CN210312472U - Manipulator for conveying silicon wafer water channel line - Google Patents

Abstract

The utility model provides a conveying silicon chip is manipulator for water line, the manipulator includes installing support, lateral shifting device, vertical telescoping device, horizontal telescoping device and clamping device, and on the lateral shifting device was located to vertical telescoping device, horizontal telescoping device was connected with vertical telescoping device, and clamping device is connected with horizontal telescoping device, and lateral shifting device locates on the installing support. The beneficial effects of the utility model are that simple structure, the installation is dismantled conveniently, and this manipulator has lateral shifting device, vertical telescoping device, horizontal telescoping device and clamping device, can realize clamping device lateral shifting and vertical migration, can realize clamping device's centre gripping simultaneously, convenient to use, degree of automation is high, has reduced intensity of labour, has improved work efficiency.

Description

Manipulator for conveying silicon wafer water channel line

Technical Field

The utility model belongs to the technical field of the silicon chip production, especially, relate to a manipulator for conveying silicon chip water channel line.

Background

After the silicon wafer is degummed, the silicon wafer is manually loaded into the carrier in the prior art and is placed into the wafer inserting machine for inserting the wafer, so that the automatic purpose cannot be achieved, the labor cost is high, the labor intensity is high, and the working efficiency is low.

Disclosure of Invention

In view of the above problem, the to-be-solved problem of the utility model is to provide a conveying silicon chip manipulator for water channel line is applied to the silicon chip and is used by degumming machine department motion to inserted sheet washing all-in-one department after degumming, after realizing that the silicon chip that comes unstuck packs into the carrier, transport to the inserted sheet cleaning machine through main transfer chain to the automatic inserted sheet that gets into of effect through the manipulator washs all-in-one, empty carrier flows back, degree of automation is high, and the labor intensity is reduced, the labor cost is reduced, and the work efficiency is improved.

In order to solve the technical problem, the utility model discloses a technical scheme is: the utility model provides a conveying silicon chip is manipulator for water channel line, the manipulator includes installing support, lateral shifting device, vertical telescoping device, horizontal telescoping device and clamping device, and vertical telescoping device locates on the lateral shifting device, and horizontal telescoping device is connected with vertical telescoping device, and clamping device is connected with horizontal telescoping device, and lateral shifting device locates on the installing support.

Specifically, the transverse expansion device comprises a first transverse expansion device and a second transverse expansion device, the first transverse expansion device and the second transverse expansion device are both connected with the longitudinal expansion device, and the first transverse expansion device and the second transverse expansion device are arranged oppositely.

Furthermore, the clamping device comprises a first clamping plate and a second clamping plate, the first clamping plate is connected with the first transverse telescopic device, and the second clamping plate is connected with the second transverse telescopic device.

Further, first grip block includes vertical grip block and horizontal grip block, and vertical grip block is connected with horizontal grip block is perpendicular.

Further, the device also comprises a manipulator control device, and the transverse moving device, the longitudinal telescopic device, the first transverse telescopic device and the second transverse telescopic device are respectively electrically connected with the manipulator control device.

Furthermore, the manipulator further comprises a display screen and a warning lamp, and the manipulator control device is respectively electrically connected with the display screen and the warning lamp.

Further, the manipulator still includes the branch water tank, and the branch water tank is connected with the installing support, and the branch water tank is located between manipulator and the main transfer chain.

Further, the lateral moving device is a pneumatic guide rail.

Further, the longitudinal telescopic device, the first telescopic device and the second telescopic device are all cylinders.

The utility model has the advantages and positive effects that:

1. by adopting the technical scheme, the manipulator for conveying the silicon wafer water channel line is simple in structure and convenient to mount and dismount, is provided with the transverse moving device, the longitudinal stretching device, the transverse stretching device and the clamping device, can realize transverse movement and longitudinal movement of the clamping device, can realize clamping of the clamping device, is convenient to use and high in automation degree, reduces labor intensity and improves working efficiency;

2. the arrangement of the mechanical arm is characterized in that a carrier fully loaded on the main conveying line is placed into the insert cleaning machine, and meanwhile, an empty carrier in the insert cleaning integrated machine is taken out and placed on the return line, so that the automation degree of the water line is improved, and the labor intensity is reduced;

3. conveying silicon chip water course line device with manipulator has main transfer chain and return line, and main transfer chain and return line link up a plurality of degumming machines and inserted sheet and wash the all-in-one, after the silicon chip after degumming is packed into the carrier, transport to inserted sheet washing all-in-one under the effect of main transfer chain, the inserted sheet cleaning machine is put into with the carrier that is fully loaded to the manipulator, the silicon chip washs, and simultaneously, empty carrier flows back to degumming machine department reuse under the effect of return line, degree of automation is high, save the cost of labor, the labor intensity is reduced, convenience of process management and control, the work efficiency is improved.

Drawings

Fig. 1 is a schematic structural diagram of an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a pushing mechanism according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a feeding mechanism according to an embodiment of the present invention;

fig. 4 is a schematic structural diagram of a circulation filtration water tank according to an embodiment of the present invention;

fig. 5 is a schematic structural diagram of a robot according to an embodiment of the present invention;

fig. 6 is a schematic structural diagram of a blocking and stopping mechanism according to an embodiment of the present invention;

fig. 7 is a schematic structural view of the main conveyor line according to an embodiment of the present invention.

