CN209411281U - A kind of wafer-load system - Google Patents
A kind of wafer-load system Download PDFInfo
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- CN209411281U CN209411281U CN201821046883.XU CN201821046883U CN209411281U CN 209411281 U CN209411281 U CN 209411281U CN 201821046883 U CN201821046883 U CN 201821046883U CN 209411281 U CN209411281 U CN 209411281U
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Abstract
The utility model relates to solar energy film processing technique fields, more particularly to a kind of wafer-load system, it is used for the column tool equipped with charging tray into column tool conveying device by being delivered to charging tray column tool separation station into column tool station, first handling device, which is used to empty column tool having separation station by charging tray column, moves to sky column tool station, second handling device has separation station by charging tray column for the charging tray equipped with chip in having column and moves to charging tray station, empty tray is moved into empty tray station by charging tray station again, and empty tray is moved in the empty column tool on sky column tool station by empty tray station, third handling device is used to by charging tray station move to the chip in charging tray in the gaily decorated basket for loading gaily decorated basket station, it delivers tool conveying device for sale and is used to for the column column the Ju Youkong tool station equipped with empty tray being delivered to and deliver tool station for sale and remove.The reliability and stability of equipment are improved, realize the full-automation for entering outflow from column tool, efficiency of transmission and precision are high.
Description
Technical field
The utility model relates to solar energy film processing technique field more particularly to a kind of wafer-load systems.
Background technique
Big production capacity is a very important index of current solar energy wafer product line.But due to solar energy film
The special tectonic of wafer (wafer), the i.e. substrate of wafer (substrate) small, film than raw film (film) on it
(film) it is flexible inflexibility, greatly limits the rate of loading of solar energy film product line, and then influence product line
Production capacity is promoted.
Currently, existing pan feeding mode is coin stack (coin storehouse)+single arm robot, which is asked there are following
Topic: 1, coin stack i.e. by solar energy film stacked in multi-layers together, will lead to adhesion, and be difficult to find and eliminate, can shadow
Ring the stability and reliability of equipment.2, single arm robot inputs a piece of wafer every time, limits the promotion of production capacity.
Utility model content
(1) technical problems to be solved
The technical problems to be solved in the utility model is to solve existing wafer-load system to be easy to cause wafer film heap
It is folded to be adhered, and loading process reliability and stability are poor, the lower problem of production efficiency.
(2) technical solution
In order to solve the above-mentioned technical problem, the utility model provides a kind of wafer-load system, and column has conveyor module, material
Disk transfer module and carrying wafers module, column tool conveyor module include into column tool conveying device, deliver for sale tool conveying device and
First handling device, the charging tray transfer module include the second handling device, and the carrying wafers module includes that third carries dress
It sets, it is described to be used for the column tool equipped with charging tray into column tool conveying device by being delivered to charging tray column tool separation station into column tool station
On, first handling device be used for by empty column tool by the charging tray column have separation station move to sky column tool station, described second
Handling device be used to having on column in the charging tray equipped with chip have separation station by the charging tray column and move to charging tray station, then sky is expected
Disk moves to empty tray station by the charging tray station, and empty tray is moved on the empty column tool station by the empty tray station
Empty column tool in, the third handling device, which is used to move to the chip in charging tray by the charging tray station, loads gaily decorated basket station
In the gaily decorated basket, it is described deliver tool conveying device for sale and be used to for the column tool equipped with empty tray being delivered to by the empty column tool station deliver tool work for sale
Position simultaneously removes.
Wherein, the charging tray transfer module further includes lifting device, and the lifting device is set to the charging tray column tool point
It rises and falls from station, the column for that will be equipped with charging tray has, so that second handling device enters the bottom of column tool simultaneously
Fall in charging tray on second handling device.
Wherein, the carrying wafers module further includes calibrating installation, and the calibrating installation is located at the charging tray station and institute
It states on the calibration station loaded between gaily decorated basket station, for calibrating to moving to the chip before the gaily decorated basket.
