CN210134181U - Adjustable side heater, ingot furnace thermal field structure and ingot furnace - Google Patents

Abstract

The utility model provides an adjustable lateral part heater, including lateral part heater monomer, two at least connection davits and two at least graphite electrodes of polylith end to end connection, every the one end of connecting the davit is fixed with one graphite electrode, every the other end of connecting the davit is equipped with two at least rectangular shape holes, rectangular shape hole is on a parallel with connect the length direction of davit, install a plurality of fixing bolt on the lateral part heater monomer, fixing bolt passes rectangular shape hole just will connect the davit to fix on the lateral part heater monomer, fixing bolt can remove in the rectangular shape hole, in order to drive the lateral part heater monomer removes. The adjustable side heater can correspondingly adjust the thermal field at any time according to the quality condition of production feedback, and the position of the adjustable side heater is moved relative to the crucible, so that the quality of the silicon ingot produced by ingot casting is greatly improved. The utility model also provides an ingot furnace thermal field structure and ingot furnace.

Description

Adjustable side heater, ingot furnace thermal field structure and ingot furnace

Technical Field

The utility model relates to an ingot furnace heater technical field especially relates to an adjustable lateral part heater, ingot furnace thermal field structure and ingot furnace.

Background

The solar cell industry is one of the fastest growing industries in recent years, and among various types of solar cells, the crystalline silicon solar cell continues to keep the leading position due to high conversion efficiency and mature technology. Currently, crystalline silicon is mainly cast by an existing ingot furnace. Among them, the design and adjustment of the thermal field structure of the ingot furnace are one of the very critical factors in production.

Most of casting furnace thermal field structures in the current market adopt a fixed mode, and once a heater in the casting furnace is designed with defects or a process adjusting window is limited, when the production requirements cannot be met, spare parts must be replaced again to carry out scheme transformation, so that the cost is extremely high. In addition, after the ingot furnace runs for a period of time, the heater can be corroded by various impurity atmospheres in the ingot, the efficacy of the heater can be gradually attenuated, the preset stability requirement of the silicon ingot cannot be matched, and the problem cannot be solved by conventional process adjustment at the moment; the quality of the silicon ingot obtained by ingot casting is poor, the yield of the silicon ingot is seriously influenced, and the production cost of the silicon ingot is greatly improved.

SUMMERY OF THE UTILITY MODEL

In view of the above, the utility model provides an adjustable lateral heater, ingot furnace thermal field structure and ingot furnace; this adjustable lateral part heater can carry out the corresponding adjustment in thermal field according to the quality condition of production feedback at any time, carries out the position removal for the crucible, effectively matches the temperature distribution demand of crucible, promotes the quality of the silicon bulk of ingot production greatly.

In a first aspect, the utility model provides an adjustable lateral part heater, including lateral part heater monomer, two at least connection davits and two at least graphite electrodes of polylith end to end connection, every the one end of connecting the davit is fixed with one graphite electrode, every the other end of connecting the davit is equipped with two at least rectangular shape holes, rectangular shape hole is on a parallel with the length direction of connecting the davit, install a plurality of fixing bolt on the lateral part heater monomer, fixing bolt passes rectangular shape hole just will it fixes to connect the davit on the lateral part heater monomer, fixing bolt can remove in the rectangular shape hole, in order to drive lateral part heater monomer removes.

Optionally, the fixing device further comprises a fixing cushion block, the fixing cushion block is arranged in the elongated hole, and two ends of the fixing cushion block respectively abut against the fixing bolt and the inner wall of the elongated hole.

Optionally, the length of the elongated hole is 80-150 mm.

Optionally, the elongated holes are arranged side by side, and each elongated hole is correspondingly provided with two fixing bolts.

Optionally, the side heater is a three-phase structure, and the side heater includes three connecting booms and three graphite electrodes.