In the figure:

1. main conveyor line 2, return line 3 and blocking and stopping mechanism

4. Manipulator 5, circulating filter water tank 6, feed mechanism

7. Pushing mechanism 8, carrier 31 and first barrier

32. Second barrier 33, third barrier 34, first switch

35. Second switch 36, third switch 37, fourth switch

41. Lateral moving device 42, longitudinal expansion device 43, and lateral expansion device

44. Clamping device 51, water circulation power device 52 and water tank

53. Water inlet 54, water outlet 55 and filter screen

56. Small trough body 61, carrier recognition device 62 and feeding table

71. Material pushing telescopic device 72, material pushing connecting plate 73 and material pushing baffle plate

10. A first side plate 11, a transmission line 12 and a second side plate

13. Integrated chip cleaning machine 14 and degumming machine

Detailed Description

The invention will be further described with reference to the accompanying drawings and specific embodiments.

Fig. 1 shows a structure of a silicon wafer conveying water channel line device according to an embodiment of the present invention, specifically showing the structure and connection relationship of the silicon wafer conveying water channel line device according to the embodiment, the embodiment relates to a manipulator for conveying a silicon wafer water channel line, which is installed on the silicon wafer conveying water channel line device, and is used for conveying a silicon wafer (a full-load carrier) loaded into a carrier into an integrated silicon wafer insert cleaning machine 13 after the silicon wafer is degummed by a degumming machine 14, and simultaneously reflowing an empty carrier (a no-load carrier) to the degumming machine 14 for secondary use, the arrangement of the manipulator for conveying a silicon wafer water channel line shortens the time for the silicon wafer to come out from the degumming machine 14 and enter the integrated silicon wafer insert cleaning machine 13, and has a main conveying line and a reflow line, which can carry out the conveying of the full-load carrier and the reflow of the no-load tool, and has high automation degree, reduce intensity of labour, improve work efficiency, reduce the cost of labor, the management and control of being convenient for simultaneously.

As shown in fig. 1, the silicon wafer conveying water channel line device comprises a main conveying line 1, a return line 2, a manipulator 4, a circulating filter water tank 5, a stopping and stopping mechanism 3, a feeding mechanism 6 and a control device, wherein the main conveying line 1 is used for conveying silicon wafers loaded in carriers and degummed by a degumming machine 14, namely full-load carriers, conveying the full-load carriers into an insert cleaning integrated machine 13, the return line 2 is used for returning empty carriers coming out of the insert cleaning integrated machine 13, and conveying the empty carriers back to the degumming machine 14 for secondary use, the main conveying line 1 and the return line 2 are arranged in parallel, the main conveying line 1 is communicated with the insert cleaning integrated machine 13 and the degumming machine 14, and the return line 2 is communicated with the insert cleaning integrated machine 13 and the degumming machine 14, so that full-load carrier conveying and empty carrier returning are facilitated; the manipulator 4 and the feeding mechanism 6 are both arranged on one side of the return line 2, the manipulator 4 is matched with the insert cleaning integrated machine 13, the feeding mechanism 6 is matched with the degumming machine 14, the manipulator 4 is used for clamping a full-load carrier on the main conveying line 1 into the insert cleaning integrated machine 13, and meanwhile, the manipulator 4 is used for placing a no-load tool flowing out of the insert cleaning integrated machine 13 into the return line 2; the blocking and stopping mechanism 3 is respectively arranged on the main conveying line 1 and the return line 2, and the blocking and stopping mechanism 3 is used for blocking and stopping full-load carriers on the main conveying line 1, preventing the main conveying line 1 from being jammed due to too many full-load carriers on the main conveying line 1, and preventing the silicon wafers from being damaged, and meanwhile, preventing the return line 2 from being jammed due to too many carriers over the return line 2, and causing the working fault of the return line 2; the circulating filter water tank 5 is connected with the main conveying line 1, the circulating filter water tank 5 is used for supplying water to the main conveying line 1, so that when a fully loaded carrier can be conveyed on the main conveying line 1, the main conveying line 1 is filled with water, the fully loaded carrier is always in the water in the conveying process, silicon wafers are prevented from being stuck, the circulating filter water tank 5 supplies water to the main conveying line 1 for circulation, meanwhile, the water on the main conveying line 1 is always kept in a clean state, and the water on the main conveying line 1 is subjected to circulating filtration, sedimentation and cleaning; the control device is respectively connected with the main conveying line 1, the return line 2, the mechanical arm 4, the circulating filter water tank 5, the stopping mechanism 3 and the feeding mechanism 6 electrically, and controls the main conveying line 1, the return line 2, the mechanical arm 4, the circulating filter water tank 5, the stopping mechanism 3 and the feeding mechanism 6 to act, so that the mechanical arm for the whole silicon wafer conveying water channel line realizes automatic control, the labor intensity is reduced, and the working efficiency is improved.