Wherein, the third handling device includes servo motor, guide rail, sliding block and manipulator, and the guide rail is along the material
Disk station to the loading gaily decorated basket station direction is arranged, and the sliding block is set on the guide rail, the manipulator and the cunning
Block connection, the manipulator drive the sliding block to move along the guide rail for grabbing transfer chip, the servo motor.
Wherein, second handling device includes sideways transfer mechanism and longitudinal carrying mechanism, the sideways transfer mechanism
It include guide rail, sliding block and servo motor with longitudinal carrying mechanism, the guide rail of the sideways transfer mechanism is described in
Empty tray station to the empty column tool station direction is arranged, the guide rail of the longitudinal direction carrying mechanism along the charging tray station extremely
The setting of empty tray station direction, the sliding block are set on the guide rail, and longitudinal carrying mechanism further includes charging tray
Fixed frame, the charging tray fixed frame are connect with the sliding block of longitudinal carrying mechanism, the servo of the longitudinal direction carrying mechanism
Motor can drive the sliding block of longitudinal carrying mechanism to drive the charging tray fixed frame in the charging tray station and the empty tray
It is moved back and forth between station, and the guide rail of longitudinal carrying mechanism is connect with the sliding block of the sideways transfer mechanism, institute
The servo motor for stating sideways transfer mechanism drives the sliding block of the sideways transfer mechanism to drive longitudinal carrying implement
The charging tray fixed frame on structure has between separation station and the charging tray station and the empty tray work on the charging tray column
It is moved back and forth between position and the empty column tool station.
Wherein, first handling device includes servo motor, guide rail, sliding block and column tool fixed frame, and the guide rail is along institute
It states charging tray column tool separation station to the empty column tool station direction to be arranged, the sliding block is set on the guide rail, the column tool
Fixed frame is connected with the slide block, and the servo motor drives the sliding block to move along the guide rail.
Wherein, the bracket that the lifting device includes motor and has for placing the column equipped with charging tray, the motor and institute
Stating bracket connection drives the bracket to rise or fall.
Wherein, the manipulator is equipped with the sucker for adsorbing chip.
Wherein, the calibrating installation includes UVW vision alignment platform.
Wherein, it is described into column have conveying device and it is described deliver for sale tool conveying device include conveyer belt.
(3) beneficial effect
The above-mentioned technical proposal of the utility model has the advantages that the wafer-load system of the utility model, in column tool
It can be packed into the charging tray being laminated, every layered material disk can load more wafers respectively, and it is contactless between every wafer, it effectively prevents
The problem of stacking leads to adhesion between chip.Column tool is transported to charging tray column tool separation station into column tool conveying device, second removes
Charging tray column is had the charging tray taking-up on separation station in column tool and is put in charging tray station by shipping unit, after all charging trays all take out,
Empty column tool and the charging tray taken out are allocated as both direction, and all the way, empty column tool is carried on sky column tool station by the first handling device, etc.
Empty tray to be loaded.Another way, the charging tray that tool takes out from column, after third handling device all takes out chip therein, the
Empty tray is just carried at empty tray station by two handling devices, if there are less than column tools, second to carry for empty column tool station
Device just removes the empty tray on empty tray station into the column tool on empty column tool station, after tool fills charging tray after column, delivers tool for sale
The column filled tool is just delivered to by conveying device delivers tool station for sale, and outputs this on AGV (automated guided vehicle), by
This utility model improves the reliability and stability of equipment, realizes the full-automation that outflow is entered from column tool, and chip passes
Defeated efficiency and precision are high, and can extract more wafers simultaneously, and without adhesion, improve production capacity and production efficiency.
In addition to the utility model described above solve the technical issues of, composition technical solution technical characteristic and
Have except advantage brought by the technical characteristic of these technical solutions, the other technical characteristics of the utility model and these technologies are special
The advantages of sign is brought, will further illustrate in conjunction with attached drawing.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model embodiment wafer-load system；
Fig. 2 is the flow chart of the utility model embodiment wafer-load method.
