CN209979678U - Atomic force microscope simulation experiment device - Google Patents
Atomic force microscope simulation experiment device Download PDFInfo
- Publication number
- CN209979678U CN209979678U CN201920238000.3U CN201920238000U CN209979678U CN 209979678 U CN209979678 U CN 209979678U CN 201920238000 U CN201920238000 U CN 201920238000U CN 209979678 U CN209979678 U CN 209979678U
- Authority
- CN
- China
- Prior art keywords
- probe
- atomic force
- force microscope
- adjusting mechanism
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The utility model relates to an atomic force microscope simulation experiment device, which comprises a base, a probe, a sample table, a laser and an adjusting mechanism; the laser, the deflection prism and the position sensitive detector are sequentially arranged on the same plane; the adjusting mechanism comprises a Z-direction adjusting mechanism, the probe is arranged on the Z-direction adjusting mechanism through the probe seat and the probe mounting bracket, and the probe comprises a cantilever and a reflector; the laser probe is characterized by further comprising an organic glass sheet, wherein the organic glass sheet is arranged above the probe, so that laser emitted by the laser is transmitted to the reflecting mirror of the probe through the organic glass and then is reflected to the organic glass, the deflection prism and the position sensitive detector in sequence through the reflecting mirror. The experimental device for simulating the principle of the atomic force microscope, the feeding operation of the microprobe and the scanning imaging of the sample is provided. The damage probability of the atomic force microscope probe and the experimental instrument is reduced, the cost of the atomic force microscope experiment is saved, and the experiment efficiency of the atomic force microscope is improved.
Description
Technical Field
The utility model relates to a universities and colleges physical experiment teaching device, in particular to atomic force microscope simulation experiment device.
Background
The atomic force microscope is an experimental testing instrument which utilizes an atomic force microscope microprobe to scan and observe the surface micro-topography of a sample to be tested. The atomic force microscope has high scanning imaging resolution and is not limited by the conductivity and the material state of the micro-nano sample, so the atomic force microscope can be widely applied to the fields of physics, chemistry, microelectronics, photoelectricity science, biomedicine, material science, micro-nano processing and the like, and the development of nano science is greatly promoted. Meanwhile, the atomic force microscope is a scientific instrument integrating physics, optics, electronics and a computer, wherein the physical principle is rich, the technical system is novel, and the experimental method is ingenious, and the atomic force microscope becomes one of indispensable contents in college physical experiments. In an atomic force microscope system, a microprobe is a core component and consists of a needle tip and a microcantilever which is sensitive to atomic force. When the needle tip of the atomic force microscope microprobe is close to the surface of a sample, the atoms at the probe tip and the atoms on the surface of the sample generate interactive atomic force, and the microcantilever is pushed to deform and bend; when the microprobe and the sample are scanned transversely and relatively, the information such as atomic arrangement, nano structure and the like on the surface of the sample can be obtained by detecting the deformation amount of the micro cantilever and converting the deformation amount into an electric signal which can be collected. Because the actual atomic force microscope microprobe has a small size, and the effective length of the micro cantilever is only 100 μm or 200 μm, the micro cantilever is invisible to naked eyes and is easy to damage in the experimental process of the atomic force microscope; meanwhile, the physical experiment is the first experiment course after college students go to school, and is directed to the students with the first school and the second school, and the experiment skills of the students are not trained too much. However, the atomic force microscope is used as a high-precision experimental device, each part of the atomic force microscope is expensive, the price of a single probe is high, and the number of schools is limited; in the experiment operation process of the atomic force microscope, the phenomenon that the probe and even the instrument of the atomic force microscope are damaged due to improper operation of students occurs occasionally, so that the experiment of the atomic force microscope is high in cost and consumption, and the progress of the teaching experiment is seriously influenced.
SUMMERY OF THE UTILITY MODEL
To the technical problem who exists, the utility model provides an atomic force microscope simulation experiment device.
