CN209356756U - A kind of discrepancy light laser galvanometer device in the same direction - Google Patents
A kind of discrepancy light laser galvanometer device in the same direction Download PDFInfo
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- CN209356756U CN209356756U CN201822227774.4U CN201822227774U CN209356756U CN 209356756 U CN209356756 U CN 209356756U CN 201822227774 U CN201822227774 U CN 201822227774U CN 209356756 U CN209356756 U CN 209356756U
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Abstract
A kind of discrepancy light laser galvanometer device in the same direction, including y-axis motor reflecting mirror, X-axis motor reflecting mirror, galvanometer shell and lens pinboard；Wherein, galvanometer shell is fixedly installed on lens pinboard；Y-axis motor reflecting mirror and X-axis motor reflecting mirror are all set on galvanometer shell, y-axis motor reflecting mirror forms the first reflection light for receiving incident ray and reflecting incident ray, and the first reflection light is reflexed into X-axis motor reflecting mirror, X-axis motor reflecting mirror obtains the second reflection light for receiving the first reflection light and reflecting the first reflection light, wherein, the second reflection light is parallel with incident ray and in the same direction.As it can be seen that implementing discrepancy light laser galvanometer device in the same direction, enables to the input light of laser galvanometer device in the same direction with output light, improve positioning accuracy, while also reducing the debugging difficulty of laser galvanometer device.
Description
Technical field
The utility model relates to optical technical fields, in particular to a kind of discrepancy light laser galvanometer device in the same direction.
Background technique
Laser galvanometer device is the optical scanner of a kind of high-precision, high speed and high duplication, is widely used in laser
The fields such as material processing, biologic medical detection, laser projection and display, graph and image processing and semiconductor machining.It is existing to swash
For light galvanometer device when being set in horizontal table top, incident ray is parallel to the horizontal table top, and output light is then vertically to
The desktop is downward.However in practice, it has been found that using input light and output light it is not in the same direction by the way of, the positioning of output light
Low precision, and increase the debugging difficulty of laser galvanometer device.
Utility model content
In view of the above problems, the utility model provides a kind of discrepancy light laser galvanometer device in the same direction, enables to laser
The input light of galvanometer device is in the same direction with output light, improves positioning accuracy, while also reducing the tune of laser galvanometer device
Try difficulty.
To achieve the goals above, the utility model adopts the following technical solutions:
In a first aspect, the utility model provides a kind of discrepancy light laser galvanometer device in the same direction, including y-axis motor reflection
Mirror, X-axis motor reflecting mirror, galvanometer shell and lens pinboard；Wherein,
The galvanometer shell is fixedly installed on the lens pinboard；
The y-axis motor reflecting mirror and the X-axis motor reflecting mirror are all set on the galvanometer shell, the Y-axis electricity
Machine reflecting mirror forms the first reflection light for receiving incident ray and reflecting the incident ray, and described first is reflected
Light reflexes to the X-axis motor reflecting mirror, and the X-axis motor reflecting mirror is for receiving first reflection light and reflecting institute
It states the first reflection light and obtains the second reflection light, wherein second reflection light is parallel with the incident ray and in the same direction；
The y-axis motor reflecting mirror includes Y-axis reflecting mirror, the folder between the Y-axis reflecting mirror and the lens pinboard
Angle is 45 °；
The X-axis motor reflecting mirror includes X-axis reflecting mirror, the mirror surface of the X-axis reflecting mirror and the lens pinboard it
Between angle be 45 °, and the Y-axis reflecting mirror and the X-axis reflecting mirror are parallel to each other.
As an alternative embodiment, the y-axis motor reflecting mirror further includes y-axis motor, wherein
The Y-axis reflecting mirror is fixedly installed on the output shaft of the y-axis motor, and the y-axis motor is by controlling the Y
The output shaft of spindle motor rotates and the Y-axis reflecting mirror is driven to be rotated.
As an alternative embodiment, the X-axis motor reflecting mirror further includes X-axis motor, wherein
The X-axis reflecting mirror is fixedly installed on the output shaft of the X-axis motor, and the X-axis motor is by controlling the X
The output shaft of spindle motor rotates and the X-axis reflecting mirror is driven to be rotated.
As an alternative embodiment, the discrepancy light laser galvanometer device in the same direction further includes incidence hole and light out
Hole, wherein
The incidence hole is set on the galvanometer shell, for passing through the incident ray；
The light hole is set on the lens pinboard, for passing through second reflection light.
