CN209969138U - Objective lens cleaning device and microscope - Google Patents
Objective lens cleaning device and microscope Download PDFInfo
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- CN209969138U CN209969138U CN201821918893.8U CN201821918893U CN209969138U CN 209969138 U CN209969138 U CN 209969138U CN 201821918893 U CN201821918893 U CN 201821918893U CN 209969138 U CN209969138 U CN 209969138U
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- 238000004140 cleaning Methods 0.000 title claims abstract description 154
- 239000002245 particle Substances 0.000 claims abstract description 28
- 239000003344 environmental pollutant Substances 0.000 claims abstract description 23
- 231100000719 pollutant Toxicity 0.000 claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 239000011797 cavity material Substances 0.000 description 279
- 239000007789 gas Substances 0.000 description 104
- 238000006243 chemical reaction Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 10
- 239000000356 contaminant Substances 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 230000009471 action Effects 0.000 description 4
- 239000008187 granular material Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 230000001680 brushing effect Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000005034 decoration Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000013013 elastic material Substances 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000011086 high cleaning Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
A cleaning device for an objective lens and a microscope, wherein the cleaning device for the objective lens comprises an inner cavity and an outer cavity positioned outside the inner cavity, the inner cavity is provided with a cavity wall, a closed inner cavity is formed by the space surrounded by the cavity wall of the inner cavity, the inner cavity is used for accommodating the objective lens to be cleaned, the outer cavity is provided with a cavity wall, and the cavity wall of the outer cavity is contacted with the cavity wall of the inner cavity to form a closed outer cavity; the cavity wall of the inner cavity is provided with a gas supply inlet for supplying cleaning gas into the inner cavity; the inner cavity body is characterized in that a one-way valve is further arranged on the cavity body wall of the inner cavity body, the inner cavity body is communicated with the outer cavity body when the one-way valve is opened, and when cleaning gas is supplied into the inner cavity body through the gas supply inlet to clean the objective lens, the cleaning gas brings particles or pollutants on the objective lens to the outer cavity body through the opened one-way valve. The utility model discloses a belt cleaning device prevents the production of hidden danger in the production process, has improved abluent efficiency.
Description
Technical Field
The utility model relates to a microscope field especially relates to a belt cleaning device of objective and microscope that has this objective belt cleaning device.
Background
An Optical Microscope (abbreviated as OM) is an Optical instrument that uses Optical principles to magnify and image tiny objects that cannot be resolved by human eyes, so as to extract fine structure information. Optical microscopes have been widely used in the semiconductor field to detect defects on wafers.
The optical system of a conventional optical microscope mainly includes components such as an eyepiece and an objective lens, wherein the objective lens is the most important component for determining the performance of the microscope, and is called an objective lens or an objective lens because it is mounted on an objective lens changer and is close to an object to be observed.
In the use process of the optical microscope, particles or pollutants are easy to adhere to the objective lens along with the increase of the use time, and influence is caused on the detection process, so that the objective lens needs to be cleaned regularly, but the existing cleaning mode easily brings hidden troubles to the production process.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the technical problem that will solve prevents how to have the hidden danger that the washing mode brought to the production process now.
In order to solve the above problem, the utility model provides a belt cleaning device of objective lens, include: the cleaning device comprises an inner cavity and an outer cavity positioned on the outer side of the inner cavity, wherein the inner cavity is provided with a cavity wall, a closed inner cavity is formed by a space surrounded by the cavity wall of the inner cavity, the inner cavity is used for accommodating an objective lens to be cleaned, the outer cavity is provided with a cavity wall, and the cavity wall of the outer cavity is in contact with the cavity wall of the inner cavity to form a closed outer cavity;
the cavity wall of the inner cavity is provided with a gas supply inlet for supplying cleaning gas into the inner cavity;
the inner cavity body is characterized in that a one-way valve is further arranged on the cavity body wall of the inner cavity body, the inner cavity body is communicated with the outer cavity body when the one-way valve is opened, and when cleaning gas is supplied into the inner cavity body through the gas supply inlet to clean the objective lens, the cleaning gas brings particles or pollutants on the objective lens to the outer cavity body through the opened one-way valve.
Optionally, the cavity wall of the inner cavity comprises an inner cavity top wall, an inner cavity bottom wall and an inner cavity side wall located between the inner cavity top wall and the inner cavity bottom wall, a space surrounded by the inner cavity top wall, the inner cavity bottom wall and the inner cavity side wall forms a closed inner cavity, the inner cavity top wall is provided with a cavity door, and the cavity door is opened when the objective lens penetrates into the inner cavity and is closed after the objective lens penetrates into the inner cavity; the cleaning device for the objective lens further comprises a lifting device connected with the inner cavity and the outer cavity, and the lifting device is used for controlling the inner cavity and the outer cavity to ascend or descend.
