CN209491443U - A kind of micromachining device of ultraviolet laser - Google Patents

Abstract

The utility model relates to field of laser processing, more particularly to a kind of micromachining device of ultraviolet laser, the micromachining device of the ultraviolet laser include ultraviolet laser, at least one for reducing laser power decaying eyeglass, beam expanding lens and focus pack, wherein, ultraviolet laser is transmitted to decaying eyeglass after generating laser, beam expanding lens is transmitted to after reducing power by decaying eyeglass, it is transmitted to focus pack after the multiple change spot size by adjusting beam expanding lens again, is exported after being focused finally by focus pack；The utility model realizes the processing of small, small in size, processing request the is fine product of fusing point by designing a kind of ultraviolet laser micromachining device.

Description

A kind of micromachining device of ultraviolet laser

Technical field

The utility model relates to field of laser processing, and in particular to a kind of micromachining device of ultraviolet laser.

Background technique

In recent years, as the micromation of electronic product, electronic component, micro-machined demand increasingly increase, micro Process is The processing of very high-precision size and shape is obtained with small resection, it is general using laser processing.Laser processing is laser system It unites most common application, according to the mechanism of laser beam and material interaction, substantially laser processing can be divided into laser heat processing Two classes are processed with photochemical reaction.Laser heat processing refers to the fuel factor generated using laser beam projects to material surface to complete Process, including the cutting of laser welding, laser engraving, surface modification, laser mark, laser drill and micro Process etc.； Photochemical reaction processing refers to that laser beam is irradiated to object, causes or control photochemical reaction by high-density laser high-energy photon Process.Including photochemical precipitation, stereolithography, laser engraving etching etc..

It when laser is applied to micro Process, is generally processed using ultraviolet laser, ultraviolet laser processes that focal beam spot is small, hot shadow Sound is small, high-efficient, is particularly suitable for micro Process, but product low for some fusing points, small in size, processing request is fine, needs to use Special ultraviolet processing unit (plant) is just able to achieve, and therefore, designs a kind of special ultraviolet processing unit (plant) for fine product processing The technical issues of always this field is mainly studied.

Utility model content

The technical problem to be solved by the present invention is in view of the above drawbacks of the prior art, provide a kind of small-power The fine laser processing for microminiaturized product ultraviolet laser micromachining device, overcome the prior art can not it is low to fusing point, The defect that fine product small in size is processed.

The technical scheme adopted by the utility model to solve the technical problem is as follows: providing a kind of micro Process dress of ultraviolet laser Set, the micromachining device include ultraviolet laser, at least one for reducing the decaying eyeglass of laser power, beam expanding lens and Focus pack, wherein ultraviolet laser is transmitted to decaying eyeglass after generating laser, is transmitted to after reducing power by decaying eyeglass Beam expanding lens, then by adjust beam expanding lens multiple change spot size after be transmitted to focus pack, finally by focus pack into It is exported after line focusing.

Wherein, preferred version are as follows: the focus pack includes galvanometer mechanism and an amasthenic lens.

Wherein, preferred version are as follows: the micromachining device further includes one for changing light path and carries out the light of optical transport Learn eyeglass, wherein ultraviolet laser generates laser, and laser is transmitted to decaying mirror after changing the propagation path of laser by optical mirror slip Piece, then it is transmitted to beam expanding lens after passing through decaying eyeglass reduction power, then after the multiple change spot size for passing through adjusting beam expanding lens It is transmitted to focus pack, is exported after being focused finally by focus pack.

Wherein, preferred version are as follows: the optical mirror slip is ultraviolet reflectance mirror.

Wherein, preferred version are as follows: the beam expanding lens is the ultraviolet beam expanding lens of zoom, and zoom range is 2-10 times.

Wherein, preferred version are as follows: the ultraviolet wavelength of the ultraviolet laser is 266nm-355nm.

Wherein, preferred version are as follows: the micromachining device further includes one for the blocking laser under the fortuitous events such as power-off Electric-controlled mechanical barrier gate.