Optionally, the side heater further comprises an angle connection plate, and two ends of the angle connection plate are respectively connected with the end portions of two adjacent side heater single bodies, so that the side heater single bodies are connected end to end.

In a second aspect, the utility model also provides an ingot furnace thermal field structure, which comprises a crucible, a heat exchange platform, a protective plate, a heater and a heat insulation cage, wherein the crucible is arranged on the heat exchange platform, the protective plate and the heater are sequentially sleeved on the periphery of the crucible, and the crucible, the heat exchange platform, the protective plate and the heater are all arranged in the heat insulation cage; wherein, the heater includes top heater and the lateral part heater as described in the first aspect of the present invention, the top heater is disposed on the top of the crucible, and the lateral part heater is disposed on the periphery of the guard plate.

Alternatively, the graphite electrode of the side heater is fixed on one side of the top heater, the length extension direction of the connecting suspension arm is perpendicular to the bottom surface of the crucible, and the side heater single body can move in a direction close to or far away from the bottom surface of the crucible.

Optionally, the cross-sectional shape of the side heater matches the cross-sectional shape of the crucible.

Optionally, a gap between the shield and the crucible is filled with a graphite soft felt.

Optionally, the thermal insulation cage comprises a thermal field chamber formed by a top thermal insulation plate, a side thermal insulation plate and a bottom thermal insulation plate.

Optionally, the top heat insulation plate is provided with an air inlet hole and an air outlet hole.

Optionally, the insulation cage comprises at least one layer of insulation.

Optionally, the polycrystalline silicon ingot casting thermal field structure further comprises a graphite cover plate for covering the crucible.

The third aspect of the present invention also provides an ingot furnace, which comprises a furnace body and an adjustable side heater.

The utility model discloses there is beneficial effect to include:

(1) the adjustable side heater of the utility model can move relatively between the side heater monomer and the connecting suspension arm, can realize fine adjustment and position adjustment in a larger range, and can correspondingly adjust the thermal field at any time according to the quality condition of production feedback; the heat distribution of the whole thermal field structure can be adjusted according to the heating condition of the crucible, so that the nucleation and crystal growth effects of each region in the crucible are better, crystals with short photon life and higher dislocation and lower dislocation are formed, and the quality of a silicon ingot is greatly improved.

(2) Ingot furnace thermal field structure, lateral part heater in the thermal field structure can be adjusted from top to bottom according to the demand of production to can finely tune, the range of adjustment is controllable, realizes that the heat distribution around the crucible is balanced.

(3) Ingot furnace, including furnace body and the ingot furnace thermal field structure of setting in the furnace body, compare in traditional ingot furnace, can adjust the position relation of heater and crucible, realize the unable heater position problem of solving of conventional technology adjustment, promote the yield of silicon bulk greatly, effectively reduce manufacturing cost.

Advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of embodiments of the invention.

Drawings

To more clearly illustrate the structural features and effects of the present invention, the following detailed description is given with reference to the accompanying drawings and specific embodiments.

Fig. 1 is a schematic structural view of an adjustable side heater according to an embodiment of the present invention;

fig. 2 is a schematic view of a partial structure of an adjustable side heater according to an embodiment of the present invention;

fig. 3 is a schematic view of a partially disassembled structure of an adjustable side heater according to an embodiment of the present invention;

fig. 4 is a schematic structural diagram of a thermal field structure of an ingot furnace according to an embodiment of the present invention;

fig. 5 is a schematic structural view of an ingot furnace according to an embodiment of the present invention;

FIG. 6 is an IR view of a silicon ingot produced by an unmodified ingot furnace according to one embodiment of the present invention;

FIG. 7 is an IR view of a silicon ingot produced by the ingot furnace according to an embodiment of the present invention;

fig. 8 is a minority carrier map of a silicon ingot produced by an unmodified ingot furnace according to an embodiment of the present invention;

fig. 9 is a minority carrier map of a silicon ingot produced by the improved ingot furnace according to an embodiment of the present invention.