It is optional, the cavity wall of outer cavity includes outer cavity top wall, outer cavity bottom wall, outer cavity lateral wall, outer cavity inside wall, outer cavity top wall is last to have the opening, and the height that highly is less than outer cavity lateral wall of outer cavity inside wall, outer cavity lateral wall is located between outer cavity top wall and the outer cavity bottom wall, outer cavity bottom wall and the contact of interior cavity bottom wall, the top surface of outer cavity inside wall and the lower surface contact of outer cavity top wall to the bottom surface and the interior cavity top wall contact of outer cavity inside wall make outer cavity inside wall encircle opening on the outer cavity top wall and the cavity door on the interior cavity top wall.
Optionally, the gas supply inlet is located on the inner cavity bottom wall, the one-way valve is arranged on the inner cavity top wall, when cleaning is performed, the gas supply inlet on the inner cavity bottom wall supplies clean gas, the cleaning gas flows from bottom to top, particles or pollutants stained on the objective lens are taken away, and the particles or the pollutants are opened from the inner cavity top wall and flow into the outer cavity through the one-way valve.
Optionally, the gas supply inlet is located on a bottom wall of the inner cavity, the one-way valve is arranged on a side wall of the inner cavity, and the setting position of the one-way valve is higher than the objective lens extending into the inner cavity.
Optionally, when cleaning is performed, when the gas supply inlet on the bottom wall of the inner cavity is used for supplying cleaning gas, the cleaning gas flows from bottom to top, carries away particles or pollutants attached to the objective lens, and flows into the outer cavity from the opened one-way valve on the side wall of the inner cavity.
Optionally, gaseous confession mouth and check valve all are located the interior cavity lateral wall of cavity in, and gaseous confession mouth and check valve set up relatively, and when the objective deepened interior cavity and wash, objective is located between gaseous confession mouth and the check valve, and when wasing, when the gaseous confession mouth on the interior cavity lateral wall supplies clean gas, and the purge gas lateral flow takes away the granule or the pollutant that are stained with on objective to open the check valve from the relative cavity lateral wall and flow to outer cavity in.
Optionally, a part of the gas supply inlet is located on the bottom wall of the inner cavity, a corresponding part of the one-way valve is located on the top wall of the inner cavity, a part of the gas supply inlet is located on the side wall of the inner cavity on one side of the inner cavity, and a corresponding part of the one-way valve is located on the opposite side wall of the inner cavity on the other side of the inner cavity.
Optionally, a pressure relief device is further arranged on the cavity wall of the outer cavity, and the pressure relief device is used for releasing cleaning gas entering the outer cavity.
The utility model also provides a microscope, including the aforesaid belt cleaning device of objective, just the belt cleaning device of objective sets up on microscopical objective table.
Compared with the prior art, the utility model discloses technical scheme has following advantage:
the utility model discloses a when belt cleaning device of objective washs, objective arranges inclosed interior cavity in, intercommunication between interior cavity and the outer cavity passes through the check valve control, with interior cavity and outer cavity intercommunication when check valve opens, cleaning gas washs objective in supplying the interior cavity through gaseous confession entry, takes the outer cavity to granule or pollutant on the objective through the check valve who opens, therefore the utility model discloses a wash whole journey all go on in inclosed cavity, granule or pollutant are taken to outer cavity and can not take to in microscopical cavity, on the objective table on the environment or other microscopes, when guaranteeing higher clean efficiency, reduced the hidden danger in the production process to cleaning process can regularly repeated going on.
Furthermore, in this implementation, the gas supply inlet is arranged on the bottom wall of the inner cavity, the one-way valve is arranged on the top wall of the inner cavity, and the cleaning gas flows from bottom to top, so that the objective lens faces the flowing direction of the cleaning gas, the blowing and brushing effect of the cleaning gas on particles or pollutants on the surface of the objective lens is stronger, the particles or pollutants are easy to fall off, and the cleaning gas carrying the particles or pollutants can easily flow or be discharged into the outer cavity through the opened one-way valve on the top wall of the inner cavity, thereby improving the cleaning efficiency.
