CN209544289U - A kind of identification of wafer class product and carry integrated apparatus - Google Patents
A kind of identification of wafer class product and carry integrated apparatus Download PDFInfo
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- CN209544289U CN209544289U CN201920089193.0U CN201920089193U CN209544289U CN 209544289 U CN209544289 U CN 209544289U CN 201920089193 U CN201920089193 U CN 201920089193U CN 209544289 U CN209544289 U CN 209544289U
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- wafer
- identification
- mechanical arm
- integrated apparatus
- class product
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- 238000000034 method Methods 0.000 claims abstract description 6
- 239000013078 crystal Substances 0.000 claims description 9
- 230000003028 elevating effect Effects 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a kind of identification of wafer class product and carry integrated apparatus, comprising: first mechanical arm, front end is equipped with vacuum chuck, for the wafer in wafer cassette to be adsorbed and carried；Identification module is set in the first mechanical arm, for carrying out any time point in handling process to wafer in the first mechanical arm, is identified to the wafer adsorbed on the sucker.The utility model reaches the occupied space for not only saving equipment, but also saves the read access time for individually reading identification code, utilization rate is all improved on room and time, to improve the production efficiency in workshop.
Description
Technical field
The utility model relates to wafer class product haulage equipment technical fields in semicon industry wafer automated process, more
Identification and carrying integrated apparatus in particular it relates to a kind of wafer class product.
Background technique
In semicon industry, crystal column surface is radium-shine identification code.When being carried using mechanical arm to wafer, need
It is read out using identification code of the code reader to crystal column surface.
However, mechanical arm is two movements to the reading of crystal column surface identification code to the carrying of wafer and code reader at present
(step)；Also, the two movements separate operation, and two are separately performed movement and are bound to production run to be increased
Time reduces production efficiency.
Therefore, it is necessary to design a kind of identification of wafer class product and carry integrated apparatus, realize identified in carrying it is brilliant
Round identification code improves production efficiency to save the time.
Utility model content
The purpose of the utility model is to overcome drawbacks described above of the existing technology, provide a kind of knowledge of wafer class product
Not and integrated apparatus is carried, to save equipment occupation space, and the read access time of identification code on wafer is saved, improved
Productive temp.
To achieve the above object, the technical solution of the utility model is as follows:
A kind of identification of wafer class product and carry integrated apparatus, comprising:
First mechanical arm, front end is equipped with vacuum chuck, for the wafer in wafer cassette to be adsorbed and carried；
Identification module is set in the first mechanical arm, for carrying out handling process to wafer in the first mechanical arm
In any time point, the wafer adsorbed on the sucker is identified.
Further, the first mechanical arm is equipped with opening, and the identification module is by the opening to being located below
Wafer identified.
Further, the opening is located at the top for the crystal column surface being exposed to other than the sucker.
Further, the identification module is vertically arranged in the opening.
Further, the identification module is a reading code unit, the identification code being equipped with for reading crystal column surface.
Further, the reading code unit is industrial code reader.
Further, further includes: connect the second mechanical arm of the first mechanical arm, the second mechanical arm, which is equipped with, to be risen
Descending mechanism, for driving the first mechanical arm to move up and down.
Further, further includes: be rotatablely connected the third mechanical arm of the second mechanical arm, the third mechanical arm connection
Rotating drive mechanism.
Further, the rotating drive mechanism is motor.
Further, the motor is servo motor.
It can be seen from the above technical proposal that the utility model is by being integrated into industrial machinery arm end for code reader, in machine
During tool arm carries wafer, the identification code of crystal column surface is read with code reader, thus reach the occupied space for both saving equipment,
The read access time that code reader individually reads identification code is saved again, utilization rate is all improved on room and time, to improve
The production efficiency in workshop.
Detailed description of the invention
Fig. 1 is the identification and carrying integrated apparatus structure of a kind of wafer class product of one preferred embodiment of the utility model
Schematic diagram.
Specific embodiment
With reference to the accompanying drawing, specific embodiment of the present utility model is described in further detail.
