CN110349892A - It is a kind of for carrying the silicon chip flower basket of silicon wafer - Google Patents
It is a kind of for carrying the silicon chip flower basket of silicon wafer Download PDFInfo
- Publication number
- CN110349892A CN110349892A CN201910605660.5A CN201910605660A CN110349892A CN 110349892 A CN110349892 A CN 110349892A CN 201910605660 A CN201910605660 A CN 201910605660A CN 110349892 A CN110349892 A CN 110349892A
- Authority
- CN
- China
- Prior art keywords
- silicon wafer
- flower basket
- carrying
- silicon chip
- chip flower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 110
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 110
- 239000010703 silicon Substances 0.000 title claims abstract description 110
- 238000005192 partition Methods 0.000 claims abstract description 80
- 238000009434 installation Methods 0.000 claims description 32
- 238000009826 distribution Methods 0.000 claims description 2
- 239000011159 matrix material Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 48
- 238000010586 diagram Methods 0.000 description 8
- 239000012634 fragment Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a kind of for carrying the silicon chip flower basket of silicon wafer, its inner space is vertically arranged silicon wafer for inserting, including main frame body, main frame body includes side wall and chassis, side wall is surrounded by the end plate that the side frame and a pair of of front and back of a pair of of left and right settings are arranged, this is vertically arranged and is parallel to each other to end plate, this is respectively equipped with the vertical slot inserted for silicon wafer side to side frame, and this cooperates to side frame；Partition rod is equipped in the side wall, partition rod is vertical with end plate, and partition rod is detachably connected with side wall.The present invention is configured with dismountable partition rod to existing silicon chip flower basket；When partition rod removes, silicon chip flower basket can insert a row and be vertically arranged silicon wafer；When partition rod is loaded onto, the inner space of silicon chip flower basket can be separated, and then two rows can be inserted and be vertically arranged silicon wafer, which can setting up and down or left and right settings.
Description
Technical field
The present invention relates to a kind of for carrying the silicon chip flower basket of silicon wafer.
Background technique
Silicon chip flower basket is the utensil for carrying silicon wafer, and inner space is vertically arranged silicon wafer for inserting, including main frame body, main
Frame body includes side wall and chassis, and side wall is surrounded by the end plate that the side frame and a pair of of front and back of a pair of of left and right settings are arranged, this is to end plate
It is vertically arranged and is parallel to each other, this is respectively equipped with the vertical slot inserted for silicon wafer side to side frame, and this cooperates to side frame.
There are mainly two types of forms for the side frame of existing silicon chip flower basket:
1) side frame uses slot board；Slot board includes: to be vertically arranged plate-like body, and vertical set on a row of plate-like body one side
Slot；The rows of sockets is set gradually along the transverse direction of plate-like body；
2) side frame is made of multiple ratch, and each ratch in same side frame is located at same vertical plane；Ratch includes: shape body,
And at least rows of sockets on shape body；Same rows of sockets is set gradually along the axial direction of shape body；If rod-shaped master
Body is equipped with two rows of sockets, which is disposed opposite to each other.
With the development of solar battery technology, it is at least two fragments by silicon wafer full slice, sun component can be improved
Efficiency.But existing silicon chip flower basket is all to be designed according to the shape of silicon wafer full wafer, therefore fragment needs other independent design
Silicon chip flower basket increases the production cost of enterprise.
Summary of the invention
In order to solve defect in the prior art, the present invention provide it is a kind of for carrying the silicon chip flower basket of silicon wafer, inside
Space is vertically arranged silicon wafer for inserting, including main frame body, and main frame body includes side wall and chassis, side wall by a pair of of left and right settings side frame
It is surrounded with the end plate being arranged before and after a pair, this is vertically arranged and is parallel to each other to end plate, this is respectively equipped with for silicon wafer side side frame
The vertical slot inserted, and this cooperates to side frame；
Partition rod is equipped in the side wall, partition rod is vertical with end plate, and partition rod is detachably connected with side wall.
The present invention is configured with dismountable partition rod to existing silicon chip flower basket；When partition rod removes, silicon chip flower basket can be inserted
One row is vertically arranged silicon wafer (can be full wafer)；When partition rod is loaded onto, the inner space of silicon chip flower basket can be separated, and then two rows can be inserted
It is vertically arranged silicon wafer (can be fragment), which can setting up and down or left and right settings.
Preferably, the partition rod is ratch.If partition rod selects ratch, ratch is equipped with to be inserted for what silicon wafer inserted
Slot can more stably place silicon wafer.
