CN209929280U - Quartz boat for bearing silicon wafers - Google Patents
Quartz boat for bearing silicon wafers Download PDFInfo
- Publication number
- CN209929280U CN209929280U CN201921143996.6U CN201921143996U CN209929280U CN 209929280 U CN209929280 U CN 209929280U CN 201921143996 U CN201921143996 U CN 201921143996U CN 209929280 U CN209929280 U CN 209929280U
- Authority
- CN
- China
- Prior art keywords
- pair
- silicon wafers
- quartz boat
- side frames
- positioning notches
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
- 235000012431 wafers Nutrition 0.000 title claims abstract description 63
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 59
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 59
- 239000010703 silicon Substances 0.000 title claims abstract description 59
- 239000010453 quartz Substances 0.000 title claims abstract description 40
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 40
- 238000000926 separation method Methods 0.000 claims abstract description 5
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 238000000034 method Methods 0.000 claims 1
- 238000005034 decoration Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a quartz boat for bearing silicon wafers, which comprises a quartz main frame body, wherein the quartz main frame body comprises a side wall and a bottom frame, the side wall is formed by a pair of side frames arranged left and right and a pair of end plates arranged front and back, the end plates are vertically arranged and are parallel to each other, the side frames are respectively provided with a vertical slot for inserting the side edge of the silicon wafer, and the side frames are matched with each other; a separating rod is also arranged in the side wall; the top edges of the pair of end plates are respectively provided with: a positioning gap for inserting the end part of the separation rod; the positioning notches of the pair of end plates are symmetrically arranged; the two ends of the separating rod are clamped into a pair of symmetrically arranged positioning notches. The utility model arranges a detachable separating rod for the prior quartz boat; when the separating rod is disassembled, a row of vertically arranged silicon wafers can be inserted into the quartz boat; when the separating rod is arranged, the inner space of the quartz boat can be separated, and then two rows of vertically arranged silicon wafers can be inserted and placed, wherein the two rows of silicon wafers are arranged left and right.
Description
Technical Field
The utility model relates to a quartz boat for bearing silicon chip.
Background
The quartz boat is an appliance for bearing silicon wafers, the inner space of the quartz boat is used for inserting and placing vertical silicon wafers, the quartz boat comprises a quartz main frame body, the quartz main frame body comprises a side wall and a bottom frame, the side wall is formed by a pair of side frames arranged left and right and a pair of end plates arranged front and back, the end plates are vertically placed and are parallel to each other, the side frames are respectively provided with vertical slots for inserting the silicon wafers, and the side frames are matched with each other.
With the development of solar cell technology, the efficiency of the solar module can be improved by dividing the whole silicon wafer into at least two sub-wafers. However, the existing quartz boat is designed according to the shape of the whole silicon wafer, so that the quartz boat needs to be additionally and independently designed for the wafer separation, and the production cost of enterprises is increased.
SUMMERY OF THE UTILITY MODEL
In order to solve the defects in the prior art, the utility model provides a quartz boat for bearing silicon wafers, the inner space of which is used for inserting and placing the vertically placed silicon wafers, comprising a quartz main frame body, the quartz main frame body comprises a side frame and a bottom frame, the side frame is enclosed by a pair of side frames arranged left and right and a pair of end plates arranged front and back, the pair of end plates are vertically placed and are parallel to each other, the pair of side frames are respectively provided with a vertical slot for inserting and placing the side edge of the silicon wafer, and the pair of side frames are mutually matched;
a separating rod is further arranged in the side wall; the top edges of the pair of end plates are respectively provided with: a positioning gap for inserting the end part of the separation rod; the positioning notches of the pair of end plates are symmetrically arranged; the two ends of the separating rod are clamped into a pair of symmetrically arranged positioning notches.
The utility model arranges the detachable separating rod for the prior quartz boat (both ends of the separating rod can be taken out from the positioning gap); when the separating rod is detached, a row of vertically arranged silicon wafers (whole wafers) can be inserted into the quartz boat; when the separating rod is installed (the two ends of the separating rod are clamped into a pair of symmetrically arranged positioning notches), the internal space of the quartz boat can be separated, and then two rows of vertically arranged silicon wafers (the two rows of silicon wafers can be separated from the whole wafer) can be inserted and placed, and the two rows of silicon wafers are arranged left and right (namely the two rows of silicon wafers are arranged on the two sides of the separating rod).
