CN209729879U - A kind of transmission silicon wafer water channel line apparatus - Google Patents
A kind of transmission silicon wafer water channel line apparatus Download PDFInfo
- Publication number
- CN209729879U CN209729879U CN201920356884.2U CN201920356884U CN209729879U CN 209729879 U CN209729879 U CN 209729879U CN 201920356884 U CN201920356884 U CN 201920356884U CN 209729879 U CN209729879 U CN 209729879U
- Authority
- CN
- China
- Prior art keywords
- main conveyor
- conveyor line
- return wire
- machine
- silicon wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Specific Conveyance Elements (AREA)
Abstract
The utility model provides a kind of transmission silicon wafer water channel line apparatus, including main conveyor line, return wire, manipulator, circulating filtration water tank, stop stop mechanism and feed mechanism, main conveyor line is set side by side with return wire, main conveyor line is distinguished inserted sheet and is connected to cleaning all-in-one machine and degumming machine, return wire cleans all-in-one machine with inserted sheet respectively and degumming machine is connected to, manipulator and inserted sheet cleaning all-in-one machine are set to the side of main conveyor line, manipulator is matched with inserted sheet cleaning all-in-one machine, feed mechanism and degumming machine are set to the other side of main conveyor line, feed mechanism is matched with degumming machine, the blocking mechanism that stops is respectively arranged on main conveyor line and return wire, circulating filtration water tank is connect with main conveyor line.The utility model has the beneficial effects that having main conveyor line and return wire, the reflux of the conveying of the silicon wafer after realizing degumming and unloaded carrier, high degree of automation saves cost of labor, reduces labor intensity, facilitate process management and control, improve work efficiency.
Description
Technical field
The utility model belongs to silicon wafer production technical field, more particularly, to a kind of transmission silicon wafer water channel line apparatus.
Background technique
After silicon wafer stripping, the prior art is placed into plug-in sheet machine and carries out inserted sheet by the way that silicon wafer is manually packed into carrier, can not
Reach automation purpose, high labor cost, large labor intensity, working efficiency is low.
Summary of the invention
In view of the above problems, problem to be solved in the utility model is to provide a kind of transmission silicon wafer water channel line apparatus, application
It is moved at inserted sheet cleaning all-in-one machine and is used by degumming machine after silicon wafer stripping, after silicon wafer is packed into carrier after realization degumming, warp
It crosses main conveyor line and is transported to inserted sheet cleaning machine, and clean all-in-one machine, empty carrier automatically into inserted sheet by the effect of manipulator
It flows back, high degree of automation reduces labor intensity, reduces cost of labor, improve work efficiency.
In order to solve the above technical problems, the technical solution adopted in the utility model is: a kind of transmission silicon wafer water channel line apparatus,
Including main conveyor line, return wire, manipulator, circulating filtration water tank, stop stop mechanism and feed mechanism, main conveyor line and reflux
Line is set side by side, and main conveyor line is distinguished inserted sheet and is connected to cleaning all-in-one machine and degumming machine, and return wire cleans one with inserted sheet respectively
Machine is connected to degumming machine, and manipulator and inserted sheet clean the side that all-in-one machine is set to main conveyor line, manipulator and inserted sheet cleaning one
Body machine matches, and feed mechanism is set to the other side of main conveyor line with degumming machine, and feed mechanism is matched with degumming machine, stops
The mechanism that stops is respectively arranged on main conveyor line and return wire, and circulating filtration water tank is connect with main conveyor line.
Further, main conveyor line includes the first side plate, the second side plate and transmission line, and the first side plate and the second side plate are distinguished
Set on the two sides of transmission line, the first side plate and/or the second side plate are equipped with inlet opening, and inlet opening and circulating filtration water outlet of water tank connect
It connects, the first side plate and/or the second side plate are equipped with apopore, and apopore is connect with circulating filtration water tank inlet.
Further, return wire includes return wire driving device and return wire conveyer belt, return wire conveyer belt and return wire
Driving device connection.
Further, manipulator include mounting bracket, manipulator controller, horizontal mobile device, longitudinal extension device,
Transversal stretching device and clamping device, horizontal mobile device, longitudinal extension device and transversal stretching device are manual with machinery respectively
Device electrical connection processed, longitudinal extension device are set on horizontal mobile device, and transversal stretching device is connect with longitudinal extension device, folder
It holds device to connect with transversal stretching device, horizontal mobile device is set in mounting bracket, and manipulator controller is defeated with master respectively
Line sending and return wire electrical connection.
Further, the mechanism that stops to stop includes that the blocking of multiple main conveyor lines stops structure and the blocking of multiple return wires is stopped
Structure, multiple main conveyor lines blocking structure of stopping are set on main conveyor line, and multiple return wires blockings structure of stopping is set to back
On streamline.
Further, main conveyor line blocking structure of stopping includes main support, first switch, second switch, third switch, the
Four switches, the first blocking, the second blocking and third stop, and first stops, second stops and third stops to be sequentially arranged in main support
On, first switch and second switch are set on main support, and first switch and second switch are set to first and stop and the second blocking
Between, third switch is set on main support with the 4th switch, and third switch, which is set to second with the 4th switch, to be stopped to stop it with third
Between.
Further, return wire stops to stop structure including stopping and switching, and stops and switchs to be set on return wire, hinder
Gear includes telescopic device and countercheck rod, and telescopic device is connect with countercheck rod, and telescopic device is connect with return wire.
Further, feed mechanism includes material loading platform, feeding control device and carrier identification device, feeding control device
It is connect with material loading platform with carrier identification device, carrier identification device is electrically connected with feeding control device.
Further, transmission silicon wafer water channel line apparatus further includes pusher, and pusher is set on main conveyor line, pusher
Mechanism includes pusher telescopic device, pusher connecting plate and scraping wings, and pusher telescopic device is connect with main conveyor line, pusher connecting plate
One end connect with pusher telescopic device, scraping wings is connect with the other end of pusher connecting plate.
Further, transmission silicon wafer water channel line apparatus further includes control device, control device respectively with main conveyor line, reflux
Line, manipulator, blocking are stopped mechanism, feed mechanism and the electrical connection of circulating filtration water tank.