Specifically, as shown in fig. 7, the main conveyor line 1 includes a first side plate 10, a second side plate 12 and a conveyor line 11, the conveyor line 11 is installed on the ground through a bracket, the first side plate 10 and the second side plate 12 are respectively installed on two sides of the conveyor line 11, the bracket is arranged to facilitate installation of the conveyor line 11, and the height of the bracket is consistent with the height of the feeding end of the insert cleaning all-in-one machine 13, so that the main conveyor line 1 can convey full-load carriers to the insert cleaning all-in-one machine 13, the conveyor line 11 is a strip-shaped belt transmission structure and includes a conveyor belt and a power driving device, the length of the conveyor belt is selected according to the sum of the number of the insert cleaning all-in-one machines 13 and the number of the degumming machines 14, the conveyor belt penetrates through the plurality of degumming machines 14 and the plurality of insert cleaning all-in-one machine 13, so as to, the conveyer belt is connected with power drive arrangement, the conveyer belt is installed on the support, provide power for the conveyer belt through drive arrangement, drive the conveyer belt motion, realize the transport of full-load carrier, here, it is preferred, the conveyer belt is the link plate formula guipure, the width of this link plate formula guipure suits with the width of carrier 8, be convenient for to the transport of carrier 8, make carrier 8 can not block on the conveyer belt, power drive arrangement is the motor, the motor is connected with link plate formula guipure, the rotation through the motor drives link plate formula guipure circulation and rotates, realize full-load carrier transportation, here, link plate formula guipure and motor are the product on the market, select according to the actual demand, do not specifically require here.

The first side plate 10 and the second side plate 12 are respectively installed on two sides of the conveying belt, a bottom plate is installed at the bottom ends of the first side plate 11 and the second side plate 12, the first side plate 11 and the second side plate 12 are both higher than the conveying belt, so that the first side plate 11, the bottom plate and the second side plate 12 form a groove body, the conveying belt is located in the groove body, a support is installed inside the groove body and penetrates through the bottom plate to be fixedly connected with the ground, the conveying belt is supported, water inlet holes are formed in the first side plate 11 or the second side plate 12, or the first side plate 11 and the second side plate 12 are both provided with water inlet holes, the water inlet holes are connected with the circulating filter water tank 5 through pipelines, and the circulating filter water tank 5 supplies water; a water outlet hole is formed in the first side plate 11 or the second side plate 12, or water outlet holes are formed in both the first side plate 11 and the second side plate 12, the water outlet holes are connected with the circulating filter water tank 5 through a pipeline, water on the main conveying line 1 enters the circulating filter water tank 5 through the water outlet holes and the pipeline, and the circulating filter water tank 5 filters and deposits the water; through the setting of apopore and inlet opening, realize the change that circulates to the water in the cell body, and the water in the cell body is higher than conveyer belt 11 for the full load carrier that is located conveyer belt 11 is in the aquatic often, prevents the silicon chip bonding piece after coming unstuck. The quantity of inlet opening and apopore is a plurality ofly, selects according to the actual demand, and in this embodiment, preferred, the inlet opening is located first curb plate 10, and the apopore is located second curb plate 12, the entering and the outflow of the water of being convenient for.

The return line 2 is arranged on one side of the main conveying line 1, and the return line 2 and the main conveying line 1 are arranged in parallel, so that conveying of full-load carriers and return of no-load carriers are carried out simultaneously. This return wire 2 includes return wire support, return wire drive arrangement and return wire conveyer belt, and the return wire conveyer belt is connected with return wire drive arrangement, and the return wire conveyer belt is installed on the return wire support for the return wire conveyer belt moves under return wire drive arrangement's drive. The length of the return line 2 is consistent with that of the main conveying line 1, a plurality of insert cleaning integrated machines 13 and a plurality of degumming machines 14 are communicated, return of no-load carriers coming out of the insert cleaning integrated machines 13 is carried out, and the no-load carriers are transported to the degumming machines 14 for reuse. Preferably, the return line driving device is a motor, the return line conveying belt is a chain plate type mesh belt, the motor drives the chain plate type mesh belt to move, return of the no-load carrier is achieved, and the motor and the chain plate type mesh belt are commercially available products and are selected according to actual requirements.

This main transfer chain 1 and return line 2 set up side by side, can be the linear type setting, also can be the setting of U type, or other setting modes, select according to the actual demand, it is preferred, here, main transfer chain 1 and return line 2 are the setting of U type, a plurality of inserted sheets wash all-in-one 13 and evenly set up in main transfer chain 1 and return line 2 with one side, a plurality of degumming machines 14 evenly set up the opposite side at main transfer chain 1 and return line 2, make a plurality of inserted sheets wash all-in-one 13 and a plurality of degumming machines 14 and set up relatively, save the space that this manipulator for conveying silicon chip water way line occupy, and the labor cost is reduced, and the work efficiency is improved. The number of the insert cleaning integrated machines 13 is selected according to actual production requirements, and the number of the degumming machines 14 is selected according to actual production requirements.

The quantity of foretell manipulator 4 is a plurality of, it is unanimous with the quantity of inserted sheet washing all-in-one 13, each manipulator cooperatees with an inserted sheet washing all-in-one 13, be located the feed end of inserted sheet washing all-in-one 13, take the full-load carrier on main transfer chain 1 and place into inserted sheet washing all-in-one 13, take the no-load carrier that comes out from this inserted sheet washing all-in-one 13 and place on the return line, realize the automation of inserted sheet washing all-in-one 13 material loading and unloading, reduce the cost of labor, reduce intensity of labour, improve work efficiency.