Preferably, the separating rod is a groove rod, and the left side and the right side of the separating rod are respectively provided with a vertical slot for inserting the side edge of the silicon wafer; the slots on the spacer bar mate with the slots on the side frames. If the separating rod is a slot rod, the slot rod is provided with a slot for inserting the silicon wafer, so that the silicon wafer can be placed more stably.
Preferably, the top edge of any end plate is provided with at least two positioning notches. The mounting position of the separating rod can be selected in the left-right direction, and can be adjusted along the left-right direction so as to adapt to silicon wafers of different sizes.
Preferably, the top edge of any end plate is provided with at least three positioning notches; the positioning notches on the same end plate are arranged in sequence at equal intervals. The mounting positions of the separating rods can be selected in the left-right direction, and can be adjusted at equal intervals along the left-right direction so as to adapt to silicon wafers of different sizes.
Preferably, there are two positioning notches located on the same end plate, and the distance between them is one sixth of the distance between the above-mentioned pair of side frames; the two positioning notches provide the possibility of placement of the 1/6 segments, and if two separating rods are fitted in one-to-one correspondence with the two positioning notches, the 1/6 segments can be inserted between the two separating rods.
Preferably, there are two locating notches located on the same end plate, the distance between them is one fifth of the distance between the pair of side frames; the two positioning notches provide the possibility of placement of the 1/5 segments, and if two separating rods are fitted in one-to-one correspondence with the two positioning notches, the 1/5 segments can be inserted between the two separating rods.
Preferably, there are two positioning notches located on the same end plate, and the distance between them is one fourth of the distance between the above-mentioned pair of side frames; the two positioning notches provide the possibility of placement of the 1/4 segments, and if two separating rods are fitted in one-to-one correspondence with the two positioning notches, the 1/4 segments can be inserted between the two separating rods.
Preferably, there are two positioning notches located on the same end plate, and the distance between them is one third of the distance between the above-mentioned pair of side frames; the two positioning notches provide the possibility of placement of the 1/3 segments, and if two separating rods are fitted in one-to-one correspondence with the two positioning notches, the 1/3 segments can be inserted between the two separating rods.
Preferably, there is a positioning notch located on one end plate, which is equal to the distance between the pair of side frames; the positioning notch provides possibility for placement of 1/2 pieces, and if a separating rod is correspondingly assembled with the positioning notch, 1/2 pieces can be respectively inserted into the left side and the right side of the separating rod.
Preferably, the same end plate is provided with at least two separating rods, a plurality of rows of silicon wafers can be inserted and placed, the silicon wafers are sequentially arranged along the left-right direction, and two adjacent rows of silicon wafers are separated by one separating rod.
Drawings
FIGS. 1 and 2 are schematic views of example 1;
FIG. 3 is a schematic view of example 3;
FIG. 4 is a schematic view of example 4.
Detailed Description
The following description will further describe embodiments of the present invention with reference to the accompanying drawings and examples. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
Example 1
As shown in fig. 1 and fig. 2, the utility model provides a quartz boat for bearing silicon wafers, the inner space of which is used for inserting and placing vertically placed silicon wafers, comprising a quartz main frame body, the quartz main frame body comprises a side frame 10 and a bottom frame 20, the side frame 10 is enclosed by a pair of side frames 11 arranged left and right and a pair of end plates 12 arranged front and back, the pair of end plates 12 are vertically placed and parallel to each other, the pair of side frames 11 are respectively provided with a vertical slot for inserting and placing the side edge of a silicon wafer, and the pair of side frames 11 are mutually matched;
a separating rod 30 is also arranged in the side wall 10; the top edges of the pair of end plates 12 are respectively provided with: a positioning notch 40 for inserting the end of the separating rod 30; the positioning notches 40 of the pair of end plates 12 are symmetrically arranged; the two ends of the spacer bar 30 are snapped into a pair of symmetrically disposed alignment notches 40.
