CN110379752B - Silicon wafer flower basket with inner frame - Google Patents
Silicon wafer flower basket with inner frame Download PDFInfo
- Publication number
- CN110379752B CN110379752B CN201910678719.3A CN201910678719A CN110379752B CN 110379752 B CN110379752 B CN 110379752B CN 201910678719 A CN201910678719 A CN 201910678719A CN 110379752 B CN110379752 B CN 110379752B
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- China
- Prior art keywords
- pair
- silicon wafer
- inner frame
- underframe
- vertical
- Prior art date
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 94
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 94
- 239000010703 silicon Substances 0.000 title claims abstract description 94
- 238000000926 separation method Methods 0.000 claims abstract description 33
- 238000005192 partition Methods 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 abstract description 92
- 125000006850 spacer group Chemical group 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Packaging Frangible Articles (AREA)
Abstract
The invention discloses a silicon wafer flower basket with an inner frame, which comprises a main frame body, wherein the main frame body comprises a side wall and an underframe; a detachable inner frame is also arranged in the side wall; the inner frame includes: a pair of vertical plates arranged front and back, and a horizontally arranged separation rod with two ends respectively connected with the pair of vertical plates; the pair of vertical plates are arranged on the underframe, the bottom edges of the pair of vertical plates are respectively provided with a positioning notch for the underframe to be clamped in, and the underframe is clamped in the positioning notch of the pair of vertical plates; the partition rod is perpendicular to the vertical plate and is positioned above the underframe. The invention provides a detachable inner frame for the existing silicon wafer flower basket, and a separation rod is arranged in the inner frame; when the inner frame is detached, a row of vertically arranged silicon wafers can be inserted into the silicon wafer flower basket; when the inner frame is installed, the separation rod can separate the inner space of the silicon wafer flower basket, and then two rows of vertical silicon wafers can be inserted and placed, the two rows of silicon wafers are separated by the separation rod, namely, the two rows of silicon wafers are respectively arranged at the left side and the right side of the separation rod.
Description
Technical Field
The invention relates to a silicon wafer flower basket with an inner frame.
Background
The silicon wafer flower basket is an appliance for bearing silicon wafers, the internal space of the appliance is used for inserting and placing the vertical silicon wafers, the appliance comprises a main frame body, the main frame body comprises a side wall and a bottom frame, the side wall is formed by surrounding a pair of side frames which are arranged left and right and a pair of end plates which are arranged front and back, the pair of end plates are vertically arranged and are parallel to each other, the pair of side frames are respectively provided with a vertical slot for inserting and placing the side edges of the silicon wafers, and the pair of side frames are mutually matched.
The side frames of the existing silicon wafer flower basket mainly have two forms:
1) The side frame adopts a slot plate; the slot board includes: a row of vertical slots arranged on one side surface of the plate-shaped main body; the row of slots are sequentially arranged along the transverse direction of the plate-shaped main body;
2) The side frame consists of a plurality of toothed bars, and all the toothed bars in the same side frame are positioned on the same vertical surface; the rack bar includes: a rod-shaped main body and at least one row of slots arranged on the rod-shaped main body; the slots in the same row are sequentially arranged along the axial direction of the rod-shaped main body; if two rows of slots are arranged on the rod-shaped main body, the two rows of slots are arranged in a back-to-back manner.
With the development of solar cell technology, the whole silicon wafer is divided into at least two fragments, so that the efficiency of the solar module can be improved. However, the existing silicon wafer basket is designed according to the shape of the whole silicon wafer, so that the silicon wafer basket is required to be independently designed in a slicing way, and the production cost of enterprises is increased.
Disclosure of Invention
In order to solve the defects in the prior art, the invention provides a silicon wafer flower basket with an inner frame, wherein the inner space of the silicon wafer flower basket is used for inserting and vertically placing silicon wafers, the silicon wafer flower basket comprises a main frame body, and the main frame body comprises side walls and an underframe; the side wall is surrounded by a pair of side frames arranged left and right and a pair of end plates arranged front and back, the pair of end plates are vertically arranged and are parallel to each other, the pair of side frames are respectively provided with a vertical slot for inserting the side edge of the silicon wafer, and the pair of side frames are mutually matched;
a detachable inner frame is further arranged in the side wall; the inner frame includes: a pair of vertical plates arranged front and back, and a horizontally arranged separation rod with two ends respectively connected with the pair of vertical plates; the pair of risers are parallel to the end plates; the pair of vertical plates are arranged on the underframe, the bottom edges of the pair of vertical plates are respectively provided with a positioning notch for the underframe to be clamped in, and the underframe is clamped in the positioning notch of the pair of vertical plates; the partition rod is perpendicular to the vertical plate and is positioned above the underframe.