Detailed Description

The following is a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the embodiment of the present invention, and these improvements and decorations are also considered as the protection scope of the embodiment of the present invention.

As shown in fig. 1, for the adjustable lateral heater provided in an embodiment of the present invention, including four end-to-end connected lateral heater units 1, three connection suspension arms 2 and three graphite electrode 3, one end of each connection suspension arm 2 is fixed with a graphite electrode 3, and the other end of each connection suspension arm 2 is equipped with two strip-shaped holes 4, strip-shaped holes 4 are parallel to the length direction of connection suspension arm 2, install a plurality of fixing bolts 5 on lateral heater unit 1, fixing bolt 5 passes strip-shaped holes 4 and will connection suspension arm 2 is fixed on lateral heater unit 1, fixing bolt 5 can remove in strip-shaped holes 4 to drive lateral heater unit 1 moves.

In the embodiment of the present invention, the side heater unit 1 may be composed of a plurality of U-shaped heating resistor units. By connecting the side heater units 1 end to end, a series-parallel loop can be formed, and the integral heating effect is realized.

In the embodiment of the present invention, the number of the side heater units 1 may be 4 to 10. By connecting different numbers of the side heater units 1, side heaters with various cross-sectional shapes can be formed so as to heat crucibles with different models.

Further, the length and size of the side heater unit 1 may be the same or different.

For example, the number of the side heater units 1 may be 8, one side heater having an octagonal sectional shape may be formed, and a G7 type crucible may be heated.

Optionally, the side heater further comprises an angle connecting plate 6, and two ends of the angle connecting plate 6 are respectively connected with the ends of two adjacent side heater single bodies 1, so that the side heater single bodies 1 are connected end to end, see fig. 1.

Alternatively, both ends of the corner connecting plate 6 and the end of the side heater unit 1 may be fixed by bolts.

In the embodiment of the utility model, the length direction of rectangular shape hole 4 with the length direction of connecting davit 2 is parallel.

Optionally, in the utility model discloses in, the lateral part heater is three-phase structure, the lateral part heater includes threely connect davit and threely graphite electrode.

Optionally, the other end of each connecting boom 2 is provided with two elongated holes 4, said elongated holes 4 being arranged side by side, see fig. 2. Alternatively, each connecting boom 2 may also be provided with more than two elongated holes 4 at the other end.

Optionally, the other end of each connecting boom is provided with at least two elongated holes, which are arranged in parallel.

Alternatively, the cross-sectional shape of the elongated hole may be rectangular. Further, the cross-sectional shapes of the two ends of the elongated hole in the length direction are circular arc.

Optionally, the distance d between two adjacent elongated holes 4 is 20-50 mm.

Further, optionally, the distance d between two adjacent elongated holes 4 is 20-80 mm.

Optionally, the length L of the elongated holes 4 is 80-150 mm.

Further, optionally, the length L of the elongated hole 4 is 80-200 mm.

The utility model discloses in the embodiment, adjacent two the interval of rectangular shape hole, and the length of rectangular shape hole all can be adjusted according to the size of a dimension of connecting the davit.

The utility model discloses in the embodiment, fixing bolt 5 includes bolt head and shank of bolt, the position of closing soon of shank of bolt is equipped with the external screw thread. The diameter of the bolt rod is matched with the width of the elongated hole. The width of the bolt head is larger than that of the elongated hole.

Optionally, a plurality of bolt holes 7 are formed in the side heater unit 1, and inner walls of the bolt holes 7 are provided with internal threads matched with the fixing bolts 5.

Optionally, each elongated hole 4 may be, but not limited to, provided with at least one fixing bolt 5. For example, two fixing bolts are correspondingly arranged in each elongated hole.

Optionally, the fixing bolt may also be provided with a spring washer.

