CN209348273U - Ultra-clean system layer stream and dust free room, glove box and equipment with it - Google Patents
Ultra-clean system layer stream and dust free room, glove box and equipment with it Download PDFInfo
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- CN209348273U CN209348273U CN201821810284.0U CN201821810284U CN209348273U CN 209348273 U CN209348273 U CN 209348273U CN 201821810284 U CN201821810284 U CN 201821810284U CN 209348273 U CN209348273 U CN 209348273U
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Abstract
A kind of ultra-clean system layer stream and dust free room, glove box and equipment with it, the system include the ultra-clean chamber with exhaust outlet；It is arranged in above ultra-clean chamber and has the gas mixer chamber of the sealing of air inlet, wherein gas mixer chamber is isolated with ultra-clean chamber by the top plate of ultra-clean chamber；One or more clean filters, the opening being arranged in the top plate of ultra-clean chamber, and ultra-clean chamber and gas mixer chamber are in fluid communication；The first and second driven fans being arranged in gas mixer chamber, wherein the first and second driven fans, which are arranged to generation power, flows into ultra-clean chamber by clean filter with certain driving air-flow；Film is flowed, is arranged in ultra-clean chamber below the top plate of ultra-clean chamber, and be arranged so that the air-flow for flowing into ultra-clean chamber is formed as laminar flow, to generate uniform one-way circulation air-flow in ultra-clean chamber.The utility model solves the Varied problems such as dead space existing for existing ultra-clean chamber technology, vibration, noise, temperature control fineness deficiency.
Description
Technical field
The utility model belongs to super-clean environment field, more particularly to a kind of ultra-clean system layer stream and with the dustless of its
Room, glove box and equipment.
Background technique
A large amount of manufacturing process and process in production and research and development cannot all carry out under common environmental condition, but need
Want special atmosphere.This manufacturing process can be galvanization process, for example in semiconductor fabrication；In LCD or OLED manufacture
Encapsulation step or high purity raw material manufacturing process, for example in medicine and pharmaceutical field；And in welding application, example
As titanium welds.These techniques for example may require that clean room condition, low humidity, inert gas atmosphere or various this kind of conditions and its
The combination of his condition.
It is known that this manufacturing process or process carry out in closed space, it can be according to institute in closed space
Condition is needed to set atmosphere.
This space can be constructed differently to as needed the super-clean environment of size, for example, may be configured to greatly to entire workshop or
The dust-free workshop of room-size also may be configured to the glove box of multistation or single-station.In addition, such space can also construct
The custom-built system of super-clean environment is provided as one or more productions or experimental facilities, or constructs a part of forming apparatus to mention
For the super-clean environment of part.
Requirement in different industrial applications to environment cleanliness is different.For example, food industry and pharmaceutical industry are general
It is required that 6 to 8 grades of ISO of cleanliness.In the research and development such as oled panel research and development and the manufacturing, semiconductors manufacture, nano particle and life
In production, it is accordingly required in particular to such super-clean environment, such as the super-clean environment with 2 to 5 grades of cleanliness of ISO, and in some keys
1 grade of ISO of cleanliness is even required in process procedure.
Mainstream toilet's technology in Vehicles Collected from Market mainly passes through blower fan filtering unit (FFU) and produces in closed space
Raw circulation one-way gas flow (UDF) forms clean room to reach the dust purpose in removal space.For example, the figure of the application
1 shows a kind of rough schematic view of ultra-clean system layer stream based on FFU in the prior art.The application Fig. 2 shows existing
There is the stereoscopic schematic diagram of dust free room of one of the technology based on FFU.For another example Chinese invention patent application CN1651831A
Disclose a kind of fan filter unit control system and the dust free room with the system.And Chinese invention patent application
CN102889249A discloses a kind of blower filter module and clean room air purification system.In another example Chinese invention patent Shen
Please CN105666528A disclose a kind of dust free room circulation filter, dust free room and glove box.These systems have been all made of base
In the scheme of FFU.