In figure: 1: having station into column；2: delivering tool station for sale；3: charging tray column tool separation station；4: empty column has station；5: material
Disk station；6: calibration station；7: loading gaily decorated basket station；8: empty tray station；9a: servo motor；9b: servo motor；9c: servo
Motor；9d: servo motor；10；Manipulator；11: charging tray fixed frame；12a: guide rail；12b: guide rail；12c: guide rail；12d: guide rail；
13a: sliding block；13b: sliding block；13c: sliding block；13d: sliding block；14: column has fixed frame；100: column has conveyor module；101: into column
Has conveying device；102: delivering tool conveying device for sale；103: column tool；104: charging tray；105: the first handling devices；200: charging tray is carried
Module；201: lifting device；202: the second handling devices；300: carrying wafers module；301: third handling device；302: calibration
Device；303: the gaily decorated basket；2021: sideways transfer mechanism；2022: longitudinal carrying mechanism.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is a part of the embodiment of the utility model, instead of all the embodiments.Based on the reality in the utility model
Apply example, those of ordinary skill in the art's every other embodiment obtained without making creative work, all
Belong to the range of the utility model protection.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
The concrete meaning of language in the present invention.
In addition, in the description of the present invention, unless otherwise indicated, " multiple ", " more ", " multiple groups " are meant that two
A or more than two, " several ", " several ", " several groups " are meant that one or more.
As shown in Figure 1, wafer-load system provided by the embodiment of the utility model, including column have conveyor module 100, charging tray
Transfer module 200 and carrying wafers module 300, column tool conveyor module 100 include into column tool conveying device 101, deliver tool conveying for sale
Device 102 and the first handling device 105, charging tray transfer module 200 include the second handling device 202, carrying wafers module 300
Including third handling device 301, into column tool conveying device 101 for that will have 103 by having station 1 into column equipped with the column of charging tray 104
It is delivered on charging tray column tool separation station 3, the first handling device 105 is used to empty column tool 103 having separation station 3 by charging tray column
Sky column tool station 4 is moved to, the charging tray 104 that the second handling device 202 is used to have column in 103 equipped with chip is separated by charging tray column tool
Station 3 moves to charging tray station 5, then by empty tray 103 by charging tray station shifting 5 to empty tray station 8, and by empty tray 104 by sky
Charging tray station 8 moves in the empty column tool 103 on sky column tool station 4, and third handling device 301 is used for the chip in charging tray 104
By delivering tool conveying device 102 for sale for empty tray 104 will to be equipped in charging tray station shifting 5 to the gaily decorated basket 303 for loading gaily decorated basket station 7
Column tool 103 be delivered to by empty column tool station 4 and deliver tool for sale and station 2 and remove.
The wafer-load system of the utility model, column tool in can be packed into the charging tray being laminated, every layered material disk can fill respectively
More wafers are carried, it is contactless between every wafer, effectively prevent the problem of stacking leads to adhesion between chip.Have into column and conveys
Column tool is transported to charging tray column tool separation station by device, and charging tray column is had the charging tray on separation station in column tool by the second handling device
Taking-up is put in charging tray station, and after all charging trays all take out, empty column tool and the charging tray taken out are allocated as both direction, all the way, the
Empty column tool is carried on sky column tool station by one handling device, is waited and is loaded empty tray.Another way, the charging tray that tool takes out from column,
After third handling device all takes out chip therein, empty tray is just carried to empty tray station by the second handling device
Place, if empty column tool station is there are less than column tool, the second handling device just removes the empty tray on empty tray station to empty column
Have in the column tool on station, after tool fills charging tray after column, delivers tool conveying device for sale and be just delivered to the column filled tool and deliver tool for sale
Station, and output this on AGV (automated guided vehicle), thus the utility model improves the reliability and stabilization of equipment
Property, realize the full-automation that outflow is entered from column tool, chip efficiency of transmission and precision are high, and can extract more wafers simultaneously,
And without adhesion, production capacity and production efficiency are improved.