As an alternative embodiment, the discrepancy light laser galvanometer device in the same direction further includes the fixed group of multiple motors
Part, for the y-axis motor reflecting mirror and the X-axis motor reflecting mirror to be fixed on the galvanometer shell respectively.
As an alternative embodiment, the motor fixation kit includes motor locking screw and motor compacting ring；
The motor locking screw is fixedly installed on the galvanometer shell, the motor locking screw and the motor pressure
Collar matching, for the y-axis motor to be fixed on the galvanometer shell.
As an alternative embodiment, the light source is set in backlight, the Y-axis reflecting mirror and the X-axis
Reflecting mirror is plane mirror.
As an alternative embodiment, the discrepancy light laser galvanometer device in the same direction further includes field lens, wherein
The field lens is set on the light hole, for changing the position of second reflection light imaging.
As an alternative embodiment, the discrepancy light laser galvanometer device in the same direction further includes laser beam expanding lens,
In,
The laser beam expanding lens are set on the incidence hole, for extending described in diameter and the reduction of the incident ray
The angle of divergence of incident ray.
As an alternative embodiment, the X-axis motor and y-axis motor are servo motor or X-axis electricity
Machine and y-axis motor are stepper motor.
According to discrepancy light laser galvanometer device in the same direction provided by the utility model, can be received by y-axis motor reflecting mirror
Incident ray simultaneously reflects the incident ray the first reflection light of formation, and the first reflection light is reflexed to the reflection of X-axis motor
Then mirror receives the first reflection light by X-axis motor reflecting mirror again and the first reflection light of reflection obtains the second reflection light
And export, so that the second reflection light for entering and leaving the incident ray of light laser galvanometer device in the same direction and exporting is in the same direction, it is fixed to improve
Position precision, while also reducing the debugging difficulty of laser galvanometer device.
To enable the above objects, features, and advantages of the utility model to be clearer and more comprehensible, preferred embodiment is cited below particularly, and
Cooperate appended attached drawing, is described in detail below.
Detailed description of the invention
It, below will be to use required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment
Attached drawing be briefly described, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore should not be by
Regard the restriction to the scope of the utility model as.
Fig. 1 is a kind of structural representation for discrepancy light laser galvanometer device in the same direction that the utility model first embodiment provides
Figure；
Fig. 2 is a kind of structural representation for discrepancy light laser galvanometer device in the same direction that the utility model second embodiment provides
Figure；
Fig. 3 is a kind of optical path signal for discrepancy light laser galvanometer device in the same direction that the utility model second embodiment provides
Figure.
Main element symbol description:
100-Y spindle motor reflecting mirror；101-Y axis reflecting mirror；102-Y spindle motor；200-X spindle motor reflecting mirror；201-X axis
Reflecting mirror；202-X spindle motor；300- galvanometer shell；400- lens pinboard；500- incidence hole；600- light hole；700- motor
Fixation kit；701- motor locking screw；702- motor compacting ring；A- incident ray；The first reflection light of b-；C- second reflects
Light.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describing, it is clear that described embodiment is only a part of the embodiment of the utility model, rather than all
Embodiment.Under normal conditions, can pass through shown in attached drawing with component included by the utility model embodiment of description
A variety of different configurations are to arrange and design.Therefore, below to the detailed of provided the utility model embodiment in the accompanying drawings
Description is not intended to limit the range of claimed invention, but is merely representative of the selected implementation of the utility model
Example.Based on the embodiments of the present invention, those skilled in the art are obtained without making creative work
Every other embodiment, fall within the protection scope of the utility model.
In the present invention, term " on ", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outside",
" in ", "vertical", "horizontal", " transverse direction ", the orientation or positional relationship of the instructions such as " longitudinal direction " be orientation based on the figure or
Positional relationship.These terms are not intended to limit indicated primarily to better describe the utility model and embodiment
Device, element or component must have particular orientation, or be constructed and operated with particular orientation.
Also, above-mentioned part term is other than it can be used to indicate that orientation or positional relationship, it is also possible to for indicating it
His meaning, such as term " on " also are likely used for indicating certain relations of dependence or connection relationship in some cases.For ability
For the those of ordinary skill of domain, the concrete meaning of these terms in the present invention can be understood as the case may be.