The utility model arranges the detachable separating rod 30 for the prior quartz boat (both ends of the separating rod 30 can be taken out from the positioning gap 40); as shown in FIG. 1, when the spacer bar 30 is removed, the quartz boat can be inserted with a row of vertically positioned silicon wafers 50 (monoliths); as shown in fig. 2, when the separating rod 30 is installed (the two ends of the separating rod 30 are inserted into a pair of symmetrically arranged positioning notches), the inner space of the quartz boat can be partitioned, and then two rows of vertically arranged silicon wafers 51 and 52 (the silicon wafers 51 and 52 can be split pieces of the whole wafer) can be inserted, wherein the two rows of silicon wafers 51 and 52 are arranged left and right (i.e. the two rows of silicon wafers 51 and 52 are respectively arranged at the two sides of the separating rod 30).
The separating rod 30 can be a slot rod, and the left side and the right side of the separating rod 30 are respectively provided with a vertical slot for inserting the side edge of the silicon wafer; the slots on the spacer bar 30 mate with the slots on the side frame 11. If the separating rod 30 is a slot rod, the slot rod is provided with a slot for inserting a silicon wafer, so that the silicon wafer can be placed more stably.
Example 2
On the basis of example 1, the difference lies in:
the top edge of any end plate is provided with at least two positioning notches. The mounting position of the separating rod can be selected in the left-right direction, and can be adjusted along the left-right direction so as to adapt to silicon wafers with different widths.
Example 3
As shown in fig. 3, the difference is that, based on embodiment 1:
the top edge of any end plate 12 is provided with a plurality of positioning notches 40; the positioning notches 40 on the same end plate 12 are arranged in sequence at equal intervals. The mounting positions of the separating rods can be selected in the left-right direction, and can be adjusted at equal intervals along the left-right direction so as to adapt to silicon wafers with different widths.
Preferably, in embodiments 2 and 3, at least two separating rods are mounted on the same end plate, and a plurality of rows of silicon wafers can be inserted and arranged in sequence along the left-right direction, and two adjacent rows of silicon wafers are separated by one separating rod.
Example 4
As shown in fig. 4, the difference is that, based on embodiment 1:
an optional positioning notch is formed in any end plate 12, and the positioning notch is equal to the distance between the pair of side frames 11; the positioning notch provides possibility for placement of 1/2 sub-pieces, and if one separating rod 30 is correspondingly assembled with the positioning notch, 1/2 sub-pieces can be respectively inserted into the left side and the right side of the separating rod 30; that is, two rows of vertically arranged silicon wafers 53 (the silicon wafers 53 are 1/2 pieces of the whole wafer in example 1) can be inserted, and the two rows of silicon wafers 53 are arranged in the left and right direction.
Example 5
On the basis of example 2, the difference lies in:
two optional positioning notches are formed in any end plate, and the distance between the two positioning notches is one third of the distance between the pair of side frames; the two positioning notches provide the possibility of placement of the 1/3 segments, and if two separating rods are fitted in one-to-one correspondence with the two positioning notches, the 1/3 segments can be inserted between the two separating rods.
Example 6
On the basis of example 2, the difference lies in:
two optional positioning notches are arranged on any end plate, and the distance between the two positioning notches is one fourth of the distance between the pair of side frames; the two positioning notches provide the possibility of placement of the 1/4 segments, and if two separating rods are fitted in one-to-one correspondence with the two positioning notches, the 1/4 segments can be inserted between the two separating rods.
Example 7
On the basis of example 2, the difference lies in:
two optional positioning notches are formed in any end plate, and the distance between the two positioning notches is one fifth of the distance between the pair of side frames; the two positioning notches provide the possibility of placement of the 1/5 segments, and if two separating rods are fitted in one-to-one correspondence with the two positioning notches, the 1/5 segments can be inserted between the two separating rods.