The invention provides a detachable inner frame for the existing silicon wafer flower basket, and a separation rod is arranged in the inner frame; when the inner frame is detached, a row of vertically arranged silicon wafers (can be whole wafers) can be inserted into the silicon wafer flower basket; when the inner frame is assembled, the separation rod can separate the inner space of the silicon wafer flower basket, and then two rows of vertical silicon wafers (which can be the whole wafer slices) can be inserted and placed, and the two rows of silicon wafers are separated by the separation rod, namely, the two rows of silicon wafers are respectively arranged at the left side and the right side of the separation rod.
Preferably, the pair of vertical plates are respectively provided with a guide groove for guiding the end parts of the separation rod to slide, the guide grooves on the pair of end plates are symmetrically arranged, and the guide grooves extend along the left-right direction; the two ends of the separation rod are detachably connected with the guide grooves on the pair of end plates respectively.
In order to adjust the position of the separation rod in the internal space of the silicon wafer flower basket, a guide groove extending along the left-right direction is arranged on the vertical plate, and the installation position of the separation rod can be adjusted along the left-right direction so as to adapt to silicon wafers with different sizes; when the separation rod is required to be adjusted, the inner frame is taken out from the silicon wafer flower basket, the two ends of the separation rod are moved in the left-right direction in the guide groove, and when the separation rod is adjusted in place, the two ends of the separation rod are fixed with a pair of vertical plates (detachably); after the separation rod is fixed, the inner frame is installed into the silicon wafer basket (the underframe is clamped into the positioning notches of the pair of vertical plates), and at the moment, the position of the separation rod in the inner space of the silicon wafer basket is adjusted.
Preferably, the separation rod is a toothed bar, and a slot for inserting and placing the silicon wafer is arranged on the toothed bar, so that the silicon wafer can be placed more stably.
Preferably, at least two separation rods are assembled in any guide groove, a plurality of rows of silicon wafers can be inserted, the silicon wafers in the plurality of rows are sequentially arranged along the left-right direction, and two adjacent rows of silicon wafers are separated by one separation rod.
Preferably, the pair of side frames are slot plates; is a side frame structure of the existing silicon wafer flower basket.
Preferably, the pair of side frames are respectively composed of a plurality of toothed bars, and each toothed bar in the same side frame is positioned on the same vertical surface; is a side frame structure of the existing silicon wafer flower basket.
Drawings
FIG. 1 is a schematic diagram of a prior art silicon wafer basket;
FIG. 2 is a schematic view of a silicon wafer basket with an inner frame provided in example 1;
FIG. 3 is a schematic view of a silicon wafer basket insert row of vertically positioned silicon wafers of example 1;
FIG. 4 is a schematic illustration of two rows of vertically arranged silicon wafers inserted into a silicon wafer basket in example 1;
FIG. 5 is a schematic view of a silicon wafer basket with an inner frame provided in example 2;
FIG. 6 is a schematic view of a wafer basket insert row of vertically oriented wafers of example 3.
Detailed Description
The following describes the embodiments of the present invention further with reference to the drawings and examples. The following examples are only for more clearly illustrating the technical aspects of the present invention, and are not intended to limit the scope of the present invention.
The silicon wafer basket is an appliance for bearing silicon wafers, and the inner space of the silicon wafer basket is used for inserting and vertically placing the silicon wafers. As shown in fig. 1, the existing silicon wafer flower basket comprises a main frame body, the main frame body comprises a side wall 10 and a bottom frame 20, the side wall 10 is formed by a pair of side frames 11 arranged left and right and a pair of end plates 12 arranged front and back, the pair of end plates 12 are vertically arranged and parallel to each other, the pair of side frames 11 are respectively provided with a vertical slot for inserting and placing the side edges of the silicon wafer, and the pair of side frames 11 are mutually matched.