In addition, term " installation ", " setting ", " being equipped with ", " connection ", " connected " shall be understood in a broad sense.For example, can make solid
Fixed connection, is detachably connected or monolithic construction；It can be mechanical connection, or point connection；It can make to be connected directly, either
It indirectly connected through an intermediary, or is two connection internal between device, element or component.For this field
For those of ordinary skill, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.
In addition, term " first ", " second " etc. are mainly used for distinguishing different devices, element or component (specifically
Type and construction may it is identical may also be different), be not intended to show or implies meaning showing device, element or component
Relative importance and quantity.Unless otherwise indicated, the meaning of " multiple " is two or more.
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
It clearly and completely describes, it is clear that described embodiment is only the utility model a part of the embodiment, rather than whole realities
Apply example.Based on the embodiments of the present invention, those of ordinary skill in the art institute without making creative work
The every other embodiment obtained, fall within the protection scope of the utility model.
For the problems of the prior art, the utility model provides a kind of discrepancy light laser galvanometer device in the same direction, can
Incident ray is received by y-axis motor reflecting mirror and reflects the incident ray and forms the first reflection light, and first is reflected
Light reflexes to X-axis motor reflecting mirror, then receives the first reflection light by X-axis motor reflecting mirror again and reflects the first reflection
Light obtains the second reflection light and exports, so that second for entering and leaving the incident ray of light laser galvanometer device in the same direction and exporting is anti-
It is in the same direction to penetrate light, improves positioning accuracy, while also reducing the debugging difficulty of laser galvanometer device.Below by embodiment into
Row description.
To enable the above objects, features, and advantages of the utility model to be clearer and more comprehensible, preferred embodiment is cited below particularly, and
Cooperate appended attached drawing, is described in detail below.
Embodiment 1
Referring to Fig. 1, being a kind of structural schematic diagram for entering and leaving light laser galvanometer device in the same direction provided in this embodiment, should go out
Entering light laser galvanometer device in the same direction includes y-axis motor reflecting mirror 100, X-axis motor reflecting mirror 200, galvanometer shell 300 and lens
Pinboard 400.
In the present embodiment, y-axis motor reflecting mirror 100 and X-axis motor reflecting mirror 200 are also referred to as X-Y optical scanning head, scanning
Pattern is two-dimensional scanning pattern.
Galvanometer shell 300 is fixedly installed on lens pinboard 400, y-axis motor reflecting mirror 100 and X-axis motor reflecting mirror
200 are all set on galvanometer shell 300.
As an alternative embodiment, being provided with heat dissipation groove and thermally conductive sheet on galvanometer shell 300.Wherein, it radiates
Groove is connect with thermally conductive sheet, for radiating.It can be avoided influence of the temperature to light laser galvanometer device in the same direction is entered and left.
Y-axis motor reflecting mirror 100 forms the first reflection light b for receiving incident ray a and reflecting incident ray a, with
And the first reflection light b is reflexed into X-axis motor reflecting mirror 200, X-axis motor reflecting mirror 200 is for receiving the first reflection light b
And reflect the first reflection light b and obtain the second reflection light c, wherein the second reflection light c is parallel with incident ray a and in the same direction.
Y-axis motor reflecting mirror 100 includes Y-axis reflecting mirror 101, the folder between Y-axis reflecting mirror 101 and lens pinboard 400
Angle is 45 °.
X-axis motor reflecting mirror 200 includes X-axis reflecting mirror 201, the mirror surface of X-axis reflecting mirror 201 and lens pinboard 400 it
Between angle be 45 °, and Y-axis reflecting mirror 101 and X-axis reflecting mirror 201 are parallel to each other.
As an alternative embodiment, it is plane reflection that Y-axis reflecting mirror 101 and X-axis reflecting mirror 201, which can be,
Mirror.Then the angle where the mirror surface of Y-axis reflecting mirror 101 between plane and 400 place plane of lens pinboard is 45 °, X-axis reflection
Angle where the mirror surface of mirror 201 between plane and 400 place plane of lens pinboard is 45 °, meanwhile, Y-axis reflecting mirror 101
Plane where mirror surface is parallel to each other with plane where the mirror surface of X-axis reflecting mirror 201.