In the embodiment of the present invention, the side heater further includes a fixing pad 8, the fixing pad 8 is disposed in the elongated hole 4, the two ends of the fixing pad 8 are respectively supported by the fixing bolt 5 and the inner wall of the elongated hole 4, see fig. 2 and 3 together. On one hand, the fixed cushion block can enable the connection between the suspension arm and the single body of the side heater to be firmer, ensure the installation strength and avoid the looseness between the side heater and the single body of the side heater caused by thermal shock; on the other hand, the connecting suspension arms can be effectively adjusted to be positioned at the same horizontal position by inserting the fixing cushion blocks 8 with different heights. And the Z-axis direction is the length direction of the connecting suspension arm or the length direction of the long strip-shaped hole. In the utility model, the plane direction that X axle and Y axle constitute does the bottom plane direction of crucible.

Alternatively, the height of the fixed block 8 may be varied. Furthermore, one or more fixed cushion blocks can be placed in the elongated hole. The fixed cushion block is detachably fixed in the elongated hole, and the fixed cushion block and the elongated hole are firmly connected and are not easy to loosen.

Optionally, when the elongated hole 4 includes a plurality of fixing bolts, a fixing pad may be clamped between the fixing bolts.

Lateral part heater monomer can be based on fixing bolt be in reciprocate in the rectangular shape hole, and realize holistic reciprocating for connecting the davit. The up-down moving direction may be a length direction of the elongated hole.

As shown in fig. 4, in order to provide an ingot furnace thermal field structure 100 in an embodiment of the present invention, the ingot furnace thermal field structure includes a crucible 10, a heat exchange platform 20, a protection plate 30, a heater 40 and a heat insulation cage 50, the crucible 10 is disposed on the heat exchange platform 20, the protection plate 30 and the heater 40 are sequentially sleeved on the periphery of the crucible 10, the heat exchange platform 20, the protection plate 30 and the heater 40 are all disposed in the heat insulation cage 50, the heater 40 includes a top heater 41 and a side heater 42, the top heater 41 is disposed on the top of the crucible 10, the side heater 42 is disposed in a gap between the protection plate 30 and the heat insulation cage 50, and the side heater 42 is disposed on the periphery of the protection plate 30.

Alternatively, specific limitations of the side heater 42 may be found in the side heater described in the above embodiment. Optionally, the cross-sectional shape of the side heater matches the cross-sectional shape of the crucible.

Alternatively, the crucible 10 includes a bottom surface and a side wall, and the side wall may not be limited to include several side surfaces, and the side wall is perpendicular to the bottom surface. In this embodiment, the cross-sectional shape of the crucible may be, but is not limited to, a square, an octagon, or a polygon. Alternatively, the crucible may be a quartz crucible, a graphite crucible, or a ceramic crucible. Optionally, the crucible further comprises a crucible made of other hard materials. Optionally, the crucible surface may also include, but is not limited to, a silicon nitride layer.

Alternatively, the graphite electrode of the side heater 42 is fixed to one side of the top heater 41, the length of the connecting boom extends perpendicular to the bottom surface of the crucible, and the side heater unit is movable in a direction toward or away from the bottom surface of the crucible.

In particular, the top heater 41 may include, but is not limited to, at least two graphite electrodes. For example, the top heater 41 also includes three graphite electrodes, and the top heater and the side heater constitute a six-phase structure. The graphite electrode of the top heater and the graphite electrode of the side heater may be, but not limited to, located on the same horizontal plane.

Alternatively, the heat exchange stage 20 may be a DS plate. For example, the hot swap station may be a DS Block (DS-Block).

Optionally, the shield abuts the crucible. When the protective plate is not tightly attached to the crucible, a gap between the protective plate and the crucible is filled with graphite soft felt. The protective plate and the crucible can be effectively attached and matched through the filled graphite soft felt, and the heat distribution of the same horizontal plane of the crucible is more uniform and the heat dead angle is not easy to form under the symmetrically distributed heaters.

