CN210722979U - Vertical bearing type wafer flower basket with adjustable groove width - Google Patents

Abstract

The utility model discloses a vertical bearing type wafer basket with adjustable groove width, which comprises a group of clamping grooves which are arranged in parallel and at equal intervals and are used for vertically bearing wafers, wherein the upper end of each clamping groove is provided with a first opening for taking out and putting in the wafers, and the lower end of each clamping groove is provided with a second opening through which the wafers cannot pass; the flower basket is provided with a movable mechanism which can enable the width of part of the groove bodies of the clamping grooves to synchronously change between a first width and a second width, the first width is the width of the rest groove bodies of the clamping grooves, and the second width is smaller than the first width. The utility model discloses can transfer the draw-in groove width wide when putting the piece and getting the piece, transfer the draw-in groove width narrow with the washing operation time to when not improving and get the piece degree of difficulty, reduce the wafer damage by a wide margin.

Description

Vertical bearing type wafer flower basket with adjustable groove width

Technical Field

The utility model relates to a wafer basket of flowers especially relates to a vertical type wafer basket of flowers that bears.

Background

In modern semiconductor manufacturing technology, wafer cleaning is an essential critical step in the manufacturing process flow, and if the cleanliness and quality of the wafer surface are not satisfactory, no matter how well the other process steps are controlled, it is impossible to obtain high-quality semiconductor devices. The cleaning is to put the wafer into a cleaning basket (called as a sheet for short) and then put the basket into a cleaning solution to remove the surface contamination of the wafer. After the cleaning, the wafer is taken out from the flower basket (referred to as taking the wafer).

The conventional wafer baskets for cleaning can be divided into a vertical carrying type (the wafer is vertically placed) and a horizontal carrying type (the wafer is horizontally placed), and the vertical carrying type baskets are mostly used. The vertical bearing type wafer flower basket generally comprises a group of clamping grooves which are parallel and arranged at equal intervals and used for vertically bearing wafers, a first opening used for taking out and putting in the wafers is arranged at the upper end of each clamping groove, and a second opening through which the wafers cannot pass is arranged at the lower end of each clamping groove. For the vertical bearing type wafer basket, the operation mode of placing and taking the wafer is to clamp the edge of the wafer by using tweezers, and directly place the wafer into the basket and take the wafer out of the basket. Due to the fragile characteristics of the wafer (especially thin wafer), the following defects exist in the way of taking and placing the wafer: because the clamping groove of the standard wafer cleaning basket is usually designed to be narrow, when the wafer is manually taken and placed, the hand is easy to shake, the position is not accurately controlled, and the like, the wafer is easy to collide and extrude with the periphery of the clamping groove, so that the wafer is broken. If increase basket of flowers draw-in groove width when the design, the wafer easily rocks by a wide margin in the draw-in groove in transportation and washing operation process, produces great impact force, can cause the wafer breakage equally.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that it is not enough to overcome prior art, provide a vertical bearing type wafer basket of flowers of groove width adjustable, can transfer the draw-in groove width wide when putting the piece and getting the piece, transfer the draw-in groove width narrow when transportation and washing operation to when not improving and get the piece degree of difficulty, it is damaged to reduce the wafer by a wide margin.

The utility model discloses specifically adopt following technical scheme to solve above-mentioned technical problem:

a vertical bearing type wafer basket with an adjustable groove width comprises a group of clamping grooves which are arranged in parallel at equal intervals and used for vertically bearing wafers, wherein a first opening used for taking out and putting in the wafers is formed in the upper end of each clamping groove, and a second opening through which the wafers cannot pass is formed in the lower end of each clamping groove; the flower basket is provided with a movable mechanism which can enable the width of part of the groove bodies of the clamping grooves to synchronously change between a first width and a second width, the first width is the width of the rest groove bodies of the clamping grooves, and the second width is smaller than the first width.

As one preferred implementation scheme, the flower basket comprises a frame, wherein a group of vertical partition plates are respectively arranged on the inner sides of the left wall and the right wall of the frame, the two groups of vertical partition plates are in mirror symmetry, and the two groups of partition plates divide the space in the frame into clamping grooves; the left wall and the right wall of the frame are respectively provided with a movable part, one part of the movable part can drive a part of the vertical partition plate at the inner side of the movable part to transversely slide in a certain range, the two movable parts form the movable mechanism, and the two end parts of the movable part transversely slide respectively correspond to the first width and the second width of the partial groove body.

Preferably, the two movable members may be respectively fixed at end positions corresponding to the second width of the partial groove body with fastening bolts.

Further, the flower basket also comprises a handle fixed on the frame.

Preferably, the first width and the second width are respectively 9mm and 3 mm.

Compared with the prior art, the utility model discloses technical scheme has following beneficial effect:

the utility model discloses draw-in groove width to the vertical type wafer basket of bearing weight of tradition can not adapt to simultaneously and get the problem of putting piece demand and transportation, washing operation demand, can increase the cell body width when getting the piece like this through setting up a moving mechanism so that the partial cell body width of draw-in groove can change, reduces the cell body width in transportation and cleaning process to when not improving and get the piece degree of difficulty, reduce the wafer damage in the production process by a wide margin.

Drawings

Fig. 1 is a schematic structural diagram of a preferred embodiment of the present invention;

FIG. 2 is a schematic view of the position of the movable member in the pick-and-place sheet state;

fig. 3 is a schematic view showing the position of the movable member in the transport and cleaning operation state.

The reference symbols in the figures have the following meanings:

1. frame, 11, vertical baffle, 12, draw-in groove, 13, movable part, 14, fastening bolt, 2, handle.

Detailed Description

The draw-in groove width to the vertical type wafer basket that bears of tradition can not adapt to simultaneously and get the problem of putting piece demand and transportation, washing operation demand, the utility model discloses a solution thinking is through setting up a moving mechanism so that the partial cell body width of draw-in groove can change, can strengthen the cell body width when getting the piece like this, reduces the cell body width in transportation and cleaning process to when not improving and get the piece degree of difficulty, reduce the wafer damage in the production process by a wide margin.

Particularly, the vertical bearing type wafer flower basket with the adjustable groove width comprises a group of clamping grooves which are arranged in parallel and at equal intervals and are used for vertically bearing wafers, wherein a first opening used for taking out and putting in the wafers is formed in the upper end of each clamping groove, and a second opening through which the wafers cannot pass is formed in the lower end of each clamping groove; the flower basket is provided with a movable mechanism which can enable the width of part of the groove bodies of the clamping grooves to synchronously change between a first width and a second width, the first width is the width of the rest groove bodies of the clamping grooves, and the second width is smaller than the first width.

For the public understanding, the technical solution of the present invention is further explained in detail by a preferred embodiment with reference to the attached drawings:

as shown in fig. 1, the vertical loading type wafer flower basket with adjustable groove width of the embodiment comprises a frame 1 and a handle 2 fixed on the frame 1; the inner sides of the left wall and the right wall of the frame 1 are respectively provided with a group of vertical clapboards 11, the two groups of vertical clapboards 11 are in mirror symmetry, the two groups of vertical clapboards 11 divide the space in the frame 1 into a group of clamping grooves 12 which are arranged in parallel and at equal intervals and are used for vertically bearing wafers, the upper ends of the clamping grooves 12 are provided with first openings for taking out and putting in the wafers, and the lower ends of the clamping grooves 12 are provided with second openings through which the wafers cannot pass; as shown in fig. 1, the left and right walls of the frame 1 respectively have a movable part 13 with a part of vertical partition board capable of driving the inner side of the movable part to slide transversely in a certain range, the two movable parts constitute the movable mechanism, two end positions of the movable part 13 sliding transversely respectively correspond to a first width and a second width of the part of the tank body, the first width is the width of the rest tank body of the clamping groove 12 except the tank body at the inner side of the movable part, and the second width is smaller than the first width; the reference numeral 14 denotes a pair of fastening bolts for fixing the movable member 13 at a position corresponding to a second width of the partial groove.

When the sheet taking and placing operation is performed, as shown in fig. 2, the movable part 13 is slid to the rightmost side shown in the drawing, at this time, the vertical baffle on the inner side of the movable part 13 is flush with the vertical baffles on the rest of the side walls in the same row, that is, the groove body on the inner side of the movable part 13 is identical to the rest of the groove bodies above and below, and the widths of the groove bodies are the first width. First width in this embodiment is set for 9mm, and under such draw-in groove width, it is very light to get the piece, is difficult to produce the collision damage.

After the sheet is taken and placed, as shown in fig. 3, the movable part 13 is slid to the leftmost side shown in the figure and is fixed by the fastening bolt 14, at this time, the vertical baffle on the inner side of the movable part 13 is staggered with the vertical baffle on the rest part on the side wall of the same column, that is, the width of the groove body on the inner side of the movable part 13 is the second width and is smaller than the widths of the groove bodies above and below the second width. The second width in this embodiment is set to 3mm, and under such a narrow width of the slot, the wafer placed therein will not shake to a large extent during the transportation and cleaning operation, thereby effectively reducing the damage caused thereby.

When the flower basket is used for cleaning the wafer, the following operation flows can be referred to:

1. placing the sheet: when the wafers are placed, the movable parts on two sides are placed at positions corresponding to the first width, the clamping grooves in the inner side portions of the movable parts are flush with the clamping grooves in other portions, the width of the whole clamping groove is 9mm, and the wafers are conveyed into the flower basket body until the bottom of the flower basket body through operation of tweezers or suckers.

2. Tightening the groove body: placing the moving parts at two sides at the position corresponding to the second width, and fastening by using fixed bolts (2 6-edge bolts), wherein the width of part of clamping grooves at the inner side of the moving part is 3 mm;

3. cleaning: vertically putting the flower basket into a cleaning solution for cleaning;

4, opening a groove body: loosening the fixing bolts (the fixing device is 2 6-edge bolts) at the two sides of the flower basket, and placing the moving parts at the two sides at the positions corresponding to the width of 9 mm;

5. taking the slices: and taking the wafer out of the flower basket body by using tweezers or a sucker.

Claims (5)

1. A vertical bearing type wafer basket with an adjustable groove width comprises a group of clamping grooves which are arranged in parallel at equal intervals and used for vertically bearing wafers, wherein a first opening used for taking out and putting in the wafers is formed in the upper end of each clamping groove, and a second opening through which the wafers cannot pass is formed in the lower end of each clamping groove; the flower basket is characterized in that the flower basket is provided with a movable mechanism which can enable the width of part of groove bodies of the clamping grooves to synchronously change between a first width and a second width, the first width is the width of the rest groove bodies of the clamping grooves, and the second width is smaller than the first width.

2. The vertically loaded wafer basket of claim 1, wherein the basket comprises a frame, wherein a set of vertical partitions are respectively disposed on the inner sides of the left and right walls of the frame, the two sets of vertical partitions are mirror images of each other, and the two sets of partitions divide the space in the frame into the slots; the left wall and the right wall of the frame are respectively provided with a movable part, one part of the movable part can drive a part of the vertical partition plate at the inner side of the movable part to transversely slide in a certain range, the two movable parts form the movable mechanism, and the two end parts of the movable part transversely slide respectively correspond to the first width and the second width of the partial groove body.

3. A vertically supported wafer flower basket with adjustable channel width as claimed in claim 2, wherein said two movable members are respectively fixed at end positions corresponding to the second width of said partial channel body by fastening bolts.

4. A vertically supported wafer basket as recited in claim 2, further comprising a handle secured to said frame.

5. A vertically supported wafer basket as recited in claim 1, wherein the first and second widths are 9mm and 3mm, respectively.

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