As shown in fig. 5, the above-mentioned robot 4 includes a mounting bracket, a robot control device, a lateral movement device 41, a longitudinal expansion device 42, a lateral expansion device 43, and a clamping device 44, the mounting bracket is provided to facilitate the mounting of the robot control device and the lateral movement device 41, the longitudinal expansion device 42, and the lateral expansion device 43 are electrically connected to the robot control device, respectively, the robot control device controls the operations of the lateral movement device 41, the longitudinal expansion device 42, and the lateral expansion device 43, and at the same time, the robot control device is electrically connected to the motor of the power driving device of the main conveyor line 1, the robot control device is electrically connected to the motor of the return line power driving device, and the robot control device controls the operations of the power driving device of the main conveyor line 1 and the return line power driving device, respectively, so that the movement of the conveyor belt 11 of the main conveyor line 1 and the movement of the return The conveying speed of the conveying belt 11 of the main conveying line 1 and the conveying speed of the return line conveying belt are matched with the clamping action frequency of the clamping device 44 of the manipulator 4, so that clamping of full-load carriers and clamping of empty carriers cannot cause excessive blockage of the carriers on the main conveying line 1 and the return line 2.

The manipulator 4 further comprises a branch water tank, the branch water tank is connected with the mounting support, the branch water tank is located at the front end of the manipulator 4 and located between the manipulator 4 and the main conveying line 1, the manipulator 4 clamps the full-load carriers from the main conveying line 1 and then places the full-load carriers in the branch water tank, the full-load carriers placed before the full-load carriers are clamped from the branch water tank and placed in the insert cleaning all-in-one machine 13, the branch water tank is used for temporarily storing the full-load carriers, a plurality of full-load carriers are placed in the branch water tank according to the first-in first-out principle, the clamping device 44 places the full-load carriers on the main conveying line 1 behind the full-load carriers in the branch water tank again, and simultaneously clamps the full-load carriers at the front end of the branch water tank and places.

The above-mentioned lateral moving device 41 is installed on the installation bracket, the longitudinal expansion device 42 is installed on the lateral moving device 41, so that the longitudinal expansion means 42 is freely movable on the lateral movement means 41, the lateral expansion means 43 is connected with the longitudinal expansion means 42, so that the transverse expansion device 43 moves up and down under the drive of the longitudinal expansion device 42, the clamping device 44 is connected with the transverse expansion device 43, so that the clamping device 44 can realize clamping and loosening under the drive of the transverse expansion device 43, through the cooperation of the transverse moving device 41, the longitudinal expansion device 42 and the transverse expansion device 43, the clamping device 44 can move back and forth in the transverse direction and move up and down in the longitudinal direction, so that full-load carriers can be taken from the main conveying line 1 and placed into the insert cleaning integrated machine 13, and meanwhile, the full-load carriers in the insert cleaning integrated machine 13 are placed into the return line 2. Specifically, the transverse moving device 41 is a pneumatic guide rail, a plurality of limit switches are mounted on the pneumatic guide rail, the device is mounted according to the positions of a manipulator 4 for placing a full-load carrier and taking an empty-load carrier in the insert cleaning all-in-one machine 13, a position for clamping the full-load carrier on the main conveying line 1, a position for placing the empty-load carrier on the return line 2, a position for placing the full-load carrier in a branch water tank and a position for clamping the full-load carrier in the branch water tank, and the device corresponds to the positions, so that the manipulator can accurately act, the placing of the full-load carrier and the clamping of the empty-load carrier are realized, the longitudinal telescopic device 42 is an air cylinder, the transverse telescopic device 43 is an air cylinder, the longitudinal telescopic device 42 is connected with a slide block of the pneumatic guide rail, the longitudinal telescopic device 42 can freely move on the pneumatic guide pipe, the longitudinal expansion device 42 is vertically arranged, so that the transverse expansion device 43 can move up and down, the clamping device 44 is arranged at the expansion rod end of the cylinder of the transverse expansion device 43 to clamp and loosen the clamping device 44, the transverse expansion device 43 comprises a first transverse expansion device and a second transverse expansion device, the first transverse expansion device and the second transverse expansion device are oppositely arranged at the end part of the expansion rod of the cylinder of the longitudinal expansion device 42, the first transverse expansion device and the second transverse expansion device are both cylinders, the clamping device 44 comprises a first clamping plate and a second clamping plate, the first clamping plate is connected with the end part of the expansion rod of the cylinder of the first transverse expansion device, the second clamping plate is connected with the end part of the expansion rod of the cylinder of the second transverse expansion device, and the expansion rod of the first transverse expansion device and the second transverse expansion device can extend and retract, the first clamping plate and the second clamping plate are close to and away from each other, and the clamping device is clamped and away from each other. Here, the first clamping plate and the second clamping plate have the same structure, and the first clamping plate will be described as an example. First grip block is L type structure, including vertical grip block and horizontal grip block, and vertical grip block sets up with horizontal grip block is perpendicular, and the one end that horizontal grip block was kept away from to vertical grip block is connected with first horizontal telescoping device, realizes first grip block seesaw on the horizontal direction, and the width of horizontal grip block is unanimous with the width in the centre gripping hole on the carrier 8, is convenient for the centre gripping to carrier 8.