As it can be seen that implementing discrepancy light laser galvanometer device in the same direction shown in FIG. 1, can be received by y-axis motor reflecting mirror 100
Incident ray a simultaneously reflects incident ray a the first reflection light b of formation, and the first reflection light b is reflexed to X-axis motor
Then reflecting mirror 200 receives the first reflection light b by X-axis motor reflecting mirror 200 again and the first reflection light b of reflection is obtained
Second reflection light c is simultaneously exported, so as to enter and leave the incident ray a of light laser galvanometer device in the same direction and the second reflection light of output
C is in the same direction, improves positioning accuracy, while also reducing the debugging difficulty of laser galvanometer device.
Embodiment 2
Referring to Fig. 2, being a kind of structural schematic diagram for entering and leaving light laser galvanometer device in the same direction provided in this embodiment.Its
In, the light laser galvanometer device in the same direction shown in Fig. 2 that enters and leaves is that discrepancy light laser galvanometer installation optimization in the same direction as shown in Figure 1 obtains
's.
As shown in Fig. 2, y-axis motor reflecting mirror 100 further includes y-axis motor 102.Wherein, Y-axis reflecting mirror 101 is fixedly installed
In on the output shaft of y-axis motor 102, y-axis motor 102 rotates by the output shaft of control y-axis motor 102 and Y-axis is driven to reflect
Mirror 101 is rotated.
In the present embodiment, X-axis motor reflecting mirror 200 further includes X-axis motor 202.Wherein, X-axis reflecting mirror 201 is fixedly installed
In on the output shaft of X-axis motor 202, X-axis motor 202 rotates by the output shaft of control X-axis motor 202 and X-axis is driven to reflect
Mirror 201 is rotated.
In the present embodiment, entering and leaving light laser galvanometer device in the same direction further includes incidence hole 500 and light hole 600.Wherein, enter light
Hole 500 is set on galvanometer shell 300, for passing through incident ray a；Light hole 600 is set on lens pinboard 400,
For passing through the second reflection light c.
In the present embodiment, referring to Fig. 3, Fig. 3 is a kind of light for discrepancy light laser galvanometer device in the same direction that embodiment provides
Road schematic diagram.As shown in figure 3, incident ray a is injected by incidence hole 500, Y-axis reflecting mirror 101 is reached, then Y-axis reflecting mirror 101
Incident ray a is reflected to form into the first reflection light b, then the first reflection light b is anti-through the reflection arrival X-axis of Y-axis reflecting mirror 101
Penetrate mirror 201；Further, first reflection light b of the reflection of X-axis reflecting mirror 201 obtains the second reflection light c, finally, the second reflection
Light c will be projected by light hole 600.
In the present embodiment, the second reflection light c is parallel with incident ray a and in the same direction.
In the present embodiment, when incident ray a perpendicular to it is horizontal downwards when, obtained second reflection light c is also vertical
Downwards in level.
In the present embodiment, entering and leaving light laser galvanometer device in the same direction further includes multiple motor fixation kits 700, for respectively will
Y-axis motor reflecting mirror 100 and X-axis motor reflecting mirror 200 are fixed on galvanometer shell 300.
As an alternative embodiment, motor fixation kit 700 includes motor locking screw 701 and motor compacting ring
702.Wherein, motor locking screw 701 is fixedly installed on galvanometer shell 300, motor locking screw 701 and motor compacting ring
702 matchings, for y-axis motor 102 to be fixed on galvanometer shell 300.
In the above-described embodiment, the material of motor locking screw 701 and motor compacting ring 702 can be metal or plastic cement
Deng not being limited in any way to this present embodiment.Wherein, motor locking screw 701 is cylindrical, and indent and convex screw thread is carved on surface
Ditch；Motor compacting ring 702 is in hollow cylindrical, and inner surface is carved with to match with 701 surface screw thread ditch of motor locking screw
Concave-convex ditch.When y-axis motor reflecting mirror 100 to be fixed on galvanometer shell 300, by 702 sets of motor compacting ring in electromechanical locks
On tight screw 701, turn motor compacting ring 702 is so that 702 inside of 701 surface screw thread ditch of motor locking screw and motor compacting ring
The concave-convex ditch on surface is agreed with, and fastens y-axis motor reflecting mirror 100 by easy stages.
As an alternative embodiment, Y-axis reflecting mirror 101 and X-axis reflecting mirror 201 are plane mirror.
As an alternative embodiment, entering and leaving light laser galvanometer device in the same direction further includes field lens.Wherein, field lens is arranged
In the position on light hole 600, being imaged for changing the second reflection light c.