The utility model has the advantages and positive effects of:
1. due to the adoption of the above technical scheme, being easily installed and tearing open so that the transmission silicon wafer channel line apparatus structure is simple
It unloads, there is main conveyor line and return wire, and main conveyor line and return wire penetrate through multiple degumming machines and inserted sheet cleans all-in-one machine, degumming
After silicon wafer afterwards is packed into carrier, inserted sheet cleaning all-in-one machine, the carrier that manipulator will be fully loaded with are transported under the action of main conveyor line
It being put into inserted sheet cleaning machine, silicon wafer is cleaned, meanwhile, empty carrier is back at degumming machine again under the action of return wire
It uses, high degree of automation, saves cost of labor, reduce labor intensity, facilitate process management and control, improve work efficiency；
2. the carrier being fully loaded on main conveyor line is put into inserted sheet cleaning machine by the setting of manipulator, meanwhile, inserted sheet is cleaned
Empty carrier in all-in-one machine takes out, and is put on return wire, improves the degree of automation of the channel line, and it is strong to reduce labour
Degree；
Stop the mechanism that stops 3. having, the fully loaded carrier on main conveyor line is carried out stopping to stop, is convenient for manipulator pair
Fully loaded carrier is clamped, and is improved the degree of automation of the channel line, is reduced labor intensity, improves work efficiency；
4. having circulating filtration water tank, circulating filtration precipitating can be carried out to the water on main conveyor line, so that main conveyor line
On water be able to carry out circulation, keep the water cleaning on main conveyor line, the silicon wafer bonding die in fully loaded carrier prevented, conducive to silicon wafer
Transmission.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of an embodiment of the utility model；
Fig. 2 is the structural schematic diagram of the pusher of an embodiment of the utility model；
Fig. 3 is the feed mechanism structural schematic diagram of an embodiment of the utility model；
Fig. 4 is the circulating filtration cisten mechanism schematic diagram of an embodiment of the utility model；
Fig. 5 is the structural schematic diagram of the manipulator of an embodiment of the utility model；
Fig. 6 is that the blocking of an embodiment of the utility model is stopped the structural schematic diagram of mechanism；
Fig. 7 is the structural schematic diagram of the main conveyor line of an embodiment of the utility model.
In figure:
1, main conveyor line 2, return wire 3, stop to stop mechanism
4, manipulator 5, circulating filtration water tank 6, feed mechanism
7, pusher 8, carrier 31, first stop
32, second stops 33, third to stop 34, first switch
35, second switch 36, third switch the 37, the 4th switch
41, horizontal mobile device 42, longitudinal extension device 43, transversal stretching device
44, clamping device 51, Water circulation hydrodynamics device 52, water tank
53, water inlet 54, water outlet 55, filter screen
56, small groove body 61, carrier identification device 62, feeding platform
71, pusher telescopic device 72, pusher connecting plate 73, pusher baffle
10, the first side plate 11, transmission line 12, the second side plate
13, inserted sheet cleans all-in-one machine 14, degumming machine
Specific embodiment
The utility model is further described in the following with reference to the drawings and specific embodiments.
Fig. 1 shows the structure of an embodiment of the present invention, and the structure and connection relationship of the present embodiment has been shown in particular,
The present embodiment is related to a kind of transmission silicon wafer water channel line apparatus, for silicon wafer after 14 degumming of degumming machine, by the transmission silicon wafer water
The transmission of road line apparatus, the silicon wafer (fully loaded carrier) for being loaded into carrier are sent into silicon wafer inserted sheet cleaning all-in-one machine 13, while will be empty
Carrier (unloaded carrier) be back at degumming machine 14, carry out secondary use, the setting of the transmission silicon wafer water channel line apparatus, shorten
Silicon wafer is come out the time entered in inserted sheet cleaning all-in-one machine 13 by degumming machine 14, and has main conveyor line and return wire, can
The conveying of fully loaded carrier and the reflux of unloaded tool are carried out, high degree of automation reduces labor intensity, improves working efficiency, reduces
Cost of labor, while convenient for control.
As shown in Figure 1, above-mentioned transmission silicon wafer water channel line apparatus, including main conveyor line 1, return wire 2, manipulator 4, circulation
Water tank with strainer 5 stops stop mechanism 3, feed mechanism 6 and control device, and main conveyor line 1 is for conveying the warp being loaded in carrier
This is fully loaded with carrier and is sent in inserted sheet cleaning all-in-one machine 13 by the silicon wafer after crossing 14 degumming of degumming machine, i.e., fully loaded carrier, return wire
2, for the unloaded tool come out out of inserted sheet cleaning all-in-one machine 13 that flows back, zero load tool reflux are sent at degumming machine 14, is carried out
Secondary use, the main conveyor line 1 are set side by side with return wire 2, and main conveyor line 1 connects with inserted sheet cleaning all-in-one machine 13 and degumming machine 14
Logical, return wire 2 cleans all-in-one machine 13 with inserted sheet and degumming machine 14 is connected to, convenient for being fully loaded with the transmission of carrier and the reflux of unloaded tool；
Manipulator 4 and feed mechanism 6 are installed in the side of return wire 2, and manipulator 4 is matched with inserted sheet cleaning all-in-one machine 13, feeding
Mechanism 6 is matched with degumming machine 14, and manipulator 4 is used to the fully loaded carrier clamping on main conveyor line 1 being put into inserted sheet cleaning one
In machine 13, meanwhile, manipulator 4 is used to the unloaded tool flowed out from inserted sheet cleaning all-in-one machine 13 being put into return wire 2；Stop to cut
Stop mechanism 3 is separately mounted on main conveyor line 1 and return wire 2, and blocking stops mechanism 3 for the fully loaded load on main conveyor line 1
Tool carry out stop stop, prevent on main conveyor line 1 be fully loaded with carrier it is excessive, cause 1 congestion of main conveyor line, cause silicon wafer to damage, together
When, it prevents 2 overhead carrier of return wire excessive, causes 2 congestion of return wire, cause 2 job failure of return wire；Circulating filtration water tank 5
It is connect with main conveyor line 1, circulating filtration water tank 5 is used to provide water for main conveyor line 1, enables fully loaded carrier in main conveyor line
When transmitting on 1, water is full of on main conveyor line 1, so that fully loaded carrier is constantly located in water, to prevent silicon wafer viscous during transportation
Piece, circulating filtration water tank 5 carry out watering cycle to main conveyor line 1, while the water on main conveyor line 1 being made constantly to keep cleaning shape
State carries out circulating filtration, precipitating and cleaning to the water on main conveyor line 1；Control device respectively with main conveyor line 1, return wire 2,
Manipulator 4, circulating filtration water tank 5 stop stop mechanism 3 and the electrical connection of feed mechanism 6, control main conveyor line 1, return wire 2, machine
Tool hand 4, circulating filtration water tank 5 stop stop mechanism 3 and the movement of feed mechanism 6, so that entirely transmission silicon wafer water channel line apparatus is real
Existing automation control, reduces labor intensity, improves working efficiency.