It should be noted that in following specific embodiments, when the embodiments of the present invention is described in detail, in order to
The structure of the utility model is clearly showed that in order to illustrate, spy does not draw to the structure in attached drawing according to general proportion, goes forward side by side
Gone partial enlargement, deformation and simplify processing, therefore, should be avoided in this, as the restriction to the utility model to understand.
In following specific embodiment of the present utility model, referring to FIG. 1, Fig. 1 is that the utility model one is preferably implemented
A kind of identification of wafer class product of example and carrying integrated apparatus structural schematic diagram.As shown in Figure 1, one kind of the utility model
The identification of wafer class product and carrying integrated apparatus, comprising: the industrial robot equipped with multiple mechanical arm 6-8, and installation
Identification module 1 on robot arm end.
Please refer to Fig. 1.First mechanical arm 6 is provided on industrial robot.Vacuum is equipped on the front end of first mechanical arm 6
Sucker 2；Vacuum chuck 2 carries the wafer of absorption 3 for adsorbing to the wafer 3 in wafer cassette.
Identification module 1 is arranged in first mechanical arm 6, and can be located on the upper surface of first mechanical arm 6.Identification module 1
For carrying out any time point in handling process to wafer 3 in first mechanical arm 6, the wafer 3 adsorbed on sucker 2 is known
Not.
Please refer to Fig. 1.Can offer an opening in first mechanical arm 6, identification module 1 can by the opening to being located under
The wafer 3 of side is identified.Specifically, opening may be provided at the upper position for being located at 3 surface of wafer being exposed to other than sucker 2
It sets.Then, identification module 1 is vertically arranged in opening, exposes the working port of identification module 1 from opening lower section.
As an optional embodiment, identification module 1 can be a reading code unit；Reading code unit 1 can be used for reading
The identification code that 3 surface of wafer is equipped with.Further, industrial code reader (code reader) can be used in reading code unit 1.In 3 table of wafer
It is radium-shine on face to have identification code, when wafer 3 is carried using mechanical arm 6-8 in one side, it is same that industrial code reader 1 can be used on one side
When the identification code on 3 surface of wafer is read out, so as to save individually read identification code time, on room and time all
Utilization rate can be improved, the production efficiency in workshop further can be improved.
Second mechanical arm 7 and third mechanical arm 8 are also provided on industrial robot.Wherein, second mechanical arm 7 is connected to
The rear end of first mechanical arm 6, third mechanical arm 8 are connected to the rear end of second mechanical arm 7.
Elevating mechanism 5 is equipped in second mechanical arm 7；Elevating mechanism 5 is for driving first mechanical arm 6 to move up and down.The
Two mechanical arms 7 can connect first mechanical arm 6 by flange 4.
Third mechanical arm 8 can be rotatablely connected second mechanical arm 7 by shaft, and the rear end connection rotation of third mechanical arm 8 is driven
Motivation structure 9.
Rotating drive mechanism 9 is mountable on a firm banking 10.
As an optional embodiment, rotating drive mechanism 9 can be motor.Further, motor 9 can be used and be watched
Motor is taken, rotates control precision to improve.In this way, robot can three-dimensional motion mode realize the carrying to wafer 3, and
Barcode scanning identification is carried out to wafer 3 while carrying, realizes carrying and barcode scanning integration, and save equipment on the whole
Occupied space shortens barcode scanning beat, to improve production efficiency.
In conclusion the utility model carries wafer mistake by the way that code reader is integrated into industrial machinery arm end, in mechanical arm
Cheng Zhong reads the identification code of crystal column surface with code reader, to reach the occupied space for not only saving equipment, but also saves code reader
The read access time for individually reading identification code, all improves utilization rate on room and time, to improve the production effect in workshop
Rate.
Above is only the preferred embodiment of the utility model, and embodiment is not to protect to limit the patent of the utility model
Range is protected, therefore equivalent structure made by all specifications and accompanying drawing content with the utility model changes, and should all similarly wrap
Containing within the protection scope of the present utility model.