However, these technologies based on FFU still have various defects at present, for example,
1. having dead space in the space of irregular shape due to the limitation of FFU structure, it is unable to satisfy use and wants
It asks；
2. a FFU more than is arranged on the ceiling or top plate for closing ultra-clean space, causes ultra-clean space internal vibration larger, and
There is noise, influences the use of its internal unit；
3. the cooling unit or temperature control device in existing system are generally arranged at FFU blower upstream, however FFU blower is long
Meeting after time service damages temperature sensitive ultra-clean space application so that leaving air temp raising；
The air-out direction of 4.FFU blower is usually arranged as direction vertically downward, the quantity of FFU and the ultra-clean sky covered
Between area it is directly proportional, increase the construction and maintenance cost of whole system；On the other hand, if the FFU lazy weight of setting, again
It is difficult to generate uniform laminar flow in entire ultra-clean space；And
5. if desired arranging in pairs or groups for concrete application for FFU system or adjusting different grades of clean filter, need to tear open
FFU is unloaded to replace filter therein, this affects the customizability of total system while bringing additional maintenance cost.
Therefore, a kind of improved ultra-clean system layer stream is needed in the art, can overcome existing toilet's laminar flow system
The defect of system.It should be understood that above-mentioned cited technical problem is only used as example rather than limitations of the present invention, this is practical new
Type is not limited to solve the technical solution of above-mentioned all technical problems simultaneously.The technical solution of the utility model may be embodied as solving
One or more of certainly above-mentioned or other technologies problem.
Utility model content
It is multiple for dead space existing for ultra-clean chamber technology existing in industry, vibration, noise, temperature control fineness deficiency etc.
Problem, the ultra-clean chamber technology of the utility model provide a whole set of complete solution, provide for user and stablize, is efficient noble and unsullied
Cleanliness super-clean environment.Specifically, in order to solve above-mentioned and associated technical problem, the purpose of this utility model is to provide
A kind of ultra-clean system layer stream, comprising: ultra-clean chamber has the exhaust outlet of discharge gas；It is arranged in close above ultra-clean chamber
The gas mixer chamber of envelope has the air inlet of input gas, and wherein gas mixer chamber is with ultra-clean chamber by the top of ultra-clean chamber
Plate isolation；One or more clean filters, the opening being arranged in the top plate of ultra-clean chamber, and make ultra-clean chamber with
Gas mixer chamber is in fluid communication；The first driven fan and the second driven fan being arranged in gas mixer chamber, wherein first is dynamic
Power blower and the second driven fan are arranged to generation power and flow into ultra-clean chamber by clean filter with certain driving air-flow；Flow
Film is arranged in below the top plate of ultra-clean chamber in ultra-clean chamber, and is arranged so that the air-flow for flowing into ultra-clean chamber is formed
For laminar flow, to generate uniform one-way circulation air-flow in ultra-clean chamber.With the ultra-clean laminar flow for using FFU in the prior art
System is different, and the embodiment of the utility model is separately positioned with clean filter by blower, and the customization for ultra-clean system layer stream provides
Great flexibility.
In an optimal technical scheme of the utility model, the air-out direction of first driven fan and described second
The air-out direction of driven fan is with a vertical angle.Optionally, first driven fan and second driven fan
Setting opposite each other.In an optimal technical scheme, the first driven fan and the second driven fan can be along gas mixer chambers
Interior diagonal is set to the corner of gas mixer chamber, to be conducive to mobility of the gas in gas mixer chamber, together
When conducive to driven fan fixation.Different from using the scheme of FFU, blower used by the ultra-clean system layer stream of the utility model
Air-out direction need not be set as direction vertically downward, provide further flexibility for the customization of ultra-clean system layer stream.
In an optimal technical scheme of the utility model, the stream film is HPL film.
Preferably, the ultra-clean system layer stream of the utility model further includes one or more cooling units, is set to one
Or above multiple clean filters, so that air-flow is by flowing into clean filter after cooling unit.Optionally, one
Or each clean filter top in multiple clean filters is provided with one in one or more of cooling units.Root
According to the utility model, cooling unit is located at blower downstream and clean filter upstream, eliminates blower leaving air temp with work
Time and raised influence, particularly suitable for temperature sensitive application.