Specifically, as shown in fig. 7, above-mentioned main conveyor line 1 includes the first side plate 10, the second side plate 12 and transmission line 11,
Transmission line 11 is installed on the ground by bracket, and the first side plate 10 and the second side plate 12 are separately mounted to the two sides of transmission line 11,
The setting of bracket, convenient for the installation of transmission line 11, and the height of bracket and inserted sheet clean the height phase of the feed end of all-in-one machine 13
Unanimously, fully loaded carrier is transported at inserted sheet cleaning all-in-one machine 13 convenient for main conveyor line 1, transmission line 11 is the V belt translation of strip
Structure, including conveyer belt and power drive unit with certain length, the length of the conveyer belt cleans all-in-one machine according to inserted sheet
The sum of 13 quantity and the quantity of degumming machine 14 select, and conveyer belt cleans all-in-one machine through multiple degumming machines 14 and multiple inserted sheets
13, multiple degumming machines 14 are connected to multiple inserted sheets cleaning all-in-one machine 13, convenient for being fully loaded with the transport of carrier, conveyer belt and power are driven
Dynamic device connection, conveyer belt is rack-mount, provides power by driving device for conveyer belt, driving conveying belt movement is real
It is now fully loaded with the conveying of carrier, here, it is preferred that, conveyer belt is carrier bar net belt, the width of the carrier bar net belt and the width of carrier 8
Degree is adapted, and convenient for the conveying to carrier 8, so that carrier 8 will not block on the conveyor belt, power drive unit is motor, motor
It is connect with carrier bar net belt, carrier bar net belt cycle rotation is driven by the rotation of motor, realize fully loaded carrier transport, here,
Carrier bar net belt and motor are commercial product, are selected according to actual needs, do not do specific requirement here.
First side plate 10 and the second side plate 12 are separately mounted to the two sides of conveyer belt, and in the first side plate 11 and the second side plate
12 bottom end is equipped with bottom plate, and the first side plate 11 and the second side plate 12 are above conveyer belt, so that the first side plate 11, bottom plate and
Two side plates 12 constitute a groove body, and conveyer belt is located in groove body, and bracket is mounted on inside groove body, and pass through bottom plate and fix with ground
Connection, is supported conveyer belt, and 11 He of inlet opening or the first side plate is equipped on the first side plate 11 or the second side plate 12
Inlet opening is equipped on second side plate 12, inlet opening is connect by pipeline with circulating filtration water tank 5, and circulating filtration water tank 5 passes through
Inlet opening in the groove body to supplying water；Apopore is equipped on the first side plate 11 or the second side plate 12, or in the first side plate
11 and second are equipped with apopore on side plate 12, and apopore is connect by pipeline with circulating filtration water tank 5, on main conveyor line 1
Water is entered in circulating filtration water tank 5 by apopore and pipeline, and circulating filtration water tank 5 is filtered the water, precipitates；By going out
The setting in water hole and inlet opening is realized and carries out recycling replacing to the intracorporal water of slot, and the intracorporal water of slot is higher than conveyer belt 11, so that
Fully loaded carrier positioned at conveyer belt 11 is constantly in water, the silicon wafer bonding die after preventing degumming.The quantity of inlet opening and apopore
It to be multiple, is selected according to actual needs, and in the present embodiment, it is preferred that inlet opening is located on the first side plate 10, water outlet
Hole is located on second side plate 12, convenient for flowing into and out for water.
Above-mentioned return wire 2 is mounted on the side of main conveyor line 1, and return wire 2 and main conveyor line 1 are set side by side installation, make
The conveying of carrier and the reflux of unloaded carrier must be fully loaded with while being carried out.The return wire 2 includes reflux line bracket, return wire driving dress
It sets and is connect with return wire conveyer belt, return wire conveyer belt with return wire driving device, return wire conveyer belt is mounted on return wire branch
On frame, so that return wire conveyer belt is moved under the drive of return wire driving device.The length of the return wire 2 and main conveying
The length of line 1 is consistent, and multiple inserted sheets are cleaned all-in-one machine 13 and multiple degumming machines 14 penetrate through, and carries out cleaning all-in-one machine from inserted sheet
The reflux of the unloaded carrier come out in 13, unloaded carrier is transported to degumming machine 14, is reused.Here, it is preferred that,
Return wire driving device is motor, and return wire conveyer belt is carrier bar net belt, is driven by a motor the movement of carrier bar net belt, is realized empty
The reflux of carrier is carried, motor and carrier bar net belt are commercial product, are selected according to actual needs.
The main conveyor line 1 and return wire 2 are set side by side, and can be linear type setting, are also possible to U-shaped setting, either
Other set-up modes, are selected according to actual needs, it is preferred that here, main conveyor line 1 and the U-shaped setting of return wire 2 are more
A inserted sheet cleaning all-in-one machine 13 is uniformly arranged on the same side of main conveyor line 1 and return wire 2, and multiple degumming machines 14 are uniformly arranged on
It is saved so that multiple inserted sheets cleaning all-in-one machine 13 is oppositely arranged with multiple degumming machines 14 other side of main conveyor line 1 and return wire 2
The transmission silicon wafer water channel line apparatus the space occupied is saved, labour cost is reduced, improves working efficiency.Inserted sheet cleans all-in-one machine 13
Quantity is selected according to actual production demand, and the quantity of degumming machine 14 is selected according to actual production demand.
The quantity of above-mentioned manipulator 4 is multiple, each manipulator consistent with the inserted sheet cleaning quantity of all-in-one machine 13
It is matched with an inserted sheet cleaning all-in-one machine 13, it, will be fully loaded on main conveyor line 1 positioned at the feed end of inserted sheet cleaning all-in-one machine 13
Carrier, which is taken, to be placed into inserted sheet cleaning all-in-one machine 13, and the unloaded carrier come out from inserted sheet cleaning all-in-one machine 13 is taken placement
On return wire, realizes the automation of inserted sheet cleaning all-in-one machine 13 feeding and blanking, reduces cost of labor, reduce labor intensity,
Improve working efficiency.