The side frames 11 of the existing silicon wafer flower basket mainly have two forms:
1) The side frames 11 employ a slot plate (the slot plate is not shown in the drawing); the slot board includes: a row of vertical slots arranged on one side surface of the plate-shaped main body; the row of slots are sequentially arranged along the transverse direction of the plate-shaped main body;
2) The side frame 11 consists of a plurality of toothed bars, and all the toothed bars in the same side frame 11 are positioned on the same vertical surface; the rack bar includes: a rod-shaped main body and at least one row of slots arranged on the rod-shaped main body; the slots in the same row are sequentially arranged along the axial direction of the rod-shaped main body; if two rows of slots are arranged on the rod-shaped main body, the two rows of slots are arranged in a back-to-back manner.
Embodiments of the invention are as follows:
example 1
As shown in fig. 2, the present invention provides a silicon wafer basket with an inner frame, wherein the inner space of the silicon wafer basket is used for inserting and vertically placing silicon wafers, the silicon wafer basket comprises a main frame body, and the main frame body comprises a side wall 10 and a bottom frame 20; the side wall 10 is surrounded by a pair of side frames 11 which are arranged left and right and a pair of end plates 12 which are arranged front and back, the pair of end plates 12 are vertically arranged and are parallel to each other, the pair of side frames 11 are respectively provided with a vertical slot for inserting the side edges of the silicon wafer, and the pair of side frames 11 are mutually matched;
a detachable inner frame 30 is further arranged in the side wall 10; the inner frame 30 includes: a pair of vertical plates 31 disposed front and rear, and a horizontally disposed partition bar 32 having both ends connected to the pair of vertical plates 31, respectively; the pair of risers 31 are parallel to the end plate 12; the pair of risers 31 are arranged on the underframe 20, the bottom edges of the pair of risers 31 are respectively provided with a positioning notch 33 for the underframe 20 to be clamped in, and the underframe 20 is clamped in the positioning notch 33 of the pair of risers 31; the partition bar 32 is perpendicular to the riser 31, and the partition bar 32 is located above the bottom chassis 20.
The partition rod 32 can select a toothed bar, and a slot for inserting and placing the silicon wafer is arranged on the toothed bar, so that the silicon wafer can be placed more stably.
The pair of side frames 11 may have a conventional structure, and each of the pair of side frames 11 may be formed of a plurality of bars, and the bars in the same side frame 11 may be positioned on the same vertical plane. In addition, the pair of side frames 11 may be slot boards (the slot boards are not shown).
The invention provides a detachable inner frame 30 for the existing silicon wafer basket, and a separation rod 32 is arranged in the inner frame 30; as shown in fig. 3, when the inner frame 30 is removed, a row of vertically arranged silicon wafers 40 (which may be a whole wafer) may be inserted into the silicon wafer basket (i.e., the existing silicon wafer basket); as shown in fig. 4, when the inner frame 30 is mounted, the partition rods 32 may partition the inner space of the silicon wafer basket, and then two rows of vertically arranged silicon wafers 41 (the silicon wafers 41 may be the slices of the whole wafer 40) may be inserted, and the two rows of silicon wafers 41 are separated by the partition rods 32, that is, the two rows of silicon wafers 41 are separately arranged on the left and right sides of the partition rods 32.
Example 2
As shown in fig. 5, the present invention also provides another silicon wafer basket with an inner frame, which is different from the silicon wafer basket with an inner frame provided in embodiment 1 in that:
the pair of vertical plates 31 are respectively provided with guide grooves 34 for guiding the end parts of the partition rods 32 to slide, the guide grooves 34 on the pair of end plates 12 are symmetrically arranged, and the guide grooves 34 extend in the left-right direction; both ends of the partition bar 32 are detachably connected to the guide grooves 34 of the pair of end plates 12, respectively.
In order to adjust the position of the separation rod 32 in the internal space of the silicon wafer flower basket, a guide groove 34 extending along the left-right direction is arranged on the vertical plate 31, and the installation position of the separation rod 32 can be adjusted along the left-right direction so as to adapt to silicon wafers with different sizes; when the separation rod 32 needs to be adjusted, the inner frame 30 is taken out from the silicon wafer flower basket, the two ends of the separation rod 32 move in the left-right direction in the guide groove 34, and when the separation rod 32 is adjusted in place, the two ends of the separation rod 32 are fixed with a pair of vertical plates 31 (detachably); after the spacer bars 32 are fixed, the inner frame 30 is then installed into the silicon wafer basket (the bottom frame 20 is snapped into the positioning notches 33 of the pair of risers 31), at which time the position of the spacer bars 32 in the interior space of the silicon wafer basket has been adjusted.