Optionally, the insulation cage 50 is formed as a sealed thermal field chamber from top, side and bottom insulation panels.

Optionally, the top heat insulation plate is provided with an air inlet hole and an air outlet hole. The air inlet hole and the air outlet hole are favorable for meeting the requirements on air pressure and inert gas environment in the preparation process of the polycrystalline silicon ingot.

Optionally, the polysilicon casting field 100 further comprises a graphite cover plate for covering the crucible. The graphite cover plate can be but is not limited to be provided with heat conduction holes or air guide holes. And the air inlet and the air outlet of the top heat insulation plate can sequentially penetrate through the heater and the graphite cover plate.

Optionally, the insulation cage comprises at least one layer of insulation. The utility model discloses in, thermal-insulated cage has the thermal-insulated effect of good heat preservation, can greatly reduce scattering and disappearing of temperature, guarantees the symmetric distribution of whole polycrystalline silicon ingot casting thermal field structure temperature, and reduces the consumption in thermal field.

In another embodiment of the present invention, as shown in fig. 5, there is provided an ingot furnace 200, including a furnace body 201 and an ingot furnace thermal field structure disposed in the furnace body, the ingot furnace thermal field structure includes a crucible 10, a heat exchange platform 20, a protection plate 30, a heater 40 and a heat insulation cage 50, the crucible 10 is disposed on the heat exchange platform 20, the periphery of the crucible 10 is sequentially sleeved with the protection plate 30 and the heater 40, the crucible 10 the heat exchange platform 20, the protection plate 30 and the heater 40 are all disposed in the heat insulation cage 50, the heater 40 includes a top heater 41 and a side heater 42, the top heater 41 is disposed at the top of the crucible 10, the side heater 42 is disposed in a gap between the protection plate 30 and the heat insulation cage 50.

The definition of the thermal field structure of the ingot furnace 200 is the same as that of the thermal field structure 100 of the ingot furnace provided in the embodiment of the present invention, and is not excessively limited here.

Further, the specific definition of the side heater 42 in the ingot furnace 200 can be referred to the side heater described in the above embodiment.

The utility model discloses in the embodiment, the ingot furnace still includes other subassemblies, other subassemblies can be the relevant subassembly among the prior art, the utility model discloses do not describe one by one.

Ingot furnace, include ingot furnace thermal field structure and furnace body compare in traditional crystalline silicon ingot furnace, and the quality of the silicon bulk that makes is better, improves the yield of product, less manufacturing cost greatly.

Effect example 1

Get a serious ingot furnace of thermal field structural attenuation, it is serious to go out ingot data and show that silicon ingot afterbody shade, the micrite is serious, and conventional process parameter can't adjust or improve, now the lateral part heater of ingot furnace thermal field structure is according to the utility model discloses the embodiment in the structure set up the improvement, moves down the whole lateral part heater unit of lateral part heater 50mm, then will by the silicon ingot of ingot furnace preparation and the silicon ingot furnace that does not improve make the silicon ingot and carry out the comparison.

See IR plots for silicon ingots in fig. 6 and 7, where fig. 6 is an unmodified ingot furnace producing silicon ingots with heavily shaded ingot tails and heavily microcrystalline tails. And silicon bulk overall structure that ingot furnace after the improvement made is outstanding, and silicon bulk micrite, shade influence disappear, see figure 7, go out ingot back yield and promote to present 63% level by original 57%, promoted nearly 6%.

Effect example 2

A ingot casting furnace platform (from Jing fortune furnace platform) is taken, a semi-melting process is adopted, the remaining area of the tail seed crystal before the improvement of the side heater in the B area is only 80%, the ingot shaping efficiency is influenced, the improvement is realized through the repeated adjustment of the process, and finally the remaining area of the seed crystal in the B area is only 85% at most.

