CN109738673A - A kind of atomic force microscope imitative experimental appliance and analogy method - Google Patents
A kind of atomic force microscope imitative experimental appliance and analogy method Download PDFInfo
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- CN109738673A CN109738673A CN201910139654.5A CN201910139654A CN109738673A CN 109738673 A CN109738673 A CN 109738673A CN 201910139654 A CN201910139654 A CN 201910139654A CN 109738673 A CN109738673 A CN 109738673A
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- 238000000034 method Methods 0.000 title claims abstract description 19
- 239000000523 sample Substances 0.000 claims abstract description 127
- 230000007246 mechanism Effects 0.000 claims abstract description 52
- 230000001105 regulatory effect Effects 0.000 claims abstract description 49
- 239000011521 glass Substances 0.000 claims abstract description 25
- 238000002474 experimental method Methods 0.000 claims abstract description 18
- 238000004088 simulation Methods 0.000 claims abstract description 16
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 6
- 230000011514 reflex Effects 0.000 claims abstract description 5
- 230000008859 change Effects 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000010534 mechanism of action Effects 0.000 claims description 4
- 230000003014 reinforcing effect Effects 0.000 claims description 3
- 230000006641 stabilisation Effects 0.000 claims description 3
- 238000011105 stabilization Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims 2
- 238000012840 feeding operation Methods 0.000 abstract description 2
- 238000012360 testing method Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004630 atomic force microscopy Methods 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000003351 stiffener Substances 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Abstract
The present invention relates to a kind of atomic force microscope imitative experimental appliance and analogy methods, including pedestal, probe, sample stage, laser and regulating mechanism；Laser, deviation prism, Position-Sensitive Detector are set gradually in the same plane；Regulating mechanism includes Z-direction regulating mechanism, and probe is arranged on Z-direction regulating mechanism through probe base and probe mounting bracket, and probe includes cantilever and reflecting mirror；It further include organic glass piece, organic glass is arranged above the probe, so that the laser of laser launched is reached the reflecting mirror of probe through organic glass, then reflex to through reflecting mirror and successively reach organic glass, deviation prism and Position-Sensitive Detector.The experimental provision of the scanning imagery analog simulation of a kind of principle of atomic force microscope, the feeding operation of microprobe and sample is provided.The probability for reducing atomic force microscope probe and laboratory apparatus damage, saves the cost of AFM experiments, improves the conventional efficient of atomic force microscope.
Description
Technical field
The present invention relates to a kind of institution of higher learning's physics experiment teaching device and analogy method, in particular to a kind of atomic force is aobvious
Micro mirror imitative experimental appliance and analogy method.
Background technique
Atomic force microscope utilizes atomic force microscope microprobe scane and observation sample to be tested surface microscopic topographic
Experimental tester device.Since atomic force microscope had not only had very high scanning imagery resolution ratio, but also do not led by micro-nano sample
Electrical and polymorphic material limitation, therefore can be widely applied to physics, chemistry, microelectronics, photoelectricity science, biomedical, material
Material science and micro-nano processing and other fields, have greatly pushed the development of nano science.Meanwhile atomic force microscope is collection physics
, optics, electronics and computer are in the scientific instrument of one, and wherein physical principle is abundant, technological system is novel, experimental method
It is ingenious, become one of content indispensable in Experiment of College Physics.In atomic force microscopy system, microprobe is it
Core component is made of needle point and micro-cantilever two parts very sensitive to atomic force.When the needle of atomic force microscope microprobe
When point is close to sample surfaces, the atomic force of interaction will be generated between probe tip atom and sample surfaces atom, and push
Bending that micro-cantilever is allowed to that deformation occurs；When microprobe and sample are in laterally opposed scanning, by the deformation quantity for detecting micro-cantilever
And the electric signal that can be collected is converted thereof into, it can be obtained the information such as Atomic Arrangement and the nanostructure of sample surfaces.Due to
Actual atomic force microscope microprobe is small-sized, and micro-cantilever effective length is only 100 μm or 200 μm, therefore is naked eyes
It is sightless, it is easy to damage during AFM experiments；Meanwhile Physical Experiment is university student into first behind school
Door experimental courses, towards be big one big two student, their experimental skill has not gone through too many training.However, former
Sub- force microscope is as a kind of high-accuracy experimental facilities, and each piece price is expensive, and single probe price is also higher, general to learn
School limited amount；And in AFM experiments operating process, atomic force microscope is caused due to student's misoperation
The phenomenon that probe or even instrument damage, happens occasionally, and not only results in the high cost for making AFM experiments, high consumption, and
And seriously affect teaching experiment progress.