In an optimal technical scheme of the utility model, first driven fan and the second driven fan are fixedly
It is arranged on the side wall and/or roof of gas mixer chamber.It should be understood that " being fixedly arranged " includes directly or indirectly fixed, and
As non-limiting example, can be used the existing ways such as fastener, welding, damper, damper, bracket, bracket, suspension into
Row is fixed.Different from using the scheme of FFU, the blower of the utility model is not fixed to the ceiling for closing ultra-clean space or top
On plate, therefore the vibration generated when its work substantially reduces ultra-clean spacial influence, particularly suitable for the application to vibration sensing
Occasion.
In an optimal technical scheme of the utility model, the entrance of the first driven fan via the first return flow line with
The lower flow of ultra-clean chamber is connected to, the entrance of the second driven fan via the second return flow line and ultra-clean chamber lower flow
Connection.By this method, laminar flow returns to gas mixer chamber via return flow line by the gas in ultra-clean space and carries out circulating filtration, from
And further increase filter effect.
In an optimal technical scheme of the utility model, the ultra-clean system layer stream of the utility model can also include more
Orifice plate is arranged in ultra-clean chamber so that ultra-clean chamber is divided into ultra-clean chamber top and ultra-clean chamber lower portion.Further, originally
The ultra-clean system layer stream of utility model can also include processing unit, be at least partially disposed in ultra-clean chamber top, with
Production or experiment process are carried out in super-clean environment.In addition, the ultra-clean system layer stream of the utility model can also include passing through institute
State the air inlet pipe and connect by the lower flow of the exhaust outlet and ultra-clean chamber that air inlet and gas mixing chamber are in fluid communication
Logical exhaust pipe.
Optionally, the air inlet pipe and the exhaust pipe are connected to gas management system.Therefore, the utility model is ultra-clean
System layer stream can be arranged in various atmosphere according to the demand of application by gas management system, such as inert gas gas
Atmosphere, and by the various parameters, such as humidity, dew point, concentration etc. of gas management system control gas.
Preferably, the level cross-sectionn of the ultra-clean chamber does not have the shape of orthogonal.FFU in the prior art
It is generally rectangular, it is difficult to cover the space of not irregular shape.And abnormity FFU needs customized production, will increase system manufacture and
Maintenance cost.In contrast, the ultra-clean chamber of the utility model is not limited, for ultra-clean system layer stream customization provide into
The flexibility of one step.
In the another aspect of the utility model, a kind of dust free room is provided comprising above-mentioned ultra-clean system layer stream.
At the another aspect of the utility model, a kind of glove box is provided comprising above-mentioned ultra-clean system layer stream.
In the another aspect of the utility model, a kind of equipment with ultra-clean chamber is provided comprising above-mentioned ultra-clean layer
Streaming system.For example, with ultra-clean chamber equipment may be embodied as various slider systems,
Compared with existing ultra-clean system layer stream, advantage provided by the utility model includes but is not limited to:
A) peptizaiton that film is flowed using high density, the space of irregular shape can also be covered without dead angle, is mentioned
For a stabilization, efficient one-way gas flow (UDF)；
B) ultra-clean space oscillations are smaller, low noise；
C) by control cooling unit, the temperature control in clean room can be better achieved, maintain isoperibol；
D) by the revolving speed of control blower, the uniform air flow that flow velocity is 0.3m/s~0.5m/s is formed in working space；
E) clean filter is conveniently replaceable, and improves the customizability of system, passes through different grades of clean filter of arranging in pairs or groups
Device, highest can achieve the cleanliness of ISO1 (ISO 14644-1)；
F) ultra clean environment caused by, it can be ensured that the dust generated when equipment and processing in space will not be deposited in base
Plate surface；And
G) dust quantity in space can be effectively controlled.
Detailed description of the invention
Fig. 1 is the rough schematic view of the ultra-clean system layer stream based on FFU according to prior art.