Wherein, charging tray transfer module 200 further includes lifting device 201, and lifting device 201 is set to charging tray column tool separation work
On position 3, for rising and falling the column tool 103 that charging tray 104 is housed, so that transfer device enters the bottom of column tool 103 and makes
Charging tray 104 is fallen on the second handling device 202.Lairage has the liter that column tool is transported at charging tray column tool separation station by conveying device
On falling unit, lifting device fixed hurdle has and rises certain altitude, then successively decline, and the second handling device of cooperation takes out most lower
One layered material disk of face, and be delivered on charging tray station.Second handling device, one layered material disk of every taking-up, lifting device just decline one layer,
Until all charging trays all take out.
Wherein, carrying wafers module 300 further includes calibrating installation 302, and calibrating installation 302 is located at charging tray station 5 and loads
On calibration station 6 between gaily decorated basket station 7, for calibrating to moving to the chip before the gaily decorated basket 303.Wherein, calibrating installation
302 include UVW vision alignment platform.The present embodiment lieutenant colonel's standard apparatus uses UVW vision alignment platform, and third handling device is from material
The charging tray last time of disk station draws more wafers, puts to UVW vision alignment platform, every group of UVW platform has a phase
Machine, by carrying out x to taking pictures for chip, the calibration of y, θ keep the transmission precision of chip higher.Wherein, the manipulator is equipped with
For adsorbing the sucker of chip.
In the present embodiment, third handling device 301 includes servo motor 9a, guide rail 12a, sliding block 13a and manipulator 10, is led
Rail 12a is arranged along charging tray station 5 to 7 direction of gaily decorated basket station is loaded, and sliding block 13a is set on guide rail 12, manipulator 10 and sliding block
13a connection, manipulator 10 are moved for grabbing transfer chip, servo motor 9a driving sliding block 13a along guide rail 12a.Wherein, machine
Tool hand 10 is equipped with the sucker for adsorbing chip.The servo motor driving sliding block of third handling device is slided along guide rail, makes machine
Tool hand moves on charging tray station to loading gaily decorated basket station direction, and realization is moved to chip in the gaily decorated basket by charging tray.In the present embodiment
Each arm of manipulator is mounted on sucker, after being moved on charging tray station, is dropped to above chip under arm, sucker opens
Dynamic adsorb chip is fixed, and arm is lifted off charging tray, 8 wafers are packed into each charging tray, is divided into two groups, and every group 4, therefore
It may be implemented to draw 4 wafers simultaneously, improve production efficiency and production capacity.The utility model can be according to practical material tray structure, number
Amount and production need to select the arm number of manipulator.
Wherein, the second handling device 202 includes sideways transfer mechanism 2021 and longitudinal carrying mechanism 2022, sideways transfer
Mechanism 2021 includes guide rail 12b, sliding block 13b and servo motor 9b, and longitudinal carrying mechanism 2022 includes guide rail 12c, sliding block 13c
It is arranged with the guide rail 12b of servo motor 9c, sideways transfer mechanism 2021 along empty tray station 8 to empty column tool 4 direction of station, it is longitudinal
The guide rail 12c of carrying mechanism 2022 is arranged along charging tray station 5 to 8 direction of empty tray station, and sliding block 13b is set on guide rail 12b,
Sliding block 13c is set on guide rail 12c, and longitudinal carrying mechanism 2022 further includes charging tray fixed frame 11, charging tray fixed frame 11 and vertical
Sliding block 13c connection to carrying mechanism 2022, the servo motor 9c of longitudinal carrying mechanism 2022 can drive longitudinal carrying mechanism
2022 sliding block 13c drives charging tray fixed frame 11 to move back and forth between charging tray station 5 and empty tray station 8, and longitudinal carrying
The guide rail 12c of mechanism 2022 is connect with the sliding block 13b of sideways transfer mechanism 2021, the servo motor of sideways transfer mechanism 2021
9b drives the sliding block 13b of sideways transfer mechanism 2021 that the charging tray fixed frame 11 on longitudinal carrying mechanism 2022 is driven to have on charging tray column
It is moved back and forth between separation station 3 and charging tray station 5 and between empty tray station 8 and empty column tool station 4.Sideways transfer machine
The servo motor driving sliding block of structure is moved along guide rail, drive longitudinal carrying mechanism charging tray column have separation station and charging tray station it
Between move back and forth, realize and move to charging tray on charging tray station by column tool, can also drive longitudinal carrying mechanism in empty tray station and
It is moved back and forth between empty column tool station, realizes and empty tray is put into sky column tool, the servo motor of longitudinal carrying mechanism, which drives, to be slided
Block is moved along guide rail, moves back and forth fixed frame between charging tray station and empty tray station, is realized empty tray by charging tray work
It is moved to empty tray station.