The pneumatic guide rail of the transverse moving device 41, the cylinder of the longitudinal expansion device 42, the cylinder of the first transverse expansion device and the cylinder of the second transverse expansion device are all connected with an air pump through pipelines, each connecting pipeline is provided with an electromagnetic valve, a plurality of electromagnetic valves are all electrically connected with a manipulator control device, meanwhile, a limit switch on the transverse moving device 41 is electrically connected with the manipulator control device, an edited program is preset in the manipulator control device, the manipulator control device controls the transverse moving device 41, the longitudinal expansion device 42, the first transverse expansion device and the second transverse expansion device to act according to the edited program, and controls the driving device and the return line driving device of the main conveying line 1 to act simultaneously, so that full-load carriers are clamped from the main conveying line 1 and are placed into the insert cleaning all-in-one machine 13, and simultaneously empty-load carriers in the insert cleaning all-in-one machine 13 are placed onto the return line 2, the silicon wafer is enabled to enter the insert cleaning all-in-one machine 13 through the degumming machine 14, meanwhile, the carrier 8 is used again in a backflow mode, automation of the process is achieved, working efficiency is improved, labor intensity is reduced, and labor cost is saved.

The robot control device is electrically connected to the control device, and transmits information of the robot 4 to the control device, so that the control device can control the operation of the plurality of robots 4. The manipulator control device is preferably a PLC controller, is a commercially available product and is selected according to actual requirements.

This manipulator 4 still includes display screen and warning light, and manipulator controlling means is connected with the display screen electricity respectively, and the display screen is used for showing 4 equipment information of manipulator, and the warning light is used for showing 4 operating condition of manipulator, and the operator of being convenient for masters 4 operating condition of manipulator often.

The blocking and stopping mechanism 3 comprises a plurality of main conveying line blocking and stopping structures and a plurality of backflow line blocking and stopping structures, the main conveying line blocking and stopping structures are all installed on the main conveying line 1, the backflow line blocking and stopping structures are all installed on the backflow line 2, the number of the main conveying line blocking and stopping structures is matched with the number of the insert cleaning integrated machines 13, one main conveying line blocking and stopping structure is installed at the position, corresponding to each insert cleaning integrated machine 13, of the main conveying line 1, the full-load carrier moving to the insert cleaning integrated machine 13 is blocked and stopped, and the manipulator 4 acts to clamp the full-load carrier; the number of the backflow line blocking and stopping structures is consistent with that of the degumming machines 14, a backflow line blocking and stopping structure is installed at the position of the backflow line 2 corresponding to each degumming machine 14, and an operator places the no-load carrier moving to the position into the degumming machine 14. That is, the installation position of each main conveying line blocking and stopping structure corresponds to the position of each insert cleaning all-in-one machine 13, the installation position of each return line blocking and stopping structure corresponds to the position of each degumming machine 14, so that full carriers can conveniently enter the insert cleaning all-in-one machine 13, and empty carriers can conveniently enter the degumming machine 14.

As shown in fig. 6, the above-mentioned main conveyor line blocking and stopping structure includes a main support, a first switch 34, a second switch 35, a third switch 36, a fourth switch 37, a first block 31, a second block 32 and a third block 33, wherein the first block 31, the second block 32 and the third block 33 are sequentially installed on the main support, the main support is installed on the first side plate 10 or the second side plate 12 of the main conveyor line 1, the first switch 34 and the second switch 35 are installed on the main support, and the first switch 34 and the second switch 35 are located between the first barrier 31 and the second barrier 32, the third switch 36 and the fourth switch 37 are mounted on the main support, and the third and fourth switches 36 and 37 are located between the second and third blocks 32 and 33, that is, the first block 31, the first switch 34, the second switch 35, the second block 32, the third switch 36, the fourth switch 37 and the third block 33 are sequentially mounted on the main support. Here, the first barrier 31, the second barrier 32, and the third barrier 33 have the same structure, and the structure of the first barrier 31 will be described as an example. The first barrier 31 comprises a first support, a first expansion device, a first swing rod, a first rotating shaft and a first baffle plate, wherein the first expansion device is arranged on the first support, the first support is arranged on the main support, the first support comprises an installation bottom plate, a first support arm and a second support arm, the installation bottom plate is of an L-shaped structure and is arranged on the main support through fixing parts such as bolts, the first support arm and the second support arm are vertically arranged on the inner wall of a first side plate 10 or a second side plate 12 of the main conveying line 1 on the installation bottom plate, the first support arm and the second support arm are arranged in parallel, the first support arm and the second support arm are positioned on the same straight line, through holes are arranged at the free ends of the first support arm and the second support arm, the first rotating shaft is connected with the first support through two through holes, the first rotating shaft can freely rotate, one end of the first rotating shaft is connected with one end of the first swing rod, the other end of the first rotating shaft is fixedly connected with the, the other end of the first swing rod is connected with the first telescopic device, the first swing rod is driven to swing through the telescopic action of the first telescopic device, the first rotating shaft is driven to rotate through the swing of the first swing rod, and then the first baffle is driven to swing, so that the blocking of a fully loaded carrier is realized. The first telescopic device is an air cylinder, a first swing rod is installed at the tail end of a telescopic rod of the air cylinder, when the telescopic rod of the air cylinder extends out, the first swing rod swings towards the inner wall of the first side plate 10 or the second side plate 12 to drive the first rotating shaft to rotate anticlockwise, so that the first baffle swings towards the inner wall of the first side plate 10 or the second side plate 12, the first baffle is far away from the middle position of the main conveying line 1, and the full-load carrier is not blocked at the moment; when the telescopic rod of the cylinder of the first telescopic device retracts, the first swing rod swings to the middle position of the main conveying line 1 to drive the first rotating shaft to rotate clockwise, the first baffle is driven to swing to the middle position of the main conveying line 1, and the full-load carrier is blocked.