Fig. 2 is a kind of stereoscopic schematic diagram of the dust free room based on FFU according to prior art.
Fig. 3 is the schematic diagram according to the ultra-clean system layer stream of the utility model one embodiment.
Fig. 4 is the schematic isometric according to the glove box of the utility model one embodiment.
Fig. 5 is the schematic isometric according to the ultra-clean system layer stream of the utility model one embodiment.
Description of symbols
100 ultra-clean system layer streams
200 ultra-clean chambers
201 flow film
205 ultra-clean chamber tops
202 porous plates
206 ultra-clean chamber lower portions
203 processing units
204 exhaust outlets
300 gas mixer chambers
301 first driven fans
302 second driven fans
303a, 303b, 303c cooling unit
304a, 304b, 304c clean filter
305 air inlets
401 first return flow lines
402 second return flow lines
503 air inlet pipe
504 exhaust pipes
Specific embodiment
The utility model will hereinafter be described more fully hereinafter with reference to the accompanying drawings, attached drawing constitutes one disclosed by the utility model
Divide and exemplary embodiment is shown by way of diagram.It should be understood that attached drawing shown in and embodiments described just below only
It is illustrative, and not as limitations of the present invention.Illustrative attached drawing is merely to illustrate that the utility model
Principle and provide, and be not necessarily drawn to scale.
Example embodiment as shown in Figure 3, the primary structure of the ultra-clean chamber technology of the utility model is by driven fan, cooling
Unit, flows film and porous plate composition at clean filter, its working principle is that driving the indoor gas of seal chamber by driven fan
It flows through supercooling unit, filter, flow film and porous plate, in the indoor circulating current for forming one unidirectionally at the uniform velocity of chamber, and
Dust is taken to above filter from cavity bottom through external backwind tube, removes dust using filter, stream film may be implemented
Unidirectional circulating current at the uniform velocity is covered without dead angle in chamber, and it is the super of 0.3~0.5m/s that flow velocity is finally formed in working space
Net airflow is that the working region of client forms the super-clean environment of real-time stabilization.
According to different grades of clean filter and the equal stream films of arranging in pairs or groups, the different purity requirements (ISO of user can satisfy
1~ISO of 14644-1:Class ISO 9).
As shown in figure 3, including underlying ultra-clean chamber according to the ultra-clean system layer stream 100 of the utility model embodiment
200 and the gas mixer chamber 300 of sealing that is arranged in above ultra-clean chamber, the two be isolated by the top plate of ultra-clean chamber 200.Ying Li
Solution, as non-limiting example, the top plate of ultra-clean chamber 200 may include one of plate, keel frame and/or combination thereof, and
It and can be the structure with one or more layers.Air inlet 305 of the gas mixer chamber 300 with input gas, and ultra-clean chamber
200 have the exhaust outlet 204 of discharge gas.In addition, the ultra-clean system layer stream of the utility model can also include passing through air inlet
305 air inlet pipe 503 being in fluid communication with gas mixer chamber 300 and the lower flow by exhaust outlet 204 and ultra-clean chamber 200
The exhaust pipe 504 of connection.Optionally, air inlet pipe 503 and exhaust pipe 504 are connected to gas management system (not shown), so as to by
The indoor ultra-clean space of ultra-clean chamber is arranged in various atmosphere, such as indifferent gas according to the demand of application by gas management system
Body atmosphere, and by the various parameters, such as humidity, dew point, concentration etc. of gas management system control gas.
As shown in figure 3, one or more clean filter 304a, 304b, 304c are arranged in the top plate of ultra-clean chamber 200
Opening, and ultra-clean chamber 200 is in fluid communication with gas mixer chamber 300.According to the utility model, clean filter
Rank can be selected according to the requirement of concrete application, such as can be HEPA filter, ulpa filter etc..In semiconductor
Etc. in precision applications, it is preferable to use ulpa filter.
