CN216996634U

CN216996634U - Monocrystalline silicon material transfer device

Info

Publication number: CN216996634U
Application number: CN202220234035.1U
Authority: CN
Inventors: 李海威; 梁兴华; 李元业; 郑光健; 廖书阳; 沈锦锋; 梁洁; 李波; 赖晓锟
Original assignee: Fuzhou Tianrui Scroll Saw Technology Co Ltd
Current assignee: Fuzhou Tianrui Scroll Saw Technology Co Ltd
Priority date: 2022-01-28
Filing date: 2022-01-28
Publication date: 2022-07-19
Anticipated expiration: 2032-01-28

Abstract

The utility model relates to a monocrystalline silicon feeding and transferring device, which comprises a feeding mechanism and a transferring mechanism positioned beside the feeding mechanism and used for carrying monocrystalline silicon, wherein the feeding mechanism comprises a placing frame, an object carrying table is arranged on one side of the placing frame, which faces the transferring mechanism, the transferring mechanism comprises a sliding table and a rotary base fixed by the moving end of the sliding table, a transverse guide rail is arranged on one side of the rotary base, which faces the placing frame, and a clamping jaw group on the transverse guide rail, wherein the clamping jaw group comprises a pair of clamping jaws, and the pair of clamping jaws are driven by a clamping jaw driving device to move in the opposite direction or in the opposite direction along the transverse guide rail.

Description

Monocrystalline silicon material transfer device

Technical Field

The utility model relates to the technical field of crystalline silicon processing equipment, in particular to a monocrystalline silicon charging transfer device.

Background

The existing squaring machine is generally of a horizontal structure. The bar stock to be cut is conveyed to a designated position through the horizontal conveying crawler mechanism and then is clamped by the feeding mechanism, and the middle part of the feeding mechanism is provided with the rotating mechanism, so that the bar stock to be cut can be vertically or horizontally conveyed to the clamping position of the cutting clamping mechanism. Because vertical squarer has the cutting cooling effect good, advantages such as equipment overall dimension is little, consequently vertical cutting machine obtains the rapid development, in the material loading process step, need overturn the conveying and transport to the cutting bed to the bar and operate, for this reason it is necessary to set up one kind can dock with horizontal conveyor, can overturn the device of transporting to the bar, and current equipment structure overall arrangement is unreasonable, and the in-process causes bar wearing and tearing to collide with.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model provides a bar stock transfer mechanism which can be suitable for a vertical squarer. The actual axial center of gravity of the silicon crystal bar can be found, and the position of the adjustment position is adjusted by the locking device, so that the silicon crystal bar is stably erected.

The technical scheme of the utility model is as follows: the utility model provides a single crystal silicon material transfer device, includes feed mechanism and is located the transport mechanism that feed mechanism side is used for accepting single crystal silicon, feed mechanism includes a rack, the rack is provided with the objective table towards transport mechanism one side, transport mechanism includes the fixed rotary base of slip table and slip table moving end, rotary base is provided with transverse guide towards rack one side, clamping jaw group on the transverse guide, clamping jaw group includes a pair of clamping jaw, and a pair of clamping jaw is by clamping jaw drive arrangement drive along transverse guide or motion dorsad.

Preferably, one side of the placing frame, which faces the transfer mechanism, is hinged to a feeding rack, a guide wheel is arranged on the surface of the placing frame, and a feeding driving mechanism for driving the placing frame to rotate around the hinged position of the placing frame and the feeding rack is arranged on the feeding rack.

Preferably, the placing frame is in sliding fit with the object stage, a guide rod which is arranged along the moving direction of the bar stock is fixed on the placing frame, the object stage is sleeved on the guide rod, and limiting plates for preventing the object stage from being separated are fixed at two ends of the guide rod.

Preferably, the clamping jaw driving device is an electric cylinder, an air cylinder or a hydraulic cylinder, one clamping jaw in the clamping jaw group is fixed on the transverse guide rail, and the other clamping jaw is driven by the electric cylinder, the air cylinder or the hydraulic cylinder to move transversely.