Wherein, preferred version are as follows: the micromachining device further includes one simulating for operator's air exercise shelves of marking on a map Red preview module.

Wherein, preferred version are as follows: the hot spot after the focus pack focuses is 5um-45um.

Wherein, preferred version are as follows: the galvanometer mechanism is the galvanometer of 10mm-14mm.

The beneficial effects of the utility model are that compared with prior art, the utility model is a kind of ultraviolet sharp by designing The micromachining device of light realizes the processing of small, small in size, processing request the is fine product of fusing point, wherein utilizes decaying eyeglass Laser power is reduced under the premise of not changing the parameters such as the pulse frequency of laser, realizes small-power processing, further, is led to The multiple for crossing beam expanding lens, which is adjusted, generates micron order focal beam spot, realizes the processing of fine product, further, passes through setting Barrier gate and red preview module considerably increase operation convenience and the safety of device.

Detailed description of the invention

Below in conjunction with accompanying drawings and embodiments, the utility model is described in further detail, in attached drawing:

Fig. 1 is the structural schematic diagram of the micromachining device of ultraviolet laser in the utility model；

Fig. 2 is the principle formula figure in the utility model.

Specific embodiment

Now in conjunction with attached drawing, elaborate to the preferred embodiment of the utility model.

As described in Figure 1, the utility model provides the most preferred embodiment of the micromachining device of ultraviolet laser.

With reference to Fig. 1, a kind of micromachining device of ultraviolet laser, the micromachining device includes ultraviolet laser, optical frames Piece, at least one for reducing laser power decaying eyeglass, beam expanding lens and focus pack, wherein ultraviolet laser generate Laser, optical mirror slip, which changes, is transmitted to decaying eyeglass for laser after the propagation path of laser, then reduces power by decaying eyeglass After be transmitted to beam expanding lens, then the multiple by adjusting beam expanding lens change spot size after be transmitted to focus pack, finally by poly- Burnt component exports after being focused.

Specifically, 1 generation wavelength of ultraviolet laser is the ultraviolet laser of 355nm, is transmitted to decaying mirror along optical mirror slip 2 Piece 3, the optical mirror slip 2 are ultraviolet reflectance mirror 2, i.e. ultraviolet laser is totally reflected by ultraviolet reflectance mirror 2, are all-trans to be incident upon and decline Subtract on eyeglass 3, after reducing laser power (parameters such as pulse, the frequency of laser will not be changed) by decaying eyeglass 3, is transmitted to expansion Beam mirror 4, beam expanding lens 4 are the ultraviolet beam expanding lens of zoom, 2-10 times of zoom may be implemented, the multiple for changing beam expanding lens 4 is adjustable The spot size of ultraviolet laser, ultraviolet laser are expanded by beam expanding lens 4 so as to adjust focusing group after spot size, is transmitted to Part, focus pack include galvanometer mechanism 7 and amasthenic lens 8, wherein galvanometer mechanism 7 can be according to mark map file in marking system Driving under realize laser scanning, the laser after scanning by amasthenic lens 8 focusing form minimum focal beam spot, minimum purple The ultraviolet laser micro Process to product is completed in outer laser focal beam spot output.

Wherein, galvanometer mechanism 7 is the galvanometer of 10mm-14mm, and amasthenic lens 8 is F100 or F160 amasthenic lens, wherein is expanded Beam mirror 4, ultraviolet galvanometer mechanism 7 and 8 three of ultraviolet amasthenic lens constitute a system, can carry out optical coupled, obtain tiny Focal beam spot, 5 μm -45 μm of focal beam spot can be obtained, can be needed to carry out Laser Micro-Machining to product at this time according to product.

