can remove and turn the carrier 100 hung on the hanger 210.

It will be readily appreciated that the flipping mechanism 1000 also enables the vehicle 100 to be flipped from the second state to the first state and then hung back on the hanger 210 by reversing the operation. For example, when the receiving mechanism 300 is in the second state, the carrier 100 may be fixed on the receiving mechanism 300. The turnover mechanism 500 drives the material receiving mechanism 300 to turn over from the second state to the first state, and the lifting mechanism 400 drives the hanger 210 to descend or drives the material receiving mechanism 300 and the carrier 100 thereon to ascend, so that the hook 110 and the hanger 210 move relatively, and the suspension of the carrier 100 is facilitated.

As shown in fig. 2 and 3, in one embodiment, the receiving mechanism 300 may include a receiving platform 310 and a fixing assembly 320. The receiving platform 310 is used for receiving the carrier 100, so that the carrier 100 leans against the receiving platform 310. The fixing assembly 320 is used for fixing the carrier 100 on the receiving platform 310.

The fixing assembly 320 may include a fixing member 321, a first fixing driving member 322, and a second fixing driving member 323. When the receiving platform 310 does not receive the carrier 100, the fixing member 321 is not higher than a receiving surface of the receiving platform 310, which is used for contacting the carrier 100, and the fixing member 321 is far away from the receiving surface of the receiving platform 310 (for example, projections of the fixing member 321 and the receiving surface of the receiving platform 310 in a direction perpendicular to the receiving surface are not overlapped), so that the carrier 100 is received by the receiving platform 310. When the receiving platform 310 receives the carrier 100, the first fixed driving element 322 drives the fixing element 321 to move toward the receiving surface until the fixing element 321 protrudes out of the carrier 100, and the second fixed driving element 323 drives the fixing element 321 to move toward the carrier 100 until the fixing element 321 projects on the carrier 100 in a direction perpendicular to the receiving surface. Thus, the carrier 100 can be fixed on the receiving platform 310 by further moving the fixing member 321 toward the carrier 100.

In one embodiment, the first fixed driving member 322 may be a linear cylinder, the second fixed driving member 323 may be a rotary cylinder, and the fixing member 321 may be a plate-shaped blade. The fixing member 321 may be disposed at an output end of the second fixed driving member 323, and a main body of the second fixed driving member 323 is disposed at an output end of the first fixed driving member 322. Alternatively, the fixing member 321 may be disposed at an output end of the first fixed driving member 322, and a main body of the first fixed driving member 322 is disposed at an output end of the second fixed driving member 323. Specifically, referring to fig. 2, when the receiving platform 310 does not receive the carrier 100, the fixing member 321 is used for pressing the end of the carrier 100 away from the receiving surface. After the carrier 100 abuts against the receiving platform 310, the first fixed driving component 322 can drive the second fixed driving component 323, so that the second fixed driving component 323 can drive the fixing component 321 to move toward the carrier 100 until the fixing component 321 protrudes out of the carrier 100, the second fixed driving component 323 can drive the fixing component 321 to rotate toward the carrier 100 until the end of the plate-shaped blade covers the edge of the carrier 100, and then the first fixed driving component 322 reversely acts to recover the fixing component 321, so that the fixing component 321 tightly presses the carrier 100 on the receiving platform 310.

In another embodiment, the first fixed driving element 322 may be a linear cylinder disposed toward the receiving surface, and the second fixed driving element 323 may be a linear cylinder disposed toward the receiving platform 310. Different from the above embodiments, the second fixing driving member 323 drives the fixing member 321 to move closer to or away from the receiving platform 310 along the horizontal direction. That is, the first fixing driver 322 can drive the fixing member 321 to be lower than the material receiving surface, and the second fixing driver 323 can drive the fixing member 321 to be horizontally far from the material receiving surface. When the material receiving platform 310 receives the carrier 100, the first fixing driving element 322 drives the fixing element 321 to extend out, so that the fixing element 321 protrudes out of the carrier 100, and the second fixing driving element 323 drives the fixing element 321 to move toward the carrier 100 until the fixing element 321 projects on the carrier 100; then, the first fixing driving element 322 moves reversely to recover the fixing element 321, so as to press the carrier 100 on the receiving platform 310.