Preferably, the side wall is equipped with the location hole for installing partition rod, and location hole is set on end plate, and positions hole location
Between above-mentioned a pair of of side frame, partition rod is detachably connected with location hole, and partition rod is positioned by location hole.Partition rod is by positioning
Hole positioning, facilitates installation site of the determining partition rod in silicon chip flower basket inner space, to adapt to various sizes of silicon wafer.
Preferably, the side wall is equipped with: the location hole set gradually in left-right direction.The installation site of partition rod is in left and right
It may be selected on direction, the installation site of partition rod can be adjusted, in left-right direction to adapt to various sizes of silicon wafer.
Preferably, the side wall is equipped with: the location hole set gradually at equal intervals in left-right direction.The installation site of partition rod
It may be selected in the lateral direction, and can equally spaced adjust the installation site of partition rod in left-right direction, to adapt to different sizes
Silicon wafer.
Preferably, the side wall is equipped with: the location hole vertically set gradually.The installation site of partition rod is vertically optional
It selects, can vertically adjust the installation site of partition rod, to adapt to various sizes of silicon wafer.
Preferably, the side wall is equipped with: the location hole vertically set gradually at equal intervals.The installation site of partition rod is vertical
It is upper to may be selected, the installation site of partition rod can be adjusted, equally spaced vertically to adapt to various sizes of silicon wafer.
Preferably, the side wall is equipped with: the location hole set gradually in left-right direction, and the positioning vertically set gradually
Hole.The installation site of partition rod in left and right directions and vertically on all may be selected, can both adjust the installation of partition rod in left-right direction
Position, and the installation site of partition rod can be vertically adjusted, to adapt to various sizes of silicon wafer.
Preferably, the side wall is equipped with: the location hole set gradually at equal intervals in left-right direction, and it is vertical at equal intervals according to
The location hole of secondary setting.The installation site of partition rod in left and right directions and vertically on all may be selected, between can both waiting in left-right direction
Every the installation site of ground adjustment partition rod, and the installation site of partition rod vertically can be equally spaced adjusted, to adapt to different sizes
Silicon wafer.
Preferably, the location hole on same end plate is located along the same line.If the location hole on same end plate is located at same
On straight line, then the installation site of partition rod can be more easily adjusted.
Preferably, above-mentioned a pair of of side frame is all slot board；It is the side cage structure of existing silicon chip flower basket.
Preferably, above-mentioned a pair of of side frame is made of multiple ratch respectively, and each ratch in same side frame is located at same vertical
Face；It is the side cage structure of existing silicon chip flower basket.
Preferably, at least two partition rods are equipped on same end plate, the storage of silicon wafer can be made, which to be laid out, there are more more options.
Detailed description of the invention
Fig. 1 and Fig. 2 is the schematic diagram of embodiment 1；
Fig. 3 is the schematic diagram of embodiment 2；
Fig. 4 is the schematic diagram of embodiment 3；
Fig. 5 is the schematic diagram of embodiment 4；
Fig. 6 is the schematic diagram of embodiment 5；
Fig. 7 is the schematic diagram of embodiment 6；
Fig. 8 is the schematic diagram of embodiment 7；
Fig. 9 is the schematic diagram of embodiment 8.
Specific embodiment
With reference to the accompanying drawings and examples, further description of the specific embodiments of the present invention.Following embodiment is only
For clearly illustrating technical solution of the present invention, and not intended to limit the protection scope of the present invention.
Embodiment 1
As depicted in figs. 1 and 2, the present invention provides a kind of for carrying the silicon chip flower basket of silicon wafer, and inner space is perpendicular for inserting
Set silicon wafer, including main frame body, main frame body includes side wall 10 and chassis 20, side wall 10 by a pair of of left and right settings side frame 11 and a pair
The end plate 12 of front and back setting surrounds, this is vertically arranged and is parallel to each other to end plate 12, this is respectively equipped with for silicon wafer side side frame 11
The vertical slot inserted, and this cooperates to side frame 11；
Partition rod 30 is equipped in the side wall 10, partition rod 30 is vertical with end plate 12, and partition rod 30 detachably connects with side wall 10
It connects.
Partition rod 30 is detachable；When partition rod 30 removes, silicon chip flower basket can insert a row and be vertically arranged silicon wafer (can be full wafer)；
When partition rod 30 is loaded onto, the inner space of silicon chip flower basket can be separated, and then two rows can be inserted be vertically arranged silicon wafer 50(and can be fragment),
The two rows silicon wafer 50 can (as shown in Figure 1) or left and right settings (as shown in Figure 2) setting up and down.
The partition rod 30 can choose ratch, and ratch is equipped with the slot inserted for silicon wafer, can more stably put
Set silicon wafer.