The purpose of the utility model is realized through the following technical scheme: an atomic force microscope simulation experiment device comprises a base, a probe, a sample table, a laser and an adjusting mechanism; the base includes the bottom plate and erects the mounting panel, its characterized in that: the laser is arranged on one side of the deflection prism, and the Position Sensitive Detector (PSD) is arranged on the other side of the deflection prism; the adjusting mechanism comprises a Z-direction adjusting mechanism, and the Z-direction adjusting mechanism is arranged on the vertical mounting plate; the probe is arranged on the Z-direction adjusting mechanism through the probe seat and the probe mounting bracket and can be adjusted up and down along with the Z-direction adjusting mechanism; the sample stage comprises an XY adjusting mechanism and a sample placing platform; the probe comprises a cantilever and a reflector; laser emitted by the laser is reflected to a deflection prism through the reflector of the probe, and then is transmitted to a Position Sensitive Detector (PSD) through the deflection prism. Selecting a semiconductor laser with the wavelength of 650nm and the power of 4mW as a light source; the probe is made of a copper foil with the thickness of 0.2mm, a triangle with the bottom side length of about 8mm and the height of about 10mm is cut out to serve as a cantilever, and a reflector with the length of 1.5mm and the width of 3.6mm is adhered to the position close to the top point of the upper surface of the probe, so that laser beams can be reflected conveniently, and optical lever amplification can be realized; the top end of the triangle is bent to be used as a simulated needle point.
Further: still include the organic glass piece, organic glass sets up the probe top makes the laser process of launching of laser instrument organic glass passes to the probe the speculum, the warp again the speculum reflects to passing to organic glass, deflection prism and Position Sensitive Detector (PSD) in proper order, lets the laser beam leave the track to the student observes.
Further: the laser, the deflection prism and the Position Sensitive Detector (PSD) are arranged on the Z-direction adjusting mechanism through the same mounting plate so as to keep the relative position of the laser, the deflection prism and the position sensitive detector and the stability of a light path.
Further: the reflector is arranged at the top end of the upper surface of the cantilever.
Further: the cantilever top end also includes a downwardly bent needle tip.
Further: the Z-direction adjusting mechanism comprises a coarse adjusting knob and a fine adjusting knob so as to accurately adjust the position.
Further: the upright mounting plate further comprises reinforcing ribs.
Further: the probe mounting bracket comprises a vertical rod and a transverse rod which are fixedly connected with each other.
The simulation method of the atomic force microscope simulation experiment device comprises the following steps: (1) placing a simulation sample on a sample table; (2) adjusting a coarse adjustment knob of the Z-direction adjustment mechanism to move the probe to the vicinity of the sample; (3) turning on a laser, wherein laser emitted by the laser is transmitted to the reflecting mirror of the probe through the organic glass and then is reflected by the reflecting mirror to be transmitted to the organic glass, a deflection prism and a Position Sensitive Detector (PSD) in sequence; (4) adjusting a fine adjusting knob of the Z-direction adjusting mechanism to enable the probe to be in contact with the sample, enabling the cantilever to generate rotation change, observing a laser beam track and recording position change information; (5) adjusting the XY adjusting mechanism to enable the cantilever of the probe to generate rotation change, observing the laser beam track and recording position change information; (6) after the experiment is finished, the probe and the sample platform are adjusted to initial positions; and the probe approaches the simulated sample in the Z direction by utilizing the Z-direction adjusting mechanism until the probe and the simulated sample are contacted, so that the micro-cantilever deflects, and further a reflected light beam deflects, thereby simulating an atomic force action mechanism between the probe and the sample and a light beam deflection method detection principle of the deflection amount of the micro-cantilever.
And the XY adjusting mechanism is formed by combining an X micro-motion table and a Y micro-motion table, and realizes XY simulated scanning of the sample. In the scanning process, the height and the position of the analog microprobe are kept unchanged, and the X micro-motion stage and the Y micro-motion stage are sequentially adjusted, so that the analog scanning of the microprobe on the sample can be realized.
The utility model discloses simulation probe among the device is visual, and the price is lower, through the use of this device, can satisfy the student in the elasticity limit of simulation microprobe, and the courage changes experimental parameters such as the distance of microprobe and sample, carries out the simulation observation of atomic force action mechanism and the analog operation of light beam deflection method, and then carries out XY simulated scanning, and is both directly perceived convenient, safe high-efficient again. The restriction of experimental apparatus quantity can be alleviated on the one hand, and on the other hand still can be through adopting this low-cost device mode, make the student can further understand atomic force microscope's scanning theory of operation, skilled atomic force microscope's adjusting method and feel satisfy the teaching content. In addition, the probability of damage to the atomic force microscope probe and the experimental instrument caused by improper operation can be reduced, the cost of the atomic force microscope experiment is greatly saved, and the experimental efficiency of the atomic force microscope is improved.
Drawings
Fig. 1 is a schematic structural diagram of the atomic force microscope principle simulation experiment device of the present invention.