In other embodiments, the fixing assembly 320 may also adopt a suction cup, a clamping jaw, or other members, as long as the carrier 100 can be fixed on the receiving platform 310, which is not limited in the present application.

The fixing assemblies 320 may be provided with a plurality of groups, which are respectively disposed around the receiving platform 310 to stably fix the carrier 100.

As shown in fig. 3, the receiving platform 310 may be a conveyor belt assembly, and the conveyor belt assembly at least includes a conveyor belt 314. In one embodiment, the conveyor belt assembly may include a drive element 311, a drive wheel 312, a driven wheel 313, and a conveyor belt 314. Specifically, the conveyor belt 314 points to a downstream device, meanwhile, the conveyor belt 314 is sleeved on the driving wheel 312 and the driven wheel 313, the driving element 311 is connected to and drives the driving wheel 312 to rotate, and the driven wheel 313 is further driven to rotate along through the conveyor belt 314. Therefore, the carrier 100 is carried on the conveyor belt 314, the fixing assembly 320 fixes the carrier 100, and after the receiving platform 310 is turned over from the first state to the second state and is in butt joint with the downstream equipment, the fixing assembly 320 releases the carrier 100, the driving element 311 is started, the conveyor belt 314 rotates towards the downstream equipment in a circulating mode, the carrier 100 is driven to move towards the downstream equipment, and blanking of the carrier 100 is achieved. When the carrier 100 is loaded, the driving element 311 moves reversely to operate a new carrier 100 sent from a downstream device onto the conveyor belt 314, and after the carrier 100 is in place, the fixing element 320 fixes the carrier 100, so that the receiving platform 310 can be conveniently turned to the first state through the second state.

In other embodiments, in order to facilitate the docking with the blanking device and achieve the loading and unloading of the carrier 100, the material receiving platform 310 may further adopt mechanisms such as a conveying roller and a conveying platform driven by a module, which is not limited in this application.

Further, when new carrier 100 is loaded, in order to ensure that new carrier 100 received by material receiving platform 310 each time stays at a uniform position, after material receiving platform 310 is turned over to a first state, it is directly butted with transfer mechanism 200 to realize the transfer of carrier 100, material receiving mechanism 300 may further include a correcting component 330, and correcting component 330 is used for correcting the position of carrier 100 on material receiving platform 310. For example, when a new carrier 100 is hung on the transfer mechanism 200 again, the position of the transfer mechanism 200 is relatively fixed, and the loading position of the carrier 100 also needs to be kept consistent, so that the alignment assembly 330 is arranged to align the position of the carrier 100 on the receiving platform 310.

In one embodiment, the gauging assembly 330 may include a gauging member 331, a first gauging driver 332 and a second gauging driver 333. In the non-regular state, the regular piece 331 is not higher than and far away from the receiving surface of the receiving platform 310. After the carrier 100 abuts against the receiving platform 310, the first alignment driving element 332 drives the alignment element 331 to extend, and the second alignment driving element 333 drives the alignment element 331 to move toward the carrier 100 until the alignment element 331 abuts against the carrier 100. The first alignment driving member 332 may be a linear cylinder disposed toward the receiving surface, the second alignment driving member 333 may be a linear cylinder disposed toward the receiving platform 310, and the alignment member 331 may be a follower. Therefore, after a new carrier 100 enters the material receiving platform 310, the first alignment driving element 332 can drive the alignment element 331 to extend out to be higher than the material receiving surface, and the second alignment driving element 333 can drive the alignment element 331 to move towards the carrier 100 to push the carrier 100 to a preset fixed position.

The alignment assemblies 330 may be provided with a plurality of sets, which are respectively disposed around the receiving platform 310, and the alignment assemblies 330 are matched with each other, for example, the alignment assembly 330 on the left side of the receiving platform 310 has a second alignment driving member 333 capable of driving the alignment member 331 to push the carrier 100 rightward, and the alignment assembly 330 on the right side of the receiving platform 310 has a second alignment driving member 333 capable of driving the alignment member 331 to push the carrier 100 leftward, so that the positions of the carrier 100 in the left and right directions can be fixed by the matching of the alignment assemblies 330 on the left and right sides; similarly, the alignment assemblies 330 on the front and rear sides of the receiving platform 310 are matched with each other, so that the carrier 100 can be fixed in the front and rear direction; because the main body of the carrier 100 is a regular quadrilateral, the carrier 100 can be finally adjusted to a fixed state and located at a preset fixed position on the receiving platform 310 by the limitation of the peripheral alignment assembly 330. In another embodiment, since the main body of the carrier 100 is a regular quadrilateral, the alignment components 330 can be distributed on three sides of the receiving platform 310 to push one side of the carrier 100, so as to align the specific position of the carrier 100.