Existing structure can be used in above-mentioned a pair of side frame 11, and such as above-mentioned a pair of of side frame 11 is made of multiple ratch respectively, same
Each ratch in side frame 11 is located at same vertical plane.In addition, above-mentioned a pair of side frame can also all be that (slot board is not given to be shown slot board
It is intended to).
Embodiment 2
As shown in figure 3, on the basis of embodiment 1, difference is:
The side wall 10 is equipped with the location hole 40 for installing partition rod 30, and location hole 40 is set on end plate 12, and location hole 40
Between above-mentioned a pair of of side frame 11, partition rod 30 is detachably connected with location hole 40, and partition rod 30 is positioned by location hole 40.
Partition rod 30 is positioned by location hole 40, facilitates installation position of the determining partition rod 30 in silicon chip flower basket inner space
It sets, to adapt to various sizes of silicon wafer.
Embodiment 3
As shown in figure 4, difference is on the basis of embodiment 2:
The side wall 10 is equipped with: the location hole 40 set gradually in left-right direction.
The installation site of partition rod 30 may be selected in the lateral direction, can adjust the installation position of partition rod 30 in left-right direction
It sets, to adapt to various sizes of silicon wafer.
Preferably, the side wall 10 is equipped with: the location hole 40 set gradually at equal intervals in left-right direction；It can be in left-right direction
Equally spaced adjust the installation site of partition rod 30.
Preferably, the location hole 40 on same end plate 12 is located along the same line, and can more easily adjust partition rod
Installation site.
When partition rod is installed, first the installation site of partition rod is adjusted in place, then partition rod (removably) is fixed.
Preferably, the location hole 40 on same end plate 12 is located along the same line, and is equipped at least two on same end plate 12
A partition rod；Two rows of silicon wafers can be inserted, the two rows silicon wafer is setting up and down；Or multiple rows of silicon wafer is inserted, multiple rows of silicon wafer is along left and right
Direction is set gradually.
Embodiment 4
As shown in figure 5, difference is on the basis of embodiment 2:
The side wall 10 is equipped with: the location hole 40 vertically set gradually；The installation site of partition rod 30 vertically may be selected, can
The installation site of vertical adjustment partition rod 30, to adapt to various sizes of silicon wafer.
Preferably, the side wall 10 is equipped with: the location hole 40 vertically set gradually at equal intervals；It vertically can equally spaced adjust
The installation site of partition rod 30, to adapt to various sizes of silicon wafer.
Preferably, the location hole 40 on same end plate 12 is located along the same line, and can more easily adjust partition rod
Installation site.
When partition rod is installed, first the installation site of partition rod is adjusted in place, then partition rod (removably) is fixed.
Preferably, the location hole 40 on same end plate 12 is located along the same line, and is equipped at least two on same end plate 12
A partition rod；Multiple rows of silicon wafer can be inserted, which vertically sets gradually；Or two rows of silicon wafers are inserted, the two rows silicon wafer
Left and right settings.
Embodiment 5
As shown in fig. 6, difference is on the basis of embodiment 2:
The side wall 10 is equipped with: the location hole 40 set gradually at equal intervals in left-right direction, and is vertically set gradually at equal intervals
Location hole 40；And the location hole 40 on same end plate 12 is located along the same line.
Embodiment 6
As shown in fig. 7, difference is on the basis of embodiment 2:
The side wall 10 is equipped with: the location hole 40 set gradually at equal intervals in left-right direction, and is vertically set gradually at equal intervals
Location hole 40；And the location hole 40 on same end plate 12 is in crossing distribution.
Embodiment 7
As shown in figure 8, difference is on the basis of embodiment 2:
The side wall 10 is equipped with: the location hole 40 set gradually at equal intervals in left-right direction, and is vertically set gradually at equal intervals
Location hole 40；And the location hole 40 on same end plate 12 is distributed in X font.
Embodiment 8
As shown in figure 9, difference is on the basis of embodiment 2:
The side wall 10 is equipped with: the location hole 40 set gradually at equal intervals in left-right direction, and is vertically set gradually at equal intervals
Location hole 40；And the location hole 40 on same end plate 12 is distributed in matrix.
In embodiment 5 to 9, the installation site of partition rod in left and right directions and vertically on all may be selected, both can be along right and left
To the installation site of adjustment partition rod 30, and the installation site of partition rod can be vertically adjusted, to adapt to various sizes of silicon wafer.Peace
When filling partition rod, first the installation site of partition rod is adjusted in place, then partition rod (removably) is fixed.