Wherein, the first handling device 105 includes that servo motor 9d, guide rail 12d, sliding block 13d and column have fixed frame 14, is led
Rail 12d has separation station 3 to empty column tool 4 direction of station along charging tray column and is arranged, and sliding block 13d is set on guide rail 12d, and column tool is fixed
Frame 14 is connect with sliding block 13d, and servo motor 9d driving sliding block 13d is moved along guide rail 12d；Lifting device 201 includes motor and use
In the bracket for placing the column tool 103 equipped with charging tray 104, motor connect driving bracket with bracket and rises or falls.First carries dress
The servo motor driving sliding block set is moved along guide rail, has fixed frame on charging tray column reciprocal between separation station and empty column tool station
It is mobile, empty column tool is moved into sky column tool station by lifting device to realize.
It wherein, include conveyer belt with tool conveying device 102 is delivered for sale into column tool conveying device 101.
As shown in Fig. 2, the present embodiment additionally provides wafer-load method, comprising the following steps:
S1, AGV come upstream equipped with 103 transport of column tool of charging tray 104, put into column and have in conveying device 101
Into at column tool station 1, the column tool 103 equipped with charging tray 104 is delivered to by having station 1 into column by having conveying device 101 into column
On charging tray column tool separation station 3；
Column is had the charging tray 104 in 103 equipped with chip by the second handling device 202 and has separation station 3 by charging tray column by S2
Move to charging tray station 5；
Empty column tool 103 is had separation station 3 by charging tray column by the first handling device 105 and moves to sky column tool station 4 by S3；
Chip in charging tray 104 is moved to by charging tray station 5 by third handling device 301 and is loaded on gaily decorated basket station 7 by S4
The gaily decorated basket 303 in；
Empty tray 104 is moved to empty tray station 8 by charging tray station 5 by the second handling device 202, and sky is expected by S5
Disk 104 is moved in the empty column tool 103 on sky column tool station 4 by empty tray station 8；
Column tool 103 equipped with empty tray 104 is moved to by empty column tool station 4 by column tool conveying device 102 and delivers tool for sale by S6
It is removed on station 2.
Wherein, step S2 specifically includes the following steps:
S21 is risen the column tool 103 equipped with charging tray 104 by lifting device 201；
S22, the charging tray fixed frame 11 of longitudinal carrying mechanism 2022 enters equipped with charging tray 104 in the second handling device 202
Column has 103 lower parts；
S23, by lifting device 201 by 103 one layer of the decline of column tool equipped with charging tray 104, charging tray 104 drops down onto longitudinal carrying
On the charging tray fixed frame 11 of mechanism 2022；
Charging tray 104 is moved to charging tray station 5 by the second handling device 202 by S24；
S25, judges whether column tool 103 is moved empty, if then entering step S3, if otherwise return step S22.