Further, gaseous confession mouth and check valve all are located the interior cavity lateral wall of interior cavity, and gaseous confession mouth and check valve set up relatively, when the objective gos deep into interior cavity and washs, objective is located between gaseous confession mouth and the check valve, and the purge gas lateral flow takes away and is stained with granule or pollutant on the objective when wasing, and flows to the outer cavity from opening the check valve on the relative interior cavity lateral wall for the cleaning action to the objective side is stronger, and because check valve only is located one side interior cavity lateral wall, makes the cavity wall of outer cavity can only contact with the interior cavity lateral wall that has one-way valve one side, makes the volume of outer cavity can be less, therefore makes the belt cleaning device's of whole objective volume can be less.
Furthermore, part of the gas supply inlets are located on the bottom wall of the inner cavity, corresponding part of the one-way valves are located on the top wall of the inner cavity, part of the gas supply inlets are located on the side wall of the inner cavity on one side of the inner cavity, corresponding part of the one-way valves are located on the side wall of the inner cavity opposite to the other side of the inner cavity, and when the cleaning is carried out, longitudinal cleaning from bottom to top is carried out firstly, then transverse cleaning is carried out, or transverse cleaning is carried out firstly, then longitudinal cleaning from bottom to top is carried out, so that when the cleaning is carried out, the side face and the bottom of the objective lens are well cleaned, and the cleaning effect is improved.
Drawings
Fig. 1 is a schematic structural view of a cleaning device for an objective lens according to a first embodiment of the present invention;
fig. 2 is a schematic structural view of a cleaning device for an objective lens according to a first embodiment of the present invention;
fig. 3 is a schematic structural view of a cleaning device for an objective lens according to a second embodiment of the present invention;
fig. 4 is a schematic structural view of a cleaning device for an objective lens according to a third embodiment of the present invention.
Detailed Description
As background art, the existing cleaning methods are prone to cause hidden troubles to the production process.
It is found that the prior art mainly uses N from the upper parts of both sides of the objective lens when cleaning the objective lens2The (nitrogen) gas is purged, so that particles or pollutants on the objective lens are easily blown to the cavity of the microscope, the objective table, the environment or other microscopes, and when other wafers are detected by using the microscope subsequently, the particles or pollutants may fall to the surfaces of the wafers, thereby bringing hidden troubles to the production process.
Therefore, the utility model provides a cleaning device of an objective lens and a microscope, when the cleaning device of the objective lens is adopted for cleaning, the object lens is arranged in the closed inner chamber, the communication between the inner chamber and the outer chamber is controlled by the one-way valve, the inner chamber is communicated with the outer chamber when the one-way valve is opened, the cleaning gas is supplied into the inner chamber through the gas supply inlet to clean the object lens, the particles or pollutants on the object lens are brought to the outer chamber through the opened one-way valve, therefore, the whole cleaning process of the utility model is carried out in the closed chamber, particles or pollutants are brought into the outer chamber and not brought into the chamber of the microscope, the environment on the objective table or other microscopes, the hidden danger in the production process is reduced while the higher cleaning efficiency is ensured, and the cleaning process can be repeated at regular intervals.
In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. In describing the embodiments of the present invention in detail, the drawings are not necessarily to scale, and the drawings are merely exemplary and should not be construed as limiting the scope of the present invention. In addition, the three-dimensional dimensions of length, width and depth should be included in the actual fabrication.
First embodiment
Referring to fig. 1, the cleaning apparatus for an objective lens of the present embodiment includes: the cleaning device comprises an inner cavity 201 and an outer cavity 202 positioned outside the inner cavity 201, wherein the inner cavity 201 is provided with cavity walls (201a, 201b and 201c), a closed inner cavity 203 is formed by the space surrounded by the cavity walls of the inner cavity 201, an objective lens to be cleaned is accommodated in the inner cavity 203, the outer cavity 202 is provided with cavity walls, and the cavity walls of the outer cavity 202 and the cavity walls of the inner cavity 201 are in contact to form a closed outer cavity 204;
the cavity wall of the inner cavity 201 is provided with a gas supply inlet 206 for supplying the cleaning gas 21 into the inner cavity 203;
the inner cavity 201 is also provided with a one-way valve 205 on the cavity wall, when the one-way valve 205 is opened, the inner cavity 203 and the outer cavity 204 are communicated, when the cleaning gas 21 is supplied into the inner cavity 203 through the gas supply inlet 206 to clean the objective lens, the cleaning gas brings the particles or pollutants on the objective lens to the outer cavity 204 through the opened one-way valve 205.
The cavity wall of the inner cavity 201 comprises an inner cavity top wall 201a, an inner cavity bottom wall 201b and an inner cavity side wall 201c located between the inner cavity top wall 201a and the inner cavity bottom wall 201b, and a space surrounded by the inner cavity top wall 201a, the inner cavity bottom wall 201b and the inner cavity side wall 201c forms a closed inner cavity 203.