The structures of the second barrier 32 and the third barrier 33 are the same as those of the first barrier 31, and are not described in detail herein. The expansion device of the first barrier 31, the expansion device of the second barrier 32 and the expansion device of the third barrier 33 are all connected with an air pump through pipelines, electromagnetic valves are arranged on connecting pipelines to control the actions of the expansion device of the first barrier 31, the expansion device of the second barrier 32 and the expansion device of the third barrier 33, the electromagnetic valves are respectively and electrically connected with a control device, a first switch 34, a second switch 35, a third switch 36 and a fourth switch 37 are respectively and electrically connected with the control device, an edited program is preset in the control device, the first switch 34, the second switch 35, the third switch 36 and the fourth switch 37 respectively transmit detected signals to the control device, the control device analyzes the signals of the first switch 34, the second switch 35, the third switch 36 and the fourth switch 37 to further control the actions of the first barrier 31, the second barrier 32 and the third barrier 33, blocking the fully loaded carrier. The first switch 34 is used for controlling the first stopper 31 to extend, the second switch 35 is used for the in-position detection, and simultaneously, the first switch 34 and the third switch 36 are used for controlling the second stopper 32 to extend, the third switch 36 is used for controlling the second stopper 32 to extend, and the fourth switch 37 is used for the in-position detection and controlling the third stopper 33 to extend. The specific working process is as follows: the fourth switch 37 detects that the full carrier is in place, transmits the in-place signal to the control device, the control device analyzes the signal, controls the action of the third barrier 33, blocks the full carrier, the third switch 36 detects the full carrier, when the next full carrier arrives, the second switch 32 detects that the full carrier is in place, transmits the signal to the control device, the control device analyzes the signal of the third switch 36 and the signal of the second switch 35, controls the second barrier 32 to extend out, and blocks the full carrier; meanwhile, the first switch 34 detects the full-load carrier, the first switch 34 transmits a signal to the control device, and the control device analyzes the signal, controls the first barrier 31 to extend out, and blocks the subsequent full-load carrier. Here, the first switch 34, the second switch 35, the third switch 36 and the fourth switch 37 are all position sensors, and are commercially available products, and are selected according to actual requirements, and the expansion device of the first barrier 31, the expansion device of the second barrier 32 and the expansion device of the third barrier 33 are all air cylinders, and are all commercially available products, and are selected according to actual requirements.

Foretell backflow line blocks to intercept and stops structure 3 including blockking and the switch, it installs on backflow line 2 to block through the support, the switch mounting is on backflow line 2, the backflow line blocks that interception structure is corresponding with the position of degumming machine 14, it includes telescoping device and blocks the pole to block, the telescoping device is connected with the pole that blocks, the telescoping device is installed on the support, this telescoping device is the cylinder, it is connected with the telescopic link of cylinder to block the pole, stretch out and draw back under the effect of cylinder, block the empty load carrier, the cylinder passes through the pipeline and is connected with the air pump, and install the solenoid valve on the pipeline, this solenoid valve is connected with controlling means electricity, controlling means passes through the action of solenoid valve control solenoid valve, and then the cylinder action of controlling telescoping device. The switch is electrically connected with the control device, the switch transmits the signal to the control device, and the control device analyzes the signal, so as to control the blocking action and block the empty load carrier. When the switch detects the empty load, the signal is transmitted to the control device, the control device analyzes the signal, controls the blocking action and blocks the empty load, and the switch is a photoelectric switch, is a commercially available product and is selected according to actual requirements.

The control device is preferably a PLC controller, is a commercially available product and is selected according to actual requirements.

As shown in fig. 3, the feeding mechanism 6 includes a feeding platform 62, a feeding control device and a carrier identification device 61, the feeding control device is installed in the control box, the control box is connected with the feeding platform 62, the carrier identification device 61 is electrically connected with the feeding control device, the carrier identification device 61 is located on the top of the feeding platform 62, the carrier identification device 61 is electrically connected with the feeding control device, the feeding control device is electrically connected with the control device, the carrier identification device 61 is used for identifying the tag on the carrier 8, the carrier identification device 62 is preferably an RFID reader, the RFID reader scans the RFID tag on the carrier and transmits the RFID tag information to the feeding control device, the feeding control device is preset with an edited program, the feeding control device is performed according to the preset program and transmits the information such as time and the number of the degumming machine 14 to the RFID reader, the RFID reader writes the information into the RFID tag, and the signal of the label written with the information is transmitted to the control device, so that the control device can conveniently monitor the carrier with the label subsequently. Here, the feeding control device is preferably a PLC controller, which is a commercially available product and is selected according to actual needs.

