CN209727792U - A kind of target open defect detection device - Google Patents
A kind of target open defect detection device Download PDFInfo
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- CN209727792U CN209727792U CN201920153817.0U CN201920153817U CN209727792U CN 209727792 U CN209727792 U CN 209727792U CN 201920153817 U CN201920153817 U CN 201920153817U CN 209727792 U CN209727792 U CN 209727792U
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Abstract
The utility model discloses a kind of target open defect detection devices, it includes pedestal, the positioning device for carrying positioning target is provided on pedestal, gearshift for detecting the detection device of target flatness and for moving target detection device, detection device includes the back phase-detecting machine for detecting the target back side, side phase-detecting machine for detecting the positive positive phase-detecting machine of target and for detecting target side, back phase-detecting machine is set to below positioning device, positive phase-detecting machine and side phase-detecting machine are set to above positioning device, positive phase-detecting machine and side phase-detecting machine are connect with gearshift.The utility model is not only simple in structure, is easy to use, and detection while can once realize target multiple surfaces.
Description
Technical field
The utility model relates to a kind of target detection devices, belong to target detection device technical field, and in particular to a kind of
Target open defect detection device.
Background technique
With the continuous progress of science and technology, the rapid development of photoelectronic industry, target is as semiconductor, photoelectricity industry common one
Kind sputter material is widely used in semiconductor and photoelectronic industry.The construction of target is usually by backboard and precious metal group
At backboard generally uses anaerobic brass to make, and precious metal is using sputtering method in surface coating.
Positive charge ion hits the close target of atom packing when sputter, and the atom of target scatters after hitting, sinks immediately
Product ultimately forms film on substrate, when each surface irregularity of target, then will lead to target by sputtering plated film
Unevenly.For the flatness on each surface of target, a kind of target is disclosed in the specification of Chinese patent CN207798029U
Material detection device, the target detection device include base station, the detection device for the detection target flatness being mounted on base station, installation
The guidance set that is moved reciprocatingly with X-direction along the y axis on base station for detection device is mounted on to drive on base station and detect
Transmission device that device moves reciprocatingly along the y axis on guidance set connect driving transmission device lifting with transmission device
Driving mechanism and be mounted on base station and done along the x axis on guidance set with detection device connecting band motion detection device
The dynamical element moved repeatedly.Although the target detection device can detect each region of target material surface, Jin Erti
High target passes through the uniformity for sputtering plated film, but it can only once realize a surface of target and detect, when one
When needing to detect another surface after surface inspection, then needs manually to overturn target and adjust detection device
Position undoubtedly will increase dramatically the time of the detection consumption of target in this way, reduce the detection efficiency of target.
Summary of the invention
The purpose of this utility model is to provide a kind of target open defect detection devices, are not only simple in structure, use
It is convenient, and detection while can once realize target multiple surfaces.
In order to solve the above technical problems, the utility model uses such a target open defect detection device, packet
Pedestal is included, the positioning device for carrying positioning target is provided on the pedestal, the detection for detecting target flatness fills
It sets and the gearshift for moving target detection device, the detection device includes the back phase-detecting for detecting the target back side
Machine, the side phase-detecting machine for detecting the positive positive phase-detecting machine of target and for detecting target side, the back phase-detecting machine are set to
Below the positioning device, the positive phase-detecting machine and the side phase-detecting machine are set to above the positioning device, the positive phase-detecting
Machine and the side phase-detecting machine are connect with institute displacement apparatus.
In a kind of preferred embodiment of the utility model, the positioning device includes placing bottom plate, the placement bottom
The upper surface of plate is provided with for the location structure with the backboard of target cooperation positioning target, and the upper surface for placing bottom plate is set
It is equipped with back phase-detecting machine avoid holes.
In a kind of preferred embodiment of the utility model, the location structure includes multiple locating wheels, multiple positioning
It is corresponding with the backboard shape of target to take turns the shape surrounded.
In a kind of preferred embodiment of the utility model, institute's displacement apparatus includes arranging along target length direction
For X to straight line mould group, the X is connected with the Y-direction straight line mould group arranged along target width direction to the movable end of straight line mould group, described
The movable end of Y-direction straight line mould group is connected with Z-direction straight line mould group along the vertical direction, the movable end connection of the Z-direction straight line mould group
There are the positive phase-detecting machine and the side phase-detecting machine.
In a kind of preferred embodiment of the utility model, there are two Z for connection on the movable end of the Y-direction straight line mould group
It include two to straight line mould group, two Z-direction straight line mould groups are located at the not ipsilateral of Y-direction straight line mould group.
In a kind of preferred embodiment of the utility model, the movable end of the Z-direction straight line mould group is connected with L-shaped phase
Machine mounting bracket.
In a kind of preferred embodiment of the utility model, positive phase-detecting machine, institute are connected in the camera mounting bracket
Positive phase-detecting machine is stated to arrange vertically.
In a kind of preferred embodiment of the utility model, it is connected with turntable in the camera mounting bracket, it is described
The movable end of turntable is connected with side phase-detecting machine, and the side phase-detecting machine is in tilted layout.