FIG. 2 is a top view of the mock probe.
Figure 3 is a side view of an analog probe.
Reference numerals: 1-a mock sample; 2-a mock probe; 3-a laser; 4-a deflection prism; 5-position sensitive detector (PSD device); a 6-Z direction adjusting mechanism; a 7-Z coarse adjustment knob; 8-Z fine adjustment knob; a 9-XY adjustment mechanism; 10-a base plate; 11-erecting a mounting plate; 12-reinforcing ribs; 13-a sample mount; 14-transparent organic glass; 15-a probe seat; 16-a sample stage; 17-a mirror; 18-reflected light beam; 19-simulated needle tip
Detailed Description
As shown in fig. 1, an atomic force microscope simulation experiment device includes a simulation sample 1, a simulation probe 2, a laser 3, a deflection prism 4, a position sensitive detector (PSD device) 5, a Z-direction adjusting mechanism 6, an XY adjusting mechanism 9, and the like. The base comprises a base plate 10 and an upright mounting plate 11. The laser device comprises a deflection prism 4 and a position sensitive detector (PSD device) 5 which are arranged on the same horizontal plane, wherein the laser device 3 is arranged on one side of the deflection prism 4, and the Position Sensitive Detector (PSD)5 is arranged on the other side of the deflection prism 5, is arranged on the same mounting plate and is arranged on a Z-direction adjusting mechanism 6. The adjusting mechanism comprises a Z-direction adjusting mechanism 6, and the Z-direction adjusting mechanism 6 is arranged on the vertical mounting plate 11; the simulation probe 2 is arranged on the Z-direction adjusting mechanism 6 through the probe seat 15 and the probe mounting bracket and can be adjusted up and down along with the Z-direction adjusting mechanism 6; the sample stage comprises an XY adjusting mechanism 9 and a sample placing platform 16; the probe comprises a cantilever and a mirror 17; the laser emitted by the laser 3 is reflected to the deflection prism 4 by the reflector 17 of the analog probe 2, and then transmitted to the Position Sensitive Detector (PSD)5 by the deflection prism 4. Wherein, the laser 3 selects a semiconductor laser with the wavelength of 650nm and the power of 4mW as a light source; the probe 2 is made of a copper foil with the thickness of 0.2mm, a triangle with the bottom side length of about 8mm and the height of about 10mm is cut out to be used as a cantilever, and a reflector with the length of 1.5mm and the width of 3.6mm is adhered near the top point of the upper surface of the triangle, so that laser beams can be reflected conveniently and optical lever amplification can be realized; the top end of the triangle is bent to be used as a simulated needle point. The probe mounting bracket comprises a vertical rod and a transverse rod which are fixedly connected with each other.
Still include transparent organic glass piece 14, transparent organic glass 14 sets up 2 tops of probe make the laser process of launching of laser instrument 3 organic glass 14 reaches analog probe 2 speculum 17, again the warp speculum 17 reflects to passing to organic glass 14, deflection prism 4 and Position Sensitive Detector (PSD)5 in proper order, lets the laser beam leave the track to the student observes. A deflection prism 4 and a PSD device 5 for monitoring the deflection amount of the micro-cantilever and the reflected light beam; the clear plexiglas sheet 14 is primarily intended to allow the laser beam to leave a trail for the student to observe, if this plexiglas sheet is not present, the laser beam is free of path traces in air. The Z-direction adjusting mechanism 6 is arranged on the vertical mounting plate 11; the Z-direction adjustment consists of a coarse adjustment knob 7 and a fine adjustment knob 8. The XY adjusting mechanism 9 is formed by combining an X two-dimensional micro-motion table and a Y two-dimensional micro-motion table, the simulated sample 1 is fixed on the sample table 16, the sample table 16 is fixed on the XY adjusting mechanism 9, and XY simulated scanning of the sample is realized by adjusting the XY adjusting mechanism 9.
All components in the atomic force microscope principle simulation experiment device take the same bottom plate 10 as a foundation; the vertical mounting plate 11 is further fixed by an inclined reinforcing rib 12; the analog probe 2, the laser 3, the deflection prism 4, the Position Sensitive Detector (PSD)5 and the like are all mounted on the same Z-direction adjusting mechanism 6 to keep the relative positions of the four unchanged and the optical path stable.