The manipulator for the silicon wafer conveying water channel line further comprises a pushing mechanism 7, as shown in fig. 2, the pushing mechanism 7 is installed on the main conveying line 1 and mainly located in a place where full-load carriers are easy to block and block, the pushing mechanism 7 is selected according to actual requirements, and is used for applying thrust to the full-load carriers on the main conveying line 1, and blocking of the full-load carriers on the main conveying line 1 is reduced. The material pushing mechanism 7 comprises a material pushing telescopic device 71, a material pushing connecting plate 72 and a material pushing plate 73, wherein the material pushing telescopic device 71 is installed on the main conveying line 1 through an installation support, one end of the material pushing connecting plate 72 is connected with the material pushing telescopic device 71, the material pushing plate 73 is connected with the other end of the material pushing connecting plate 72, the material pushing telescopic device 71 comprises a first material pushing telescopic device and a second material pushing telescopic device, the first material pushing telescopic device and the second material pushing telescopic device are installed on the support in parallel, and the first material pushing telescopic device and the second material pushing telescopic device are both cylinders and are commercially available products and selected according to actual requirements. The left side end and the right side end of the material pushing connecting plate 72 are respectively connected with the end part of the telescopic rod of the cylinder of the first material pushing and retracting device and the end part of the telescopic rod of the cylinder of the second material pushing and retracting device, so that the material pushing connecting plate 72 moves back and forth under the action of the first material pushing and retracting device and the second material pushing and retracting device, the material pushing plate 73 is connected with the material pushing connecting plate 72 through a connecting rod, the material pushing plate 73 is driven to move by the back and forth movement of the material pushing connecting plate 72, the material pushing plate 73 applies thrust to a full-load carrier, and the full-load carrier can stably run on. The pushing connecting plate 72 is a plate-shaped structure and has a plurality of through holes, so that the resistance of water feeding of the main conveying line 1 to the pushing connecting plate 72 is reduced.

Foretell circulation filter water tank 5 is connected with main transfer chain 1, for main transfer chain 1 provides water, and in main transfer chain 1's rivers flowed into circulation filter water tank 5 simultaneously, to this water that flows into in the water tank carry out loop filter, deposit, clean for water on the main transfer chain 1 can recycle, improves the utilization ratio of water. As shown in fig. 4, the circulating filtration water tank 5 includes a water tank 52 and a water circulating power device 51, a water inlet 53 of the water tank 52 is connected with a water outlet of the main conveyor line 1 through a pipe, a water outlet 54 of the water tank 52 is connected with a water inlet of the main conveyor line 1 through a pipe, the water inlet 53 and the water outlet 54 of the water tank 52 are both arranged at one end of the water tank 52, the water circulating power device 51 is connected with the water tank 52 and arranged at the other end of the water tank 52, the water circulating power device 51 is a water pump, the water tank 52 is of a tank body structure, the inside of the water tank 52 is provided with a plurality of partition plates which divide the inside of the water tank 52 into a plurality of small tank bodies 56, a filter screen 55 is arranged in each small tank body 56, water entering from the water inlet 53 of the water tank 52 enters the first small tank body 56, after the first small tank body 56 is full of water, the water is filtered by, after the second small groove 56 is full of water, the water enters the filter screen 55 for filtering, enters the third small groove 56, and sequentially flows to fill the small grooves 56 in the water tank 52 with water, and simultaneously, the water in the water tank 52 flows out from the water outlet 54 of the water tank and enters the main conveying line 1 to supply water for the main conveying line 1. The water circulation power device 51 is electrically connected with the control device, the control device controls the water circulation power device 51 to act, and the control device analyzes signals of the driving device of the main conveying line 1, signals of the blocking and stopping mechanism 3 and signals of the mechanical arm 4 and controls the water circulation power device 51 to act so that the water circulation power device 51 is matched with the movement of the main conveying line 1.