In a kind of preferred embodiment of the utility model, annular light source is installed on the phase turntable.
In a kind of preferred embodiment of the utility model, the pedestal includes rack, on the upper surface of the rack
It is connected with the marble of a pair of of parallel arrangement, is provided with resilient cushion between the rack and the marble.
The beneficial effects of the utility model are: the utility model structure is simple, easy to use, by being arranged on the base
Back phase-detecting machine, side phase-detecting machine and the cooperation of positive phase-detecting machine realize the synchronous detection on each surface of target, are not necessarily to turn in detection process
Turn or move target, improves the detection efficiency of target；Further, the utility model discloses a kind of target positioning devices
Design scheme, by being not only simple in structure in the placement multiple multiple locating wheels corresponding with the backboard shape of target of bottom plate,
And it is convenient for the pick-and-place of target；Further, the utility model discloses a kind of design scheme of gearshift, by using
Cooperation of the X to straight line mould group, Y-direction straight line mould group and Z-direction straight line mould group improves the detection effect of positive phase-detecting machine and side phase-detecting machine
Rate；Further, the utility model discloses the arrangement of a kind of positive phase-detecting machine and side phase-detecting machine, guarantee positive phase-detecting machine and
Side phase-detecting machine shares a gearshift to improve the integration of the utility model；Further, the utility model discloses
A kind of design scheme of pedestal improves the service life of the utility model by using rack and marmorean combine.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of target open defect detection device of the utility model embodiment；
Fig. 2 is the company of gearshift and detection device in a kind of target open defect detection device of the utility model embodiment
Connect schematic diagram；
Fig. 3 is the company of gearshift and detection device in a kind of target open defect detection device of the utility model embodiment
Connect schematic diagram；
In figure: 1- footed glass；2- rack；3- marble；4- crash roll；5-X is to straight line mould group stator；6-X is to straight line mould group
Mover；7- connection steelframe；8-Y is to straight line mould group stator；9- protective frame 10- carries on the back phase-detecting machine；11- locating wheel；12- places bottom plate；
13-Y is to straight line mould group mover；14- mover connecting plate；The left mould group fixed plate of 15-；The left servo mould group of 16-；The left mould group connection of 17-
Plate 18- servo motor fixed plate；19- servo motor；20- annular light source；The side 21- phase-detecting machine；22- turntable；23- right mould group is solid
Fixed board；The right servo mould group of 24-；25- right mould group connecting plate；The positive phase-detecting machine fixed plate of 26-；The positive phase-detecting machine -27 of 27-；28- target.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Chu is fully described by, and the described embodiments are only a part of the embodiments of the utility model, instead of all the embodiments.
Based on the embodiments of the present invention, the institute that those of ordinary skill in the art obtain without making creative work
There are other embodiments, fall within the protection scope of the utility model.
By Figure of description of the invention it is found that the utility model discloses a kind of target open defect detection device,
Rack 2 including having footed glass 1, footed glass 1 are fixed on 2 bottom of rack, and marble 3 is fixed on 2 top of rack, and crash roll 4 is fixed
Among rack 2 and marble 3, mix up fixed after level；X is fixed on above marble 3 to straight line mould group stator 5, even
It connects steelframe 7 and is fixed on X on straight line mould group mover 6, connect and Y-direction straight line mould group stator 8 is installed on steelframe 7；Place bottom plate 12
It is fixed among rack 2, is locked after mixing up level with screw and rack 2, back phase-detecting machine 10, which is mounted on, to be placed among bottom plate 12
Just in the following, locating wheel 11 is mounted in placement 12 side of bottom plate and intermediate fluting, protective frame 9 is fixed in rack 2 center of circular hole；
Y-direction straight line mould group stator 8 is fixed on connection steelframe 7, and it is two groups that locating wheel 11, which is divided to, and one group is used for located lateral target, one group
For longitudinal register target, it should be pointed out that the cooperation positioning of the backboard of the equal formula of two groups of locating wheels and target, to not influence target side
The detection in face, the locating wheel 11 for located lateral target include two locating wheels 11 of parallel arrangement, are used for longitudinal register target
The locating wheel of material includes a locating wheel 11, and mover connecting plate 14 is fixed on Y-direction straight line mould group mover 13, left mould group fixed plate
15 and right mould group fixed plate 23 be fixed on mover connecting plate 14；Left servo mould group 16 is mounted in left mould group fixed plate 15, left
Mould group connecting plate 17 is fixed on left 16 movable block of servo mould group, and servo motor fixed plate 18 is fixed on left mould group connecting plate 17
On, servo motor 19 is mounted on hollow rotating platform 22, and annular light source 20, side phase-detecting machine 21 and hollow rotating platform 22 are installed
In servo motor fixed plate 18；Right servo mould group 24 is mounted in right mould group fixed plate 23, and right mould group connecting plate 25 is fixed on
On right 24 movable block of servo mould group, positive phase-detecting machine fixed plate 26 is fixed on right mould group connecting plate 25, and positive phase-detecting machine 27 is mounted on
In positive phase-detecting machine fixed plate 26.
