CN110349892B - Silicon wafer flower basket for bearing silicon wafer - Google Patents
Silicon wafer flower basket for bearing silicon wafer Download PDFInfo
- Publication number
- CN110349892B CN110349892B CN201910605660.5A CN201910605660A CN110349892B CN 110349892 B CN110349892 B CN 110349892B CN 201910605660 A CN201910605660 A CN 201910605660A CN 110349892 B CN110349892 B CN 110349892B
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- China
- Prior art keywords
- silicon wafer
- silicon wafers
- pair
- side wall
- separation rod
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 106
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 106
- 239000010703 silicon Substances 0.000 title claims abstract description 106
- 235000012431 wafers Nutrition 0.000 claims abstract description 106
- 238000000926 separation method Methods 0.000 claims abstract description 60
- 125000006850 spacer group Chemical group 0.000 claims description 10
- 239000011159 matrix material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 238000009434 installation Methods 0.000 description 6
- 238000005192 partition Methods 0.000 description 5
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Packaging Frangible Articles (AREA)
Abstract
The invention discloses a silicon wafer flower basket for bearing silicon wafers, which is characterized in that the internal space of the silicon wafer flower basket is used for inserting and placing vertical silicon wafers, the silicon wafer flower basket comprises a main frame body, the main frame body comprises a side wall and a bottom frame, the side wall is formed by surrounding a pair of side frames arranged left and right and a pair of end plates arranged front and back, the pair of end plates are vertically arranged and are parallel to each other, the pair of side frames are respectively provided with a vertical slot for inserting and placing the side edges of the silicon wafers, and the pair of side frames are mutually matched; and a separation rod is arranged in the side wall and is perpendicular to the end plate, and the separation rod is detachably connected with the side wall. The invention provides a detachable separation rod for the existing silicon wafer basket; when the separation rod is detached, a row of vertically arranged silicon wafers can be inserted into the silicon wafer flower basket; when the separation rod is arranged, the internal space of the silicon wafer flower basket can be separated, and then two rows of vertically arranged silicon wafers can be inserted, and the two rows of silicon wafers can be arranged up and down or left and right.
Description
Technical Field
The invention relates to a silicon wafer basket for bearing silicon wafers.
Background
The silicon wafer flower basket is an appliance for bearing silicon wafers, the internal space of the appliance is used for inserting and placing the vertical silicon wafers, the appliance comprises a main frame body, the main frame body comprises a side wall and a bottom frame, the side wall is formed by surrounding a pair of side frames which are arranged left and right and a pair of end plates which are arranged front and back, the pair of end plates are vertically arranged and are parallel to each other, the pair of side frames are respectively provided with a vertical slot for inserting and placing the side edges of the silicon wafers, and the pair of side frames are mutually matched.
The side frames of the existing silicon wafer flower basket mainly have two forms:
1) The side frame adopts a slot plate; the slot board includes: a row of vertical slots arranged on one side surface of the plate-shaped main body; the row of slots are sequentially arranged along the transverse direction of the plate-shaped main body;
2) The side frame consists of a plurality of toothed bars, and all the toothed bars in the same side frame are positioned on the same vertical surface; the rack bar includes: a rod-shaped main body and at least one row of slots arranged on the rod-shaped main body; the slots in the same row are sequentially arranged along the axial direction of the rod-shaped main body; if two rows of slots are arranged on the rod-shaped main body, the two rows of slots are arranged in a back-to-back manner.
With the development of solar cell technology, the whole silicon wafer is divided into at least two fragments, so that the efficiency of the solar module can be improved. However, the existing silicon wafer basket is designed according to the shape of the whole silicon wafer, so that the silicon wafer basket is required to be independently designed in a slicing way, and the production cost of enterprises is increased.