Total reflection is also known as total internal reflection, refers to that light is mapped to light by optically denser medium (i.e. refractive index of the light in this medium big) and dredges When the interface of medium (i.e. light refractive index in this medium is small), the phenomenon that is all reflected back toward in former medium.Light is by close Jie of light When matter enters optically thinner medium, normal refraction is left, when incidence angle increases to certain situation, fringence prolongs surface progress, i.e., When refraction angle is 90 °, which is known as critical angle, if incidence angle is greater than critical angle, no refraction, whole equal return lights of light Close medium, this phenomenon is known as being totally reflected, and what fiber optic communication utilized is exactly the principle being totally reflected.

Eyeglass of decaying is a kind of transflection eyeglass, can realize transmission a part, reflection a part, to reach drop for laser The effect of low laser power.

With reference to Fig. 2, wherein λ is optical maser wavelength, φ_in.For launching spot diameter, APO is launching spot diameter/design Maximum entrance pupil, f are focal length, M²For beam quality, the micromachining device of the ultraviolet laser is that the ultraviolet of 355nm swashs using wavelength Light, and tiny hot spot is obtained by changing focal length, to complete the processing to fine product.

Further, the micromachining device further includes a motor machine barrier gate 5, and the motor machine barrier gate 5 can be with Power-off etc. under fortuitous events blocking laser pass through, improve the safety of operator in operation.

For motor machine barrier gate in the light-emitting window of ultraviolet laser, matched with optical gate is absorber, can make ultraviolet laser Prevent the laser of outer optical path to transmit in the case where being not related to light, mechanical optical shutter be it is movable, when optical gate leaves light, outer optical path Light out.

Further, the micromachining device further includes red preview module 6, and red preview module 6 is ultraviolet light Red preview module, is case progress feux rouges simulation of marking on a map in order to facilitate the operation of personnel's air exercise, this design considerably increases device Operation convenience.

As described above, only the best embodiment of the utility model is not intended to limit the scope of the utility model, All equivalent change or modifications made according to the patent scope of the utility model are all that the utility model is covered.

Claims (10)

1. a kind of micromachining device of ultraviolet laser, the micromachining device include ultraviolet laser, it is characterised in that: described micro- Processing unit (plant) further includes at least one decaying eyeglass, beam expanding lens and focus pack for reducing laser power, wherein ultraviolet Laser is transmitted to decaying eyeglass after generating laser, is transmitted to beam expanding lens after reducing power by decaying eyeglass, then pass through adjusting The multiple of beam expanding lens is transmitted to focus pack after changing spot size, exports after being focused finally by focus pack.

2. micromachining device according to claim 1, it is characterised in that: the focus pack includes that galvanometer mechanism and one are poly- Zoom lens.

3. micromachining device according to claim 1, it is characterised in that: the micromachining device further include one for changing Light path and the optical mirror slip for carrying out optical transport, wherein ultraviolet laser generates laser, and optical mirror slip changes the propagation road of laser Laser is transmitted to decaying eyeglass after diameter, then is transmitted to beam expanding lens after reducing power by decaying eyeglass, then expand by adjusting The multiple of mirror is transmitted to focus pack after changing spot size, exports after being focused finally by focus pack.

4. micromachining device according to claim 3, it is characterised in that: the optical mirror slip is ultraviolet reflectance mirror.

5. micromachining device according to claim 1, it is characterised in that: the beam expanding lens is the ultraviolet beam expanding lens of zoom, is become Times range is 2-10 times.

6. micromachining device according to claim 1, it is characterised in that: the optical maser wavelength of the ultraviolet laser is 266nm-355nm。

7. micromachining device according to claim 1, it is characterised in that: the micromachining device further includes one for disconnected The electric-controlled mechanical barrier gate of blocking laser under the fortuitous events such as electricity.

8. micromachining device according to claim 1, it is characterised in that: the micromachining device further includes one for operating Personnel's air exercise is marked on a map the red preview module that shelves are simulated.

9. micromachining device according to claim 2, it is characterised in that: the hot spot after the focus pack focuses is 5um- 45um。

10. micromachining device according to claim 2, it is characterised in that: the galvanometer mechanism is the vibration of 10mm-14mm Mirror.