CN209715770U - A kind of silicon wafer detection device - Google Patents
A kind of silicon wafer detection device Download PDFInfo
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- CN209715770U CN209715770U CN201920168321.0U CN201920168321U CN209715770U CN 209715770 U CN209715770 U CN 209715770U CN 201920168321 U CN201920168321 U CN 201920168321U CN 209715770 U CN209715770 U CN 209715770U
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- China
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- conveyer belt
- fixedly connected
- silicon wafer
- fixed frame
- sliding panel
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Abstract
The utility model relates to silicon wafer detection technique fields, in particular a kind of silicon wafer detection device, including pedestal, being fixedly connected sequentially from front to back on the inside of the pedestal has first conveyer belt, second conveyer belt and third conveyer belt, on the inside of the first conveyer belt, support plate is slidably connected on the inside of second conveyer belt and on the inside of third conveyer belt, and support plate is fixedly connected with pedestal, the support plate top end face is fixedly connected with partition, and partition and first conveyer belt, second conveyer belt and third conveyer belt are slidably connected, the pedestal top end face is fixedly connected with fixed frame, in the utility model, pass through the push plate of setting, the engagement connection of this set cooperating teeth wheel and rack and being fixedly connected for push plate and fixed plate, under control of the controller to motor, cooperate the evaluation and test of taking pictures of industrial camera, it can be the silicon wafer of fragmentation, there is the silicon wafer of dirt It is distinguished with non-defective unit silicon wafer, consequently facilitating categorised collection is handled, avoids the waste of resource.
Description
Technical field
The utility model relates to silicon wafer detection technique field, specially a kind of silicon wafer detection device.
Background technique
Element silicon provides inexhaustible source for the production of monocrystalline silicon, since element silicon is that reserves are most abundant in the earth's crust
One of element, solar battery is destined in this way into for the product of mass market, the advantage of reserves be also silicon at
One of the reason of for photovoltaic main material, being constantly progressive and develop with society are right for silicon wafer using more and more extensive
It is also higher and higher in the requirement of silicon wafer, so the detection device of some silicon wafers starts to come into our work, but part
Silicon wafer detection device can have the defects that certain when in use, and therefore, the demand to a kind of silicon wafer detection device is growing.
In silicon wafer detection field, presently, there are part detection device collection cannot be distinguished to silicon wafer well, because
It is part silicon chip surface there may be dirt, clearing up can be used, and directly will lead to the waste of resource as defective products, also
There is part silicon wafer detection device that cannot prevent from detecting the foreign matters such as the influence by extraneous factor, such as dust well, once silicon
There are dust foreign matters on piece top, it is possible that non-defective unit is handled as defective products, the phenomenon that erroneous judgement therefore, for above-mentioned
Problem proposes a kind of silicon wafer detection device.
Utility model content
The purpose of this utility model is to provide a kind of silicon wafer detection devices, to solve mentioned above in the background art ask
Topic.
To achieve the above object, the utility model provides the following technical solutions:
A kind of silicon wafer detection device, including pedestal, the pedestal inside are fixedly connected sequentially have the first conveying from front to back
Band, the second conveyer belt and third conveyer belt, the first conveyer belt inside, the second conveyer belt inside and third conveyer belt inside are
Support plate is slidably connected, and support plate is fixedly connected with pedestal, the support plate top end face is fixedly connected with partition, and partition
It is slidably connected with first conveyer belt, the second conveyer belt and third conveyer belt, the pedestal top end face is fixedly connected with fixed frame, institute
It states fixed frame top and is successively arranged motor, controller and bellows from left to right, and motor and controller are fixed with fixed frame and connected
It connects, the bellows are connected to fixed frame, and the main shaft end of the motor is fixedly connected with gear, are equipped with sliding on the outside of the gear
Plate, and sliding panel runs through fixed frame, the sliding panel is slidably connected with fixed frame, is fixedly connected on the inside of the sliding panel with teeth
Item, and wheel and rack engagement connection, the sliding panel bottom face is fixedly connected with fixed plate, and fixed plate and fixed frame slide
Connection, the fixed plate bottom face are fixedly connected with push plate, and push plate and first conveyer belt, the second conveyer belt and third conveyer belt
It is slidably connected, top is fixedly connected with filter screen on the inside of the bellows, and the filter screen bottom end is equipped with blower, and blower passes through company
Extension bar is fixedly connected with bellows, and the bellows bottom end is communicated with tracheae, is fixedly connected with industry on the inside of the fixed frame top end face
Camera.
Preferably, the tilt angle of the tracheae is 45 °, and tracheae is in the surface of the second conveyer belt.
Preferably, the partition has 2 pieces, and partition is symmetrically fixed on support plate top end face.
Preferably, the controller and motor, blower and industrial camera are electrically connected.
Preferably, the width of the sliding panel is the 2/3 of the width of pedestal, and fixed plate is at the bottom face center of sliding panel
Position.