Example 8
On the basis of example 2, the difference lies in:
two optional positioning notches are formed in any end plate, and the distance between the two positioning notches is one sixth of the distance between the pair of side frames; the two positioning notches provide the possibility of placement of the 1/6 segments, and if two separating rods are fitted in one-to-one correspondence with the two positioning notches, the 1/6 segments can be inserted between the two separating rods.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the technical principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (10)
1. The quartz boat for bearing the silicon wafers comprises a quartz main frame body, wherein the quartz main frame body comprises a side wall and an underframe, the side wall is formed by a pair of side frames arranged on the left and right and a pair of end plates arranged in front and at the back, the pair of end plates are vertically arranged and are parallel to each other, the pair of side frames are respectively provided with a vertical slot for inserting the side edge of the silicon wafer, and the pair of side frames are mutually matched; the method is characterized in that:
a separating rod is further arranged in the side wall; the top edges of the pair of end plates are respectively provided with: a positioning gap for inserting the end part of the separation rod; the positioning notches of the pair of end plates are symmetrically arranged; the two ends of the separating rod are clamped into a pair of symmetrically arranged positioning notches.
2. The quartz boat for bearing silicon wafers as claimed in claim 1, wherein the separating rod is a slotted rod, and the left and right sides of the separating rod are respectively provided with vertical slots for inserting the sides of the silicon wafers; the slots on the spacer bar mate with the slots on the side frames.
3. The quartz boat for carrying silicon wafers of claim 2, wherein the top edge of any one of the end plates is provided with at least two positioning notches.
4. The quartz boat for carrying silicon wafers of claim 2, wherein the top edge of any one of the end plates is provided with at least three positioning notches; the positioning notches on the same end plate are arranged in sequence at equal intervals.
5. The quartz boat for supporting silicon wafers of claim 3, wherein there are two positioning notches in the same end plate with a spacing of one sixth of the spacing between the pair of side frames.
6. The quartz boat for supporting silicon wafers of claim 3, wherein there are two positioning notches in the same end plate spaced one-fifth the distance between the pair of side frames.
7. The quartz boat for supporting silicon wafers of claim 3, wherein there are two positioning notches in the same end plate spaced one-fourth of the distance between the pair of side frames.
8. The quartz boat for supporting silicon wafers of claim 3, wherein there are two positioning notches in the same end plate spaced one third of the distance between the pair of side frames.
9. The quartz boat for supporting silicon wafers of claim 1, wherein there is a positioning notch on one end plate which is spaced apart from the pair of side frames.
10. The quartz boat for supporting silicon wafers as claimed in any one of claims 3 to 8, wherein at least two separation rods are mounted on the same end plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921143996.6U CN209929280U (en) | 2019-07-21 | 2019-07-21 | Quartz boat for bearing silicon wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921143996.6U CN209929280U (en) | 2019-07-21 | 2019-07-21 | Quartz boat for bearing silicon wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209929280U true CN209929280U (en) | 2020-01-10 |
Family
ID=69093941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921143996.6U Withdrawn - After Issue CN209929280U (en) | 2019-07-21 | 2019-07-21 | Quartz boat for bearing silicon wafers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209929280U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110379750A (en) * | 2019-07-21 | 2019-10-25 | 常州时创能源科技有限公司 | It is a kind of for carrying the quartz boat of silicon wafer |
-
2019
- 2019-07-21 CN CN201921143996.6U patent/CN209929280U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110379750A (en) * | 2019-07-21 | 2019-10-25 | 常州时创能源科技有限公司 | It is a kind of for carrying the quartz boat of silicon wafer |
| CN110379750B (en) * | 2019-07-21 | 2024-05-31 | 常州时创能源股份有限公司 | Quartz boat for bearing silicon wafers |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Liyang City, Jiangsu province 213300 Li Cheng Zhen Wu Changzhou city Tandu Road No. 8 Patentee after: Changzhou Shichuang Energy Co.,Ltd. Address before: Liyang City, Jiangsu province 213300 Li Cheng Zhen Wu Changzhou city Tandu Road No. 8 Patentee before: CHANGZHOU SHICHUANG ENERGY TECHNOLOGY Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20200110 Effective date of abandoning: 20240531 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20200110 Effective date of abandoning: 20240531 |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |