CN110299316B - Silicon wafer flower basket capable of bearing half piece - Google Patents

Silicon wafer flower basket capable of bearing half piece Download PDF

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Publication number
CN110299316B
CN110299316B CN201910669898.4A CN201910669898A CN110299316B CN 110299316 B CN110299316 B CN 110299316B CN 201910669898 A CN201910669898 A CN 201910669898A CN 110299316 B CN110299316 B CN 110299316B
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Prior art keywords
pair
half plate
rod
plate
silicon wafer
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CN201910669898.4A
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CN110299316A (en
Inventor
罗西佳
孟祥熙
梅晓东
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Changzhou Shichuang Energy Co Ltd
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Changzhou Shichuang Energy Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

The invention discloses a silicon wafer flower basket capable of bearing half pieces, wherein a pair of end plates are respectively formed by splicing a left half plate and a right half plate, the lower right corner of the left half plate is hinged with the lower left corner of the right half plate, and the upper part of the left half plate is connected with the upper part of the right half plate through a hasp structure; a separation rod is clamped at the joint of the left half plate and the right half plate; a pair of ejector rods are arranged above the separation rod, and the ejector rods can be detached. The silicon wafer basket is suitable for carrying the whole wafer and the split wafer.

Description

Silicon wafer flower basket capable of bearing half piece
Technical Field
The invention relates to a silicon wafer basket capable of bearing half pieces.
Background
The silicon wafer flower basket is an appliance for bearing silicon wafers, the internal space of the appliance is used for inserting and placing the vertical silicon wafers, the appliance comprises a main frame body, the main frame body comprises a side wall and a bottom frame, the side wall is formed by surrounding a pair of side frames which are arranged left and right and a pair of end plates which are arranged front and back, the pair of end plates are vertically arranged and are parallel to each other, the pair of side frames are respectively provided with a vertical slot for inserting and placing the side edges of the silicon wafers, and the pair of side frames are mutually matched.
The side frames of the existing silicon wafer flower basket mainly have two forms:
1) The side frame adopts a slot plate; the slot board includes: a row of vertical slots arranged on one side surface of the plate-shaped main body; the row of slots are sequentially arranged along the transverse direction of the plate-shaped main body;
2) The side frame consists of a plurality of toothed bars, and all the toothed bars in the same side frame are positioned on the same vertical surface; the rack bar includes: a rod-shaped main body and at least one row of slots arranged on the rod-shaped main body; the slots in the same row are sequentially arranged along the axial direction of the rod-shaped main body; if two rows of slots are arranged on the rod-shaped main body, the two rows of slots are arranged in a back-to-back manner.
With the development of solar cell technology, the whole silicon wafer is divided into two half pieces, so that the efficiency of the solar module can be improved. However, the existing silicon wafer basket is designed according to the shape of the whole silicon wafer, so that the half silicon wafer basket needs to be independently designed, and the production cost of enterprises is increased.
Disclosure of Invention
The invention aims to provide a silicon wafer flower basket which is suitable for carrying a whole wafer and a split wafer.
In order to achieve the above-mentioned purpose, the invention provides a silicon wafer flower basket capable of bearing half pieces, the internal space of which is used for inserting and vertically placing silicon wafers, comprising a main frame body, wherein the main frame body comprises a side wall and a bottom frame, the side wall is surrounded by a pair of side frames which are arranged left and right and a pair of end plates which are arranged front and back, the pair of end plates are vertically arranged and are parallel to each other, the pair of side frames are respectively provided with a vertical slot for inserting and placing the side edges of the silicon wafers, and the pair of side frames are mutually matched;
the pair of end plates are formed by splicing a left half plate and a right half plate respectively, the lower right corner of the left half plate is hinged with the lower left corner of the right half plate, and the upper part of the left half plate is connected with the upper part of the right half plate through a hasp structure;
the pair of side frames includes: a left side frame connected with the left half plate and a right side frame connected with the right half plate;
the chassis includes: a left bottom bar connected to the left half plate and a right bottom bar connected to the right half plate;
a separation rod is further arranged between the pair of side frames, the separation rod is perpendicular to the pair of end plates, two ends of the separation rod are respectively clamped and fixed by a left half plate and a right half plate of the pair of end plates, and a gap for clamping the end parts of the separation rod is formed in the joint of the left half plate and the right half plate;
a pair of ejector rods are arranged between the pair of side frames and are positioned above the separation rods, the pair of ejector rods are perpendicular to the pair of end plates, and two ends of the pair of ejector rods are detachably connected with the pair of end plates respectively; the pair of ejector pins includes: the left ejector rod is detachably connected with the left half plate, and the right ejector rod is detachably connected with the right half plate.
Preferably, the left bottom rod and the right bottom rod are symmetrically arranged.
Preferably, the left ejector rod and the right ejector rod are symmetrically arranged.
Preferably, the left bottom rod and the right bottom rod are toothed bars.
Preferably, the left ejector rod and the right ejector rod are toothed bars.
Preferably, the pair of side frames are each composed of at least two toothed bars, and each toothed bar in the same side frame is located on the same vertical plane.
Preferably, the pair of side frames are slot plates.
The invention has the advantages and beneficial effects that: the silicon wafer basket is suitable for carrying the whole wafer and the split wafer.
Drawings
FIG. 1 is a schematic illustration of a silicon wafer basket closure;
FIG. 2 is a schematic diagram of a silicon wafer basket flipped open;
FIG. 3 is a schematic view of a silicon wafer basket carrying whole wafer;
FIG. 4 is a schematic diagram of a silicon wafer basket flipped open insert fragment;
FIG. 5 is a schematic illustration of a silicon wafer basket carrier slice.
Detailed Description
The following describes the embodiments of the present invention further with reference to the drawings and examples. The following examples are only for more clearly illustrating the technical aspects of the present invention, and are not intended to limit the scope of the present invention.
As shown in fig. 1, the invention provides a silicon wafer flower basket capable of bearing half pieces, wherein the internal space of the silicon wafer flower basket is used for inserting and placing vertical silicon wafers, the silicon wafer flower basket comprises a main frame body, the main frame body comprises side walls and an underframe, the side walls are formed by surrounding a pair of side frames 21 and 22 which are arranged left and right and a pair of end plates 10 which are arranged front and back, the pair of end plates 10 are vertically arranged and are parallel to each other, the pair of side frames are respectively provided with a vertical slot for inserting and placing the side edges of the silicon wafers, and the pair of side frames are mutually matched;
the pair of end plates 10 are respectively formed by splicing a left half plate 11 and a right half plate 12, the lower right corner of the left half plate 11 is hinged with the lower left corner of the right half plate 12 (such as by a shaft 13), and the upper part of the left half plate 11 is connected with the upper part of the right half plate 12 by a hasp structure 40;
the pair of side frames includes: a left side frame 21 connected to the left half plate 11, and a right side frame 22 connected to the right half plate 12;
the chassis includes: a left bottom bar 31 connected to the left half plate 11, and a right bottom bar 32 connected to the right half plate 12; the left bottom rod 31 and the right bottom rod 32 are symmetrically arranged;
a separation rod 50 is further arranged between the pair of side frames, the separation rod 50 is perpendicular to the pair of end plates 10, two ends of the separation rod 50 are respectively clamped and fixed by the left half plate 11 and the right half plate 12 of the pair of end plates 10, and a gap 14 for clamping the end parts of the separation rod 50 is formed at the joint of the left half plate 11 and the right half plate 12;
a pair of ejector rods 61, 62 are arranged between the pair of side frames 21, 22, and are positioned above the separation rod 50, are perpendicular to the pair of end plates 10, and have two ends detachably connected with the pair of end plates 10 respectively; the pair of ejector pins includes: a left jack 61 detachably connected to the left half plate 11, and a right jack 62 detachably connected to the right half plate 12; the left ejector rod 61 and the right ejector rod 62 are symmetrically arranged.
The pair of side frames may have a conventional structure, for example, the pair of side frames may be respectively composed of at least two toothed bars, and each toothed bar in the same side frame is located on the same vertical plane. In addition, the pair of side frames may be slot boards (the slot boards are not shown).
As shown in FIG. 2, the end plate 10 of the silicon wafer basket of the present invention is composed of a left half plate 11 and a right half plate 12, and the left half plate 11 is hinged with the right half plate 12, so that the silicon wafer basket of the present invention can be turned over into two small frames, namely a left half frame 71 and a right half frame 72, only by releasing the hasp structure 40.
The silicon wafer basket can bear the whole wafer, before the whole wafer 80 is inserted and placed, the left ejector rod 61 and the right ejector rod 62 are dismounted, the hasp structure 40 is released, the left half plate 11 and the right half plate 12 are turned outwards respectively, the separation rod 50 is taken away, the left half plate 11 and the right half plate 12 are closed, the left half plate 11 and the right half plate 12 are fixed together through the hasp structure 40, at the moment, the silicon wafer basket can be inserted and placed with a row of whole wafer 80, the left side edge and the right side edge of the whole wafer 80 (vertical placement) are respectively inserted into the slots of the left side frame 21 and the right side frame 22, and the bottom edge of the whole wafer 80 is supported by the underframe (the left bottom rod 31 and the right bottom rod 32) as shown in fig. 3.
Before inserting and placing the fragments, as shown in fig. 4, firstly, the hasp structure 40 is untied, then the left half plate 11 and the right half plate 12 are respectively turned outwards by 90 degrees, and the separation rod 50 is taken away, at the moment, the silicon wafer basket is turned into two small frames, namely a left half frame 71 and a right half frame 72, and a row of fragments can be inserted and placed in the left half frame 71 and the right half frame 72; left half frame 71: the bottom edge of the segment 81 (vertical) is inserted into the slot of the left side frame 21, and the left and right sides of the segment 81 respectively abut against the left bottom rod 31 and the left top rod 61; right half frame 72: the bottom edge of the segment 82 (upright) is inserted into the slot of the right side frame 22, and the left and right sides of the segment 82 abut against the right bottom bar 32 and the right top bar 62, respectively.
After the two rows of the split plates 81 and 82 are inserted, the left half plate 11 and the right half plate 12 are closed, in the closing process, the separation rod 50 is installed (the separation rod 50 is placed in the notch 14 at the joint of the left half plate 12 and the right half plate 12), after the left half plate 11 and the right half plate 12 are closed, the left half plate 11 and the right half plate 12 are fixed together through the hasp structure 40, at this time, two ends of the separation rod 50 are respectively clamped and fixed by the left half plate 11 and the right half plate 12 of the pair of end plates 10, and the two rows of the split plates 81 and 82 are separated by the separation rod 50, as shown in fig. 5.
In addition, the left bottom rod, the right bottom rod, the left ejector rod and the right ejector rod can all select the toothed bars, and the toothed bars are provided with slots, so that the insertion and the placement of the fragments are facilitated.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that it will be apparent to those skilled in the art that several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the scope of the invention.

Claims (5)

1. The utility model provides a can bear half silicon chip basket of flowers, its inner space is used for inserting and puts the silicon chip vertically, including the main frame body, the main frame body includes side wall and chassis, and the side wall is enclosed by a pair of side bearer that sets up about and a pair of end plate that sets up behind and in the front of, and this pair of end plate is put vertically and is parallel to each other, and this pair of side bearer is equipped with the vertical slot that can supply the silicon chip side to insert respectively, and this pair of side bearer mutually support; the method is characterized in that:
the pair of end plates are formed by splicing a left half plate and a right half plate respectively, the lower right corner of the left half plate is hinged with the lower left corner of the right half plate, and the upper part of the left half plate is connected with the upper part of the right half plate through a hasp structure;
the pair of side frames includes: a left side frame connected with the left half plate and a right side frame connected with the right half plate;
the chassis includes: a left bottom bar connected to the left half plate and a right bottom bar connected to the right half plate; the left bottom rod and the right bottom rod are toothed rods;
a separation rod is further arranged between the pair of side frames, the separation rod is perpendicular to the pair of end plates, two ends of the separation rod are respectively clamped and fixed by a left half plate and a right half plate of the pair of end plates, and a gap for clamping the end parts of the separation rod is formed in the joint of the left half plate and the right half plate;
a pair of ejector rods are arranged between the pair of side frames and are positioned above the separation rods, the pair of ejector rods are perpendicular to the pair of end plates, and two ends of the pair of ejector rods are detachably connected with the pair of end plates respectively; the pair of ejector pins includes: a left ejector rod detachably connected with the left half plate and a right ejector rod detachably connected with the right half plate; the left ejector rod and the right ejector rod are toothed bars.
2. The silicon wafer basket capable of bearing half pieces according to claim 1, wherein the left bottom rod and the right bottom rod are symmetrically arranged.
3. The silicon wafer basket capable of bearing half pieces according to claim 1, wherein the left ejector rod and the right ejector rod are symmetrically arranged.
4. The basket of claim 1 wherein the pair of side frames each comprise at least two toothed bars, each toothed bar in the same side frame being on the same vertical plane.
5. The half-carrying silicon wafer basket of claim 1 wherein the pair of side frames are slotted plates.
CN201910669898.4A 2019-07-24 2019-07-24 Silicon wafer flower basket capable of bearing half piece Active CN110299316B (en)