Compared with prior art, the utility model has the beneficial effects that
1, in the utility model, pass through the push plate of setting, the engagement connection and push plate of this set cooperating teeth wheel and rack
Cooperate the evaluation and test of taking pictures of industrial camera under control of the controller to motor with being fixedly connected for fixed plate, it can be fragmentation
Silicon wafer, the silicon wafer for having dirt and non-defective unit silicon wafer distinguish, consequently facilitating categorised collection is handled, avoid the waste of resource；
2, in the utility model, by the tracheae of setting, this set cooperates blower to the traction of wind and the mistake of filter screen
It filters function and avoids misjudgment phenomenon caused by dust foreign matter consequently facilitating being dusted processing to the silicon wafer being put into.
Detailed description of the invention
Fig. 1 is the utility model overall structure diagram；
Fig. 2 is the mounting structure schematic diagram of the second conveyer belt of the utility model；
Fig. 3 is the mounting structure schematic diagram of the utility model rack gear.
In figure: 1- pedestal, 2- first conveyer belt, the second conveyer belt of 3-, 4- third conveyer belt, 5- support plate, 6- partition, 7-
Fixed frame, 8- motor, 9- controller, 10- bellows, 11- gear, 12- sliding panel, 13- rack gear, 14- fixed plate, 15- push plate,
16- filter screen, 17- blower, 18- tracheae, 19- industrial camera.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1-3 is please referred to, the utility model provides a kind of technical solution:
A kind of silicon wafer detection device, including pedestal 1,1 inside of the pedestal be fixedly connected sequentially from front to back have it is first defeated
Send band 2, the second conveyer belt 3 and third conveyer belt 4,2 inside of first conveyer belt, 3 inside of the second conveyer belt and third conveying
4 inside of band slidably connects support plate 5, and support plate 5 is fixedly connected with pedestal 1, and 5 top end face of support plate is fixedly connected
There is partition 6, and partition 6 is slidably connected with first conveyer belt 2, the second conveyer belt 3 and third conveyer belt 4,1 top end face of pedestal
It is fixedly connected with fixed frame 7,7 top of fixed frame is successively arranged motor 8, controller 9 and bellows 10, and motor from left to right
8 and controller 9 be fixedly connected with fixed frame 7, the bellows 10 are connected to fixed frame 7, and the main shaft end of the motor 8 is fixed
Be connected with gear 11, be equipped with sliding panel 12 on the outside of the gear 11, and sliding panel 12 runs through fixed frame 7, the sliding panel 12 with
Fixed frame 7 is slidably connected, and rack gear 13 is fixedly connected on the inside of the sliding panel 12, and gear 11 engages connection, institute with rack gear 13
It states 12 bottom face of sliding panel and is fixedly connected with fixed plate 14, and fixed plate 14 is slidably connected with fixed frame 7,14 bottom of fixed plate
End face is fixedly connected with push plate 15, and push plate 15 is slidably connected with first conveyer belt 2, the second conveyer belt 3 and third conveyer belt 4,
The 10 inside top of bellows is fixedly connected with filter screen 16, and 16 bottom end of filter screen is equipped with blower 17, and blower 17 passes through
Connecting rod is fixedly connected with bellows 10, and 10 bottom end of bellows is communicated with tracheae 18, fixed company on the inside of 7 top end face of fixed frame
It is connected to industrial camera 19.
The tilt angle of the tracheae 18 is 45 °, and tracheae 18, in the surface of the second conveyer belt 3, this set is convenient for
Dust is blown to 7 outside of fixed frame, avoids the phenomenon that dust influences 19 evaluation result of industrial camera, the partition 6 has 2 pieces,
And partition 6 is symmetrically fixed on 5 top end face of support plate, this arrangement avoid the silicon wafers in transmission process to slide into other conveyer belts
On phenomenon, the controller 9 is electrically connected with motor 8, blower 17 and industrial camera 19, and this set is convenient for control silicon wafer
The differentiation transportation work of dedusting work and silicon wafer, the width of the sliding panel 12 are the 2/3 of the width of pedestal 1, and fixed plate 14
Length be sliding panel 12 length 1/2, and fixed plate 14, in the bottom face center of sliding panel 12, this set guarantees
Silicon wafer can normally be open differentiation conveying, avoid the phenomenon that sliding panel 12 bumps against fixed frame 7.
The model of the model SD-02 conveyer belt of second conveyer belt 3, first conveyer belt 2 and third conveyer belt 4 is SD-
01 conveyer belt, the model 900U controller of controller 9,775 motor of model of motor 8, the model T40 wind of blower 17
Machine, the model UC130M camera of industrial camera 19.