As shown in figure 5, above-mentioned manipulator 4 includes mounting bracket, manipulator controller, horizontal mobile device 41, indulges
To telescopic device 42, transversal stretching device 43 and clamping device 44, the setting of the mounting bracket, convenient for manipulator controller and
The installation of horizontal mobile device 41, horizontal mobile device 41, longitudinal extension device 42 and transversal stretching device 43 respectively with machinery
Hand control device electrical connection, by manipulator controller control horizontal mobile device 41, longitudinal extension device 42 and transversal stretching
The movement of device 43, meanwhile, manipulator controller is electrically connected with the motor of the power drive unit of main conveyor line 1, manipulator
Control device is electrically connected with the motor of return wire power drive unit, controls main conveyor line 1 respectively by manipulator controller
The movement of power drive unit and return wire power drive unit, so that movement and the return wire of the conveyer belt 11 of main conveyor line 1
The movement of conveyer belt is matched with the holding action of manipulator 4, so that the travelling speed of the conveyer belt 11 of main conveyor line 1, reflux
The travelling speed of line conveyer belt is matched with the holding action frequency of the clamping device 44 of manipulator 4, is realized to fully loaded carrier
Clamping and the clamping of unloaded carrier not will cause on main conveyor line 1 with carrier excessive on return wire 2 and block.
The manipulator 4 further includes branch line water tank, which connect with mounting bracket, and branch line water tank is located at manipulator
It 4 front end, will after clamping fully loaded carrier from main conveyor line 1 for manipulator 4 between manipulator 4 and main conveyor line 1
Fully loaded carrier is placed in branch line water tank, and the fully loaded carrier placed before clamping out of branch line water tank is placed in inserted sheet cleaning one
In body machine 13, branch line water tank is used to be fully loaded with the temporary storage of carrier, it then follows first puts the principle first gone out, multiple fully loaded carriers are placed on
In branch line water tank, the fully loaded carrier on main conveyor line 1 is placed on multiple fully loaded carriers in branch line water tank by clamp device 44 again
Back, and the clamping of the fully loaded carrier of the front end in branch line water tank is placed in inserted sheet cleaning all-in-one machine 13 simultaneously.
Above-mentioned horizontal mobile device 41 is mounted in mounting bracket, and longitudinal extension device 42 is mounted on horizontal mobile device
On 41, so that longitudinal extension device 42 moves freely on horizontal mobile device 41, transversal stretching device 43 and longitudinal extension are filled
Set 42 connections so that transversal stretching device 43 moves up and down under the drive of longitudinal extension device 42, clamping device 44 with
Transversal stretching device 43 connects, so that clamping device 44 is realized clamping and unclamped under the drive of transversal stretching device 43, passes through
Horizontal mobile device 41, longitudinal extension device 42 and transversal stretching device 43 match, before realizing clamping device 44 horizontally
It is mobile afterwards to be moved up and down with longitudinal, inserted sheet cleaning all-in-one machine 13 is put into convenient for fully loaded carrier is taken from main conveyor line 1
It is interior, while inserted sheet is cleaned into unloaded carrier in all-in-one machine 13 and is put on return wire 2.Specifically, above-mentioned horizontal mobile device 41
For Pneumatic guide rail, multiple limit switches are installed on Pneumatic guide rail, are placed in inserted sheet cleaning all-in-one machine 13 according to manipulator 4
Fully loaded carrier is placed empty with the position for taking the position of unloaded carrier, clamping fully loaded carrier on main conveyor line 1, on return wire 2
Carry the position of carrier, the position placing in branch line water tank the position of fully loaded carrier and clamp fully loaded carrier in branch line water tank into
Row installation, and it is corresponding with above-mentioned position, it is convenient for manipulator precision maneuver, realizes the placement of fully loaded carrier and the folder of unloaded carrier
It takes, longitudinal extension device 42 is cylinder, and transversal stretching device 43 is cylinder, the sliding block company of longitudinal extension device 42 and Pneumatic guide rail
It connects, longitudinal extension device 42 is moved freely on pneumatic tube, transversal stretching device 43 is mounted on longitudinal extension dress
On the telescopic rod for setting 42 cylinder, longitudinal extension device 42 is vertically arranged, so that transversal stretching device 43 is able to carry out fortune up and down
Dynamic, clamping device 44 is mounted on the flexible rod end of the cylinder of transversal stretching device 43, realizes the clamping and release of clamping device 44,
The transversal stretching device 43 includes the first transversal stretching device and the second transversal stretching device, the first transversal stretching device and second
The end of the telescopic rod of the opposite cylinder for being mounted on longitudinal extension device 42 of transversal stretching device, and the first transversal stretching device with
Second transversal stretching device is cylinder, and clamping device 44 includes the first grip block and the second grip block, the first grip block and the
The telescopic rod end of the cylinder of one transversal stretching device connects, and the cylinder of the second grip block and the second transversal stretching device stretches
The end of bar connects, and by the stretching and retraction of the first transversal stretching device and the telescopic rod of the second transversal stretching device, realizes
First grip block and the close of the second grip block with leave, realize the clamping of clamping device and leave.Here, the first grip block with
The structure of second grip block is identical, is illustrated by taking the first grip block as an example.First grip block is L-type structure, including is pressed from both sides vertically
Plate and horizontal grip block are held, vertical grip block is vertically arranged with horizontal grip block, and vertical grip block is far from horizontal grip block
One end is connect with the first transversal stretching device, realizes that the first grip block moves forward and backward in the horizontal direction, the width of horizontal grip block
Degree is consistent with the width of holding holes on carrier 8, convenient for the clamping to carrier 8.
The Pneumatic guide rail of above-mentioned horizontal mobile device 41, the cylinder of longitudinal extension device 42, the first transversal stretching device
Cylinder and the cylinder of the second transversal stretching device pass through pipeline and connect with air pump, and be equipped in each connecting pipe
Solenoid valve, multiple solenoid valves are electrically connected with manipulator controller, meanwhile, limit switch and machine on horizontal mobile device 41
Tool hand control device is electrically connected, and is preset with the program editted in the manipulator controller, manipulator controller is according to volume
Process control horizontal mobile device 41, longitudinal extension device 42, the first transversal stretching device and the second transversal stretching dress collected
Movement is set, while controlling the driving device and the movement of return wire driving device of main conveyor line 1, realizes and is clamped from main conveyor line 1
Fully loaded carrier is put into inserted sheet cleaning all-in-one machine 13, while the unloaded carrier that inserted sheet cleans in all-in-one machine 13 is put into return wire 2
On, realize that silicon wafer is entered in inserted sheet cleaning all-in-one machine 13 by degumming machine 14, while the reflux of carrier 8 reuses, and realizes this process
Automation improves working efficiency, reduces labor intensity, saves cost of labor.