Preferably, the opposite surfaces of the pair of clamping jaws of each clamping jaw set are provided with concave clamping surfaces, and cushion blocks are fixed on the inner sides of the clamping surfaces

. Preferably, the cushion block is provided with a plurality of cushion blocks, and a gap is reserved between the adjacent cushion blocks.

Preferably, the feeding rack is hinged with a rotating shaft through a bearing, the rotating shaft is fixedly connected with the placing rack, the feeding driving mechanism is an air cylinder, an electric cylinder or a hydraulic cylinder, the lower portion of the driving mechanism is hinged to the feeding rack, and the telescopic end of the feeding driving mechanism is hinged to the placing rack.

Preferably, the placing frame is in sliding fit with the objective table, a jacking piece capable of jacking the objective table is arranged on one side, away from the driving mechanism, of the feeding rack, the jacking piece is in sliding fit with the feeding rack, the jacking piece is driven by the jacking mechanism to move up and down, and the jacking mechanism is an air cylinder, an oil cylinder or an electric cylinder;

the rack is provided with a plurality of groove-shaped supports along the length direction of a bar, guide wheels are arranged at the tops of the groove-shaped supports in pairs, pulleys are arranged at the bottom of the objective table, a guide support plate capable of abutting against the pulleys is fixed on the feeding rack, the inner side of the guide support plate is an arc surface, and a positioning tray capable of supporting the rack in an auxiliary mode is fixed on the upper portion of the feeding rack.

Preferably, the rotary base comprises a rotary motor fixed on the sliding table and a base pillar fixed at the output end of the rotary motor.

Preferably, a lateral auxiliary guide plate is fixed on the side part of the placing frame, and a flexible pad capable of contacting with the side part of the bar stock is fixed on the lateral auxiliary guide plate.

Compared with the prior art, the utility model has the following beneficial effects:

(1) the utility model provides a monocrystalline silicon feeding and transferring device which can realize feeding and transferring of monocrystalline silicon through the combination of a placing rack and a clamping jaw set, thereby realizing turning and conveying of bars on the placing rack, reducing feeding time and improving bar conveying efficiency.

(2) The guide wheel and the auxiliary guide plate are designed on the placing frame, so that the stability of the bar in the conveying process can be met through the guide wheel, and the influence on the surface of the bar in the moving process is reduced.

(3) In the embodiment of the utility model, the silicon crystal bar is clamped by the inner side of the clamping jaw through the cushion blocks so as to avoid damaging the surface of the silicon crystal bar.

Drawings

FIG. 1 is a schematic overall structure diagram according to an embodiment of the present invention;

FIG. 2 is a schematic view of a partial structure of the transfer mechanism of the present invention;

FIG. 3 is a schematic view of a partial structure of the feeding mechanism of the present invention;

FIG. 4 is a schematic side view of the loading mechanism of the present invention (the single crystal silicon is in a horizontal state);

FIG. 5 is a schematic diagram of a side view of the feeding mechanism of the present invention (a vertical state of single crystal silicon);

fig. 6 is a schematic structural view of a feeding rack and a placing rack with a jacking mechanism according to the present invention (the placing rack is in a horizontal state);

FIG. 7 is a schematic view of the jacking mechanism of FIG. 6 according to the present invention;

fig. 8 is a side view of the present invention (rack upright position);

in the figure: 100-monocrystalline silicon, 10-feeding rack, 110-rotating shaft, 111-feeding cylinder, 120-guiding support plate, 20-placing rack, 210-object stage, 201-guide rail, 211-pulley, 212-groove, 213-slider, 220-guide rod, 221-limiting plate, 230-groove-shaped bracket, 231-guide wheel, 240-lateral auxiliary guide plate, 241-flexible pad, 30-sliding table, 310-base column, 311-transverse guide rail, 40-clamping jaw group, 410-clamping jaw, 411-cushion block, 50-jacking piece, 501-jacking plate, 502-buffer cushion block, 510-guide rod, 520-driving plate, 60-jacking cylinder, 610-chain wheel and 611-transmission chain.

Detailed Description

The utility model is described in detail below with reference to the figures and the specific embodiments.