In the above-described embodiment, field lens is also known as F-Theta field lens or f- θ field lens, can be improved edge light beam and enters
It is mapped to the ability of detector.In identical primary optical system, field lens can reduce the area of detector, and then expand visual field,
Increase incident flux；On the other hand, image planes position can also be conceded and place chopper wheel, to solve nowhere to place asking for modulator
Topic；It, can be with the curvature of field and distortion of compensation system in terms of aberration correction.
As an alternative embodiment, entering and leaving light laser galvanometer device in the same direction further includes laser beam expanding lens.Wherein, swash
Light beam expanding lens is set on incidence hole 500, for extending the diameter of incident ray a and reducing the angle of divergence of incident ray a.
In the above-described embodiment, mainly there are two purposes for laser beam expanding lens: one is the diameter of expanded beam；Secondly
It is the angle of divergence for reducing laser beam.It the angle of divergence of a branch of light beam expanded and expands than inversely proportional variation.With without expanding
Light beam compare, the light beam after expanding can be focused smaller.The hot spot ruler of the second reflection light c exported from light hole 600
Very little and angle of divergence product is optical invariant, is approximately certain value.When waist radius expands x times, the angle of divergence is accordingly compressed
For original 1/x, compress the angle of divergence it is practical be exactly the second reflection light c collimation.It is anti-that the compression angle of divergence can not improve second
Light c beam quality is penetrated, beam quality is the product of waist radius and the angle of divergence；It will be with a tight waist while compressing the angle of divergence
The increase of radius, then spot size increases.
In the above-described embodiment, entering and leaving light laser galvanometer device in the same direction further includes f-theta lens, with laser beam expanding
Mirror cooperates use.
As an alternative embodiment, X-axis motor 202 and y-axis motor 102 are servo motor or X-axis motor
202 and y-axis motor 102 be stepper motor.
The utility model provide it is a kind of enter and leave light laser galvanometer device in the same direction structure, be not restricted to specification and
Described in embodiment.Therefore the equivalence changes that all structure, feature and principles according to present utility model application the scope of the patents are done
Or modification, it should be included in the utility model patent application range.
As it can be seen that implementing discrepancy light laser galvanometer device in the same direction shown in Fig. 2, can be received by y-axis motor reflecting mirror 100
Incident ray a simultaneously reflects incident ray a the first reflection light b of formation, and the first reflection light b is reflexed to X-axis motor
Then reflecting mirror 200 receives the first reflection light b by X-axis motor reflecting mirror 200 again and the first reflection light b of reflection is obtained
Second reflection light c is simultaneously exported, so as to enter and leave the incident ray a of light laser galvanometer device in the same direction and the second reflection light of output
C is in the same direction, improves positioning accuracy, while also reducing the debugging difficulty of laser galvanometer device.
It should be understood that " in the present embodiment ", " in the utility model embodiment " or " as one kind that specification is mentioned in the whole text
Optional embodiment " means that a particular feature, structure, or characteristic related with embodiment includes in the multiple of the utility model
In embodiment.Therefore, " in the present embodiment " for occurring everywhere in the whole instruction, " in the utility model embodiment " or " as
A kind of optional embodiment " not necessarily refers to identical embodiment.In addition, these a particular feature, structure, or characteristics can be with
Any suitable mode combines in one or more embodiments.Those skilled in the art should also know that being retouched in specification
The embodiment stated belongs to alternative embodiment, and related actions and modules is not necessarily required by the utility model.
In the various embodiments of the utility model, it should be appreciated that magnitude of the sequence numbers of the above procedures are not meant to hold
Successively, the execution sequence of each process should be determined by its function and internal logic the certainty of row sequence, without coping with the utility model
The implementation process of embodiment constitutes any restriction.
More than, only specific embodiment of the present utility model, but protection scope of the utility model is not limited thereto,
Anyone skilled in the art within the technical scope disclosed by the utility model, can readily occur in variation or replace
It changes, should be covered within the scope of the utility model.Therefore, the protection scope of the utility model should be with claim
Subject to protection scope.