In the present embodiment, the first driven fan 301 and the second driven fan 302 are arranged in gas mixer chamber 300,
In the first driven fan 301 and the second driven fan 302 be arranged to generate power with certain driving air-flow by clean filter 304a,
304b, 304c flow into ultra-clean chamber.Although it should be understood that showing three clean filters, the implementation of the utility model in Fig. 3
It is not limited to that, those skilled in the art upon reading this disclosure can be according to the needs of concrete application using being less than or more
In three clean filters.
Different from the scheme using FFU, in the present embodiment, driven fan and clean filter and it is not integrated into a shell
The unit being formed integrally in vivo.Therefore, it is mono- to be not limited to FFU for the shape of the clean filter in the utility model
The shape of member, but can be fabricated to customizing with various shapes, for example, rectangle, circle, polygon and/or other
The regular and/or irregular shape being made of straight line and/or curve.As a result, the level cross-sectionn of ultra-clean chamber 200 can not
Shape with orthogonal.In contrast, FFU in the prior art is generally rectangular, passes through the tiling of multiple FFU
The shape of orthogonal can be covered, and is difficult to cover the space of not irregular shape, and then laminar flow in ultra-clean chamber is caused to have
Dead angle or non-uniform defect.
Ultra-clean system layer stream 100 shown in Fig. 3 further includes flowing film 201, is arranged in ultra-clean chamber in ultra-clean chamber 200
Below the top plate of room, and it is arranged so that the air-flow for flowing into ultra-clean chamber 200 is formed as laminar flow, thus in ultra-clean chamber 200
Generate uniform one-way circulation air-flow.Preferably, it is HPL film that this, which flows film,.HPL film is that a kind of high density flows film.Utilize height
Density flows the peptizaiton of film, and the space of irregular shape can also be covered without dead angle, provides stabilization, efficient
One-way gas flow (UDF).On the other hand, in the present embodiment, the air-out direction of the first driven fan 302 and the second driven fan
Air-out direction 302 is not downward along vertical direction as in the scheme using FFU with a vertical angle
Outlet air.In contrast, in the scheme using FFU, the quantity of driven fan and the quantity of clean filter are corresponding.In this reality
With in novel embodiment, the quantity of driven fan can be far fewer than the quantity of filter.
In addition, in the present embodiment, the first driven fan 301 and the setting opposite each other of the second driven fan 302.With only set
The system that single first driven fan 301 is equipped with without the second driven fan 302 is compared, such opposite disposed to be conducive to
The more uniform air-flow of flow velocity is generated in gas mixer chamber 300, and then is conducive to generate in ultra-clean chamber 200 more uniform
Laminar flow.
Further as shown in figure 3, ultra-clean system layer stream 100 further include be respectively arranged at clean filter 304a, 304b,
Cooling unit 303a, 303b, 303c above 304c.The air-flow of driven fan blowout passes through 303a, 303b, 303c cooling unit
Clean filter 304a, 304b, 304c are flowed into later.It is set as shown in figure 3, cooling unit can be adjacent to above clean filter
It sets.By this method, the raised influence with the working time of blower leaving air temp is eliminated.It should be understood that cooling unit can be implemented
For metal fin, coil pipe, water cooling or liquid cooling apparatus or any other suitable cooling device.It should also be understood that cooling unit can
To be electrically connected to and be controlled by temperature control system (not shown), and the ultra-clean system layer stream of the utility model can be set
Corresponding temperature sensor and other kinds of sensor are with the control for cooling unit.Meanwhile blower and cooling unit with
And each component of ultra-clean system layer stream can be uniformly controlled by central control system (not shown).
It is shown in Fig. 3 and is provided with a cooling unit above each clean filter.However, those skilled in the art should manage
Solution, the embodiments of the present invention are not limited thereto, and a cooling unit can be arranged above multiple clean filters,
It can also be cooled down by enter air-flow of multiple cooling units to a clean filter, as long as cleaning can be cooled down equably
Filter enters air-flow.