Referring to fig. 1-5, a single crystal silicon material transfer device, includes feed mechanism and is located the transport mechanism that the feed mechanism side is used for accepting single crystal silicon 100, feed mechanism includes a rack 20, the rack is provided with objective table 210 towards transport mechanism one side, transport mechanism includes that slip table 30 and slip table moving end are fixed gyration base, gyration base is provided with transverse guide 311 towards rack one side, clamping jaw group 40 on the transverse guide, clamping jaw group includes a pair of clamping jaw 410, and a pair of clamping jaw is by clamping jaw drive arrangement drive along transverse guide or motion dorsad.

In this embodiment, the jaw driving device is an electric cylinder, an air cylinder or a hydraulic cylinder, one of the jaws 410 in the jaw set is fixed to the transverse guide rail 311, and the other jaw is driven by the electric cylinder, the air cylinder or the hydraulic cylinder to move transversely.

The rack is hinged to a feeding rack 10, a rotating shaft 110 is hinged to the feeding rack 10 through a bearing, the rotating shaft 110 is fixedly connected with the rack, so that the rack 20 is hinged to the feeding rack, and a feeding driving mechanism for driving the rack to rotate around the hinged position of the rack and the feeding rack is arranged on the feeding rack.

In this embodiment, the feeding driving mechanism is a feeding cylinder 111, the lower portion of the feeding cylinder 111 is hinged to the feeding rack, the telescopic end of the feeding cylinder 111 is hinged to the placing rack, and when the monocrystalline silicon rod contacts the object stage 210, the extension of the telescopic rod of the feeding cylinder 111 can push the placing rack 20 to be changed from the horizontal direction to the vertical direction, so that the monocrystalline silicon rod is changed from the horizontal direction to the vertical direction, and when the monocrystalline silicon rod is in the vertical state, the object stage 210 supports the monocrystalline silicon rod.

In the illustration of this embodiment, the sliding table is a two-axis sliding table, the moving direction of the moving end of the sliding table is towards or away from the direction of the placement frame and moves along the transverse direction, so as to correspond to the feeding mechanism of a plurality of stations, the rotary base includes a rotary motor fixed on the sliding table and a base column 310 fixed at the output end of the rotary motor, and the clamping jaw driving device, the clamping jaw set and other components are arranged on the base column 310.

When the monocrystalline silicon bar stock is changed from the horizontal direction of the placing frame to the vertical direction, the pair of clamping jaws 410 of the clamping jaw group is opened, then the sliding table is close to the monocrystalline silicon bar stock 100, the monocrystalline silicon bar stock 100 is placed into the pair of clamping jaws 410, the clamping jaws 410 clamp the monocrystalline silicon bar stock 100 under the driving of the clamping jaw driving device, the monocrystalline silicon bar stock 100 is transferred to the next station through the combination of the rotating base and the sliding table, and the monocrystalline silicon blanking can be realized by loosening the two clamping jaws of the clamping jaw group after the monocrystalline silicon bar stock reaches the next station.

In an embodiment of the present invention, the placing rack 20 is in sliding fit with the object stage, guide rods 220 arranged along the moving direction of the bar are fixed on the placing rack 20, the object stage 210 is sleeved on the guide rods 220, and limit plates 221 for preventing the object stage from falling off are fixed at both ends of the guide rods, in this embodiment, the limit plates 221 are fixedly connected with the placing rack 20, and the limit of the stroke of the object stage in the vertical and horizontal state conversion process is controlled by the limit of the limit plates 221.

In this embodiment, the bottom of the stage is provided with a pulley 211, the feeding frame is provided with a guide support plate 120 capable of abutting against the pulley, and the inner side of the guide support plate is an arc surface.

During operation, after monocrystalline silicon contacts the object stage 210, the object stage 210 is pushed to move on the guide rod to the limiting plate 221 close to one side of the transfer mechanism, when the placing frame 20 is changed from the horizontal direction to the vertical direction, the pulley 211 and the arc surface of the guide support plate 120 keep in contact with each other, and meanwhile the object stage is lifted to the high position of the guide rod along the guide rod 220, and the structure can realize the stability of the placing frame turnover process.

In practical design, the clamping jaw driving mode of the clamping jaw set can also adopt screw driving, the screw is in opposite direction with the threaded connection of the two clamping jaws 410 of the clamping jaw set, and the pair of clamping jaws are driven by the clamping jaw driving device to move towards or away from each other along the transverse guide rail through the rotation driving of the screw.

In actual design, the sliding table can be a single-direction sliding table or a two-shaft sliding table (a cross sliding table) or a three-shaft sliding table according to requirements, and a screw rod or belt mode can be adopted as a driving mode.

In practical design, the feeding cylinder 111 can be replaced by an electric cylinder or a hydraulic cylinder, and the working principle is the same as that of the cylinder 410. In any of the above embodiments, in order to facilitate the sliding of the bar stock, the placing frame is provided with a plurality of groove-shaped brackets 230 along the length direction of the bar stock, and the surface of the placing frame is provided with guide wheels 231 which are arranged on the tops of the groove-shaped brackets in pairs.

The bar is continuously in contact with the guide wheel 231 during the movement, thereby facilitating the movement of the bar.

In any of the above embodiments, in order to facilitate the centering and guiding of the position of the bar in the moving process of the lower surface of the horizontal placement frame and the limiting of the side portion of the bar, a lateral auxiliary guide plate 240 is fixed on the side portion of the placement frame 20, a flexible pad 241 capable of contacting with the side portion of the bar is fixed on the lateral auxiliary guide plate, and the flexible pad 241 can assist in supporting the bar and avoid friction on the surface of the bar.

In any of the above embodiments, the stage 210 has staggered grooves 212 on its surface to increase the friction on the stage surface.

In any of the above embodiments, in order to ensure the stability of bar transportation and the positioning of the position of the placing rack 20 when the placing rack is in a horizontal state, the positioning trays 130 capable of assisting in supporting the placing rack 20 are fixed on the upper portion of the feeding rack, in this embodiment, the positioning trays 130 are symmetrically located on two sides below the placing rack 20 in pairs, and meanwhile, the position of the object stage 210 is ensured to be correct when the object stage is loaded and unloaded.

In any of the above embodiments, the opposing surfaces of the pair of clamping jaws 410 of each clamping jaw set have concave clamping surfaces, the inner sides of the clamping surfaces are fixed with a plurality of cushion blocks 411, gaps are left between the adjacent cushion blocks, and the plurality of cushion blocks are designed to enable the clamping jaws to adapt to the arc-shaped surface of the monocrystalline silicon to be cut before or the plane of the cut monocrystalline silicon.

Referring to fig. 6 to 8, in another embodiment of the present invention, a rotating shaft 110 is connected to the feeding rack 10 through a bearing hinge, and the rotating shaft 110 is fixedly connected to the placing rack, so as to achieve the hinge connection between the placing rack 20 and the feeding rack 10. The stage 210 is turned in the same manner as in the first embodiment, and the feeding cylinder 111 is used to drive the placing frame 20 to rotate. The rack 20 is in sliding fit with the object stage 210, a guide rail 201 is fixed on the rack, a sliding block 213 matched with the guide rail 201 is fixed on the object stage, and the object stage is in sliding fit with the rack through the sliding block and the guide rail. Generally, the guide rail on have and be used for the stopper of spacing slider 213 stroke length, the pay-off frame deviates from actuating mechanism one side and is provided with the jacking piece 50 that can jacking objective table, jacking piece 50 and pay-off frame 10 sliding fit, jacking piece 50 is reciprocated by the climbing mechanism drive.

In this embodiment, the jacking mechanism includes jacking cylinder 60 with pay-off frame fixed connection, with jacking piece lower part fixed connection's guide arm 510, the guide arm is vertical to pass the pay-off frame and the lower extreme is connected with drive plate 520, the articulated sprocket 610 that has rotatable that is connected with of the upper portion activity end of jacking cylinder, sprocket 610 is around there being drive chain 611, drive chain 611 one end and pay-off frame fixed connection, the drive chain 611 other end and drive plate fixed connection.