Wherein, step S4 specifically includes the following steps:
Chip in charging tray 104 is moved to the school of calibration station 6 by third handling device 301 by S41 by charging tray station 5
On standard apparatus 302；
S42 calibrates chip by calibrating installation 302；
S43 is moved to the chip of calibration in the gaily decorated basket 303 for loading gaily decorated basket station 7 by third handling device 301；
S44, judges whether the gaily decorated basket 303 is filled, if then moving in the new gaily decorated basket 303, and return step S41；If otherwise
Return step S41.
Wherein, further comprising the steps of after step S41:
S42 ' judges whether chip is moved empty in charging tray 104, if otherwise return step S41, if entering step S5；
It is further comprising the steps of between step S5 and step S6:
S561, judges whether the column tool 103 on empty column tool station 4 fills empty tray 104, if then entering step S6, if
Otherwise return step 5.
In use, the utility model is equipped with corresponding sensor at each node, it is to move with column tool, charging tray, chip
Dynamic object monitors the position of mobile object and the progress of process by the variation of sensor signal at any time.
In conclusion the wafer-load system of the utility model, the charging tray being laminated, every layered material disk can be packed into column tool
It can load more wafers respectively, it is contactless between every wafer, effectively prevent the problem of stacking leads to adhesion between chip.Into
Column has conveying device and column tool is transported to charging tray column tool separation station, and charging tray column is had column on separation station and had by the second handling device
In charging tray taking-up be put in charging tray station, after all charging trays all take out, empty column tool and the charging tray taken out are allocated as both direction,
All the way, empty column tool is carried on sky column tool station by the first handling device, is waited and is loaded empty tray.Another way has from column and takes out
Charging tray, after third handling device all takes out chip therein, empty tray is just carried to empty material by the second handling device
Pan Gongweichu, if empty column tool station is there are less than column tool, the second handling device just removes the empty tray on empty tray station
In column tool on to empty column tool station, after tool fills charging tray after column, delivers tool conveying device for sale and be just delivered to the column filled tool
It delivers tool station for sale, and outputs this on AGV (automated guided vehicle), thus the utility model improves the reliability of equipment
And stability, realize the full-automation that outflow is entered from column tool, chip efficiency of transmission and precision are high, and can extract multi-disc simultaneously
Chip, and without adhesion, improve production capacity and production efficiency.
Finally, it should be noted that above embodiments are only to illustrate the technical solution of the utility model, rather than its limitations；
Although the utility model is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that:
It is still possible to modify the technical solutions described in the foregoing embodiments, or part of technical characteristic is carried out etc.
With replacement；And these are modified or replaceed, various embodiments of the utility model technology that it does not separate the essence of the corresponding technical solution
The spirit and scope of scheme.
Claims (10)
1. a kind of wafer-load system, it is characterised in that: including column tool conveyor module, charging tray transfer module and carrying wafers mould
Block, column tool conveyor module include into column tool conveying device, deliver tool conveying device for sale and the first handling device, the charging tray are removed
Transporting module includes the second handling device, and the carrying wafers module includes third handling device, described to use into column tool conveying device
In the column tool by charging tray is equipped with by being delivered on charging tray column tool separation station into column tool station, first handling device is used for will
Empty column, which has, moves to sky column tool station by charging tray column tool separation station, and second handling device is brilliant for being equipped in having column
The charging tray of piece has separation station by the charging tray column and moves to charging tray station, then empty tray is moved to empty tray by the charging tray station
Station, and empty tray is moved in the empty column tool on the empty column tool station by the empty tray station, the third carries dress
It sets for moving in the gaily decorated basket for loading the gaily decorated basket station chip in charging tray by the charging tray station, it is described to deliver tool conveying device for sale
It is delivered to for the column tool of empty tray will to be equipped with by the empty column tool station and delivers tool station for sale and remove.