As shown in fig. 2, the analog probe 2 is made of a copper foil with a thickness of 0.2mm, a triangle with a bottom side of about 8mm and a height of about 10mm is cut out as a micro-cantilever, and a micro-mirror 17 with a length of 1.5mm and a width of 3.6mm is attached near the top of the upper surface of the micro-cantilever, so as to reflect laser beams and realize optical lever amplification. As shown in FIG. 3, the triangular shaped microcantilever tip is bent downward to act as a mock tip 19.
The simulation method of the atomic force microscope simulation experiment device is adopted, (1) a simulation sample is placed on a sample table; (2) adjusting a coarse adjusting knob 7 of the Z-direction adjusting mechanism to move the analog probe 2 to the vicinity of the sample; (3) the laser 3 is turned on, and laser emitted by the laser 3 is transmitted to the reflecting mirror 17 of the probe through the organic glass 14 and then is reflected by the reflecting mirror 17 to be transmitted to the organic glass 14, the deflection prism 4 and the Position Sensitive Detector (PSD)5 in sequence; (4) adjusting a fine adjusting knob 8 of the Z-direction adjusting mechanism to enable the analog probe 2 to be in contact with a sample, enabling the cantilever to generate rotation change, observing a laser beam track and recording position change information; (5) adjusting an XY adjusting mechanism 9 to enable a cantilever of the probe to generate rotation change, observing a laser beam track and recording position change information; and the Z-direction adjusting mechanism 6 is utilized to enable the simulation probe 2 to approach the simulation sample in the Z direction until the simulation probe and the simulation sample are contacted, so that the micro-cantilever deflects, and further the reflected light beam deflects, thereby simulating an atomic force action mechanism between the probe and the sample and a light beam deflection method detection principle of micro-cantilever deflection.
And the XY adjusting mechanism is formed by combining an X micro-motion table and a Y micro-motion table, and realizes XY simulated scanning of the sample. In the scanning process, the height and the position of the analog microprobe are kept unchanged, and the X micro-motion stage and the Y micro-motion stage are sequentially adjusted, so that the analog scanning of the microprobe on the sample can be realized.
The atomic force microscope principle simulation experiment device utilizes actual physics, optics, electronics and precise mechanical integrated modules to realize the principle of the atomic force microscope, the feeding operation of a microprobe and the scanning imaging simulation of a sample. The content of the experiment is equal to that of a standard experiment, and the experiment control operation is the same as that of a standard system. Because the actual atomic force microscope microprobe has a small size, and the effective length of the micro cantilever is only 100 μm or 200 μm, the micro cantilever is invisible to naked eyes and is easy to damage in the experimental process of the atomic force microscope; the simulation probe in the system is visual, so that students can change experimental parameters such as the distance between the microprobe and a sample and the like greatly within the elastic limit of the simulation microprobe, perform simulation observation of an atomic force action mechanism and simulation operation of a light beam deflection method, and further perform XY simulation scanning, and the system is visual, convenient, safe and efficient. The restriction of experimental apparatus quantity can be alleviated on the one hand, and on the other hand still can be through adopting this low-cost device mode, make the student can further understand atomic force microscope's scanning theory of operation, skilled atomic force microscope's adjusting method and feel satisfy the teaching content. In addition, the probability of damage to the atomic force microscope probe and the experimental instrument caused by improper operation can be reduced, the cost of the atomic force microscope experiment is greatly saved, and the experimental efficiency of the atomic force microscope is improved.
Claims (8)
1. An atomic force microscope simulation experiment device comprises a base, a probe, a sample table, a laser and an adjusting mechanism; the base includes interconnect's bottom plate and erects the mounting panel, its characterized in that: the laser is arranged on one side of the deflection prism, and the position sensitive detector is arranged on the other side of the deflection prism; the adjusting mechanism comprises a Z-direction adjusting mechanism, and the Z-direction adjusting mechanism is arranged on the vertical mounting plate; the probe is arranged on the Z-direction adjusting mechanism through the probe seat and the probe mounting bracket and can be adjusted up and down along with the Z-direction adjusting mechanism; the sample stage comprises an XY adjusting mechanism and a sample placing platform; the probe comprises a cantilever and a reflector; laser emitted by the laser is reflected to the deflection prism through the reflector of the probe, and then is transmitted to the position sensitive detector through the deflection prism.
2. The atomic force microscope simulation experiment device according to claim 1, wherein: still include the organic glass piece, organic glass sets up the probe top makes the laser process that launches of laser instrument organic glass passes to the probe the speculum, the process again the speculum reflects to passing to organic glass, deflection prism and position sensitive detector in proper order, lets the laser beam leave the track to observe.