In the embodiment shown in fig. 3, the first driven fan 301 and the second driven fan 302 are fixedly arranged in gas
On the side wall of mixing chamber 300.Different from using the scheme of FFU, the blower of the utility model is not fixed to the ultra-clean space of closing
Ceiling or top plate on, therefore the vibration generated when its work substantially reduces ultra-clean spacial influence.It should be understood that this is practical new
The embodiment of type is without being limited thereto, and the first driven fan 301 and/or the second driven fan 302 can be fixedly arranged in gas
On the side wall and/or roof of mixing chamber.In addition, compared with the scheme except driven fan is set to gas mixer chamber, this is practical
It is shorter to reduce the excellent of fan energy consumption to clean filter/cooling unit outlet air path that novel one side has driven fan
On the other hand point has the compact advantage of ultra-clean system layer stream overall dimensions.
As shown in figure 3, lower part of the entrance of the first driven fan 301 via the first return flow line 401 and ultra-clean chamber 200
It is in fluid communication, the entrance of the second driven fan 302 connects via the second return flow line 402 and the lower flow of ultra-clean chamber 200
It is logical.By this method, laminar flow returns to gas mixer chamber via return flow line by the gas of ultra-clean chamber 200 and carries out circulating filtration,
To further increase filter effect.
Porous plate 202 is also shown in Fig. 3, is arranged in ultra-clean ultra-clean chamber 200 to be divided into ultra-clean chamber 200
Chamber top 205 and ultra-clean chamber lower portion 206.Further, ultra-clean system layer stream 100 further includes processing unit 203, at least
It is partially disposed in ultra-clean chamber top 205, to carry out production or experiment process in super-clean environment.Processing unit can be
Manual processing device for being produced or being tested, such as filled with operator by the processing that the gloves of glove box operate
It sets or automatic processing device, such as manipulator or other automatic producing devices.Although processing unit 203 shown in Fig. 3 passes through
Porous plate 202 extends to ultra-clean chamber top 205 from ultra-clean chamber lower portion 206, it should be appreciated that the utility model is not limited to
This, processing unit 203 can be entirely set in ultra-clean chamber top 205.
It will be understood by those skilled in the art that the embodiment of the utility model can be applied to dust free room comprising according to this reality
With the ultra-clean system layer stream of new principle.
In addition the embodiment of the utility model can be applied to glove box.For example, Fig. 4 shows a kind of exemplary glove box,
It may include ultra-clean system layer stream according to the present utility model.
The embodiment of the utility model can also be applied to the equipment with ultra-clean chamber comprising above-mentioned ultra-clean laminar flow system
System.For example, Fig. 5 shows a kind of equipment with ultra-clean chamber, it may include ultra-clean laminar flow system according to the present utility model
System.
Although various embodiments have been described for the purpose of this disclosure, should not be construed as the introduction of the disclosure
It is limited to these embodiments.For example, illustrating only two driven fans in a particular embodiment, but the utility model is not limited to
This, but it is understood to include the scheme using more than two driven fans.Disclosed feature is simultaneously in a specific embodiment
It is not limited to the embodiment, but can be combined with feature disclosed in different embodiments.It will be understood by those skilled in the art that
There is also possible more optional embodiments and modifications, can make various changes and modifications to above-mentioned component and construction, and
It does not depart from by the utility model claims limited range.
Claims (16)
1. a kind of ultra-clean system layer stream characterized by comprising
Ultra-clean chamber (200) has the exhaust outlet (204) of discharge gas；
It is arranged in the gas mixer chamber (300) of the sealing above ultra-clean chamber (200), there is the air inlet of input gas
(305), wherein gas mixer chamber (300) is isolated with ultra-clean chamber (200) by the top plate of ultra-clean chamber；
One or more clean filters (304a, 304b, 304c), the opening being arranged in the top plate of ultra-clean chamber (200)
Place, and ultra-clean chamber (200) and gas mixer chamber (300) are in fluid communication；
The first driven fan (301) and the second driven fan (302) being arranged in gas mixer chamber (300), wherein first is dynamic
Power blower (301) and the second driven fan (302) be arranged to generate power with certain driving air-flow by clean filter (304a,
304b, 304c) flow into ultra-clean chamber (200)；
Film (201) are flowed, are arranged in ultra-clean chamber (200) below the top plate of ultra-clean chamber, and be arranged so as to flow into
The air-flow of ultra-clean chamber (200) is formed as laminar flow, to generate uniform one-way circulation air-flow in ultra-clean chamber (200).