Workflow: all electrical appliances in described device are external power supply, starter when use device, then
The silicon wafer of well cutting is put on the right side of the second conveyer belt 3, and the second conveyer belt 3 will drive silicon wafer and move downward, during movement
The wind that silicon wafer can first be drawn through blower 17 is dusted the surface of silicon wafer, and blower 17 can draw extraneous wind through 16 mistake of filter screen
Filter, then transtracheal 18 sprays to silicon wafer, the silicon wafer then cleared up can through 19 photographic analysis silicon chip state of industrial camera, then on
Data are passed to controller 9, if it is the silicon wafer of fragmentation, controller 9 can control motor 8 and rotate counterclockwise 90 degree, the mistake of rotation
Journey middle gear 11 can be engaged with rack gear 13, and sliding panel 12 can be slided with fixed frame 7, and push plate at this time 15 can slide backward, and
The silicon wafer of fragmentation is pushed to third conveyer belt 4, when the silicon wafer of fragmentation is transported away by third conveyer belt 4, controller 9 is quickly controlled
Motor 17 rotates clockwise 90 degree of resets, if the silicon chip surface that industrial camera 19 is analyzed is there are stain, controller 9 can be controlled
Motor 8 rotates counterclockwise 90 degree, and 15 forward slip of push plate at this time can be pushed to first conveyer belt 2 with flecked silicon wafer, to
When being transported away with flecked silicon wafer by first conveyer belt 2, quickly control motor 8 rotates counterclockwise 90 degree of resets to controller 9,
It is last only categorised collection processing to be carried out to silicon wafer in 1 left side of pedestal.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (5)
1. a kind of silicon wafer detection device, including pedestal (1), it is characterised in that: successively fixed from front to back on the inside of the pedestal (1)
First conveyer belt (2), the second conveyer belt (3) and third conveyer belt (4) are connected with, on the inside of the first conveyer belt (2), second defeated
It send on the inside of band (3) and is slidably connected support plate (5) on the inside of third conveyer belt (4), and support plate (5) and pedestal (1) are fixed
Connection, support plate (5) top end face are fixedly connected with partition (6), and partition (6) and first conveyer belt (2), the second conveyer belt
(3) it is slidably connected with third conveyer belt (4), pedestal (1) top end face is fixedly connected with fixed frame (7), the fixed frame (7)
Top is successively arranged motor (8), controller (9) and bellows (10) from left to right, and motor (8) and controller (9) with fixation
Frame (7) is fixedly connected, and the bellows (10) are connected to fixed frame (7), and the main shaft end of the motor (8) is fixedly connected with gear
(11), sliding panel (12) are equipped on the outside of the gear (11), and sliding panel (12) runs through fixed frame (7), the sliding panel (12)
It is slidably connected with fixed frame (7), is fixedly connected with rack gear (13) on the inside of the sliding panel (12), and gear (11) and rack gear (13)
Engagement connection, sliding panel (12) bottom face are fixedly connected with fixed plate (14), and fixed plate (14) and fixed frame (7) are slided
Connection, fixed plate (14) bottom face is fixedly connected with push plate (15), and push plate (15) and first conveyer belt (2), second defeated
Band (3) and third conveyer belt (4) is sent to be slidably connected, top is fixedly connected with filter screen (16) on the inside of the bellows (10), described
Filter screen (16) bottom end is equipped with blower (17), and blower (17) is fixedly connected by connecting rod with bellows (10), the bellows
(10) bottom end is communicated with tracheae (18), is fixedly connected with industrial camera (19) on the inside of fixed frame (7) top end face.
2. a kind of silicon wafer detection device according to claim 1, it is characterised in that: the tilt angle of the tracheae (18) is
45 °, and tracheae (18) is in the surface of the second conveyer belt (3).
3. a kind of silicon wafer detection device according to claim 1, it is characterised in that: the partition (6) has 2 pieces, and partition
(6) symmetrically it is fixed on support plate (5) top end face.
4. a kind of silicon wafer detection device according to claim 1, it is characterised in that: the controller (9) and motor (8),
Blower (17) and industrial camera (19) are electrically connected.
5. a kind of silicon wafer detection device according to claim 1, it is characterised in that: the width of the sliding panel (12) is bottom
The 2/3 of the width of seat (1), and fixed plate (14) is in the bottom face center of sliding panel (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920168321.0U CN209715770U (en) | 2019-01-30 | 2019-01-30 | A kind of silicon wafer detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920168321.0U CN209715770U (en) | 2019-01-30 | 2019-01-30 | A kind of silicon wafer detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209715770U true CN209715770U (en) | 2019-12-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920168321.0U Active CN209715770U (en) | 2019-01-30 | 2019-01-30 | A kind of silicon wafer detection device |
Country Status (1)
| Country | Link |
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| CN (1) | CN209715770U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111578055A (en) * | 2020-04-18 | 2020-08-25 | 青岛奥利普自动化控制系统有限公司 | Electronic batch recording equipment and method |
-
2019
- 2019-01-30 CN CN201920168321.0U patent/CN209715770U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111578055A (en) * | 2020-04-18 | 2020-08-25 | 青岛奥利普自动化控制系统有限公司 | Electronic batch recording equipment and method |
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