2. wafer-load system according to claim 1, it is characterised in that: the charging tray transfer module further includes lifting dress
It sets, the lifting device is set on the charging tray column tool separation station, for rising and falling the column tool that charging tray is housed, with
Enter the bottom of column tool for second handling device and falls in charging tray on second handling device.
3. wafer-load system according to claim 1, it is characterised in that: the carrying wafers module further includes calibration cartridge
It sets, the calibrating installation is located on the charging tray station and the calibration station loaded between gaily decorated basket station, for moving to
Chip before the gaily decorated basket is calibrated.
4. wafer-load system according to claim 1, it is characterised in that: the third handling device includes servo electricity
Machine, guide rail, sliding block and manipulator, the guide rail are arranged along the charging tray station to the loading gaily decorated basket station direction, the cunning
Block is set on the guide rail, and the manipulator is connected with the slide block, and the manipulator is described to watch for grabbing transfer chip
Sliding block described in motor driven is taken to move along the guide rail.
5. wafer-load system according to claim 1, it is characterised in that: second handling device includes sideways transfer
Mechanism and longitudinal carrying mechanism, the sideways transfer mechanism and longitudinal carrying mechanism include guide rail, sliding block and servo electricity
The guide rail of machine, the sideways transfer mechanism is arranged along the empty tray station to the empty column tool station direction, described vertical
It is arranged to the guide rail of carrying mechanism along the charging tray station to empty tray station direction, the sliding block is set to described
On guide rail, and longitudinal carrying mechanism further includes charging tray fixed frame, the charging tray fixed frame and longitudinal carrying mechanism
The sliding block connection, the servo motor of the longitudinal direction carrying mechanism can drive the sliding block of longitudinal carrying mechanism to drive the material
Disk fixed frame moves back and forth between the charging tray station and the empty tray station, and the guide rail of longitudinal carrying mechanism with
The sliding block of the sideways transfer mechanism connects, and the servo motor of the sideways transfer mechanism drives the sideways transfer
The sliding block of mechanism drive the charging tray fixed frame on longitudinal carrying mechanism the charging tray column have separation station and
It is moved back and forth between the charging tray station and between the empty tray station and the empty column tool station.
6. wafer-load system according to claim 2, it is characterised in that: first handling device includes servo electricity
Machine, guide rail, sliding block and column have fixed frame, and the guide rail has separation station to the empty column tool station direction along the charging tray column and sets
It sets, the sliding block is set on the guide rail, and the column tool fixed frame is connected with the slide block, described in the servo motor driving
Sliding block is moved along the guide rail.
7. wafer-load system according to claim 2, it is characterised in that: the lifting device includes motor and for putting
The bracket that the column equipped with charging tray has is set, the motor connect the driving bracket with the bracket and rises or falls.
8. wafer-load system according to claim 4, it is characterised in that: the manipulator is equipped with for adsorbing chip
Sucker.
9. wafer-load system according to claim 3, it is characterised in that: the calibrating installation includes UVW vision alignment
Platform.
10. wafer-load system according to claim 1, it is characterised in that: it is described into column have conveying device and it is described go out
It includes conveyer belt that column, which has conveying device,.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821046883.XU CN209411281U (en) | 2018-06-29 | 2018-06-29 | A kind of wafer-load system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821046883.XU CN209411281U (en) | 2018-06-29 | 2018-06-29 | A kind of wafer-load system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209411281U true CN209411281U (en) | 2019-09-20 |
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ID=67929375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821046883.XU Active CN209411281U (en) | 2018-06-29 | 2018-06-29 | A kind of wafer-load system |
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| Country | Link |
|---|---|
| CN (1) | CN209411281U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115092615A (en) * | 2022-06-20 | 2022-09-23 | 浙江屹立机器人科技有限公司 | Heavy feed bin of charging tray transport |
-
2018
- 2018-06-29 CN CN201821046883.XU patent/CN209411281U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115092615A (en) * | 2022-06-20 | 2022-09-23 | 浙江屹立机器人科技有限公司 | Heavy feed bin of charging tray transport |
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