CN209963033U - 一种拼接式的硅片承载框 - Google Patents
一种拼接式的硅片承载框 Download PDFInfo
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- CN209963033U CN209963033U CN201921009799.5U CN201921009799U CN209963033U CN 209963033 U CN209963033 U CN 209963033U CN 201921009799 U CN201921009799 U CN 201921009799U CN 209963033 U CN209963033 U CN 209963033U
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 41
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 41
- 239000010703 silicon Substances 0.000 title claims abstract description 41
- 238000009434 installation Methods 0.000 claims abstract description 17
- 238000010030 laminating Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 23
- 239000002131 composite material Substances 0.000 description 6
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- 239000011521 glass Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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CN201921009799.5U CN209963033U (zh) | 2019-07-01 | 2019-07-01 | 一种拼接式的硅片承载框 |
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CN201921009799.5U CN209963033U (zh) | 2019-07-01 | 2019-07-01 | 一种拼接式的硅片承载框 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110190018A (zh) * | 2019-07-01 | 2019-08-30 | 深圳市石金科技股份有限公司 | 一种拼接式的硅片承载框 |
CN112556974A (zh) * | 2020-12-08 | 2021-03-26 | 中国空气动力研究与发展中心设备设计及测试技术研究所 | 一种大型耐热小变形的多层平板式支撑框架结构 |
CN115161620A (zh) * | 2022-07-12 | 2022-10-11 | 上海德瀛睿创半导体科技有限公司 | 载板和镀膜设备 |
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2019
- 2019-07-01 CN CN201921009799.5U patent/CN209963033U/zh active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110190018A (zh) * | 2019-07-01 | 2019-08-30 | 深圳市石金科技股份有限公司 | 一种拼接式的硅片承载框 |
CN110190018B (zh) * | 2019-07-01 | 2024-08-20 | 南通玖方新材料股份有限公司 | 一种拼接式的硅片承载框 |
CN112556974A (zh) * | 2020-12-08 | 2021-03-26 | 中国空气动力研究与发展中心设备设计及测试技术研究所 | 一种大型耐热小变形的多层平板式支撑框架结构 |
CN115161620A (zh) * | 2022-07-12 | 2022-10-11 | 上海德瀛睿创半导体科技有限公司 | 载板和镀膜设备 |
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Date | Code | Title | Description |
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GR01 | Patent grant | ||
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TR01 | Transfer of patent right |
Effective date of registration: 20200904 Address after: Room 6C, block 2, building 1, Dayi Plaza, Xixiang, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Li Bixiang Address before: Baoan District Songgang street, Shenzhen city 518105 Guangdong province with rich industrial zone safety run road No. 2 Patentee before: SHENZHEN GOLD STONE TECHNOLOGY Co.,Ltd. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20211227 Address after: A5, Dongjiu (Nantong) zhizaoyuan, 1199 Bihua Road, Tongzhou District, Nantong City, Jiangsu Province, 226300 Patentee after: Nantong Jiufang New Material Technology Co.,Ltd. Address before: 518102 6C, block 2, building 1, Dayi Plaza, Xixiang, Bao'an District, Shenzhen, Guangdong Province Patentee before: Li Bixiang |
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CP03 | Change of name, title or address |
Address after: A5 Dongjiu (Nantong) Zhizao Park, No. 1199 Bihua Road, Nantong High tech Zone, Nantong City, Jiangsu Province, 226000 Patentee after: Nantong Jiufang New Materials Co.,Ltd. Country or region after: China Address before: A5, Dongjiu (Nantong) zhizaoyuan, 1199 Bihua Road, Tongzhou District, Nantong City, Jiangsu Province, 226300 Patentee before: Nantong Jiufang New Material Technology Co.,Ltd. Country or region before: China |
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CP03 | Change of name, title or address |