Claims (10)
1. a kind of discrepancy light laser galvanometer device in the same direction, which is characterized in that including y-axis motor reflecting mirror, X-axis motor reflecting mirror,
Galvanometer shell and lens pinboard；Wherein,
The galvanometer shell is fixedly installed on the lens pinboard；
The y-axis motor reflecting mirror and the X-axis motor reflecting mirror are all set on the galvanometer shell, and the y-axis motor is anti-
It penetrates mirror and forms the first reflection light for receiving incident ray and reflecting the incident ray, and by first reflection light
Reflex to the X-axis motor reflecting mirror, the X-axis motor reflecting mirror is for receiving first reflection light and reflecting described the
One reflection light obtains the second reflection light, wherein second reflection light is parallel with the incident ray and in the same direction；
The y-axis motor reflecting mirror includes Y-axis reflecting mirror, and the angle between the Y-axis reflecting mirror and the lens pinboard is
45°；
The X-axis motor reflecting mirror includes X-axis reflecting mirror, between the mirror surface of the X-axis reflecting mirror and the lens pinboard
Angle is 45 °, and the Y-axis reflecting mirror and the X-axis reflecting mirror are parallel to each other.
2. discrepancy light laser galvanometer device in the same direction according to claim 1, which is characterized in that the y-axis motor reflecting mirror
It further include y-axis motor, wherein
The Y-axis reflecting mirror is fixedly installed on the output shaft of the y-axis motor, and the y-axis motor is by controlling the Y-axis electricity
The output shaft of machine rotates and the Y-axis reflecting mirror is driven to be rotated.
3. discrepancy light laser galvanometer device in the same direction according to claim 2, which is characterized in that the X-axis motor reflecting mirror
It further include X-axis motor, wherein
The X-axis reflecting mirror is fixedly installed on the output shaft of the X-axis motor, and the X-axis motor is by controlling the X-axis electricity
The output shaft of machine rotates and the X-axis reflecting mirror is driven to be rotated.
4. discrepancy light laser galvanometer device in the same direction according to claim 1, which is characterized in that discrepancy light laser in the same direction
Galvanometer device further includes incidence hole and light hole, wherein
The incidence hole is set on the galvanometer shell, for passing through the incident ray；
The light hole is set on the lens pinboard, for passing through second reflection light.
5. discrepancy light laser galvanometer device in the same direction according to claim 3, which is characterized in that discrepancy light laser in the same direction
Galvanometer device further includes multiple motor fixation kits, for respectively by the y-axis motor reflecting mirror and the X-axis motor reflecting mirror
It is fixed on the galvanometer shell.
6. discrepancy light laser galvanometer device in the same direction according to claim 5, which is characterized in that the motor fixation kit packet
Include motor locking screw and motor compacting ring；
The motor locking screw is fixedly installed on the galvanometer shell, the motor locking screw and the motor compacting ring
Matching, for the y-axis motor to be fixed on the galvanometer shell.
7. discrepancy light laser galvanometer device in the same direction according to claim 1, which is characterized in that the Y-axis reflecting mirror and institute
Stating X-axis reflecting mirror is plane mirror.
8. discrepancy light laser galvanometer device in the same direction according to claim 4, which is characterized in that discrepancy light laser in the same direction
Galvanometer device further includes field lens, wherein
The field lens is set on the light hole, for changing the position of second reflection light imaging.
9. discrepancy light laser galvanometer device in the same direction according to claim 4, which is characterized in that discrepancy light laser in the same direction
Galvanometer device further includes laser beam expanding lens, wherein
The laser beam expanding lens are set on the incidence hole, for extending the diameter of the incident ray and reducing the incidence
The angle of divergence of light.
10. discrepancy light laser galvanometer device in the same direction according to claim 3, which is characterized in that the X-axis motor and Y-axis
Motor is servo motor or the X-axis motor and y-axis motor is stepper motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822227774.4U CN209356756U (en) | 2018-12-28 | 2018-12-28 | A kind of discrepancy light laser galvanometer device in the same direction |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201822227774.4U CN209356756U (en) | 2018-12-28 | 2018-12-28 | A kind of discrepancy light laser galvanometer device in the same direction |
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| CN209356756U true CN209356756U (en) | 2019-09-06 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116423040A (en) * | 2023-03-20 | 2023-07-14 | 苏州菲镭泰克激光技术有限公司 | Laser welding galvanometer system |
-
2018
- 2018-12-28 CN CN201822227774.4U patent/CN209356756U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116423040A (en) * | 2023-03-20 | 2023-07-14 | 苏州菲镭泰克激光技术有限公司 | Laser welding galvanometer system |
| CN116423040B (en) * | 2023-03-20 | 2023-11-28 | 苏州菲镭泰克激光技术有限公司 | Laser welding galvanometer system |
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