It is right the lateral part heater of ingot casting stove platform is according to the utility model discloses the structure sets up the improvement among the embodiment, will lateral part heater unit of lateral part heater upwards adjusts 10mm, according to the normal ingot casting of the same technology, and the afterbody seed crystal that finds the silicon bulk after going out the ingot remains and can reach 100%, and improvement effect is very obvious.

The ingots produced by the unmodified ingot furnace platform and the modified ingot furnace platform were further examined, and referring to the minority carrier map of the regions B of the ingots before and after modification as shown in fig. 8 and 9. Through the verification of the ingot-shaping efficiency, the improved ingot-shaping efficiency of the silicon ingot is improved by 0.1 percent compared with the original ingot-shaping efficiency and reaches the level of 18.89 percent.

To sum up, adjustable lateral part heater can effectively promote ingot casting yield and efficiency, can carry out the corresponding adjustment of thermal field, especially millimeter level's slight adjustment according to the quality condition of production feedback at any time, and the cost is 0 almost, and current conventional thermal field adjustment scheme cost is huge, causes manufacturing cost huge.

It is to be noted that variations and modifications can be made to the above-described embodiments by those skilled in the art in light of the disclosure and description of the above description. Therefore, the present invention is not limited to the specific embodiments disclosed and described above, and some equivalent modifications and variations of the present invention should be covered by the protection scope of the claims of the present invention. Furthermore, although specific terms are employed herein, they are used in a generic and descriptive sense only and not for purposes of limitation.

Claims (10)

1. The utility model provides an adjustable lateral part heater, its characterized in that, includes lateral part heater monomer, two at least connection davits and two at least graphite electrodes of polylith end to end connection, every the one end of connecting the davit is fixed with one graphite electrode, every the other end of connecting the davit is equipped with two at least rectangular shape holes, rectangular shape hole is on a parallel with connect the length direction of davit, install a plurality of fixing bolt on the lateral part heater monomer, fixing bolt passes rectangular shape hole just will it fixes to connect the davit on the lateral part heater monomer, fixing bolt can remove in the rectangular shape hole, in order to drive the lateral part heater monomer removes.

2. The adjustable side heater of claim 1, further comprising a fixed pad disposed within the elongated hole, wherein two ends of the fixed pad abut against the fixed bolt and an inner wall of the elongated hole, respectively.

3. The adjustable side heater of claim 1, wherein the elongated hole has a length of 80-150 mm.

4. The adjustable side heater of claim 1, wherein the elongated apertures are arranged side-by-side; and each elongated hole is correspondingly provided with two fixing bolts.

5. The adjustable side heater of claim 1, wherein the side heater is a three-phase structure comprising three said connecting booms and three said graphite electrodes.

6. The adjustable side heater of claim 1, wherein the side heater further comprises an angle connection plate, and two ends of the angle connection plate are respectively connected with the ends of two adjacent side heater units, so that the side heater units are connected end to end.

7. The ingot furnace thermal field structure is characterized by comprising a crucible, a heat exchange platform, a protective plate, a heater and a heat insulation cage, wherein the crucible is arranged on the heat exchange platform, the protective plate and the heater are sequentially sleeved on the periphery of the crucible, and the crucible, the heat exchange platform, the protective plate and the heater are all arranged in the heat insulation cage; wherein the heater comprises a top heater disposed at the top of the crucible and a side heater disposed at the periphery of the shield as claimed in any one of claims 1 to 6.

8. The ingot furnace thermal field structure of claim 7, wherein the graphite electrode of the side heater is fixed to one side of the top heater, the connecting boom has a length extending perpendicular to the bottom surface of the crucible, and the side heater unit is movable in a direction toward or away from the bottom surface of the crucible.

9. The ingot furnace thermal field structure of claim 7, wherein the side heater has a cross-sectional shape that matches a cross-sectional shape of the crucible.

10. An ingot furnace comprising a furnace body and an adjustable side heater as claimed in any one of claims 1 to 6 disposed within the furnace body.

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