Disclosure of Invention
In order to solve the defects in the prior art, the invention provides a silicon wafer flower basket for bearing silicon wafers, wherein the internal space of the silicon wafer flower basket is used for inserting and vertically placing the silicon wafers, the silicon wafer flower basket comprises a main frame body, the main frame body comprises a side wall and a bottom frame, the side wall is formed by surrounding a pair of side frames which are arranged left and right and a pair of end plates which are arranged front and back, the pair of end plates are vertically arranged and are parallel to each other, the pair of side frames are respectively provided with a vertical slot for inserting and placing the side edges of the silicon wafers, and the pair of side frames are mutually matched;
and a separation rod is arranged in the side wall and is perpendicular to the end plate, and the separation rod is detachably connected with the side wall.
The invention provides a detachable separation rod for the existing silicon wafer basket; when the separation rod is detached, a row of vertically arranged silicon wafers (can be whole wafers) can be inserted into the silicon wafer flower basket; when the separation rod is arranged, the internal space of the silicon wafer flower basket can be separated, and then two rows of vertically arranged silicon wafers (which can be divided into slices) can be inserted, and the two rows of silicon wafers can be arranged up and down or left and right.
Preferably, the separation rod is a toothed rod. If the separation rod selects the toothed bar, the toothed bar is provided with a slot for inserting and placing the silicon wafer, so that the silicon wafer can be placed more stably.
Preferably, the side wall is provided with a positioning hole for installing the separation rod, the positioning hole is arranged on the end plate, the positioning hole is positioned between the pair of side frames, the separation rod is detachably connected with the positioning hole, and the separation rod is positioned by the positioning hole. The separation rod is positioned by the positioning hole, so that the installation position of the separation rod in the inner space of the silicon wafer basket is conveniently determined, and the silicon wafer basket is suitable for silicon wafers with different sizes.
Preferably, the side wall is provided with: and the positioning holes are sequentially arranged along the left-right direction. The mounting position of the separation rod is selectable in the left-right direction, and the mounting position of the separation rod can be adjusted in the left-right direction so as to adapt to silicon wafers with different sizes.
Preferably, the side wall is provided with: and the positioning holes are sequentially arranged at equal intervals along the left-right direction. The mounting positions of the separation rods can be selected in the left-right direction, and the mounting positions of the separation rods can be adjusted at equal intervals in the left-right direction so as to adapt to silicon wafers with different sizes.
Preferably, the side wall is provided with: and the positioning holes are vertically and sequentially arranged. The mounting position of the separation rod is vertically selectable, and the mounting position of the separation rod can be vertically adjusted so as to adapt to silicon wafers with different sizes.
Preferably, the side wall is provided with: and positioning holes are vertically and uniformly arranged at intervals in sequence. The mounting position of the separation rod is vertically selectable, and the mounting position of the separation rod can be vertically and equally spaced to adapt to silicon wafers with different sizes.
Preferably, the side wall is provided with: locating holes which are sequentially arranged along the left-right direction and locating holes which are vertically and sequentially arranged. The mounting position of the separation rod can be selected in the left-right direction and the vertical direction, and the mounting position of the separation rod can be adjusted in the left-right direction and also can be adjusted vertically so as to adapt to silicon wafers with different sizes.
Preferably, the side wall is provided with: the positioning holes are sequentially arranged at equal intervals along the left-right direction, and the positioning holes are sequentially arranged at equal intervals along the vertical direction. The mounting positions of the separation rods can be selected in the left-right direction and the vertical direction, the mounting positions of the separation rods can be adjusted at equal intervals in the left-right direction, and the mounting positions of the separation rods can be adjusted at equal intervals in the vertical direction, so that the silicon wafers with different sizes can be adapted.
Preferably, the positioning holes on the same end plate are positioned on the same straight line. If the positioning holes on the same end plate are positioned on the same straight line, the installation position of the separation rod can be more conveniently adjusted.
Preferably, the pair of side frames are slot plates; is a side frame structure of the existing silicon wafer flower basket.
Preferably, the pair of side frames are respectively composed of a plurality of toothed bars, and each toothed bar in the same side frame is positioned on the same vertical surface; is a side frame structure of the existing silicon wafer flower basket.