3. The atomic force microscope simulation experiment device according to claim 1 or 2, wherein: the laser, the deflection prism and the position sensitive detector are arranged on the Z-direction adjusting mechanism through the same mounting plate so as to keep the relative positions of each part and the probe unchanged and stabilize the light path.
4. The atomic force microscope simulation experiment device according to claim 1 or 2, wherein: the reflector is arranged at the top end of the upper surface of the cantilever.
5. The atomic force microscope simulation experiment device according to any one of claims 1 or 2, wherein: the cantilever top end also includes a downwardly bent needle tip.
6. The atomic force microscope simulation experiment device according to claim 1, wherein: the Z-direction adjusting mechanism comprises a coarse adjusting knob and a fine adjusting knob so as to accurately adjust the position of the probe.
7. The atomic force microscope simulation experiment device according to claim 1, wherein: the upright mounting plate further comprises reinforcing ribs.
8. The atomic force microscope simulation experiment device according to claim 1, wherein: the probe mounting bracket comprises a vertical rod and a transverse rod which are fixedly connected with each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920238000.3U CN209979678U (en) | 2019-02-26 | 2019-02-26 | Atomic force microscope simulation experiment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920238000.3U CN209979678U (en) | 2019-02-26 | 2019-02-26 | Atomic force microscope simulation experiment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209979678U true CN209979678U (en) | 2020-01-21 |
Family
ID=69253281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920238000.3U Expired - Fee Related CN209979678U (en) | 2019-02-26 | 2019-02-26 | Atomic force microscope simulation experiment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209979678U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109738673A (en) * | 2019-02-26 | 2019-05-10 | 浙江理工大学 | A kind of atomic force microscope imitative experimental appliance and analogy method |
-
2019
- 2019-02-26 CN CN201920238000.3U patent/CN209979678U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109738673A (en) * | 2019-02-26 | 2019-05-10 | 浙江理工大学 | A kind of atomic force microscope imitative experimental appliance and analogy method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6229607B1 (en) | Fine movement mechanism unit and scanning probe microscope | |
| CN107449939B (en) | Multi-parameter synchronous measurement method by adopting magnetic drive peak force modulation atomic force microscope | |
| US7170054B2 (en) | Scanning probe microscopy cantilever holder and scanning probe microscope using the cantilever holder | |
| JPH0776696B2 (en) | Atomic force microscope | |
| JPH0626854A (en) | Scanning power microscope | |
| CN101751811B (en) | Laser scan type vibration integrated demonstrator | |
| CN209979678U (en) | Atomic force microscope simulation experiment device | |
| CN202599978U (en) | Three-scanner atomic power microscan detecting device | |
| JP5273660B2 (en) | Cell physical property measuring device | |
| CN201653804U (en) | Nano-indentation system based on scanning electron microscope | |
| CN105911311A (en) | In-situ test system and method for mechanical properties of nano material | |
| CN103808967A (en) | Imaging system of atomic force microscope on the basis of quartz tuning fork probe | |
| CN101793911A (en) | Nano indentation system based on scanning electron microscope | |
| CN109738673A (en) | A kind of atomic force microscope imitative experimental appliance and analogy method | |
| US20080048115A1 (en) | Scanning probe microscope displacement detecting mechanism and scanning probe microscope using same | |
| US7614288B2 (en) | Scanning probe microscope fine-movement mechanism and scanning probe microscope using same | |
| CN106104278A (en) | Scanning probe microscopy | |
| CN102243253B (en) | Scanning probe microscope body with isolated imaging scanning and rough approximation | |
| CN108508238A (en) | Single molecule force spectroscopy device and method are tested based on double drive AFM system | |
| CN205749569U (en) | A kind of nano material mechanics performance in-situ test system | |
| CN106568989B (en) | A kind of horizontal probe apparatus of the deep space environment atomic force microscopy system based on quartz tuning-fork probe | |
| Shusteff et al. | Measuring Boltzmann’s constant with a low-cost atomic force microscope: An undergraduate experiment | |
| CN106556535A (en) | A kind of mechanic property test method based on mechanics sensor | |
| CN103296194A (en) | piezoelectric actuator | |
| CN101206170A (en) | Sample nondestructive approach method and implementation device facing to nano collimation and operation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200121 Termination date: 20210226 |