In addition, above-mentioned manipulator controller is electrically connected with control device, the information of manipulator 4 is sent to control dress
It sets, the movement of multiple manipulators 4 is controlled convenient for control device.The manipulator controller is preferably PLC controller, is
Commercial product is selected according to actual needs.
The manipulator 4 further includes display screen and warning lamp, and manipulator controller is electrically connected with display screen and warning lamp respectively
It connects, display screen is used to show that the facility information of manipulator 4, warning lamp to be used to show the working condition of manipulator, is convenient for operator
Constantly grasp the working condition of manipulator 4.
The above-mentioned blocking mechanism 3 that stops includes that the blocking of multiple main conveyor lines stops structure and the blocking of multiple return wires is stopped knot
Structure, multiple main conveyor lines blocking structure of stopping are installed on main conveyor line 1, and multiple return wires blockings structure of stopping is installed in
On return wire 2, and main conveyor line stop stop structure quantity and inserted sheet cleaning all-in-one machine 13 quantity be adapted, each insert
The position of the piece cleaning corresponding main conveyor line 1 of all-in-one machine 13 is equipped with the blocking of main conveyor line and stops structure, to moving to this
Fully loaded carrier at inserted sheet cleaning all-in-one machine 13 carries out stopping to stop, and manipulator 4 acts, and clamps to fully loaded carrier；Reflux
Line stop to stop structure quantity it is consistent with the quantity of degumming machine 14, and the position of each corresponding return wire 2 of degumming machine 14
It sets and the blocking of return wire is installed stops structure, the unloaded carrier that operator will move to this is put into degumming machine 14.
It is exactly that each main conveyor line stops to stop, and to clean the position of all-in-one machine 13 opposite for installation site and each inserted sheet of structure
Answer, each return wire stop to stop structure installation site it is corresponding with the position of each degumming machine 14, convenient for fully loaded load
Tool enters inserted sheet and cleans all-in-one machine 13, and sky enters degumming machine 14 in carrier.
As shown in fig. 6, above-mentioned main conveyor line blocking is stopped structure include main support, first switch 34, second switch 35,
Third switch 36, the 4th switch 37, first stop 31, second to stop 32 and third blocking 33, and first stops 31, second to stop 32
33 are stopped to be sequentially arranged on main support with third, main support is mounted on the first side plate 10 or the second side plate 12 of main conveyor line 1
On, first switch 34 and second switch 35 are mounted on main support, and first switch 34 and second switch 35 are located at first and stop
31 and second stop between 32, and third switch 36 and the 4th switch 37 are mounted on main support, and third switch 36 is opened with the 4th
Close 37 be located at second stop 32 and third stop between 33, it is, first stops 31, first switch 34, second switch 35, the
Two stop 32, third switch 36, the 4th switch 37 and third to stop 33 to be sequentially arranged on main support.Here, first stop 31,
Second stops 32 to stop 33 structures identical with third, carries out structure explanation so that first stops 31 as an example.This first stop 31 include
First support, the first telescopic device, the first swing rod, first rotating shaft and first baffle, the first telescopic device are mounted on first support
On, first support is mounted on main support, and first support includes mounting base, first support arm and second support arm, and mounting base is in L
Type structure is mounted on main support by fixing pieces such as bolts, is located at the first side plate 10 or the of main conveyor line 1 in mounting base
It is vertically installed with first support arm and second support arm on the inner wall of two side plates 12, first support arm is arranged in parallel with second support arm,
And first support arm is located along the same line with second support arm, is equipped with through-hole in the free end of first support arm and second support arm, the
One shaft is connect by two through-holes with first support, and first rotating shaft can be freely rotated, one end of first rotating shaft and first
One end of swing rod connects, and the other end of first rotating shaft is fixedly connected with first baffle, and the other end of the first swing rod and first stretches
Device connection drives the first swing rod to swing by the expanding-contracting action of the first telescopic device, is swung by the first swing rod and drives first
Shaft rotation, and then first baffle is driven to swing, realize the blocking to fully loaded carrier.Here, the first telescopic device is cylinder, In
The end of the telescopic rod of cylinder is equipped with the first swing rod, and when the telescopic rod of cylinder stretches out, the first swing rod is towards the first side plate 10
Or second side plate 12 inner wall swing, drive first rotating shaft rotate counterclockwise so that first baffle is towards the first side plate 10
Or second side plate 12 inner wall swing, middle position of the first baffle far from main conveyor line 1 does not at this time stop fully loaded carrier；
When the telescopic rod of the cylinder of the first telescopic device retracts, the first swing rod is swung to the middle position of main conveyor line 1, drives first turn
Axis rotates clockwise, and drives first baffle to swing to 1 middle position of main conveyor line, stops to fully loaded carrier.
Second blocking 32 and third stop 33 structure and first to stop 31 structure all the same, and which is not described herein again.The
One stops 31 telescopic device, second to stop 32 telescopic device and third that 33 telescopic device is stopped to pass through pipeline and air pump
Connection, and solenoid valve is respectively provided in connecting pipe, control first stops 31 telescopic device, the telescopic device of the second blocking 32
Stop the movement of 33 telescopic device with third, and these solenoid valves are electrically connected with control device respectively, first switch 34, second
Switch 35, third switch 36 and the 4th switch 37 are electrically connected with control device respectively, and the journey editted is preset in control device
Sequence, the signal that first switch 34, second switch 35, third switch 36 and the 4th switch 37 will test respectively pass to control dress
It sets, control device analyzes the signal of first switch 34, second switch 35, third switch 36 and the 4th switch 37, in turn
Control first stops 31, second to stop 32 and 33 movement of third blocking, stops to fully loaded carrier.First switch 34 is for controlling
System first stops 31 to stretch out use, and second switch 35 is used for detection in place, while being matched with first switch 34 and third switch 36
Closing control second stops 32 to stretch out use, and the stretching that third switch 36 is used to control the second blocking 32 is used, and the 4th switch 37 is for arriving
Position detection, control third stop 33 stretching to be used.The specific course of work are as follows: the 4th switch 37 detects fully loaded carrier in place,
Control device will be passed to by signal in place, control device analyzes the signal, and control third stops 33 movements, to fully loaded load
Tool is stopped, and third switch 36 detects the fully loaded carrier, after next fully loaded carrier arrives, when second switch 32 is examined
After measuring the fully loaded carrier in place, signal is passed into control device, control device analyzes the signal and second of third switch 36
The signal of switch 35, control second stop 32 to stretch out, are fully loaded with carrier to this and stop；First switch 34 detects that this is full simultaneously
Carrier is carried, signal is passed to control device by first switch 34, and control device analyzes the signal, and control first stops 31
It stretches out, subsequent fully loaded carrier is stopped.Here, first switch 34, second switch 35, third switch 36 and the 4th switch
37 be position sensor, is commercial product, is selected according to actual needs, and first stops 31 telescopic device, the second resistance
The telescopic device of telescopic device and the third blocking 33 of gear 32 is cylinder, is commercial product, is selected according to actual needs
It selects.