Example 3
As shown in fig. 6, on the basis of example 2, the difference is that:
at least two partition bars 32 are fitted in any one of the guide grooves 34, and the partition bars 32 are toothed bars.
The tooth bar is provided with a slot for inserting and placing the silicon wafer, so that the silicon wafer can be placed more stably.
The silicon wafer basket in embodiment 3 can insert a plurality of rows of silicon wafers 42, the plurality of rows of silicon wafers 42 being arranged in order in the left-right direction, and two adjacent rows of silicon wafers 42 being separated by a spacer rod 32.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that it will be apparent to those skilled in the art that several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the scope of the invention.
Claims (6)
1. The silicon wafer basket comprises a main frame body, wherein the main frame body comprises a side wall and a bottom frame; the side wall is surrounded by a pair of side frames arranged left and right and a pair of end plates arranged front and back, the pair of end plates are vertically arranged and are parallel to each other, the pair of side frames are respectively provided with a vertical slot for inserting the side edge of the silicon wafer, and the pair of side frames are mutually matched; the method is characterized in that:
a detachable inner frame is further arranged in the side wall; the inner frame includes: a pair of vertical plates arranged front and back, and a horizontally arranged separation rod with two ends respectively connected with the pair of vertical plates; the pair of risers are parallel to the end plates; the pair of vertical plates are arranged on the underframe, the bottom edges of the pair of vertical plates are respectively provided with a positioning notch for the underframe to be clamped in, and the underframe is clamped in the positioning notch of the pair of vertical plates; the partition rod is perpendicular to the vertical plate and is positioned above the underframe.
2. The silicon wafer basket with an inner frame according to claim 1, wherein the pair of vertical plates are respectively provided with a guide groove for guiding the end parts of the separation rods to slide, the guide grooves on the pair of end plates are symmetrically arranged, the guide grooves extend along the left-right direction, the guide grooves are positioned above the bottom frame, and the guide grooves are positioned between the pair of side frames; the two ends of the separation rod are detachably connected with the guide grooves on the pair of end plates respectively.
3. The silicon wafer basket with inner frame according to claim 2, wherein the dividing bar is a toothed bar.
4. A silicon wafer flower basket provided with an inner frame according to claim 3, wherein at least two dividing bars are fitted in any one of the guide slots.
5. The silicon wafer basket with inner frame according to claim 1, wherein the pair of side frames are slot plates.
6. The silicon wafer basket according to claim 1, wherein the pair of side frames are each composed of a plurality of rack bars, and each rack bar in the same side frame is located on the same vertical plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910678719.3A CN110379752B (en) | 2019-07-25 | 2019-07-25 | Silicon wafer flower basket with inner frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910678719.3A CN110379752B (en) | 2019-07-25 | 2019-07-25 | Silicon wafer flower basket with inner frame |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110379752A CN110379752A (en) | 2019-10-25 |
| CN110379752B true CN110379752B (en) | 2024-02-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910678719.3A Active CN110379752B (en) | 2019-07-25 | 2019-07-25 | Silicon wafer flower basket with inner frame |
Country Status (1)
| Country | Link |