The shape of the inner cavity 201 may be a cylinder, a cube, or other suitable shape. In this embodiment, the inner cavity 201 is cylindrical.
The cavity walls of the outer cavity 202 comprise an outer cavity top wall 202a, an outer cavity bottom wall 202b, an outer cavity outer side wall 202c and an outer cavity inner side wall 202d, the size of the outer cavity top wall 202a is larger than that of the inner cavity top wall 201a, the outer cavity top wall 202a is provided with an opening 202e, the outer cavity top wall 202a is positioned above the inner cavity top wall 201a, the opening 202e on the outer cavity top wall 202a is positioned above a cavity door 207 on the outer cavity top wall 202a, the size of the opening 202e is larger than that of the cavity door 207, the height of the outer cavity inner side wall 202d is smaller than that of the outer cavity outer side wall 202c, the outer cavity outer side wall 202c is positioned between the outer cavity top wall 202a and the outer cavity bottom wall 202b, the outer cavity bottom wall 202b is in contact with the inner cavity bottom wall 201b, the top surface of the outer cavity inner side wall 202d is in contact with the lower surface of the outer cavity top wall 202a, and the bottom surface of the outer cavity inner side wall 202d is in contact with the inner cavity top wall 201a such that said outer cavity inner side wall 202d surrounds the opening 202e on said outer cavity top wall 202a and the cavity door 207 on the inner cavity top wall 201a, whereby the cavity wall of the outer cavity 202 is in contact with the cavity wall of the inner cavity 201, forming a closed outer chamber 204 between the cavity walls of the outer cavity 202 and the inner cavity 201.
In this embodiment, the outer cavity inner side wall 202d and the outer cavity outer side wall 202c are annular structures, and the annular structures are circular rings. The top surface of the outer cavity inner side wall 202d is in contact with the edge of the opening 202e, and the outer cavity bottom wall 202b is in contact with the edge of the inner cavity bottom wall 201 a.
In other embodiments, the outer cavity inner side wall and the outer cavity outer side wall may be other annular structures, such as rectangular rings, the top surface of the outer cavity inner side wall may contact with the lower surface of the inner cavity top wall on both sides of the opening, and the outer cavity bottom wall may contact with the bottom surface of the inner cavity bottom wall or contact with the inner cavity side wall.
In an embodiment, a chamber door 207 is disposed on the inner chamber top wall 201a of the inner chamber 201, the chamber door 207 can be opened and closed, when cleaning is performed, when the chamber door 207 is opened, the inner chamber 201 and the outer chamber 202 are lifted, an objective lens to be cleaned penetrates into the inner chamber 203 through the opening 202e on the outer chamber top wall 202a and the opened chamber door 207, the chamber door 207 is opened when the objective lens penetrates into the inner chamber 203, and after the objective lens penetrates into the inner chamber 203, the chamber door 207 is closed to maintain a sealed environment. The opening and closing of the chamber door 207 is controlled by an electric signal, and in an embodiment, the apparatus for cleaning an objective lens may further include a control unit which sends an opening and closing signal to the chamber door 207, and the chamber door 207 is opened and closed when receiving the opening and closing signal.
In an embodiment, the cavity door 207 includes a door body and a driving unit, the second opening is disposed on the inner cavity top wall 201a, a position of the door body corresponds to a position of the second opening, and the driving unit is configured to drive the door body to move, so that the door body closes or opens the second opening. The number of the door body and the drive unit can be one or more (more than or equal to 2). Since the objective lens is generally mounted on the conversion head (specifically, referring to fig. 2, the objective lens 31 is mounted on the conversion head 32), after the objective lens 31 enters the inner chamber 203, the chamber door 207 needs to be closed to keep the inner chamber 203 airtight, and in a specific embodiment, the door body of the chamber door 207 may be in contact with the conversion head 32 to keep the inner chamber 203 airtight.
In order to ensure the sealing performance when the door body contacts the conversion head 32, in an embodiment, the shape of the contact portion of the door body and the conversion head 32 is consistent with the shape of the outer surface of the conversion head 32, or the material of the contact portion of the door body and the conversion head 32 is made of an elastic material, and when the door body contacts the conversion head 32, the elastic material on the door body is elastically deformed, so that the door body and the conversion head 32 are in sealing contact.
In one embodiment, the chamber door may be inclined, and in a specific embodiment, the chamber door may be inclined by 40-60 ° so as not to affect the operation of the one-way valve, so that the cleaning gas carrying particles or contaminants may be smoothly discharged (or flowed) to the outer chamber 204 through the one-way valve 205 located on the top wall 201a of the inner chamber during cleaning.