Target 28 is placed on right above back phase-detecting machine 10 by manual control hanging, detects 28 back side of target, then control boat
It hangs onto and places on bottom plate 12, so that the both sides of target 28 is nestled up the positioning of locating wheel 11, X is to straight line mould group mover 6 and Y-direction straight line
Mould group mover 13 translates, and moves above target 28 with side phase-detecting machine 21 and positive phase-detecting machine 27, left servo mould group 16 and the right side are watched
It takes the movement of 24 independent-lifting of mould group and adjusts side phase-detecting machine 21 and positive phase-detecting machine 27 respectively to the distance of target 28, detect target respectively
28 front and two sides.Servo motor 19 drives turntable 22 to rotate, and is rotated by 90 ° side phase-detecting machine 21 and annular light source 20
With 270 °, detect target 28 other two side.
It may be noted that the positioning of target is not limited to the structure that above-mentioned locating wheel 11 forms, can also directly put with formula
The positioning groove processed on bottom set plate 12, as long as the shape of the positioning groove can be corresponding with the backboard shape of target.
Meanwhile X disclosed above to straight line mould group, Y-direction straight line mould group, Z-direction straight line mould group can using slide unit mould group, servo mould group,
Guide rail+lead screw etc., as long as can be realized linear motion.
The above is only the specific embodiments of the utility model, and but protection scope of the utility model is not limited thereto,
Anyone skilled in the art is in the technical scope disclosed by the utility model, the variation that can readily occur in or replaces
It changes, should be covered within the scope of the utility model.Therefore, the protection scope of the utility model should be with claim
Subject to protection scope defined by book.
Claims (10)
1. a kind of target open defect detection device, including pedestal, it is provided on the pedestal for carrying determining for positioning target
Position device, the detection device for detecting target flatness and the gearshift for moving target detection device, feature exist
In: the detection device includes for detecting the back phase-detecting machine at the target back side, for detecting the positive positive phase-detecting machine of target and use
Side phase-detecting machine in detection target side, the back phase-detecting machine are set to below the positioning device, the positive phase-detecting machine and institute
It states side phase-detecting machine to be set to above the positioning device, the positive phase-detecting machine and the side phase-detecting machine connect with institute's displacement apparatus
It connects.
2. target open defect detection device according to claim 1, it is characterised in that: the positioning device includes placing
Bottom plate, the upper surface for placing bottom plate is provided with for the location structure with the backboard of target cooperation positioning target, described to put
The upper surface of bottom set plate is provided with back phase-detecting machine avoid holes.
3. target open defect detection device according to claim 2, it is characterised in that: the location structure includes multiple
Locating wheel, the shape that multiple locating wheels surround are corresponding with the backboard shape of target.
4. target open defect detection device according to claim 1, it is characterised in that: institute's displacement apparatus includes along target
The X of material length direction arrangement is connected with to the movable end of straight line mould group along target width direction arrangement to straight line mould group, the X
Y-direction straight line mould group, the movable end of the Y-direction straight line mould group are connected with Z-direction straight line mould group along the vertical direction, the Z-direction straight line
The movable end of mould group is connected with the positive phase-detecting machine and the side phase-detecting machine.
5. target open defect detection device according to claim 4, it is characterised in that: the work of the Y-direction straight line mould group
Connection includes two there are two Z-direction straight line mould group on moved end, and two Z-direction straight line mould groups are located at the not ipsilateral of Y-direction straight line mould group.
6. target open defect detection device according to claim 5, it is characterised in that: the work of the Z-direction straight line mould group
Moved end is connected with L-shaped camera mounting bracket.
7. target open defect detection device according to claim 6, it is characterised in that: solid in the camera mounting bracket
It is connected to positive phase-detecting machine, the positive phase-detecting machine is arranged vertically.
8. target open defect detection device according to claim 6, it is characterised in that: solid in the camera mounting bracket
It is connected to turntable, the movable end of the turntable is connected with side phase-detecting machine, and the side phase-detecting machine is in tilted layout.
9. target open defect detection device according to claim 8, it is characterised in that: be equipped with ring on the turntable
Shape light source.
10. target open defect detection device according to claim 7, it is characterised in that: the pedestal includes rack, institute
The marble for being connected with a pair of of parallel arrangement on the upper surface of rack is stated, is provided with damping between the rack and the marble
Pad.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920153817.0U CN209727792U (en) | 2019-01-29 | 2019-01-29 | A kind of target open defect detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920153817.0U CN209727792U (en) | 2019-01-29 | 2019-01-29 | A kind of target open defect detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209727792U true CN209727792U (en) | 2019-12-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920153817.0U Active CN209727792U (en) | 2019-01-29 | 2019-01-29 | A kind of target open defect detection device |
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| Country | Link |
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| CN (1) | CN209727792U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115950894A (en) * | 2023-03-10 | 2023-04-11 | 深圳市中钞科信金融科技有限公司 | Battery pole piece burr detection method and device and electronic equipment |
-
2019
- 2019-01-29 CN CN201920153817.0U patent/CN209727792U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115950894A (en) * | 2023-03-10 | 2023-04-11 | 深圳市中钞科信金融科技有限公司 | Battery pole piece burr detection method and device and electronic equipment |
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