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| CN (1) | CN110379752B (en) |
Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5905302A (en) * | 1996-11-18 | 1999-05-18 | Applied Materials, Inc. | Loadlock cassette with wafer support rails |
| JP2001308171A (en) * | 2000-04-26 | 2001-11-02 | Shin Etsu Polymer Co Ltd | Packaging for back grind wafer and method for housing the same |
| JP2002057201A (en) * | 2000-08-09 | 2002-02-22 | Matsushita Electric Ind Co Ltd | Wafer cassette and wafer cassette hanger |
| JP2006080458A (en) * | 2004-09-13 | 2006-03-23 | Dainichi Shoji Kk | Wafer carrier |
| JP2008098295A (en) * | 2006-10-10 | 2008-04-24 | Shin Etsu Polymer Co Ltd | Substrate housing cassette and housing case |
| CN201708141U (en) * | 2010-06-22 | 2011-01-12 | 北京市塑料研究所 | Silicon slice bearing flower basket |
| CN202049930U (en) * | 2011-04-20 | 2011-11-23 | 江苏伯乐达光伏有限公司 | Flower bracket for silicon wafer |
| CN205231025U (en) * | 2015-12-03 | 2016-05-11 | 钧石(中国)能源有限公司 | A integral type basket of flowers for bearing weight of silicon chip |
| CN206332014U (en) * | 2016-12-28 | 2017-07-14 | 中建材浚鑫科技股份有限公司 | Silicon chip loading box |
| CN206432243U (en) * | 2016-08-31 | 2017-08-22 | 张家港市超声电气有限公司 | Silicon chip flower basket |
| CN107993968A (en) * | 2018-01-08 | 2018-05-04 | 中国电子科技集团公司第四十六研究所 | A kind of bogey for special-shaped chip |
| CN207398106U (en) * | 2017-11-09 | 2018-05-22 | 润峰电力有限公司 | A kind of full-automatic loading and unloading gaily decorated basket of photovoltaic cell |
| CN207752987U (en) * | 2018-02-12 | 2018-08-21 | 苏州卓樱自动化设备有限公司 | A kind of silicon chip flower basket |
| CN210092048U (en) * | 2019-07-25 | 2020-02-18 | 常州时创能源科技有限公司 | Silicon wafer flower basket with inner frame |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7891937B2 (en) * | 2003-06-02 | 2011-02-22 | Texas Instruments Incorporated | Adjustable width cassette for wafer film frames |
-
2019
- 2019-07-25 CN CN201910678719.3A patent/CN110379752B/en active Active
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5905302A (en) * | 1996-11-18 | 1999-05-18 | Applied Materials, Inc. | Loadlock cassette with wafer support rails |
| JP2001308171A (en) * | 2000-04-26 | 2001-11-02 | Shin Etsu Polymer Co Ltd | Packaging for back grind wafer and method for housing the same |
| JP2002057201A (en) * | 2000-08-09 | 2002-02-22 | Matsushita Electric Ind Co Ltd | Wafer cassette and wafer cassette hanger |
| JP2006080458A (en) * | 2004-09-13 | 2006-03-23 | Dainichi Shoji Kk | Wafer carrier |
| JP2008098295A (en) * | 2006-10-10 | 2008-04-24 | Shin Etsu Polymer Co Ltd | Substrate housing cassette and housing case |
| CN201708141U (en) * | 2010-06-22 | 2011-01-12 | 北京市塑料研究所 | Silicon slice bearing flower basket |
| CN202049930U (en) * | 2011-04-20 | 2011-11-23 | 江苏伯乐达光伏有限公司 | Flower bracket for silicon wafer |
| CN205231025U (en) * | 2015-12-03 | 2016-05-11 | 钧石(中国)能源有限公司 | A integral type basket of flowers for bearing weight of silicon chip |
| CN206432243U (en) * | 2016-08-31 | 2017-08-22 | 张家港市超声电气有限公司 | Silicon chip flower basket |
| CN206332014U (en) * | 2016-12-28 | 2017-07-14 | 中建材浚鑫科技股份有限公司 | Silicon chip loading box |
| CN207398106U (en) * | 2017-11-09 | 2018-05-22 | 润峰电力有限公司 | A kind of full-automatic loading and unloading gaily decorated basket of photovoltaic cell |
| CN107993968A (en) * | 2018-01-08 | 2018-05-04 | 中国电子科技集团公司第四十六研究所 | A kind of bogey for special-shaped chip |
| CN207752987U (en) * | 2018-02-12 | 2018-08-21 | 苏州卓樱自动化设备有限公司 | A kind of silicon chip flower basket |
| CN210092048U (en) * | 2019-07-25 | 2020-02-18 | 常州时创能源科技有限公司 | Silicon wafer flower basket with inner frame |
Non-Patent Citations (1)
| Title |
|---|
| 李学威 ; 鲍君善 ; 路平 ; 何书龙 ; .硅片真空传输平台前端真空室的研制.组合机床与自动化加工技术.2017,(第09期),正文全文. * |
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| CN110379752A (en) | 2019-10-25 |
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