Preferably, at least two separation rods are arranged on the same end plate, so that the storage layout of the silicon wafers can be more selected.
Drawings
FIGS. 1 and 2 are schematic views of example 1;
FIG. 3 is a schematic diagram of example 2;
FIG. 4 is a schematic diagram of example 3;
FIG. 5 is a schematic diagram of example 4;
FIG. 6 is a schematic diagram of example 5;
FIG. 7 is a schematic diagram of example 6;
FIG. 8 is a schematic diagram of example 7;
FIG. 9 is a schematic diagram of example 8.
Detailed Description
The following describes the embodiments of the present invention further with reference to the drawings and examples. The following examples are only for more clearly illustrating the technical aspects of the present invention, and are not intended to limit the scope of the present invention.
Example 1
As shown in fig. 1 and 2, the present invention provides a silicon wafer basket for carrying silicon wafers, wherein an inner space of the silicon wafer basket is used for inserting and placing vertical silicon wafers, the silicon wafer basket comprises a main frame body, the main frame body comprises a side wall 10 and a bottom frame 20, the side wall 10 is surrounded by a pair of side frames 11 which are arranged left and right and a pair of end plates 12 which are arranged front and back, the pair of end plates 12 are vertically arranged and are parallel to each other, the pair of side frames 11 are respectively provided with a vertical slot for inserting and placing the side edges of the silicon wafers, and the pair of side frames 11 are mutually matched;
the side wall 10 is internally provided with a separation rod 30, the separation rod 30 is vertical to the end plate 12, and the separation rod 30 is detachably connected with the side wall 10.
The partition lever 30 is detachable; when the separation rod 30 is detached, a row of vertically arranged silicon wafers (which can be whole wafers) can be inserted into the silicon wafer flower basket; when the separation rod 30 is installed, the internal space of the silicon wafer basket can be separated, and then two rows of vertically arranged silicon wafers 50 (which can be divided into slices) can be inserted, and the two rows of silicon wafers 50 can be arranged up and down (as shown in fig. 1) or left and right (as shown in fig. 2).
The separation rod 30 can be a toothed rod, and a slot for inserting and placing the silicon wafer is arranged on the toothed rod, so that the silicon wafer can be placed more stably.
The pair of side frames 11 may have a conventional structure, and each of the pair of side frames 11 may be formed of a plurality of bars, and the bars in the same side frame 11 may be positioned on the same vertical plane. In addition, the pair of side frames may be slot boards (the slot boards are not shown).
Example 2
As shown in fig. 3, on the basis of example 1, the difference is that:
the side wall 10 is provided with a positioning hole 40 for installing the partition rod 30, the positioning hole 40 is arranged on the end plate 12, the positioning hole 40 is positioned between the pair of side frames 11, the partition rod 30 is detachably connected with the positioning hole 40, and the partition rod 30 is positioned by the positioning hole 40.
The separation rod 30 is positioned by the positioning hole 40, so that the installation position of the separation rod 30 in the internal space of the silicon wafer basket is conveniently determined, and the silicon wafer basket is suitable for silicon wafers with different sizes.
Example 3
As shown in fig. 4, on the basis of example 2, the difference is that:
the side wall 10 is provided with: the positioning holes 40 are provided in order in the left-right direction.
The mounting position of the separation rod 30 is selectable in the left-right direction, and the mounting position of the separation rod 30 can be adjusted in the left-right direction so as to adapt to silicon wafers with different sizes.
Preferably, the side wall 10 is provided with: the positioning holes 40 are sequentially arranged at equal intervals in the left-right direction; the mounting positions of the partition bars 30 can be adjusted at equal intervals in the left-right direction.
Preferably, the alignment holes 40 in the same end plate 12 are aligned to allow for easier adjustment of the mounting location of the spacer bars.
When the separation rod is installed, the installation position of the separation rod is adjusted to be in place, and then the separation rod is fixed (detachably).
Preferably, the positioning holes 40 on the same end plate 12 are positioned on the same straight line, and at least two separation rods are assembled on the same end plate 12; two rows of silicon wafers can be inserted and arranged up and down; or a plurality of rows of silicon wafers are inserted and placed, and the plurality of rows of silicon wafers are sequentially arranged along the left-right direction.
Example 4
As shown in fig. 5, on the basis of example 2, the difference is that:
the side wall 10 is provided with: positioning holes 40 vertically arranged in sequence; the mounting position of the separation rod 30 is vertically selectable, and the mounting position of the separation rod 30 can be vertically adjusted to adapt to silicon wafers with different sizes.
Preferably, the side wall 10 is provided with: positioning holes 40 are vertically and sequentially arranged at equal intervals; the mounting positions of the spacer bars 30 can be vertically adjusted at equal intervals to accommodate silicon wafers of different sizes.
Preferably, the alignment holes 40 in the same end plate 12 are aligned to allow for easier adjustment of the mounting location of the spacer bars.
When the separation rod is installed, the installation position of the separation rod is adjusted to be in place, and then the separation rod is fixed (detachably).
Preferably, the positioning holes 40 on the same end plate 12 are positioned on the same straight line, and at least two separation rods are assembled on the same end plate 12; multiple rows of silicon wafers can be inserted, and the multiple rows of silicon wafers are sequentially arranged along the vertical direction; or two rows of silicon wafers are inserted and placed, and the two rows of silicon wafers are arranged left and right.
Example 5
As shown in fig. 6, on the basis of example 2, the difference is that:
the side wall 10 is provided with: the positioning holes 40 are sequentially arranged at equal intervals along the left-right direction, and the positioning holes 40 are sequentially arranged at equal intervals along the vertical direction; and the alignment holes 40 on the same end plate 12 are on the same straight line.
Example 6
As shown in fig. 7, on the basis of example 2, the difference is that:
the side wall 10 is provided with: the positioning holes 40 are sequentially arranged at equal intervals along the left-right direction, and the positioning holes 40 are sequentially arranged at equal intervals along the vertical direction; and the positioning holes 40 on the same end plate 12 are distributed in a cross shape.
Example 7
As shown in fig. 8, on the basis of example 2, the difference is that:
the side wall 10 is provided with: the positioning holes 40 are sequentially arranged at equal intervals along the left-right direction, and the positioning holes 40 are sequentially arranged at equal intervals along the vertical direction; and the positioning holes 40 on the same end plate 12 are distributed in an X shape.
Example 8
As shown in fig. 9, on the basis of example 2, the difference is that:
the side wall 10 is provided with: the positioning holes 40 are sequentially arranged at equal intervals along the left-right direction, and the positioning holes 40 are sequentially arranged at equal intervals along the vertical direction; and the positioning holes 40 on the same end plate 12 are distributed in a matrix.
In embodiments 5 to 9, the mounting position of the spacer is selectable in both the left-right direction and the vertical direction, and the mounting position of the spacer 30 can be adjusted in both the left-right direction and the vertical direction to accommodate silicon wafers of different sizes. When the separation rod is installed, the installation position of the separation rod is adjusted to be in place, and then the separation rod is fixed (detachably).
Preferably, in embodiments 5 to 9, at least two spacer bars are mounted on the same end plate 12, so that the storage layout of the silicon wafer is more selected.
As in embodiment 5, at least two spacer bars are mounted on the same end plate 12; multiple rows of silicon wafers can be inserted, and the multiple rows of silicon wafers are sequentially arranged along the vertical direction or the multiple rows of silicon wafers are sequentially arranged along the left-right direction.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that it will be apparent to those skilled in the art that several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the scope of the invention.
Claims (10)
1. The silicon wafer flower basket for bearing silicon wafers is characterized in that the internal space of the silicon wafer flower basket is used for inserting and placing vertical silicon wafers, the silicon wafer flower basket comprises a main frame body, the main frame body comprises a side wall and a bottom frame, the side wall is formed by a pair of side frames arranged left and right and a pair of end plates arranged front and back, the pair of end plates are vertically arranged and parallel to each other, the pair of side frames are respectively provided with a vertical slot for inserting and placing the side edges of the silicon wafers, and the pair of side frames are mutually matched; the method is characterized in that:
the pair of side frames are slot boards; or the pair of side frames are respectively composed of a plurality of toothed bars, and each toothed bar in the same side frame is positioned on the same vertical surface;
a separation rod is arranged in the side wall and is perpendicular to the end plate, and the separation rod is detachably connected with the side wall;
the side wall is provided with a positioning hole for installing the separation rod, the positioning hole is arranged on the end plate, the positioning hole is positioned between the pair of side frames, the separation rod is detachably connected with the positioning hole, and the separation rod is positioned by the positioning hole;
the side wall is provided with: the positioning holes are sequentially arranged along the left-right direction and/or the positioning holes are vertically and sequentially arranged.
2. The silicon wafer basket for carrying silicon wafers of claim 1 wherein the spacer bar is a toothed bar.
3. The silicon wafer basket for carrying silicon wafers according to claim 1 or 2, wherein the side wall is provided with: the positioning holes are sequentially arranged at equal intervals along the left-right direction or the positioning holes are sequentially arranged at equal intervals along the vertical direction.
4. A silicon wafer basket according to claim 3 wherein the locating holes on the same end plate are located on the same line.
5. The silicon wafer basket for carrying silicon wafers of claim 4 wherein at least two spacer bars are mounted to the same end plate.
6. The silicon wafer basket for carrying silicon wafers according to claim 1 or 2, wherein the side wall is provided with: the positioning holes are sequentially arranged at equal intervals along the left-right direction, and the positioning holes are sequentially arranged at equal intervals along the vertical direction.
7. The silicon wafer basket for carrying silicon wafers according to claim 6, wherein the positioning holes on the same end plate are distributed in a cross shape.
8. The silicon wafer basket for carrying silicon wafers according to claim 6 wherein the alignment holes on the same end plate are distributed in an X-shape.
9. The silicon wafer basket for carrying silicon wafers according to claim 6, wherein the positioning holes on the same end plate are distributed in a matrix.
10. Silicon wafer basket according to any one of claims 7 to 9, characterized in that at least two spacer bars are fitted on the same end plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910605660.5A CN110349892B (en) | 2019-07-05 | 2019-07-05 | Silicon wafer flower basket for bearing silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910605660.5A CN110349892B (en) | 2019-07-05 | 2019-07-05 | Silicon wafer flower basket for bearing silicon wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110349892A CN110349892A (en) | 2019-10-18 |
| CN110349892B true CN110349892B (en) | 2023-08-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910605660.5A Active CN110349892B (en) | 2019-07-05 | 2019-07-05 | Silicon wafer flower basket for bearing silicon wafer |
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Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4493418A (en) * | 1983-08-17 | 1985-01-15 | Empak Inc. | Wafer processing cassette |
| JPH0864667A (en) * | 1994-08-24 | 1996-03-08 | Kawasaki Steel Corp | Cassette for semiconductor wafer |
| DE102009025681A1 (en) * | 2009-06-20 | 2010-12-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Wafer cartridge device for receiving wafer stacks of microelectronic product during thinning rear side of wafers, has electrical contact regions designed to electro-conductively contact stacks laid in cartridge in inserted condition |
| CN201708141U (en) * | 2010-06-22 | 2011-01-12 | 北京市塑料研究所 | Silicon slice bearing flower basket |
| CN202259219U (en) * | 2011-08-24 | 2012-05-30 | 苏州日和科技有限公司 | Liquid crystal sheet load bearing support capable of being adjusted accurately |
| CN203787399U (en) * | 2014-03-24 | 2014-08-20 | 苏州阿特斯阳光电力科技有限公司 | Crystal silicon wafer carrying basket |
| CN204927319U (en) * | 2015-09-09 | 2015-12-30 | 新奥光伏能源有限公司 | Wash basket of flowers and belt cleaning device |
| CN205231025U (en) * | 2015-12-03 | 2016-05-11 | 钧石(中国)能源有限公司 | A integral type basket of flowers for bearing weight of silicon chip |
| CN206332014U (en) * | 2016-12-28 | 2017-07-14 | 中建材浚鑫科技股份有限公司 | Silicon chip loading box |
| CN206395167U (en) * | 2016-12-29 | 2017-08-11 | 安徽世林照明股份有限公司 | A kind of LED packed and transported case |
| CN108336005A (en) * | 2017-01-20 | 2018-07-27 | 颀邦科技股份有限公司 | Wafer boat structure |
| CN208127218U (en) * | 2018-04-23 | 2018-11-20 | 苏州晶洲装备科技有限公司 | A kind of double-layered dry method separator of wet process crystalline silicon |
| CN209016031U (en) * | 2018-09-05 | 2019-06-21 | 盐城阿特斯协鑫阳光电力科技有限公司 | Silicon wafer holds big flower basket structure |
| CN209859931U (en) * | 2019-07-05 | 2019-12-27 | 常州时创能源科技有限公司 | Silicon wafer basket for bearing silicon wafers |
-
2019
- 2019-07-05 CN CN201910605660.5A patent/CN110349892B/en active Active
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4493418A (en) * | 1983-08-17 | 1985-01-15 | Empak Inc. | Wafer processing cassette |
| JPH0864667A (en) * | 1994-08-24 | 1996-03-08 | Kawasaki Steel Corp | Cassette for semiconductor wafer |
| DE102009025681A1 (en) * | 2009-06-20 | 2010-12-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Wafer cartridge device for receiving wafer stacks of microelectronic product during thinning rear side of wafers, has electrical contact regions designed to electro-conductively contact stacks laid in cartridge in inserted condition |
| CN201708141U (en) * | 2010-06-22 | 2011-01-12 | 北京市塑料研究所 | Silicon slice bearing flower basket |
| CN202259219U (en) * | 2011-08-24 | 2012-05-30 | 苏州日和科技有限公司 | Liquid crystal sheet load bearing support capable of being adjusted accurately |
| CN203787399U (en) * | 2014-03-24 | 2014-08-20 | 苏州阿特斯阳光电力科技有限公司 | Crystal silicon wafer carrying basket |
| CN204927319U (en) * | 2015-09-09 | 2015-12-30 | 新奥光伏能源有限公司 | Wash basket of flowers and belt cleaning device |
| CN205231025U (en) * | 2015-12-03 | 2016-05-11 | 钧石(中国)能源有限公司 | A integral type basket of flowers for bearing weight of silicon chip |
| CN206332014U (en) * | 2016-12-28 | 2017-07-14 | 中建材浚鑫科技股份有限公司 | Silicon chip loading box |
| CN206395167U (en) * | 2016-12-29 | 2017-08-11 | 安徽世林照明股份有限公司 | A kind of LED packed and transported case |
| CN108336005A (en) * | 2017-01-20 | 2018-07-27 | 颀邦科技股份有限公司 | Wafer boat structure |
| CN208127218U (en) * | 2018-04-23 | 2018-11-20 | 苏州晶洲装备科技有限公司 | A kind of double-layered dry method separator of wet process crystalline silicon |
| CN209016031U (en) * | 2018-09-05 | 2019-06-21 | 盐城阿特斯协鑫阳光电力科技有限公司 | Silicon wafer holds big flower basket structure |
| CN209859931U (en) * | 2019-07-05 | 2019-12-27 | 常州时创能源科技有限公司 | Silicon wafer basket for bearing silicon wafers |
Non-Patent Citations (1)
| Title |
|---|
| PVDF太阳能电池硅片花篮的研制;孙卫东;黄萍;王华;朱道峰;刘哲伟;刘秋晨;;塑料(第06期);正文全文 * |
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| Publication number | Publication date |
|---|---|
| CN110349892A (en) | 2019-10-18 |
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