The receiving platform 310 may be provided with a supporting assembly 340 at a side corresponding to the lower end of the carrier 100, which is inconvenient for the lower end of the carrier 100 to be provided with a fixing assembly 320 or a correcting assembly 330 due to a plurality of sets of followers 120 (as shown in fig. 5). The carrier 100 can be supported if necessary by arranging the supporting component 340; that is, the material supporting component 340 can be provided only for safety, and in most cases, the material supporting component 340 does not contact the carrier 100.

In one embodiment, the material holding assembly 340 may include a pallet 341 and a material holding drive 342. The supporting driving element 342 is used for driving the supporting plate 341 so that the supporting plate 341 does not extend from a position higher than the receiving surface of the receiving platform 310. Generally, the supporting plate 341 is not higher than the receiving surface of the receiving platform 310. When the receiving platform 310 receives the carrier 100 or before receiving the carrier 100, the supporting driving component 342 can drive the supporting plate 341 to extend out, so that the supporting plate 341 is higher than the receiving surface, thereby preventing the carrier 100 from falling down if the fixing component 320 fails to sufficiently fix the carrier 100 when the receiving platform 310 is in the first state, and thus playing a role of safety. The supporting plate 341 is preferably a receiving plate having a certain length extending in the extending direction of the lower end of the carrier 100, and the material holding driving member 342 is preferably an air cylinder.

Unlike the fixing assembly 320 or the alignment assembly 330, since the material supporting assembly 340 corresponds to the lower end of the carrier 100, that is, one end of the carrier 100 close to the ground when being suspended, the material supporting driving element 342 can drive the supporting plate 341 to extend out and insert to the corresponding position of the lower end of the carrier 100 while the material receiving mechanism 300 approaches to the carrier 100 (when approaching, and after approaching, the supporting plate 341 can be inserted), so as to ensure that the lower end of the carrier 100 has the supporting plate 341 (when inserting, the supporting plate 341 can not directly contact the carrier 100, only protect the carrier 100, so that after the carrier 100 is fixed on the material receiving platform 310 by the fixing assembly 320, the carrier 100 cannot fall down during the descending movement of the transfer mechanism 200 or the overturning of the material receiving mechanism 300, further, when the material receiving mechanism 300 is in the second state, receives a new carrier 100, and aligns the new carrier 100 by the alignment assembly 330, the supporting driving element 342 can drive the supporting plate 341 to extend out, at this time, the supporting plate 341 higher than the receiving surface can play a role in limiting, and the supporting plate is matched with the other three-direction correcting assemblies 330 to fix the carrier 100 to a preset position and a preset state); therefore, when the lifting mechanism 400 drives the material receiving mechanism 300 to move upwards or drives the hanging tool 210 of the transfer mechanism 200 to move downwards, the supporting plate 341 can play a role in securing the carrier 100, and the carrier 100 is limited on the material receiving platform 310 by matching with the fixing assembly 320.

As shown in FIG. 4, flipping mechanism 500 may include a flipping frame 510 and a flipping drive assembly 520. The receiving mechanism 300 is rotatably disposed on the turning frame 510 through a first rotating shaft 530, and the turning driving assembly 520 is configured to connect and drive the receiving mechanism 300 to rotate around the first rotating shaft 530.

In one embodiment, the turning driving assembly 520 may adopt an air cylinder or an electric cylinder, the turning driving assembly 520 is disposed obliquely toward the transfer mechanism 200, meanwhile, the turning driving assembly 520 is provided with a Y joint, and the turning driving assembly 520 is connected to the material receiving mechanism 300 through the Y joint, so that the turning driving assembly 520 can drive the material receiving mechanism 300 to rotate about the first rotating shaft 530 toward the transfer mechanism 200 to assume a first state; or rotate away from the transfer mechanism 200 to assume the second state.

Due to the large structure of the receiving mechanism 300, in order to stably drive the receiving mechanism 300 to rotate around the first rotating shaft 530, in another embodiment, the turning driving assembly 520 may include a turning driving member 521, a turning guiding member 522 and a connecting rod 523. The turning guide 522 is extended toward the transfer mechanism 200 (i.e., the hanger 210), one end of the connecting rod 523 is connected to the receiving mechanism 300 through a second rotating shaft 524, and the other end of the connecting rod 523 is slidably connected to the turning guide 522 through a third rotating shaft 525; for example, the turning guide 522 may be a guide rail provided to point to the relay mechanism 200, and the third rotating shaft 525 may be provided on a slider for sliding along the turning guide 522. The turning driving element 521 is configured to drive the third rotating shaft 525 to drive the connecting rod 523 to move along the turning guide 522, so that the connecting rod 523 pushes the material receiving mechanism 300 to rotate around the first rotating shaft 530.

In one embodiment, the flipping actuator 521 may include a motor and a lead screw parallel to the flipping guide 522 and pointing to the transfer mechanism 200, and the link 523 is connected to the lead screw through a nut, so that the motor drives the lead screw to rotate, and the nut converts the rotation of the lead screw into a linear motion of the link 523 along the lead screw. Further, two sets of the turnover driving assemblies 520 may be disposed in parallel, and respectively correspond to two sides (e.g., the upper and lower sides shown in fig. 3) of the receiving mechanism 300, so as to better support and drive the receiving mechanism 300 to move.

In one embodiment, the upper surface of the turnover frame 510 facing the receiving mechanism 300 is provided with a first buffer 540. In the turnover device 1000 of the present application, after the receiving mechanism 300 receives the carrier 100, the carrier 100 is separated from the transfer mechanism 200 with the help of the lifting mechanism 400, and the turnover mechanism 500 drives the receiving mechanism 300 and the carrier 100 received by the receiving mechanism to turn over from the first state to the second state. When the material receiving mechanism 300 is laid down by the turnover mechanism 500, as the material receiving mechanism 300 is turned over, the gravity center of the material receiving mechanism is further backward, and finally the material receiving mechanism is turned over on the turnover rack 510, so that the material receiving mechanism is easy to directly "bump" onto the turnover rack 510, and impact force may affect each mechanism. Therefore, by providing the buffer member 540 on the turnover frame 510, when the receiving mechanism 300 is turned over on the turnover frame 510, the receiving mechanism will contact with the buffer member 540, and the buffer member 540 can absorb the impact force generated by the receiving mechanism 300 rotating to the second state and directly contacting the turnover frame 510 to the turnover frame 510. In addition, the buffering member 540 can also have a limiting function, so as to ensure that the receiving mechanism 300 stops at a limited position of the buffering member 540. In one embodiment, the buffer 540 may be made of a flexible material, such as polyurethane.

Similarly, when the receiving mechanism 300 is in the first state, the receiving mechanism 300 will "bump" against the side of the flipping frame 510. Therefore, a second buffer member 550 can be disposed on a side surface of the turning frame 510 close to the first rotating shaft 530, and the second buffer member 550 is used for reducing impact force to the turning frame 510 when the receiving mechanism 300 rotates to the first state, so as to alleviate the impact condition.

The turnover device 1000 may further include a translation mechanism 600, and the translation mechanism 600 is configured to drive the turnover mechanism 500 to drive the material receiving mechanism 300 to approach and depart from the rack 210. Therefore, after the material receiving mechanism 300 receives the carrier 100 and before the carrier 100 is turned over, the translation mechanism 600 drives the turning mechanism 500 and drives the material receiving mechanism 300 to be far away from the transfer mechanism 200, so as to leave a space for turning over the carrier 100. Further, the translation mechanism 600 points to downstream equipment from the transfer mechanism 200, so that after the material receiving mechanism 300 receives the carrier 100, the carrier can move to the downstream equipment under the driving of the translation mechanism 600 to be in butt joint with the downstream equipment, so as to realize the loading and unloading of the carrier 100; after the new carrier 100 is in place, the translation mechanism 600 drives the receiving mechanism 300 and the new carrier 100 thereon to move toward the transfer mechanism 200.

In one embodiment, the translation mechanism 600 may include a translation drive 610 and a translation guide 620. The translation guide 620 is disposed toward the hanger 210 of the transfer mechanism 200, the turnover mechanism 500 is slidably connected to the translation guide 620, and the translation driving member 610 is configured to connect to and drive the turnover mechanism 500 to move along the translation guide 620.

In one embodiment, the translation guide 620 may be a guide rail, and the translation driving member 610 may include a rack parallel to the translation guide 620, a motor disposed on the turnover mechanism 500, and a gear disposed at an output end of the motor, the gear being engaged with the rack, such that the motor drives the gear to rotate, and the gear moves along the rack, thereby driving the turnover mechanism to move along the translation guide 620. The load driven by the motor can be reduced through the gear rack structure, and the motor can drive the turnover mechanism 500 to move conveniently.

As shown in fig. 5 and 6, the carrier 100 is suspended from the relay mechanism 200 by the hook 110. Therefore, when the hook 110 of the carrier 100 is lifted higher than the hanger 210 corresponding to the hook 110 on the relay mechanism 200, the carrier 100 can be separated from the relay mechanism 200.

In the embodiment shown in fig. 5, the lifting mechanism 400 may be connected to the rack 210 of the transfer mechanism 200 for driving the rack 210 to move up and down. Therefore, after the receiving mechanism 300 receives the carrier 100, the carrier 100 is fixed on the receiving mechanism 300, the lifting mechanism 400 drives the rack 210 of the transfer mechanism 200 to descend until the rack 210 is separated from the hook 110, and then the turnover mechanism 500 can drive the receiving mechanism 300 to horizontally turn over the carrier 100. The lifting mechanism 400 may include a lifting driving member 410 and a lifting guide 420, and the lifting guide 420 is disposed in a vertical direction.

With continued reference to fig. 5 and 6, the transfer mechanism 200 may include a transfer rack 220 and a hanger 210. Wherein, the hanger 210 is arranged on the transfer rack 220, and the carrier 100 is hung on the hanger 210; the lifting guide members 420 are disposed at both sides of the transfer frame 220, the hanger 210 is slidably connected to the lifting guide members 420 through the sliders 212, the lifting driving member 410 is disposed at the top of the transfer frame 220, and the lifting driving member 410 is connected to and drives the hanger 210 to move along the lifting guide members 420. The elevation guide 420 may be a guide rail, and the elevation driving member 410 may include a motor 411 and a lead screw 412.

The lower end of the vehicle 100 may be provided with a follower 120. The hanger 210 may comprise two guide bars 231 defining the follower 120, on one hand, when the vehicle 100 is hung on the hanger 210, the guide bars 231 can define the vehicle 100 by defining the follower 120, avoiding the lower end of the vehicle from shaking or deviating from a fixed position; on the other hand, when the pivoting mechanism 200 transports the carrier 100 toward the host computer where the silicon wafer is prepared, the follower 120 can be guided to move toward the host computer along the guide bar 231. After the carrier 100 is fixed by the receiving mechanism 300, the two guide bars 231 are kept stationary, the lifting mechanism 400 drives the rack 210 of the transfer mechanism 200 to move up and down, and the follower 120 extends out of the two guide bars 231 while the rack 210 is separated from the hook 110.

Since the two guide bars 231 catch the follower 120 to perform the spacing and guiding, in order to facilitate the movement of the follower 120 out of between the two guide bars 231, at least one guide bar 231 is disposed to be movable relative to the other guide bar 231 so as to be away from each other to facilitate the disengagement of the follower 120 or to catch the follower 120 close to each other. Specifically, the hanger 210 may further include a guide bar driving assembly 232, and the guide bar driving assembly 232 may include a driving member 233 (e.g., an air cylinder) and a guide member 234 (e.g., a guide rail), the guide member 234 being disposed toward the other guide bar 231, the driving member 233 being connected to and driving one of the guide bars 231 toward or away from the other guide bar 231 along the guide member 234.

In another embodiment, the lifting mechanism 400 may be connected to the receiving mechanism 300, and is configured to drive the receiving mechanism 300 to move up and down. Therefore, after the material receiving mechanism 300 receives and fixes the carrier 100, the lifting mechanism 400 drives the material receiving mechanism 300 to move upwards, so that the hook 110 is higher than the hanger 210 (specifically, the hook 110 is separated from the L-shaped hook structure of the hanger 210). Subsequently, the turnover mechanism 500 drives the receiving mechanism 300 to horizontally turn over the carrier 100.

In another embodiment, the lifting mechanism 400 may be connected to the turnover mechanism 500, and is configured to drive the turnover mechanism 500 to drive the material receiving mechanism 300 to move up and down. Therefore, after the material receiving mechanism 300 receives and fixes the carrier 100, the lifting mechanism 400 drives the turnover mechanism 500 to drive the material receiving mechanism 300 to move upwards, so that the hook 110 is higher than the hanger 210 (specifically, the hook 110 is separated from the L-shaped hook structure of the hanger 210). Subsequently, the turnover mechanism 500 drives the receiving mechanism 300 to horizontally turn over the carrier 100.

Referring again to fig. 1-6 in their entirety, one of the operational flows of the flipping mechanism 1000 of the present application can be referred to as follows.

1) The relay mechanism 200 receives the carrier 100 such that the carrier 100 is suspended from the hanger 210.

2) The translation mechanism 600 drives the turnover mechanism 500, and the turnover mechanism 500 drives the material receiving mechanism 300 to approach the transfer mechanism 200 (during this period, the turnover mechanism 500 can also drive the material receiving platform 310 to be in the first state), until the material receiving platform 310 in the first state abuts against the carrier 100.

3) The material supporting component 340 is actuated, and the material supporting driving component 342 drives the supporting plate 341 to extend out, so that the supporting plate 341 is higher than the material receiving surface and is located between the lower end surface of the carrier 100 and the guide strip 231.

4) The fixing assembly 320 is actuated, and the fixing member 321 is driven by the first fixing driving member 322 and the second fixing driving member 323 to press the carrier 100 on the receiving platform 310.

5) The guide bar drive assembly 232 is actuated until the two guide bars 231 are relatively far apart, facilitating the action of the follower 120.

6) The lifting mechanism 400 operates to drive the hanger 210 to descend until the hanger 210 is separated from the hook 110.

7) The translation mechanism 600 acts to drive the turnover mechanism 500, and the turnover mechanism 500 drives the material receiving mechanism 300 and the carrier 100 fixed thereon to be horizontally far away from the transfer mechanism 200.

8) The turnover mechanism 500 acts to drive the receiving mechanism 300 and the carrier 100 fixed thereon to turn over to the second state.

9) The translation mechanism 600 acts to drive the turnover mechanism 500, and the turnover mechanism 500 drives the material receiving mechanism 300 and the carrier 100 thereon to move from the transfer mechanism 200 to the downstream device until the material receiving mechanism 300 is in butt joint with the downstream device.

10) The fixing assembly 320 acts to loosen the carrier 100, and the receiving mechanism 300 acts to form the movement of the conveyor belt assembly of the receiving platform 310, so as to transfer the carrier 100 in the second state.

11) After the old carrier 100 is transferred, the new carrier 100 is transferred into the receiving platform 310 through the conveyor belt assembly forming the receiving platform 310, after the new carrier is in place, the alignment assembly 330 acts, and the alignment member 331 extends out under the driving of the first alignment driving member 332 and the second alignment driving member 333 and moves towards the carrier 100 to align the position of the carrier 100; the fixing assembly 320 is actuated to fix the carrier 100 on the receiving platform 310.

12) The translation mechanism 600 drives the turnover mechanism 500, the turnover mechanism 500 drives the material receiving mechanism 300 and the carrier 100 thereon to move towards the transfer mechanism 200, and meanwhile, the turnover mechanism 500 drives the material receiving mechanism 300 and the carrier 100 thereon to turn over from the second state to the first state.

13) After the hook 110 corresponds to the hanger 210, the fixing component 320 acts to loosen the carrier 100; the lifting mechanism 400 operates to drive the hanger 210 to move upward (because the hanger 210 is driven to the lowered position in the above-described step 6), and the hanger 210 is hung on the hook 110.

14) The guide bar drive assembly 232 is actuated until the two guide bars 231 are relatively close together, clamping the follower 120.

15) With the new carrier 100 in place, the transfer mechanism 200 can transfer the carrier 100 to a host (not shown) for processing new silicon wafers, and the processed silicon wafers are transferred out by the transfer mechanism 200.

In summary, as those skilled in the art will readily understand, in the embodiments of the present application, a carrier suspended on a rack can be fixed to a receiving mechanism by the receiving mechanism in a first state (a state convenient for docking with the rack), and then a lifting mechanism drives the rack to descend or the receiving mechanism to ascend, so that the carrier is detached from the rack; after the carrier is separated from the hanger, the material receiving mechanism can be driven to be turned from a first state to a second state (a state convenient for butting downstream equipment) through the turning mechanism, so that the carrier fixed on the material receiving mechanism is turned, the carrier is convenient to butt with the downstream equipment, and loading and unloading of workpieces are realized; similarly, the carrier can be turned over through reverse operation, and the carrier and the hanger can be conveniently butted.

The above description is only an example of the present application and is not intended to limit the scope of the present application, and all modifications of equivalent structures and equivalent processes, which are made by the contents of the specification and the drawings, or which are directly or indirectly applied to other related technical fields, are intended to be included within the scope of the present application.

Claims (10)

1. A turnover device for removing a vehicle from or hanging a vehicle on a hanger, the turnover device comprising:

the material receiving mechanism is used for receiving the carriers;

the lifting mechanism is used for driving the hanger to move up and down or driving the receiving mechanism to move up and down when the receiving mechanism is in a first state, so that the carrier is separated from the hanger or the carrier is in butt joint with the hanger; and

the turnover mechanism is connected with the material receiving mechanism and used for driving the material receiving mechanism to turn over between the first state and a second state different from the first state.

2. The turnover device of claim 1, wherein the receiving mechanism comprises a receiving platform and a fixing assembly, the receiving platform is used for receiving the carriers, and the fixing assembly is used for fixing the carriers on the receiving platform.

3. The flipping mechanism of claim 2, wherein the fixed assembly comprises a fixed member, a first fixed drive member, and a second fixed drive member; when the material receiving platform does not receive the carrier, the fixing piece is not higher than the material receiving surface of the material receiving platform, which is used for contacting the carrier, and is far away from the material receiving surface of the material receiving platform; when the material receiving platform receives the carrier, the first fixed driving piece drives the fixing piece to move towards the material receiving surface until the fixing piece protrudes out of the carrier, and the second fixed driving piece drives the fixing piece to move towards the carrier until the fixing piece has a projection on the carrier along a direction perpendicular to the material receiving surface.

4. The turnover device of claim 2, wherein a material supporting assembly is arranged on one side of the material receiving platform corresponding to the lower end of the carrier, and comprises a supporting plate and a material supporting driving member; the material supporting driving piece is used for driving the supporting plate to enable the supporting plate to extend out from a position which is not higher than the material receiving surface of the material receiving platform.

5. The turnover device of claim 2, wherein the material receiving platform is a conveyor belt assembly.

6. The flipping mechanism of claim 1, wherein the flipping mechanism comprises a flipping frame and a flipping drive assembly; the receiving mechanism is rotationally arranged on the turnover rack through a first rotating shaft, and the turnover driving assembly is used for driving the receiving mechanism to rotate around the first rotating shaft.

7. The flipping mechanism of claim 6, wherein the flipping drive assembly comprises a flipping drive, a flipping guide, and a linkage; one end of the connecting rod is connected with the material receiving mechanism through a second rotating shaft, and the other end of the connecting rod is connected with the overturning guide piece through a third rotating shaft in a sliding manner; the turnover guide piece extends towards the hanger, and the turnover driving piece is used for driving the third rotating shaft to drive the connecting rod to move along the turnover guide piece, so that the connecting rod pushes the material receiving mechanism to rotate around the first rotating shaft.

8. The turnover device of claim 6, wherein the turnover frame is provided with a first buffer member facing the upper surface of the receiving mechanism; and/or

And a second buffer piece is arranged on the side surface, close to the first rotating shaft, of the turnover rack.

9. The turnover device of claim 1, wherein the lifting mechanism is connected with the receiving mechanism and used for driving the receiving mechanism to move up and down; or

The lifting mechanism is connected with the turnover mechanism and used for driving the turnover mechanism to drive the material receiving mechanism to lift and move; or

The lifting mechanism is connected with the hanger and used for driving the hanger to move up and down.

10. The turnover device of any one of claims 1 to 9, further comprising a translation mechanism for driving the turnover mechanism to move the receiving mechanism toward and away from the rack.

Images