Summary of the invention
For the above technical problems, the invention proposes a kind of atomic force microscope imitative experimental appliance and simulations
Method.
The purpose of the present invention is achieved through the following technical solutions: a kind of atomic force microscope imitative experimental appliance,
Including pedestal, probe, sample stage, laser and regulating mechanism；The pedestal includes bottom plate and erects mounting plate, and feature exists
In: it further include the deviation prism and Position-Sensitive Detector (PSD) that same level is set, the laser setting is deflecting
The other side of deviation prism is arranged in the side of prism, the Position-Sensitive Detector (PSD)；The regulating mechanism includes Z-direction
Regulating mechanism, the Z-direction regulating mechanism are arranged on the setting mounting plate；It further include the probe base for installing probe and spy
Needle mounting bracket, the probe are arranged on Z-direction regulating mechanism through probe base and probe mounting bracket, can be with Z-direction regulating mechanism
Up and down adjustment；The sample stage includes XY regulating mechanism and sample placement platform；The probe includes cantilever and reflecting mirror；It is described
The laser of laser launched reflexes to deviation prism through the reflecting mirror of the probe, then reaches position through deviation prism
Sensing detector (PSD).The semiconductor laser that selection wavelength is 650nm, power is 4mW is as light source；The probe, by
It is made with a thickness of the copper foil of 0.2mm, is cut out a bottom edge and is about the triangle of 8mm, high about 10mm as cantilever,
Surface vertices are nearby pasted with the reflecting mirror of long 1.5mm, width 3.6mm thereon, convenient for reflection laser beam and realize that optical lever is amplified；
The top bending of triangle, as simulation needle point.
Further: further including organic glass piece, the organic glass is arranged above the probe, makes the laser
The laser launched the reflecting mirror of the probe is reached through the organic glass, then reflexed to successively through the reflecting mirror
Organic glass, deviation prism and Position-Sensitive Detector (PSD) are reached, allows laser beam to leave track, so as to observation of students.
Further: the laser, deviation prism and Position-Sensitive Detector (PSD) are arranged through same mounting plate in institute
Z-direction regulating mechanism is stated, to keep and the relative position of the probe is constant and the stabilization of optical path.
Further: the reflecting mirror is arranged on cantilever upper surface top.
Further: the cantilever top further includes the needle point bent downward.
Further: the Z-direction regulating mechanism includes coarse adjustment knob and fine tuning knob, accurately to carry out position adjusting.
Further: the setting mounting plate further includes reinforcing rib.
Further: the probe mounting bracket includes the vertical bar being mutually permanently connected and transverse bar.
A kind of analogy method using a kind of atomic force microscope imitative experimental appliance described above, it is characterised in that:
(1) analog sample is placed to sample stage；(2) the coarse adjustment knob for adjusting the Z-direction regulating mechanism, makes probe be moved to sample
Near product；(3) laser is opened, the laser of the laser transmitting reaches the reflection of the probe through the organic glass
Mirror, then reflexed to through the reflecting mirror and successively reach organic glass, deviation prism and Position-Sensitive Detector (PSD)；(4) it adjusts
The thin tuning knob of the Z-direction regulating mechanism, contacts probe with sample, generates the cantilever rotationally-varying, observation allows sharp
Light beam track and simultaneously record position change information；(5) XY regulating mechanism is adjusted, generates the cantilever of probe rotationally-varying, sees
It examines and allows laser beam track and simultaneously record position change information；(6) experiment terminates, and probe and sample stage are modulated initial position；
Using Z-direction regulating mechanism, probe is made so that micro-cantilever is generated deflection, in turn until the two contact in Z-direction approaching simulation sample
The reflected beams are made to deflect, thus the atomic force mechanism of action and micro-cantilever amount of deflection between analogue probe and sample
Light beam deflecting method testing principle.
The XY regulating mechanism is composed of X and Y micropositioner, realizes the XY analog scanning of sample.In scanning process
In, it keeps the height of simulation microprobe and position constant, successively adjusts X micropositioner and Y micropositioner, microprobe can be realized to sample
The analog scanning of product.