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CN201910669898.4A CN110299316B (en) 2019-07-24 2019-07-24 Silicon wafer flower basket capable of bearing half piece

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Application Number Priority Date Filing Date Title
CN201910669898.4A CN110299316B (en) 2019-07-24 2019-07-24 Silicon wafer flower basket capable of bearing half piece

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CN110299316B true CN110299316B (en) 2024-03-01

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4091919A (en) * 1976-09-07 1978-05-30 Monsanto Wafer packaging system
US5154873A (en) * 1989-12-11 1992-10-13 Naoetsu Electronics Company Method and apparatus for mounting slice base on wafer of semiconductor
EP0530053A1 (en) * 1991-08-30 1993-03-03 Shin-Etsu Handotai Company Limited A wafer basket for containing semiconductor wafers
US6000550A (en) * 1998-11-04 1999-12-14 Fluoroware, Inc. Wafer carrier box hinge
JP2003318248A (en) * 2002-04-22 2003-11-07 Toshiba Corp Wafer vessel
CN201708141U (en) * 2010-06-22 2011-01-12 北京市塑料研究所 Silicon slice bearing flower basket
CN206541812U (en) * 2017-03-14 2017-10-03 无锡龙奕科技有限公司 A kind of wafer gaily decorated basket
CN206849814U (en) * 2017-05-24 2018-01-05 武汉华工正源光子技术有限公司 A kind of wiper mechanism for peeling off crystal column surface photoresist and the cleaning gaily decorated basket
CN210110728U (en) * 2019-07-24 2020-02-21 常州时创能源科技有限公司 Silicon wafer basket capable of bearing half wafer

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4091919A (en) * 1976-09-07 1978-05-30 Monsanto Wafer packaging system
US5154873A (en) * 1989-12-11 1992-10-13 Naoetsu Electronics Company Method and apparatus for mounting slice base on wafer of semiconductor
EP0530053A1 (en) * 1991-08-30 1993-03-03 Shin-Etsu Handotai Company Limited A wafer basket for containing semiconductor wafers
US6000550A (en) * 1998-11-04 1999-12-14 Fluoroware, Inc. Wafer carrier box hinge
JP2003318248A (en) * 2002-04-22 2003-11-07 Toshiba Corp Wafer vessel
CN201708141U (en) * 2010-06-22 2011-01-12 北京市塑料研究所 Silicon slice bearing flower basket
CN206541812U (en) * 2017-03-14 2017-10-03 无锡龙奕科技有限公司 A kind of wafer gaily decorated basket
CN206849814U (en) * 2017-05-24 2018-01-05 武汉华工正源光子技术有限公司 A kind of wiper mechanism for peeling off crystal column surface photoresist and the cleaning gaily decorated basket
CN210110728U (en) * 2019-07-24 2020-02-21 常州时创能源科技有限公司 Silicon wafer basket capable of bearing half wafer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PVDF太阳能电池硅片花篮的研制;孙卫东;黄萍;王华;朱道峰;刘哲伟;刘秋晨;;塑料(06);第50-54页 *

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Address after: Liyang City, Jiangsu province 213300 Li Cheng Zhen Wu Changzhou city Tandu Road No. 8

Applicant after: Changzhou Shichuang Energy Co.,Ltd.

Address before: Liyang City, Jiangsu province 213300 Li Cheng Zhen Wu Changzhou city Tandu Road No. 8

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