2. ultra-clean system layer stream according to claim 1, which is characterized in that the outlet air of first driven fan (301)
The air-out direction of direction and second driven fan (302) is with a vertical angle.
3. ultra-clean system layer stream according to claim 1, which is characterized in that first driven fan (301) and described
Second driven fan (302) setting opposite each other.
4. ultra-clean system layer stream according to claim 1, which is characterized in that the stream film is HPL film.
5. ultra-clean system layer stream according to claim 1, which is characterized in that further include one or more cooling units
(303a, 303b, 303c) is set to above one or more clean filters (304a, 304b, 304c), so that air-flow
By flowing into clean filter (304a, 304b, 304c) after cooling unit (303a, 303b, 303c).
6. ultra-clean system layer stream according to claim 5, which is characterized in that one or more of clean filters
Be provided with above each clean filter in (304a, 304b, 304c) one or more of cooling units (303a, 303b,
One in 303c).
7. ultra-clean system layer stream according to claim 1, which is characterized in that first driven fan (301) and second
Driven fan (302) is fixedly arranged on the side wall and/or roof of gas mixer chamber (300).
8. ultra-clean system layer stream according to claim 1, which is characterized in that the entrance of first driven fan (301)
It is connected to via the first return flow line (401) with the lower flow of ultra-clean chamber (200), the entrance warp of the second driven fan (302)
It is connected to by the second return flow line (402) with the lower flow of ultra-clean chamber (200).
9. ultra-clean system layer stream according to claim 1, which is characterized in that further include porous plate (202), be arranged in super
Ultra-clean chamber is divided into ultra-clean chamber top (205) and ultra-clean chamber lower portion (206) in net chamber (200).
10. ultra-clean system layer stream according to claim 9, which is characterized in that further include processing unit (203), at least
It is partially disposed in ultra-clean chamber top (205), to carry out production or experiment process in super-clean environment.
11. ultra-clean system layer stream according to claim 1, which is characterized in that further include by air inlet (305) and gas
The air inlet pipe (503) and the row being connected to by exhaust outlet (204) with the lower flow of ultra-clean chamber that mixing chamber (300) is in fluid communication
Tracheae (504).
12. ultra-clean system layer stream according to claim 11, which is characterized in that the air inlet pipe (503) and the exhaust
Pipe (504) is connected to gas management system.
13. ultra-clean system layer stream according to claim 1, which is characterized in that the horizontal cross-section of the ultra-clean chamber (200)
Face does not have the shape of orthogonal.
14. a kind of dust free room, which is characterized in that including ultra-clean system layer stream according to any one of claim 1 to 13.
15. a kind of glove box, which is characterized in that including ultra-clean system layer stream according to any one of claim 1 to 13.
16. a kind of equipment with ultra-clean chamber, which is characterized in that including according to any one of claim 1 to 13
Ultra-clean system layer stream.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821810284.0U CN209348273U (en) | 2018-11-05 | 2018-11-05 | Ultra-clean system layer stream and dust free room, glove box and equipment with it |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821810284.0U CN209348273U (en) | 2018-11-05 | 2018-11-05 | Ultra-clean system layer stream and dust free room, glove box and equipment with it |
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| Publication Number | Publication Date |
|---|---|
| CN209348273U true CN209348273U (en) | 2019-09-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821810284.0U Active CN209348273U (en) | 2018-11-05 | 2018-11-05 | Ultra-clean system layer stream and dust free room, glove box and equipment with it |
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| CN (1) | CN209348273U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112452932A (en) * | 2020-11-18 | 2021-03-09 | 南通市德信致远环境科技有限公司 | Modularization intelligence toilet |
-
2018
- 2018-11-05 CN CN201821810284.0U patent/CN209348273U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112452932A (en) * | 2020-11-18 | 2021-03-09 | 南通市德信致远环境科技有限公司 | Modularization intelligence toilet |
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