The jacking cylinder 60 is vertically arranged, a piston rod of the jacking cylinder 60 lifts to drive a chain wheel to lift, a chain is wound on the surface of the chain wheel, the movable end of the chain is fixedly connected with the driving plate 520, the driving plate 520 is pulled to move up and down through the chain, and the guide rod 510 penetrates through a hole in the feeding rack to realize the guide function and guarantee the vertical movement of the jacking piece 50.

In this embodiment, the jacking member 50 includes a jacking plate 501 and a cushion block 502 fixedly connected to the upper end of the jacking plate. In operation, after the object stage is in a vertical state, the driving plate and the jacking plate 510 are lifted by the jacking cylinder 60, and the object stage is lifted along the guide rail by abutting against the lower part of the object stage through the buffer cushion block 502 on the jacking plate 501.

In this embodiment, the jacking cylinder 60 may be replaced by a hydraulic cylinder or an electric cylinder.

The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes performed by the present specification and drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.

Claims

1. The utility model provides a single crystal silicon material transfer device, its characterized in that, includes feed mechanism and is located the transport mechanism that feed mechanism side is used for accepting single crystal silicon, feed mechanism includes a rack, the rack is provided with the objective table towards transport mechanism one side, transport mechanism includes the fixed gyration base of slip table and slip table movable end, gyration base is provided with transverse guide towards rack one side, clamping jaw group on the transverse guide, clamping jaw group includes a pair of clamping jaw, and a pair of clamping jaw is driven by clamping jaw drive arrangement and is followed transverse guide or motion dorsad.

2. The device for transferring the monocrystalline silicon material as claimed in claim 1, wherein one side of the placing frame facing the transferring mechanism is hinged to a feeding frame, a guide wheel is arranged on the surface of the placing frame, and a feeding driving mechanism for driving the placing frame to rotate around the hinged position of the placing frame and the feeding frame is arranged on the feeding frame.

3. The device for transferring the monocrystalline silicon material according to claim 2, wherein the placing frame is in sliding fit with the object stage, a guide rod arranged along the moving direction of the bar is fixed on the placing frame, the object stage is sleeved on the guide rod, and limiting plates for preventing the object stage from falling off are fixed at two ends of the guide rod.

4. A single crystal silicon material transfer device according to claim 1, 2 or 3, wherein the clamping jaw driving device is an electric cylinder, an air cylinder or a hydraulic cylinder, one clamping jaw in the clamping jaw group is fixed on the transverse guide rail, and the other clamping jaw is driven by the electric cylinder, the air cylinder or the hydraulic cylinder to move transversely.

5. A single crystal silicon material transfer device according to claim 1, 2 or 3, wherein a pair of opposite surfaces of the clamping jaws of each clamping jaw group are provided with concave clamping surfaces, and a cushion block is fixed on the inner side of each clamping surface.

6. A device as claimed in claim 5, wherein the blocks are provided in plurality with gaps between adjacent blocks.

7. The single crystal silicon feeding and transferring device according to claim 2 or 3, wherein the feeding rack is hinged with a rotating shaft through a bearing, the rotating shaft is fixedly connected with the placing rack, the feeding driving mechanism is an air cylinder, an electric cylinder or a hydraulic cylinder, the lower part of the driving mechanism is hinged with the feeding rack, and the telescopic end of the feeding driving mechanism is hinged with the placing rack.

8. The single crystal silicon charging and transferring device according to claim 2, wherein the placing frame is in sliding fit with the object stage, a jacking piece capable of jacking the object stage is arranged on one side of the feeding rack, which is away from the driving mechanism, the jacking piece is in sliding fit with the feeding rack, the jacking piece is driven by the jacking mechanism to move up and down, and the jacking mechanism is an air cylinder, an oil cylinder or an electric cylinder;

9. The device for transferring the monocrystalline silicon charging material according to claim 1, wherein the rotary base comprises a rotary motor fixed on the sliding table and a base column fixed at an output end of the rotary motor.

10. The device for transferring the single crystal silicon charging material according to claim 3, wherein a lateral auxiliary guide plate is fixed on the side of the placing frame, and a flexible pad capable of contacting with the side of the bar stock is fixed on the lateral auxiliary guide plate.