Analogue probe in apparatus of the present invention is visual, and price is lower, by the use of the present apparatus, can meet
It is raw courageously to change the microprobe experiment parameters such as at a distance from sample in the elastic limit of simulation microprobe, carry out atom masterpiece
With the mock inspection of mechanism and the simulated operation of light beam deflecting method, and then XY analog scanning is carried out, it is not only intuitive and convenient, but also safety is high
Effect.On the one hand it can alleviate the limitation of experimental provision quantity, on the other hand can also make by using the device mode of this low cost
Student can further appreciate that the scanning work principle of atomic force microscope, the adjusting method and hand of skilled atomic force microscope
Sense, meets the content of courses.In addition, can also reduce due to misoperation and atomic force microscope probe and laboratory apparatus is caused to damage
Probability, the cost of AFM experiments is greatly saved, while improving the conventional efficient of atomic force microscope.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of atomic force microscope principle simulation experimental provision of the present invention.
Fig. 2 is analogue probe top view.
Fig. 3 is analogue probe side view.
Appended drawing reference: 1- analog sample；2- analogue probe；3- laser；4- deviation prism；5- Position-Sensitive Detector
(PSD device)；6-Z is to regulating mechanism；7-Z is to coarse adjustment knob；8-Z is to fine tuning knob；9-XY regulating mechanism；10- bottom plate；11-
Erect mounting plate；12- reinforcing rib；13- sample mounting frame；14- transparent organic glass；15- probe base；16- sample stage；17- is anti-
Penetrate mirror；18- the reflected beams；19- simulates needle point
Specific embodiment
As shown in Figure 1, a kind of atomic force microscope imitative experimental appliance, including analog sample 1, analogue probe 2, laser
3, the parts such as deviation prism 4, Position-Sensitive Detector (PSD device) 5, Z-direction regulating mechanism 6, XY regulating mechanism 9.Pedestal includes
Bottom plate 10 and setting mounting plate 11.It further include the deviation prism 4 and Position-Sensitive Detector (PSD device that same level is set
Part) 5, the side of deviation prism 4 is arranged in the laser 3, and the Position-Sensitive Detector (PSD) 5 is arranged in deviation prism 5
The other side, and be installed on same mounting plate, be mounted on Z-direction regulating mechanism 6.The regulating mechanism includes that Z-direction is adjusted
Mechanism 6, the Z-direction regulating mechanism 6 are arranged on the setting mounting plate 11；It further include the probe for installing analogue probe 2
Seat 15 and probe mounting bracket, the analogue probe 2 are arranged on Z-direction regulating mechanism 6 through probe base 15 and probe mounting bracket,
It can be with 6 up and down adjustment of Z-direction regulating mechanism；The sample stage includes XY regulating mechanism 9 and sample placement platform 16；The probe packet
Include cantilever and reflecting mirror 17；The laser of the laser 3 launched is reflexed to through the reflecting mirror 17 of the analogue probe 2
Deviation prism 4, then Position-Sensitive Detector (PSD) 5 is reached through deviation prism 4.It is 650nm, function that wherein laser 3, which chooses wavelength,
Rate is the semiconductor laser of 4mW as light source；The probe 2 is sheared by being made with a thickness of the copper foil of 0.2mm
The triangle that a bottom edge is about 8mm, high about 10mm out is pasted with long 1.5mm, width as cantilever on it near surface vertices
The reflecting mirror of 3.6mm convenient for reflection laser beam and realizes that optical lever is amplified；The top bending of triangle, as simulation needle point.It visits
Needle mounting bracket includes the vertical bar being mutually permanently connected and transverse bar.
It further include transparent organic glass piece 14, the transparent organic glass 14 is arranged above the probe 2, makes described sharp
The laser of light device 3 launched reaches the reflecting mirror 17 of the analogue probe 2 through the organic glass 14, then through described anti-
It penetrates mirror 17 and reflexes to and successively reach organic glass 14, deviation prism 4 and Position-Sensitive Detector (PSD) 5, laser beam is allowed to leave diameter
Mark, so as to observation of students.Deviation prism 4 and PSD device 5, for monitoring the amount of deflection of micro-cantilever and the reflected beams；It is transparent organic
Sheet glass 14 is primarily to allow laser beam to leave track, so as to observation of students, if without this organic glass piece, laser beam
It is there is no path trace in air.Z-direction regulating mechanism 6, which is mounted on, to be erect on mounting plate 11；Z-direction is adjusted by 7 He of coarse adjustment knob
Fine tuning knob 8 forms.XY regulating mechanism 9 is composed of X and Y prototype with displacement resolution, and analog sample 1 is fixed on sample stage 16,
Sample stage 16 is fixed on XY regulating mechanism 9, by adjusting XY regulating mechanism 9, realizes the XY analog scanning of sample.
All components in atomic force microscope principle simulation experimental provision, all based on same bottom plate 10；It is perpendicular
Vertical mounting plate 11, is further fixed using inclined stiffener 12；Analogue probe 2, laser 3, deviation prism 4 and position sensing are visited
Survey that device (PSD) 5 is equal to be all mounted on same Z-direction regulating mechanism 6, with the relative position of holding is constant and the stabilization of optical path.
As shown in Fig. 2, analogue probe 2 is cut out a bottom edge and is about by being made with a thickness of the copper foil of 0.2mm
8mm, high about 10mm triangle as micro-cantilever, on it surface vertices be nearby pasted with long 1.5mm, width 3.6mm it is micro- instead
Mirror 17 is penetrated, convenient for reflection laser beam and realizes that optical lever is amplified.As shown in figure 3, the micro-cantilever top of triangle is bent downward, make
To simulate needle point 19.
A kind of analogy method using a kind of atomic force microscope imitative experimental appliance described above, (1) will simulate sample
Product are placed to sample stage；(2) the coarse adjustment knob 7 for adjusting the Z-direction regulating mechanism, makes analogue probe 2 be moved to sample attached
Closely；(3) laser 3 is opened, the laser that the laser 3 emits reaches the reflection of the probe through the organic glass 14
Mirror 17, then reflexed to through the reflecting mirror 17 and successively reach organic glass 14, deviation prism 4 and Position-Sensitive Detector (PSD)
5；(4) thin tuning knob 8 for adjusting the Z-direction regulating mechanism, contacts analogue probe 2 with sample, and the cantilever is made to generate rotation
Transformationization, observation allow laser beam track and simultaneously record position change information；(5) XY regulating mechanism 9 is adjusted, the cantilever of probe is made
Generate rotationally-varying, observation allows laser beam track and simultaneously record position change information；Using Z-direction regulating mechanism 6, visit simulation
Needle 2 makes micro-cantilever generate deflection, and then the reflected beams is made to deflect in Z-direction approaching simulation sample until the two contact,
To the light beam deflecting method testing principle of atomic force mechanism of action and micro-cantilever amount of deflection between analogue probe and sample.
The XY regulating mechanism is composed of X and Y micropositioner, realizes the XY analog scanning of sample.In scanning process
In, it keeps the height of simulation microprobe and position constant, successively adjusts X micropositioner and Y micropositioner, microprobe can be realized to sample
The analog scanning of product.
Atomic force microscope principle simulation experimental provision is to utilize actual physics, optics, electronics and precision machinery
Integration module realizes the scanning imagery analog simulation of the principle of atomic force microscope, the feeding operation and sample of microprobe.Experiment
Content be equal to standard test, experiment control operation is identical as modular system.Due to actual atomic force microscope microprobe
Small-sized, micro-cantilever effective length is only 100 μm or 200 μm, therefore is that naked eyes are sightless, in atomic force microscope reality
It is easy to damage during testing；And the analogue probe in this system is that visually, student can be in the elasticity limit of simulation microprobe
In degree, courageously change the microprobe experiment parameters such as at a distance from sample, carries out the mock inspection and light beam of atomic force mechanism of action
The simulated operation of deflecting method, and then XY analog scanning is carried out, it is not only intuitive and convenient but also safe and efficient.On the one hand it can alleviate experiment
On the other hand the limitation of device quantity can also enable student to further appreciate that original by using the device mode of this low cost
The scanning work principle of sub- force microscope, the adjusting method and feel of skilled atomic force microscope, meets the content of courses.In addition,
The probability for causing atomic force microscope probe and laboratory apparatus to damage due to misoperation can be also reduced, atom is greatly saved
The cost of force microscope experiment, while improving the conventional efficient of atomic force microscope.