In this embodiment, the gas inlet 206 is located on the inner cavity bottom wall 201b of the inner cavity 201, and the one-way valve 205 is disposed on the inner cavity top wall 201a of the inner cavity 201.
The gas supply inlet 206 may be opened and closed, and when the cleaning is performed, the gas supply inlet 206 is opened to supply the cleaning gas into the inner chamber 203, and when the cleaning is completed, the gas supply inlet 206 is closed to stop the supply of the cleaning gas into the inner chamber 203. The opening and closing of the gas supply inlet 206 is controlled by an electrical signal. In an embodiment, the control unit sends an open and close signal to the gas supply inlet 206, the gas supply inlet 206 opening and closing accordingly upon receiving the open and close signal.
The number of the gas supply ports 206 is at least one. In this embodiment, the number of the gas inlets 206 is plural (2 or more), and the gas inlets 206 are distributed on the bottom wall 201b of the inner cavity in a honeycomb shape.
In other embodiments, when the number of the gas inlets 206 is plural, the gas inlets 206 are symmetrically distributed on the inner cavity bottom wall 201b of the inner cavity 201, so that the cleaning gas can be uniformly supplied into the inner cavity 203 from all directions, and when the objective lens is deeply cleaned in the inner cavity 203, the cleaning gas can clean the objective lens with the same cleaning force from all directions, so as to improve the cleaning degree and efficiency.
In another embodiment, the inner cavity bottom wall 201b of the inner cavity 201 includes a middle region and a peripheral region surrounding the middle region, the middle region and the peripheral region are distributed with a plurality of gas supply inlets 206, and the number of the gas supply inlets 206 in the middle region may be greater than (or equal to) the number of the gas supply inlets 206 in the peripheral region, and the gas supply inlets 206 in the middle region correspond to the objective lens, so that when cleaning, the objective lens is cleaned by more cleaning gas in the middle region, the cleaning efficiency is higher, and the cleaning gas in the peripheral region can prevent the cleaning gas carrying particles and contaminants in the middle region from flowing back, so that the cleaning gas carrying particles and contaminants can easily enter the outer cavity 204 from the one-way valve 205 on the inner cavity top wall 201 a.
In this embodiment, the cleaning gas may be N2(nitrogen gas), said N2The (nitrogen) is high-purity nitrogen which has inactive chemical property, less impurities and good cleaning effect. In other embodiments, the cleaning gas may be other suitable gases. The cleaning gas may be a single gas or a mixture of gases. The cleaning gas may remove particles or contaminants by physical or chemical action, or a combination of both physical and chemical action.
The one-way valve 205 can be opened and closed. When the one-way valve 205 is opened, the inner chamber 203 and the outer chamber 204 are communicated, so that the cleaning gas 21 supplied in the inner chamber 203 flows to the outer chamber 204 through the opened one-way valve 205, and when the one-way valve 205 is closed, the communication passage between the inner chamber 203 and the outer chamber 204 is cut off.
The one-way valve 205 can be a mechanical valve and an electrically controlled valve.
When the one-way valve 205 is a mechanical valve, the mechanical valve is opened when the inner chamber 203 has the cleaning gas (or the pressure of the inner chamber 203 is higher than the pressure of the outer chamber 204), and is closed when the inner chamber 203 has no cleaning gas (or the pressure of the inner chamber 203 is equal to or lower than the pressure of the outer chamber 204).
When the check valve 205 is an electric control valve, the opening and closing of the electric control valve are controlled by electric signals. In one embodiment, the control unit sends an open and close signal to the one-way valve 205, and the one-way valve 205 opens and closes accordingly upon receiving the open and close signal.
The number of the one-way valves 205 is at least one. In this embodiment, the number of the one-way valves 205 is multiple (greater than or equal to 2), and the multiple one-way valves 205 are symmetrically distributed around the cavity door 207 (on the inner cavity top wall 201 a), so that the cleaning gas carrying the particles or the contaminants can be efficiently discharged to the outer cavity, and the particles or the contaminants are prevented from being re-deposited on the objective lens or the cavity wall of the inner cavity.
In an embodiment, the one-way valve 205 may include an electrically controlled valve body and a connection pipe, the connection pipe connects the inner chamber 203 and the outer chamber 204, and the electrically controlled valve body controls the connection pipe to be opened or closed under the control of an electrical signal.
The cleaning device for the objective lens further comprises a lifting device 208 connected with the inner cavity 201 and the outer cavity 202, and the lifting device 208 is used for controlling the inner cavity 201 and the outer cavity 202 to ascend or descend. In an embodiment, when cleaning, the lifting device 208 can control the inner cavity 201 and the outer cavity 202 to ascend, so that the objective lens standing still above extends into the inner cavity 203 through the opened cavity door 207, and when cleaning is finished, the lifting device 208 can control the inner cavity 201 and the outer cavity 202 to descend, so that the objective lens is moved out from the inner cavity, so that the utility model discloses a cleaning device of objective lens does not need to change the conversion head structure of the existing objective lens when cleaning.
In an embodiment, the lifting device 208 includes a stepping motor or an air cylinder, and the lifting device 208 controls the inner cavity 201 and the outer cavity 202 to ascend or descend when receiving an ascending or descending electric signal sent by the control unit. In a specific embodiment, when the lifting device 208 includes a cylinder, a movable end of the cylinder is fixedly connected to the inner cavity 201 and the outer cavity 202, and the movable end of the cylinder can be lifted or lowered under the action of gas pressure, so as to lift or lower the inner cavity 201 and the outer cavity 202. When the lifting device 208 comprises a stepping motor, a rotating shaft of the stepping motor is connected with one end of a screw rod, the inner cavity 201 and the outer cavity 202 are fixed on a sliding block on the screw rod, the screw rod is driven to rotate when the stepping motor rotates, the sliding block is driven to move up and down when the screw rod rotates, and the inner cavity 201 and the outer cavity 202 are driven to move up and down by the up and down movement of the sliding block.
In an embodiment, a pressure relief device is further disposed on a cavity wall of the outer cavity 202, and the pressure relief device is configured to release the cleaning gas entering the outer cavity, so that the cleaning gas entering the outer cavity can be discharged to a waste pipe or a dedicated processing chamber.
The process of cleaning the cleaning device for the objective lens described above is described with reference to fig. 2, and the cleaning process includes: the objective lens 31 mounted on the conversion head 32 of the microscope remains stationary; the cleaning device is moved under the objective lens 31 so that the chamber door 207 is positioned right under the objective lens 31; the lifting device 208 controls the inner cavity 201 and the outer cavity 202 to ascend, the cavity door 207 is opened at the same time, and when the inner cavity 201 and the outer cavity 202 ascend, the objective lens 31 extends into the inner cavity 203 through the opening 202e and the opened cavity door 207; after the objective lens 31 extends into the inner chamber 203, the inner chamber 201 and the outer chamber 202 stop rising, and the chamber door 207 is closed, so that the chamber door 207 is in close contact with the surface of the conversion head 32; then, the gas inlet 206 of the inner chamber bottom wall 201b is also opened, the one-way valve 205 is opened, the gas inlet 206 supplies the cleaning gas 21 into the inner chamber 203, the cleaning gas 21 flows from bottom to top, carries away particles or contaminants adhering to the objective lens 31, and flows into the outer chamber 204 from the opened one-way valve 205 of the inner chamber top wall 201 a.
In this embodiment, since the gas inlet 206 is disposed on the inner cavity bottom wall 201b, the one-way valve 205 is disposed on the inner cavity top wall 201a, and the cleaning gas 21 flows from bottom to top, so that the objective lens faces the flow direction of the cleaning gas 21, the cleaning gas 21 has a strong blowing and brushing effect on particles or pollutants on the surface of the objective lens 31, the particles or pollutants are easy to fall off, and the cleaning gas carrying the particles or pollutants is easy to flow or be discharged into the outer chamber 204 through the opened one-way valve 205 on the inner cavity top wall 201a, thereby improving the cleaning efficiency, and the whole cleaning process of the present invention is performed in a closed chamber, the particles or pollutants are brought into the outer chamber and are not brought into the chamber of the microscope, the environment on the stage or other microscopes, thereby reducing hidden troubles in the production process while ensuring high cleaning efficiency, and the cleaning process can be repeated periodically.
Second embodiment
Fig. 3 is a schematic structural diagram of a cleaning device for an objective lens according to a second embodiment of the present invention, which is different from the previous embodiments in that: the gas inlet 206 is located on the inner cavity bottom wall 201b of the inner cavity 201, the one-way valve 205 is arranged on the inner cavity side wall 201c of the inner cavity 201, and the position of the one-way valve 205 is higher than the objective lens extending into the inner cavity 203. In this arrangement, when the cleaning gas 21 is supplied from the gas supply inlet 206 on the bottom wall 201c of the inner chamber, the cleaning gas 21 flows from bottom to top, carrying away particles or contaminants adhering to the objective lens, and flows into the outer chamber 204 through the open one-way valve 205 on the sidewall 201c of the inner chamber, which also brings about a better cleaning effect.
It should be noted that descriptions and definitions of the same structures or similar structures in this embodiment as those in the foregoing embodiment are not repeated in this embodiment, and specific reference is made to the descriptions or definitions of corresponding parts in the foregoing embodiment.
Third embodiment
Fig. 4 is a schematic structural diagram of a cleaning device for an objective lens according to a third embodiment of the present invention, which is different from the previous embodiments in that: the gas inlet 206 and the one-way valve 205 are both located on the inner cavity side wall 201c of the inner cavity 201, the gas inlet 206 and the one-way valve 205 are arranged oppositely, and when the objective lens is deep into the inner cavity 203 for cleaning, the objective lens 203 is located between the gas inlet 206 and the one-way valve 205.
In one embodiment, the gas inlet 206 is located on the left side of the inner chamber sidewall 201c, the one-way valve 205 is located on the right side of the inner chamber sidewall 201c, and the objective 203 is located between the gas inlet 206 and the one-way valve 205 when the objective is inserted deep into the inner chamber 203 for cleaning.
In this embodiment, the chamber wall of the outer chamber 202 is only in contact with the inner chamber sidewall 201c on the side having the one-way valve 205, so that the volume of the outer chamber 202 can be smaller, and thus the volume of the whole objective lens cleaning device can be smaller. In other embodiments, the cavity wall of the outer cavity may surround the cavity wall of the inner cavity.
In the present embodiment, when cleaning is performed, after the objective lens is placed in the inner chamber 203 in the manner described in the previous embodiment, the gas inlet 206 on the sidewall 201c of the inner chamber is opened, the cleaning gas 21 is supplied into the inner chamber 203, the cleaning gas 21 flows laterally to carry away particles or contaminants adhering to the objective lens, and flows into the outer chamber 204 from the one-way valve 205 which is opened on the opposite sidewall of the inner chamber.
The cleaning device for the objective lens of the embodiment has a strong cleaning effect on the side surface of the objective lens. And in order to further improve the cleaning effect of the objective lens, in this embodiment, as well as in the foregoing embodiments and subsequent embodiments, the objective lens is rotatable by the conversion head during cleaning.
It should be noted that descriptions and definitions of the same structures or similar structures in this embodiment as those in the foregoing embodiment are not repeated in this embodiment, and specific reference is made to the descriptions or definitions of corresponding parts in the foregoing embodiment.
Fourth embodiment
The cleaning device for an objective lens of the present embodiment is different from the cleaning device for an objective lens of the previous embodiments in that a part of the gas supply inlet (first gas supply inlet) is located on the bottom wall of the inner chamber, a corresponding part of the check valve (first check valve) is located on the top wall of the inner chamber, a part of the gas supply inlet (second gas supply inlet) is located on the sidewall of the inner chamber on one side of the inner chamber, and a corresponding part of the check valve (second check valve) is located on the sidewall of the inner chamber opposite to the other side of the inner chamber.
When the cleaning device for an objective lens of the present embodiment performs cleaning: after the objective lens is placed in the inner chamber in the manner of the embodiment, the gas supply inlet on the bottom wall of the inner chamber and the one-way valve on the top wall of the inner chamber can be opened first, the cleaning gas flows from bottom to top to perform longitudinal cleaning, then the gas supply inlet on the bottom wall of the inner chamber and the one-way valve on the top wall of the inner chamber are closed, the gas supply inlet on the side wall of the inner chamber and the one-way valve on the side wall of the inner chamber are opened, the cleaning gas flows transversely to perform transverse cleaning. The cleaning device and the cleaning mode of the embodiment have better cleaning effect on the side surface and the bottom of the objective lens, and the cleaning effect is improved.
In other embodiments, the transverse cleaning may be performed first, and then the longitudinal cleaning may be performed.
It should be noted that descriptions and definitions of the same structures or similar structures in this embodiment as those in the foregoing embodiment are not repeated in this embodiment, and specific reference is made to the descriptions or definitions of corresponding parts in the foregoing embodiment.
Fifth embodiment
The embodiment of the utility model provides a microscope is still provided, including the aforesaid embodiment the belt cleaning device of objective, just the belt cleaning device of objective sets up on microscopical objective table.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (9)
1. An apparatus for cleaning an objective lens, comprising: the cleaning device comprises an inner cavity and an outer cavity positioned on the outer side of the inner cavity, wherein the inner cavity is provided with a cavity wall, a closed inner cavity is formed by a space surrounded by the cavity wall of the inner cavity, the inner cavity is used for accommodating an objective lens to be cleaned, the outer cavity is provided with a cavity wall, and the cavity wall of the outer cavity is in contact with the cavity wall of the inner cavity to form a closed outer cavity;
the inner cavity is provided with a gas inlet for supplying cleaning gas to the inner cavity, the cleaning gas is used for cleaning the objective lens and bringing particles or pollutants on the objective lens to the outer cavity through the opened one-way valve;
the inner cavity is characterized in that the cavity wall of the inner cavity is also provided with a one-way valve, and the inner cavity is communicated with the outer cavity when the one-way valve is opened.
2. The apparatus for cleaning an objective lens according to claim 1, wherein the cavity wall of the inner cavity includes an inner cavity top wall, an inner cavity bottom wall and an inner cavity side wall located between the inner cavity top wall and the inner cavity bottom wall, a space surrounded by the inner cavity top wall, the inner cavity bottom wall and the inner cavity side wall forms a closed inner cavity, the inner cavity top wall is provided with a cavity door, and the cavity door is opened when the objective lens penetrates into the inner cavity and is closed after the objective lens penetrates into the inner cavity; the cleaning device for the objective lens further comprises a lifting device connected with the inner cavity and the outer cavity, and the lifting device is used for controlling the inner cavity and the outer cavity to ascend or descend.
3. The apparatus for cleaning an objective lens according to claim 2, wherein the chamber walls of the outer chamber include an outer chamber top wall, an outer chamber bottom wall, an outer chamber outer side wall, and an outer chamber inner side wall, the outer chamber top wall having a size larger than that of the inner chamber top wall, the outer chamber top wall having an opening therein, the outer chamber top wall being located above the inner chamber top wall, the opening in the outer chamber top wall being located above the chamber door in the outer chamber top wall, the opening having a size larger than that of the chamber door, the outer chamber inner side wall having a height smaller than that of the outer chamber outer side wall, the outer chamber outer side wall being located between the outer chamber top wall and the outer chamber bottom wall, the outer chamber bottom wall being in contact with the inner chamber bottom wall, a top surface of the outer chamber inner side wall being in contact with a lower surface of the outer chamber top wall, and a bottom surface of the outer chamber inner side wall being in contact with the inner chamber, such that the outer cavity inner side wall surrounds the opening in the outer cavity top wall and the cavity door in the inner cavity top wall.
4. The objective lens cleaning apparatus according to claim 3, wherein the gas supply port is provided on a bottom wall of the inner chamber, and the check valve is provided on a top wall of the inner chamber.
5. The objective lens cleaning apparatus according to claim 2, wherein the gas supply port is provided on a bottom wall of the inner chamber, the check valve is provided on a side wall of the inner chamber, and the check valve is provided at a position higher than the objective lens extending into the inner chamber.
6. The apparatus for cleaning an objective lens as claimed in claim 2, wherein the gas supply port and the check valve are both provided on a side wall of the inner chamber, the gas supply port and the check valve being disposed opposite to each other, and the objective lens is disposed between the gas supply port and the check valve when the objective lens is deep into the inner chamber for cleaning.
7. An objective lens cleaning apparatus as claimed in claim 2, wherein a part of the gas supply ports are provided on a bottom wall of the inner chamber, a corresponding part of the one-way valves are provided on a top wall of the inner chamber, and a part of the gas supply ports are provided on a side wall of the inner chamber on one side of the inner chamber, and a corresponding part of the one-way valves are provided on an opposite side wall of the inner chamber on the other side of the inner chamber.
8. The apparatus for cleaning an objective lens according to claim 1, wherein a pressure relief device is further provided on a chamber wall of the outer chamber, the pressure relief device being configured to release the cleaning gas entering the outer chamber.
9. A microscope comprising a cleaning device for an objective lens according to any one of claims 1 to 8, and arranged on the stage of the microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821918893.8U CN209969138U (en) | 2018-11-21 | 2018-11-21 | Objective lens cleaning device and microscope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821918893.8U CN209969138U (en) | 2018-11-21 | 2018-11-21 | Objective lens cleaning device and microscope |
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| CN209969138U true CN209969138U (en) | 2020-01-21 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112015051A (en) * | 2020-07-21 | 2020-12-01 | 中国科学院微电子研究所 | Photoresist baking equipment and automatic cleaning method thereof |
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2018
- 2018-11-21 CN CN201821918893.8U patent/CN209969138U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112015051A (en) * | 2020-07-21 | 2020-12-01 | 中国科学院微电子研究所 | Photoresist baking equipment and automatic cleaning method thereof |
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