Above-mentioned return wire blocking stops structure 3 including stopping and switching, and blocking is mounted on return wire 2 by bracket,
Switch is mounted on return wire 2, and return wire blocking is stopped, and structure is corresponding with the position of degumming machine 14, and blocking includes telescopic device
And countercheck rod, telescopic device are connect with countercheck rod, telescopic device is rack-mount, the telescopic device be cylinder, countercheck rod with
The telescopic rod of cylinder connects, and stretches, stops in the presence of cylinder to unloaded carrier, and cylinder passes through pipeline and air pump
Connection, and solenoid valve is installed on pipeline, which is electrically connected with control device, and control device passes through solenoid valve control electricity
The movement of magnet valve, and then control the cylinder movement of telescopic device.Switch is electrically connected with control device, and signal is passed to control by switch
Device processed, control device analyze the signal, and then control blocking movement, stop to unloaded carrier.When switch is examined
After measuring unloaded carrier, signal is passed into control device, control device analyzes the signal, control blocking movement, right
Unloaded carrier is stopped, and above-mentioned switch is optoelectronic switch, is commercial product, is selected according to actual needs.
Above-mentioned control device is preferably PLC controller, is commercial product, is selected according to actual needs.
As shown in figure 3, feed mechanism 6 includes material loading platform 62, feeding control device and carrier identification device 61, feeding control
Device processed is mounted in control cabinet, and control cabinet is connect with material loading platform 62, carrier identification device 61 and feeding control device electricity
Connection, and carrier identification device 61 is located at the top of material loading platform 62, carrier identification device 61 is electrically connected with feeding control device,
Feeding control device is electrically connected with control device, the label on carrier 8 for identification of carrier identification device 61, carrier identification device
62 preferably RFID reader, RFID readers are scanned the RFID label tag on carrier, FRID label information are passed to
Feeding control device is preset with the program editted in feeding control device, and feeding control device is carried out according to preset program,
By by the transmission of the information such as the number of time and degumming machine 14, by RFID reader, which is written the RFID and marked by RFID reader
In label, and the signal that the label of information is written is passed into control device, it is subsequent to the carrier for having the label convenient for control device
It is monitored.Here, it is preset with the program editted in feeding control device, worked according to process control all parts, the control
Device processed is preferably PLC controller, is commercial product, is selected according to actual needs.
The transmission silicon wafer water channel line apparatus further includes pusher 7, as shown in Fig. 2, pusher 7 is mounted on main conveyor line
On 1, it is predominantly located at the place that fully loaded carrier is easy blocking Caton, is selected according to actual needs, pusher 7 is used for master
Fully loaded carrier on pipeline 1 applies thrust, reduces fully loaded carrier and results in blockage on main conveyor line 1.The pusher 7 includes
Pusher telescopic device 71, pusher connecting plate 72 and scraping wings 73, pusher telescopic device 71 are mounted on main conveying by mounting bracket
Line 1 it is upper, one end of pusher connecting plate 72 is connect with pusher telescopic device 71, the other end of scraping wings 73 and pusher connecting plate 72
Connection, here, pusher telescopic device 71 include the first pusher telescopic device and the second pusher telescopic device, the flexible dress of the first pusher
It sets and is installed in parallel on bracket with the second pusher telescopic device, and the first pusher telescopic device and the second pusher telescopic device are
Cylinder is commercial product, is selected according to actual needs.It is stretched respectively with the first pusher at the left and right sides end of pusher connecting plate 72
The end of the telescopic rod of the cylinder of compression apparatus is connected with the end of the telescopic rod of the cylinder of the second pusher telescopic device, so that pusher
Connecting plate 72 is moved forward and backward under the action of the first pusher telescopic device and the second pusher telescopic device, and scraping wings 73 is logical
It crosses connecting rod to connect with pusher connecting plate 72, by the movement for moving forward and backward drive scraping wings 73 of pusher connecting plate 72, realize
Scraping wings 73 applies thrust to fully loaded carrier, so that fully loaded carrier runs smoothly on main conveyor line 1.Above-mentioned pusher connecting plate
72 be plate structure, has multiple through-holes, resistance of the water to pusher connecting plate 72 on reduction main conveyor line 1.
Above-mentioned circulating filtration water tank 5 is connect with main conveyor line 1, provides water for main conveyor line 1, while main conveyor line 1
Water flows into circulating filtration water tank 5, circulating filtration, precipitating, cleaning is carried out to the water in the inflow water tank, so that main conveyor line 1
On water energy be enough recycled, improve the utilization rate of water.As shown in figure 4, the circulating filtration water tank 5 includes that water tank 52 and water recycle
The water inlet 53 of power device 51, water tank 52 is connect with the apopore of main conveyor line 1 by pipeline, and the water outlet 54 of water tank 52 is logical
Piping is connect with the inlet opening of main conveyor line 1, and the water inlet 53 and water outlet 54 of water tank 52 are set to one end of water tank 52, water
Cycle power device 51 is connect with water tank 52, and set on the other end of water tank 52, Water circulation hydrodynamics device 51 is water pump, water tank here
52 be trough body structure, has multiple partitions inside water tank 52, and multiple partitions will be separated into multiple small groove bodies 56 inside water tank 52, and
Filter screen 55 is installed in each small groove body 56, the water entered from the water inlet 53 of water tank 52 enters first small groove body 56
It is interior, it is small into second after the filter screen 55 in first small groove body 56 filters after the water of first small groove body 56 is full
Groove body 56 after second small groove body, 56 water is full, into after crossing the filtering of filter screen 55, into the small groove body 56 of third, successively carries out, will
Water is full of in each small groove body 56 in water tank 52, meanwhile, water in water tank 52 is flowed out from the water outlet 54 of water tank, into master
In pipeline 1, supply water for main conveyor line 1.The Water circulation hydrodynamics device 51 is electrically connected with control device, controls water by control device
Cycle power device 51 acts, and control device is according to the signal of the driving device of main conveyor line 1, the signal for the mechanism 3 that stops to stop
It is analyzed with the signal of manipulator 4, control Water circulation hydrodynamics device 51 acts, so that Water circulation hydrodynamics device 51 and main conveying
The movement of line 1 matches.