Preferably, in embodiment 5 to 9, at least two partition rods are equipped on same end plate 12, are laid out the storage of silicon wafer
There are more more options.
In embodiment 5, at least two partition rods are equipped on same end plate 12；Multiple rows of silicon wafer can be inserted, multiple rows of silicon
Piece is vertically set gradually or multiple rows of silicon wafer is set gradually in left-right direction.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvements and modifications can also be made, these improvements and modifications
Also it should be regarded as protection scope of the present invention.
Claims (17)
1. a kind of for carrying the silicon chip flower basket of silicon wafer, inner space is vertically arranged silicon wafer for inserting, including main frame body, main frame body
Including side wall and chassis, side wall is surrounded by the end plate that the side frame and a pair of of front and back of a pair of of left and right settings are arranged, this is vertically arranged end plate
And be parallel to each other, this is respectively equipped with the vertical slot inserted for silicon wafer side to side frame, and this cooperates to side frame；It is special
Sign is:
Partition rod is equipped in the side wall, partition rod is vertical with end plate, and partition rod is detachably connected with side wall.
2. according to claim 1 for carrying the silicon chip flower basket of silicon wafer, which is characterized in that the partition rod is ratch.
3. according to claim 1 or 2 for carrying the silicon chip flower basket of silicon wafer, which is characterized in that the side wall, which is equipped with, to be used
In the location hole of installation partition rod, location hole is set on end plate, and location hole is located between above-mentioned a pair of of side frame, partition rod and fixed
Position hole is detachably connected, and partition rod is positioned by location hole.
4. according to claim 3 for carrying the silicon chip flower basket of silicon wafer, which is characterized in that the side wall is equipped with: along a left side
The location hole that right direction is set gradually.
5. according to claim 3 for carrying the silicon chip flower basket of silicon wafer, which is characterized in that the side wall is equipped with: along a left side
The location hole that right direction is set gradually at equal intervals.
6. according to claim 3 for carrying the silicon chip flower basket of silicon wafer, which is characterized in that the side wall is equipped with: vertical
The location hole set gradually.
7. according to claim 3 for carrying the silicon chip flower basket of silicon wafer, which is characterized in that the side wall is equipped with: vertical
The location hole set gradually at equal intervals.
8. according to claim 3 for carrying the silicon chip flower basket of silicon wafer, which is characterized in that the side wall is equipped with: along a left side
The location hole that right direction is set gradually, and the location hole vertically set gradually.
9. according to claim 1 for carrying the silicon chip flower basket of silicon wafer, which is characterized in that the side wall is equipped with: along a left side
The location hole that right direction is set gradually at equal intervals, and the location hole vertically set gradually at equal intervals.
10. according to claim 9 for carrying the silicon chip flower basket of silicon wafer, which is characterized in that the positioning on same end plate
Hole is in crossing distribution.
11. according to claim 9 for carrying the silicon chip flower basket of silicon wafer, which is characterized in that the positioning on same end plate
Hole is distributed in X font.
12. according to claim 9 for carrying the silicon chip flower basket of silicon wafer, which is characterized in that and determine on same end plate
Position hole is distributed in matrix.
13. for carrying the silicon chip flower basket of silicon wafer according to any one of claim 4 to 9, which is characterized in that the same end
Location hole on plate is located along the same line.
14. according to claim 1 for carrying the silicon chip flower basket of silicon wafer, which is characterized in that above-mentioned a pair of side frame is all
Slot board.
15. according to claim 1 for carrying the silicon chip flower basket of silicon wafer, which is characterized in that above-mentioned a pair of side frame difference
It is made of multiple ratch, each ratch in same side frame is located at same vertical plane.
16. according to claim 13 for carrying the silicon chip flower basket of silicon wafer, which is characterized in that be equipped on same end plate
At least two partition rods.
17. according to any one of claims 10 to 12 for carrying the silicon chip flower basket of silicon wafer, which is characterized in that same
At least two partition rods are equipped on end plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910605660.5A CN110349892B (en) | 2019-07-05 | 2019-07-05 | Silicon wafer flower basket for bearing silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910605660.5A CN110349892B (en) | 2019-07-05 | 2019-07-05 | Silicon wafer flower basket for bearing silicon wafer |
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| Publication Number | Publication Date |
|---|---|
| CN110349892A true CN110349892A (en) | 2019-10-18 |
| CN110349892B CN110349892B (en) | 2023-08-04 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910605660.5A Active CN110349892B (en) | 2019-07-05 | 2019-07-05 | Silicon wafer flower basket for bearing silicon wafer |
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| Publication number | Publication date |
|---|---|
| CN110349892B (en) | 2023-08-04 |
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