Claims (9)
1. a kind of atomic force microscope imitative experimental appliance, including pedestal, probe, sample stage, laser and regulating mechanism；Institute
Stating pedestal includes bottom plate interconnected and setting mounting plate, it is characterised in that: further includes the deflection that same level is arranged in
The side of deviation prism, the Position-Sensitive Detector is arranged in prism and Position-Sensitive Detector, the laser) setting exist
The other side of deviation prism；The regulating mechanism includes Z-direction regulating mechanism, and the Z-direction regulating mechanism setting is pacified in the setting
In loading board；The probe is arranged on Z-direction regulating mechanism through probe base and probe mounting bracket, can be with Z-direction regulating mechanism above and below
It adjusts；The sample stage includes XY regulating mechanism and sample placement platform；The probe includes cantilever and reflecting mirror；The laser
The laser of device launched reflexes to deviation prism through the reflecting mirror of the probe, then reaches position sensing through deviation prism
Detector.
2. a kind of atomic force microscope imitative experimental appliance according to claim 1, it is characterised in that: further include organic glass
Glass piece, the organic glass are arranged above the probe, make the laser of the laser launched through the organic glass
The reflecting mirror of the probe is reached, then is reflexed to through the reflecting mirror and successively reaches organic glass, deviation prism and position
Sensing detector allows laser beam to leave track, to observe.
3. a kind of atomic force microscope imitative experimental appliance according to claim 1 or 2, it is characterised in that: the laser
Device, deviation prism and Position-Sensitive Detector are arranged through same mounting plate in the Z-direction regulating mechanism, to keep each component and institute
State probe relative position is constant and the stabilization of optical path.
4. a kind of atomic force microscope imitative experimental appliance according to claim 1 or 2, it is characterised in that: the reflection
Mirror is arranged on cantilever upper surface top.
5. a kind of atomic force microscope imitative experimental appliance according to claim 1-4, it is characterised in that: described
Cantilever top further includes the needle point bent downward.
6. a kind of atomic force microscope imitative experimental appliance according to claim 1, it is characterised in that: the Z-direction is adjusted
Mechanism includes coarse adjustment knob and fine tuning knob, accurately to adjust probe location.
7. a kind of atomic force microscope imitative experimental appliance according to claim 1, it is characterised in that: the setting installation
Plate further includes reinforcing rib.
8. a kind of atomic force microscope imitative experimental appliance according to claim 1, it is characterised in that: the probe installation
Bracket includes the vertical bar being mutually permanently connected and transverse bar.
9. a kind of using a kind of atomic force microscope imitative experimental appliance described in any one of the claims 1-8 claim
Analogy method, which comprises the following steps: (1) analog sample is placed to sample stage；(2) Z-direction is adjusted
The coarse adjustment knob of regulating mechanism, is moved to probe near sample；(3) laser, the laser of the laser transmitting are opened
The reflecting mirror of the probe is reached through the organic glass, then reflex to through the reflecting mirror successively reach organic glass,
Deviation prism and Position-Sensitive Detector；(4) thin tuning knob for adjusting the Z-direction regulating mechanism, contacts probe with sample,
Generate the cantilever rotationally-varying, observation allows laser beam track and simultaneously record position change information；(5) it adjusts XY and adjusts machine
Structure generates the cantilever of probe rotationally-varying, and observation allows laser beam track and simultaneously record position change information；(6) experiment knot
Probe and sample stage are modulated initial position by beam；Using Z-direction regulating mechanism, make probe in Z-direction approaching simulation sample, until
The two contact, makes micro-cantilever generate deflection, and then the reflected beams is made to deflect, thus the atom between analogue probe and sample
Power mechanism of action.
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| CN201910139654.5A CN109738673A (en) | 2019-02-26 | 2019-02-26 | A kind of atomic force microscope imitative experimental appliance and analogy method |
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| CN201910139654.5A CN109738673A (en) | 2019-02-26 | 2019-02-26 | A kind of atomic force microscope imitative experimental appliance and analogy method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110488045A (en) * | 2019-09-11 | 2019-11-22 | 重庆医药高等专科学校 | Anti-falling probe charging appliance |
| US20220381804A1 (en) * | 2021-05-26 | 2022-12-01 | Changxin Memory Technologies, Inc. | Sample fixation mechanism for test with nano-probe, apparatus for test and sample test method |
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