The course of work of the present embodiment: unloaded carrier is placed on the material loading platform 62 of feed mechanism 6, carrier identification dress
The RFID label tag for setting 61 pairs of zero load carriers identifies that feeding control device writes the information such as the number of degumming machine 14 and time
Enter in the RFID label tag, and sends the information of the zero load carrier to control device after information write-in and be put into the zero load carrier
In corresponding degumming machine 14, in the carrier that the silicon wafer after 14 degumming of degumming machine is packed into the sky, unloaded carrier fills silicon wafer
Afterwards, this is fully loaded with carrier and is put on main conveyor line 1 by staff, in the rotation of main conveyor line 1 and the thrust of pusher 7
Under, move to inserted sheet cleaning 13 corresponding section of all-in-one machine, the blocking at this stop mechanism 3 to this be fully loaded with carrier carry out stop cut
Stop, after control device receives the signal that the fully loaded carrier is stopped, which is passed to the manipulator of corresponding manipulator 4
Control device, after manipulator controller receives signal, manipulator 4 is acted, and longitudinal extension device 42 is in horizontal mobile device 41
The surface of the fully loaded carrier is moved under effect, longitudinal extension device 42 acts, and drives transversal stretching device 43 and clamping dress
It sets 44 to move downward, so that the first grip block and the second grip block of clamping device 44 are located at the two sides of fully loaded carrier, laterally stretch
Compression apparatus 43 acts, and the first grip block matches with the second grip block and clamps fully loaded carrier, the cylinder of longitudinal extension device 42
Telescopic rod retracts, and horizontal mobile device 43 drives longitudinal extension device 42 to act, and fully loaded carrier is put into inserted sheet cleaning all-in-one machine
In 13, inserted sheet cleaning is carried out to silicon wafer, meanwhile, manipulator 4 takes out the unloaded carrier in inserted sheet cleaning machine, is placed on return wire
On 2, unloaded carrier moves at degumming machine 14 under the action of return wire 2, and the taking-up of unloaded carrier is placed on feeding by operator
It on the material loading platform of mechanism 6, is reused, silicon wafer is completed after degumming machine 14 with this, silicon wafer is loaded through master by carrier 8
Pipeline 1 moves, and fully loaded carrier is sent into inserted sheet by manipulator 4 and cleans all-in-one machine 13, while the zero load in all-in-one machine is carried
Tool is sent through manipulator 4 to return wire 2, and reflux carries out to degumming machine 14 carrying out secondary use.
The utility model has the advantages and positive effects of: due to the adoption of the above technical scheme, so that the transmission silicon wafer
Channel line apparatus structure is simple, is easily installed and dismantles, and has main conveyor line and return wire, and main conveyor line and return wire perforation
Multiple degumming machines and inserted sheet clean all-in-one machine, after the silicon wafer after degumming is packed into carrier, are transported under the action of main conveyor line slotting
Piece cleans all-in-one machine, and fully loaded carrier is put into inserted sheet cleaning machine by manipulator, and silicon wafer is cleaned, meanwhile, empty carrier exists
It is back at degumming machine and reuses under the action of return wire, high degree of automation saves cost of labor, and it is strong to reduce labour
Degree, facilitates process management and control, improves work efficiency；It is clear to be put into inserted sheet by the setting of manipulator for the carrier being fully loaded on main conveyor line
In washing machine, meanwhile, the empty carrier that inserted sheet cleans in all-in-one machine is taken out, is put on return wire, oneself of the channel line is improved
Dynamicization degree, reduces labor intensity；With the mechanism that stops is stopped, the fully loaded carrier on main conveyor line is carried out stopping to cut
Stop, fully loaded carrier clamped convenient for manipulator, improves the degree of automation of the channel line, reduce labor intensity,
It improves work efficiency；With circulating filtration water tank, circulating filtration precipitating can be carried out to the water on main conveyor line, keep winner defeated
Water in line sending is able to carry out circulation, keeps the water cleaning on main conveyor line, prevents the silicon wafer bonding die in fully loaded carrier, be conducive to silicon
The transmission of piece.
One embodiment of the utility model is described in detail above, but the content is only the utility model
Preferred embodiment should not be considered as limiting the scope of the present invention.It is all to be made according to application scope of the utility model
All the changes and improvements etc., should still belong within the patent covering scope of the utility model.
Claims (10)
1. a kind of transmission silicon wafer water channel line apparatus, it is characterised in that: including main conveyor line, return wire, manipulator, be circulated throughout drainage
Case stops stop mechanism and feed mechanism, and the main conveyor line is set side by side with the return wire, and the main conveyor line is inserted respectively
Piece is connected to cleaning all-in-one machine and degumming machine, and all-in-one machine is cleaned with the inserted sheet respectively for the return wire and the degumming machine connects
Logical, the manipulator and the inserted sheet clean the side that all-in-one machine is set to the main conveyor line, and the manipulator is inserted with described
Piece cleaning all-in-one machine matches, and the feed mechanism and the degumming machine are set to the other side of the main conveyor line, it is described on
Material mechanism is matched with the degumming machine, described that the mechanism that stops is stopped to be respectively arranged on the main conveyor line and the return wire,
The circulating filtration water tank is connect with the main conveyor line.
2. transmission silicon wafer water channel line apparatus according to claim 1, it is characterised in that: the main conveyor line includes the first side
Plate, the second side plate and transmission line, first side plate and second side plate are respectively arranged on the two sides of the transmission line, and described the
Side plate and/or the second side plate are equipped with inlet opening, and the inlet opening is connect with the circulating filtration water outlet of water tank, and described first
Side plate and/or the second side plate are equipped with apopore, and the apopore is connect with the circulating filtration water tank inlet.