Claims (10)
1. identification and the carrying integrated apparatus of a kind of wafer class product characterized by comprising
First mechanical arm, front end is equipped with vacuum chuck, for the wafer in wafer cassette to be adsorbed and carried；
Identification module is set in the first mechanical arm, for carrying out in handling process in the first mechanical arm to wafer
Any time point identifies the wafer adsorbed on the sucker.
2. identification and the carrying integrated apparatus of wafer class product according to claim 1, which is characterized in that described first
Mechanical arm is equipped with opening, and the identification module identifies underlying wafer by the opening.
3. identification and the carrying integrated apparatus of wafer class product according to claim 2, which is characterized in that the opening
Positioned at the top for the crystal column surface being exposed to other than the sucker.
4. identification and the carrying integrated apparatus of wafer class product according to claim 3, which is characterized in that the identification
Module is vertically arranged in the opening.
5. identification and the carrying integrated apparatus of wafer class product according to claim 1 to 4, which is characterized in that institute
Stating identification module is a reading code unit, the identification code being equipped with for reading crystal column surface.
6. identification and the carrying integrated apparatus of wafer class product according to claim 5, which is characterized in that the reading code
Unit is industrial code reader.
7. identification and the carrying integrated apparatus of wafer class product according to claim 1, which is characterized in that further include:
The second mechanical arm of the first mechanical arm is connected, the second mechanical arm is equipped with elevating mechanism, for driving described first
Mechanical arm moves up and down.
8. identification and the carrying integrated apparatus of wafer class product according to claim 7, which is characterized in that further include:
It is rotatablely connected the third mechanical arm of the second mechanical arm, the third mechanical arm connects rotating drive mechanism.
9. identification and the carrying integrated apparatus of wafer class product according to claim 8, which is characterized in that the rotation
Driving mechanism is motor.
10. identification and the carrying integrated apparatus of wafer class product according to claim 9, which is characterized in that the electricity
Machine is servo motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920089193.0U CN209544289U (en) | 2019-01-18 | 2019-01-18 | A kind of identification of wafer class product and carry integrated apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920089193.0U CN209544289U (en) | 2019-01-18 | 2019-01-18 | A kind of identification of wafer class product and carry integrated apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209544289U true CN209544289U (en) | 2019-10-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920089193.0U Active CN209544289U (en) | 2019-01-18 | 2019-01-18 | A kind of identification of wafer class product and carry integrated apparatus |
Country Status (1)
| Country | Link |
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| CN (1) | CN209544289U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113555304A (en) * | 2021-08-06 | 2021-10-26 | 深圳优艾智合机器人科技有限公司 | Wafer cassette conveying device, equipment, system and conveying method thereof |
| CN116045827A (en) * | 2023-02-22 | 2023-05-02 | 无锡星微科技有限公司 | System and method for detecting thickness and bending degree of large-size wafer |
-
2019
- 2019-01-18 CN CN201920089193.0U patent/CN209544289U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113555304A (en) * | 2021-08-06 | 2021-10-26 | 深圳优艾智合机器人科技有限公司 | Wafer cassette conveying device, equipment, system and conveying method thereof |
| CN116045827A (en) * | 2023-02-22 | 2023-05-02 | 无锡星微科技有限公司 | System and method for detecting thickness and bending degree of large-size wafer |
| CN116045827B (en) * | 2023-02-22 | 2023-11-10 | 无锡星微科技有限公司 | System and method for detecting thickness and bending degree of large-size wafer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 201702 Building 2, No. 338, Jiuye Road, Qingpu District, Shanghai Patentee after: Shanghai Forsyte Robot Co.,Ltd. Address before: Room 305-308, Kaike International Building, Area A, 1801 Hongmei Road, Xuhui District, Shanghai, 2003 Patentee before: SHANGHAI FORESIGHT ROBOTICS Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 201712 Building 2, No. 338, Jiuye Road, Qingpu District, Shanghai Patentee after: Shanghai Fosaite Technology Co.,Ltd. Country or region after: China Address before: 201702 Building 2, No. 338, Jiuye Road, Qingpu District, Shanghai Patentee before: Shanghai Forsyte Robot Co.,Ltd. Country or region before: China |