The working process of the embodiment: placing an empty carrier on a feeding platform 62 of a feeding mechanism 6, identifying the RFID label of the empty carrier by a carrier identification device 61, writing information such as the number and time of a degumming machine 14 into the RFID label by a feeding control device, transmitting the information of the empty carrier to a control device, placing the empty carrier into the corresponding degumming machine 14 after writing the information, loading the silicon wafer degummed by the degumming machine 14 into the empty carrier, placing the full carrier on a main conveying line 1 by a worker after the empty carrier is filled with the silicon wafer, moving to a corresponding position of an insert cleaning all-in-one machine 13 under the rotation of the main conveying line 1 and the thrust action of a material pushing mechanism 7, blocking and stopping the full carrier by a blocking and stopping mechanism 3 at the position, transmitting the signal to a manipulator control device of a corresponding manipulator 4 after the control device receives the signal of full carrier stopping, after the manipulator control device receives the signal, the manipulator 4 acts, the longitudinal expansion device 42 moves to the position right above the full-load carrier under the action of the transverse moving device 41, the longitudinal expansion device 42 acts to drive the transverse expansion device 43 and the clamping device 44 to move downwards, so that the first clamping plate and the second clamping plate of the clamping device 44 are positioned at two sides of the full-load carrier, the transverse expansion device 43 acts, the first clamping plate and the second clamping plate are matched to clamp the full-load carrier, the cylinder expansion rod of the longitudinal expansion device 42 retracts, the transverse moving device 43 drives the longitudinal expansion device 42 to act, the full-load carrier is placed in the insert cleaning all-in-one machine 13 to clean the silicon wafer by inserting, meanwhile, the manipulator 4 takes out the empty carrier in the insert cleaning machine and places the empty carrier on the return line 2, the empty carrier moves to the degumming machine 14 under the action of the return line 2, an operator takes out the no-load carrier and puts the no-load carrier on a feeding platform of a feeding mechanism 6 for reuse, so that after the silicon wafer passes through a degumming machine 14, the silicon wafer is loaded through a carrier 8 and moves through a main conveying line 1, the full-load carrier is conveyed into an insert cleaning integrated machine 13 through a manipulator 4, the no-load carrier in the integrated machine is conveyed to a return line 2 through the manipulator 4, and the return flow is carried out to the degumming machine 14 for secondary utilization.

The utility model has the advantages and positive effects that: by adopting the technical scheme, the manipulator for conveying the silicon wafer water channel line is simple in structure and convenient to mount and dismount, is provided with the transverse moving device, the longitudinal stretching device, the transverse stretching device and the clamping device, can realize transverse movement and longitudinal movement of the clamping device, can realize clamping of the clamping device, is convenient to use and high in automation degree, reduces labor intensity and improves working efficiency; the arrangement of the mechanical arm is characterized in that a carrier fully loaded on the main conveying line is placed into the insert cleaning machine, and meanwhile, an empty carrier in the insert cleaning integrated machine is taken out and placed on the return line, so that the automation degree of the water line is improved, and the labor intensity is reduced; conveying silicon chip water course line device with manipulator has main transfer chain and return line, and main transfer chain and return line link up a plurality of degumming machines and inserted sheet and wash the all-in-one, after the silicon chip after degumming is packed into the carrier, transport to inserted sheet washing all-in-one under the effect of main transfer chain, the inserted sheet cleaning machine is put into with the carrier that is fully loaded to the manipulator, the silicon chip washs, and simultaneously, empty carrier flows back to degumming machine department reuse under the effect of return line, degree of automation is high, save the cost of labor, the labor intensity is reduced, convenience of process management and control, the work efficiency is improved.

While one embodiment of the present invention has been described in detail, the description is only a preferred embodiment of the present invention, and should not be considered as limiting the scope of the present invention. All the equivalent changes and improvements made according to the application scope of the present invention should still fall within the patent coverage of the present invention.

Claims (9)

1. The utility model provides a manipulator for conveying silicon chip water route line which characterized in that: the manipulator comprises a mounting support, a transverse moving device, a longitudinal telescopic device, a transverse telescopic device and a clamping device, wherein the longitudinal telescopic device is arranged on the transverse moving device, the transverse telescopic device is connected with the longitudinal telescopic device, the clamping device is connected with the transverse telescopic device, and the transverse moving device is arranged on the mounting support.

2. The robot hand for a silicon wafer transfer water line according to claim 1, wherein: the transverse telescopic device comprises a first transverse telescopic device and a second transverse telescopic device, the first transverse telescopic device and the second transverse telescopic device are connected with the longitudinal telescopic device, and the first transverse telescopic device and the second transverse telescopic device are arranged oppositely.

3. The robot hand for a silicon wafer transfer water line according to claim 2, wherein: the clamping device comprises a first clamping plate and a second clamping plate, the first clamping plate is connected with the first transverse telescopic device, and the second clamping plate is connected with the second transverse telescopic device.

4. The robot hand for a silicon wafer transfer water line according to claim 3, wherein: the first clamping plate comprises a vertical clamping plate and a horizontal clamping plate, and the vertical clamping plate is vertically connected with the horizontal clamping plate.

5. The robot hand for a silicon wafer transfer line according to any one of claims 2 to 4, wherein: the horizontal moving device, the longitudinal telescopic device, the first horizontal telescopic device and the second horizontal telescopic device are respectively and electrically connected with the manipulator control device.

6. The robot hand for a silicon wafer transfer water line according to claim 5, wherein: the manipulator further comprises a display screen and a warning lamp, and the manipulator control device is respectively electrically connected with the display screen and the warning lamp.

7. The robot hand for a silicon wafer transfer water line according to claim 6, wherein: the manipulator further comprises a branch water tank, the branch water tank is connected with the mounting support, and the branch water tank is arranged between the manipulator and the main conveying line.

8. The robot hand for a silicon wafer transfer water line according to claim 6 or 7, wherein: the transverse moving device is a pneumatic guide rail.

9. The robot hand for a silicon wafer transfer water line according to claim 8, wherein: and the longitudinal telescopic device, the first telescopic device and the second telescopic device are all cylinders.

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