3. transmission silicon wafer water channel line apparatus according to claim 2, it is characterised in that: the return wire includes that return wire drives
Dynamic device and return wire conveyer belt, the return wire conveyer belt are connect with the return wire driving device.
4. transmission silicon wafer water channel line apparatus according to claim 1-3, it is characterised in that: the manipulator includes
Mounting bracket, manipulator controller, horizontal mobile device, longitudinal extension device, transversal stretching device and clamping device, it is described
Horizontal mobile device, the longitudinal extension device and the transversal stretching device are electrically connected with the manipulator controller respectively
It connects, the longitudinal extension device is set on the horizontal mobile device, the transversal stretching device and the longitudinal extension device
Connection, the clamping device are connect with the transversal stretching device, and the horizontal mobile device is set in the mounting bracket, institute
Manipulator controller is stated to be electrically connected with the main conveyor line and the return wire respectively.
5. transmission silicon wafer water channel line apparatus according to claim 4, it is characterised in that: the blocking stops mechanism including more
Structure that structure is stopped in the blocking of a main conveyor line and the blocking of multiple return wires is stopped, multiple main conveyor lines blockings structure of stopping are equal
On the main conveyor line, multiple return wires blockings structure of stopping is set on the return wire.
6. transmission silicon wafer water channel line apparatus according to claim 5, it is characterised in that: the main conveyor line stops knot of stopping
Structure includes that main support, first switch, second switch, third switch, the 4th switch, the first blocking, the second blocking and third stop,
Described first stops, described second stops and third blocking is sequentially arranged on the main support, the first switch and institute
Second switch is stated on the main support, the first switch and the second switch, which are set to described first, to be stopped and described the
Between two blockings, the third switch is set on the main support with the 4th switch, and the third switchs and the described 4th
Switch, which is set to described second, to be stopped between third blocking.
7. transmission silicon wafer water channel line apparatus according to claim 5 or 6, it is characterised in that: the return wire blocking is stopped
Structure includes stopping and switching, and the blocking is set on the return wire with the switch, and the blocking includes telescopic device
And countercheck rod, the telescopic device are connect with the countercheck rod, the telescopic device is connect with the return wire.
8. transmission silicon wafer water channel line apparatus according to claim 7, it is characterised in that: the feed mechanism includes that feeding is flat
Platform, feeding control device and carrier identification device, the feeding control device and the carrier identification device with the feeding
Platform connection, the carrier identification device are electrically connected with the feeding control device.
9. transmission silicon wafer water channel line apparatus according to claim 8, it is characterised in that: the transmission silicon wafer water channel line apparatus
It further include pusher, the pusher is set on the main conveyor line, and the pusher includes pusher telescopic device, pushes away
Material connecting plate and scraping wings, the pusher telescopic device are connect with the main conveyor line, one end of the pusher connecting plate and institute
The connection of pusher telescopic device is stated, the scraping wings is connect with the other end of the pusher connecting plate.
10. transmission silicon wafer water channel line apparatus according to claim 1, it is characterised in that: the transmission silicon wafer water channel is traditional thread binding
Setting further includes control device, the control device respectively with the main conveyor line, the return wire, the manipulator, the resistance
Keep off the mechanism that stops, the feed mechanism and circulating filtration water tank electrical connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920356884.2U CN209729879U (en) | 2019-03-20 | 2019-03-20 | A kind of transmission silicon wafer water channel line apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920356884.2U CN209729879U (en) | 2019-03-20 | 2019-03-20 | A kind of transmission silicon wafer water channel line apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209729879U true CN209729879U (en) | 2019-12-03 |
Family
ID=68687687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920356884.2U Active CN209729879U (en) | 2019-03-20 | 2019-03-20 | A kind of transmission silicon wafer water channel line apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209729879U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109817557A (en) * | 2019-03-20 | 2019-05-28 | 内蒙古中环光伏材料有限公司 | A kind of transmission silicon wafer water channel line apparatus |
-
2019
- 2019-03-20 CN CN201920356884.2U patent/CN209729879U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109817557A (en) * | 2019-03-20 | 2019-05-28 | 内蒙古中环光伏材料有限公司 | A kind of transmission silicon wafer water channel line apparatus |
| CN109817557B (en) * | 2019-03-20 | 2024-05-17 | 内蒙古中环光伏材料有限公司 | Water channel line device for conveying silicon wafers |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112718643A (en) | Full-automatic silicon chip degumming and degumming equipment | |
| CN107159835A (en) | A kind of automatic nut riveting device | |
| CN103569637A (en) | Automatic pallet filler of commutator | |
| CN204355749U (en) | A kind of from fold dish handling equipment | |
| CN109817557A (en) | A kind of transmission silicon wafer water channel line apparatus | |
| CN105618934A (en) | Laser processing equipment for full-automatic solar battery piece | |
| CN107758257A (en) | Automatic gaily decorated basket transplanter | |
| CN111531787A (en) | Full-automatic hook assembling system | |
| CN209729879U (en) | A kind of transmission silicon wafer water channel line apparatus | |
| CN209729868U (en) | A kind of blocking of transmission silicon wafer channel line is stopped mechanism | |
| CN207705219U (en) | A kind of truss arm-and-hand system | |
| CN207698531U (en) | A kind of silicon rod storage stereo garage system | |
| CN108857398B (en) | Solenoid valve subassembly rigging equipment | |
| CN110947687A (en) | An ultrasonic cleaning device for anode and cathode electrode plates | |
| CN2834715Y (en) | A full automatic ultrasonic cleaner | |
| CN211385988U (en) | Full-automatic silicon chip degumming and degumming equipment | |
| CN207954348U (en) | A kind of automatic rod bonding machine | |
| CN211757263U (en) | Ultrasonic cleaning device for positive and negative electrode plates | |
| CN108097825B (en) | Stamping line automatic conveying system and its working method | |
| CN210312472U (en) | Manipulator for conveying silicon wafer water channel line | |
| CN209306515U (en) | Material automatic pick-and-place apparatus | |
| CN211757443U (en) | Wine bottle cleaning system | |
| CN109127450A (en) | A kind of transformer automated sorting production line | |
| CN217942482U (en) | Mounting system of full-automatic core diaphragm capsule | |
| CN202684617U (en) | Servo manipulator device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |