CN209128586U - Degasser and electroplating device with degasser - Google Patents
Degasser and electroplating device with degasser Download PDFInfo
- Publication number
- CN209128586U CN209128586U CN201821948199.0U CN201821948199U CN209128586U CN 209128586 U CN209128586 U CN 209128586U CN 201821948199 U CN201821948199 U CN 201821948199U CN 209128586 U CN209128586 U CN 209128586U
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- liquid
- gassed
- degasser
- gas
- tube
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- 238000009713 electroplating Methods 0.000 title claims abstract description 20
- 239000007788 liquid Substances 0.000 claims abstract description 144
- 238000007872 degassing Methods 0.000 claims abstract description 86
- 238000010438 heat treatment Methods 0.000 claims abstract description 46
- 239000012528 membrane Substances 0.000 claims description 20
- 238000001816 cooling Methods 0.000 claims description 13
- 239000002826 coolant Substances 0.000 claims description 12
- 239000012535 impurity Substances 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000000110 cooling liquid Substances 0.000 claims description 3
- 238000004090 dissolution Methods 0.000 claims description 2
- 238000001914 filtration Methods 0.000 claims description 2
- 239000012510 hollow fiber Substances 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 10
- 238000001556 precipitation Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 8
- 235000012489 doughnuts Nutrition 0.000 description 8
- 238000007747 plating Methods 0.000 description 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- 239000000654 additive Substances 0.000 description 4
- 230000000996 additive effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 230000003254 anti-foaming effect Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 206010044565 Tremor Diseases 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Degasification And Air Bubble Elimination (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The utility model is related to a kind of degasser and the electroplating device with degasser, wherein degasser, comprising: inlet, for being passed through liquid to be de-gassed to degasser；Deaerate unit, is connected with inlet, for sloughing the gas in liquid to be de-gassed；Further include: heater is set between inlet and degassing unit, is connected with inlet and degassing unit, for heating the liquid to be de-gassed flowed through, to reduce the solubility of the gas in liquid to be de-gassed, is made the gas evolution dissolved in liquid to be de-gassed.The degasser of the utility model and electroplating device with degasser have heater and degassing unit, de-gas liq can be treated to be heated, to reduce the solubility of the gas in liquid to be de-gassed, make the gas evolution dissolved in liquid to be de-gassed, when so that treating de-gas liq using degassing unit and be de-gassed, the most of gas dissolved in liquid is all heated precipitation, to have better degasifying effect.
Description
Technical field
The utility model relates to semiconductor production fields, and in particular to a kind of degasser and the plating with degasser
Equipment.
Background technique
In semiconductor field, it is often necessary to use electroplating technology.When such as using copper as plain conductor, it is necessary to make
Copper is deposited with electroplating technology.But in the prior art, the gas in electroplate liquid is difficult to remove, and the gas in electroplate liquid is usual
Sedimentary can be made pit defect occur, influence final electroplating effect.
In the prior art, usually the gas being attached in electroplate liquid is shaken out in the way of vertical tremor, and shaken
It is electroplated again later after bubble out.Specifically, shaking electroplate liquid up and down, the surface tension of bubble in electroplate liquid is destroyed, it will be electric
Bubble in plating solution shakes out.But when using this method, the bubble in electroplate liquid shakes that effect out is limited, with electroplating reaction into
It goes, the gas dissolved in electroplate liquid still can further be precipitated, and cause pit defect during electroplating deposition, influence final
Electroplating effect.
Utility model content
The purpose of this utility model is to provide a kind of degasser and with the electroplating device of degasser, can into
The gas dissolved in liquid is precipitated before row degassing process as far as possible, the gas dissolved in the liquid for participating in reacting is enable to be filled
Divide abjection, optimizes reaction effect.
In order to solve the above-mentioned technical problem, the utility model provides a kind of degasser, comprising: inlet, for
The degasser is passed through liquid to be de-gassed；Deaerate unit, is connected with the inlet, for sloughing in liquid to be de-gassed
Gas；Further include: heater is set between the inlet and the degassing unit, with the inlet and degassing unit
It is connected, for heating the liquid to be de-gassed flowed through, to reduce the solubility of the gas in liquid to be de-gassed, makes liquid to be de-gassed
The gas evolution of middle dissolution.
Optionally, further includes: cooler is connected with the degassing unit, for the liquid Jing Guo degassing process into
Row cooling treatment.
Optionally, the cooler includes double-jacket tube, and the double-jacket tube includes inner and outer tubes, and said inner tube is arranged outside
In pipe, and the inner tube of the double-jacket tube is used for through the liquid that has been subjected to degassing process, the inner and outer tubes of the double-jacket tube it
Between filled with coolant liquid, for the cooling liquid passed through from said inner tube.
Optionally, the coolant liquid includes water.
Optionally, the degassing unit includes: vacuum tube, is deviate from from liquid to be de-gassed for containing the degassing unit
Gas；Deaerate membrane tube, is set in the vacuum tube, is connected with the heater, for the liquid to be de-gassed flowed through
It is de-gassed.
Optionally, the degassing unit includes at least two degassing membrane tubes, is set in the vacuum tube parallel.
Optionally, the tube wall of the degassing membrane tube is doughnut tube wall.
Optionally, the degassing unit further include: vacuum pump is connected to the vacuum tube, for the vacuum tube into
Row vacuumizes.
Optionally, further includes: filter is set between inlet and the heater, for from the inlet
The liquid to be de-gassed of input is filtered processing, to slough the impurity in the liquid to be de-gassed.
In order to solve the above-mentioned technical problem, the utility model additionally provides a kind of electroplating device with degasser, packet
It includes: reactive tank, for containing the electroplate liquid that electroplating reaction occurs；Degasser is connected to the reactive tank, is used for described anti-
Answer the electroplate liquid for being passed through in slot and completing degassing process, comprising: inlet, for being passed through plating to be de-gassed to the degasser
Liquid；Deaerate unit, is connected with the inlet and reactive tank, for sloughing the gas in electroplate liquid to be de-gassed, and will slough
Electroplate liquid after gas is passed through to the reactive tank；Heater is set between the inlet and the degassing unit, with institute
It states inlet to be connected with degassing unit, for heating the electroplate liquid to be de-gassed flowed through, to reduce the gas in electroplate liquid to be de-gassed
The solubility of body makes the gas evolution dissolved in electroplate liquid to be de-gassed.
The degasser of the utility model and electroplating device with degasser have heater, are treated by heater
De-gas liq is heated, and to reduce the solubility of the gas in liquid to be de-gassed, analyses the gas dissolved in liquid to be de-gassed
Out.In this way, the overwhelming majority is dissolved in be de-gassed when being de-gassed by the unit that deaerates to the liquid to be de-gassed after heating
Gas in liquid has been heated precipitation, can be removed by the degassing unit, therefore has better degasifying effect, takes off
Gas contained in liquid after gas is less, when being reacted using the liquid after degassing, it may have better reaction effect.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the degasser in a kind of specific embodiment of the utility model.
Fig. 2 is the structural schematic diagram of the cooler of the degasser in a kind of specific embodiment of the utility model.
Fig. 3 is the structural schematic diagram of the degassing unit of the degasser in a kind of specific embodiment of the utility model.
Fig. 4 is the degassing schematic diagram of the degassing unit of the degasser in a kind of specific embodiment of the utility model.
Fig. 5 is the structural representation of the electroplating device with degasser in a kind of specific embodiment of the utility model
Figure.
Specific embodiment
Below in conjunction with the drawings and specific embodiments to the utility model proposes a kind of degasser and with degassing dress
The electroplating device set is described in further detail.
Referring to Fig. 1, for the structural schematic diagram of the degasser in a kind of specific embodiment of the utility model.
In this specific embodiment, the degasser includes: inlet 100, for being passed through to the degasser
Liquid to be de-gassed；Deaerate unit 102, is connected with the inlet 100, for sloughing the gas in liquid to be de-gassed；Also wrap
Include: heater 101 is set between the inlet 100 and the degassing unit 102, single with the inlet 100 and degassing
Member 102 is connected, and for heating the liquid to be de-gassed flowed through, to reduce the solubility of the gas in liquid to be de-gassed, makes to de-
The gas evolution dissolved in gas-liquid.
In this specific embodiment, the heater 101 includes heating pipe 1011 and is wound in the heating pipe
The heater strip 1012 on 1011 surfaces.The heating pipe 1011 is connected to the inlet 100, for supplying liquid flow to be de-gassed
It crosses, the heater strip 1012 is for heating the liquid to be de-gassed for flowing through the heating pipe 1011.In a kind of specific embodiment
In, 1012 uniform winding of heater strip makes to flow through in the heating pipe 1011 in the outer surface of the heating pipe 1011
Liquid to be de-gassed can be heated properly.
In fact, the heating pipe 1011 can also be arranged to other structures, such as there is a heating chamber, and heater strip
1012 uniform windings are in the outer surface of the heating chamber.The heating chamber is connected to the inlet 100 and the degassing unit
102.The liquid to be de-gassed for being passed through the degasser from inlet 100 is stored in first in the heating chamber, by the heating
Liquid to be de-gassed in 1012 pairs of heating chambers of silk heats, and after the completion of heating, liquid to be de-gassed is emitted into described de-
Gas unit 102.
In this specific embodiment, after liquid to be de-gassed being first heated to certain temperature due to heater 101, then will be to
De-gas liq is emitted into degassing unit 102, therefore when heating chamber is arranged, liquid to be de-gassed can be appropriately extended in heating chamber
The time of retention reduces the power requirement to heater strip 1012 by extending heating time.
In fact, liquid to be de-gassed, such as microwave heating equipment can also be heated using other heating structures as needed.
When using the heater strip 1012, the heater strip 1012 can also be arranged to other positions to heating pipe 1011 or heating chamber
It sets, as in the tube wall of setting to the heating pipe 1011 or heating chamber.
After the liquid to be de-gassed is heated by the heater strip 1012, the physical property and change of liquid to be de-gassed not will cause
The tube wall of the variation for learning property, liquid to be de-gassed and heating pipe 1011 after will not making heating reacts, and will not more make
Liquid to be de-gassed after heating reacts with degassing unit 102.
Treat de-gas liq by heater 101 and heated, after increasing the temperature of liquid to be de-gassed, gas to
Solubility in de-gas liq reduces, and the gas being originally dissolved in liquid to be de-gassed is precipitated, what the heater 101 was connected to
When degassing unit 102 is treated de-gas liq and is de-gassed, the gas being precipitated can also be sloughed, treat the degassing of de-gas liq
The effect of processing is more preferable.
In specific embodiment shown in Fig. 1, the degasser further include: cooler 103, with the degassing unit
102 are connected, for carrying out cooling treatment to the liquid Jing Guo degassing process.After cooler 103, cooler can be passed through
The liquid for being heated to certain temperature is cooled to normal operating temperature by 103, prevents the liquid pair higher than normal working temperature
Subsequent process flow impacts.
It is the knot of the cooler of the degasser in a kind of specific embodiment of the utility model please refer to Fig. 2
Structure schematic diagram.In this specific embodiment, the cooler 103 includes double-jacket tube, and the double-jacket tube includes inner tube 202 and outer
Pipe 201, the diameter of said inner tube 202 are less than the diameter of outer tube 201, are arranged in outer tube 201, between inner tube 202 and outer tube 201
There is interlayer, and inner tube 202 is used for the liquid by having been subjected to degassing process, between the inner tube 202 and outer tube 201 of the double-jacket tube
Interlayer filled with coolant liquid 203, for the cooling liquid flowed through from said inner tube 202.
In a specific embodiment, the coolant liquid 203 includes water.In fact, cooling velocity that can be as needed
And the temperature being cooled to is wanted the type of the coolant liquid 203 and the length of double-jacket tube is arranged.Such as needed is cold
But speed, setting coolant liquid 203 are the mixed solution of ethylene glycol, anticorrosive additive, anti-foaming additive and water.Cooler
The length of 103 double-jacket tube is directly related with cooling time.The length of double-jacket tube is longer, the liquid after 103 pairs of cooler degassings
Cooling time it is longer.
It is the structural representation of degassing unit described in a kind of specific embodiment of the utility model please refer to Fig. 3
Figure.In this specific embodiment, the degassing unit 102 includes: vacuum tube 301, for contain the degassing unit 102 from
The gas deviate from liquid to be de-gassed；Deaerate membrane tube 302, is set in the vacuum tube 301, is connected with the heater 101
It is logical, for being de-gassed to the liquid to be de-gassed flowed through.
It is the degassing unit of the degasser in a kind of specific embodiment of the utility model please refer to Fig. 4
Deaerate schematic diagram.In this specific embodiment, the tube wall of the degassing membrane tube 302 is doughnut tube wall, is had a large amount of
Doughnut.There is small hole on doughnut, hydrone cannot be by this aperture, and gas molecule can pass through, because
During liquid to be de-gassed flows through in degassing membrane tube 302, the gas in liquid to be de-gassed can be constantly via described for this
Doughnut tube wall is spilt into vacuum tube 301, to achieve the purpose that gas in removal liquid to be de-gassed.
In a specific embodiment, the degassing unit 102 further include: vacuum pump 105 is connected to the vacuum tube
301, for being vacuumized to the vacuum tube 301.Vacuum tube 301 keeps vacuum degree under the action of vacuum pump 105.
In a specific embodiment, the degassing unit 102 includes at least two degassing membrane tubes 302, parallel to be arranged
In in the vacuum tube 301, to increase the contact area of degassing membrane tube 302 and electroplate liquid, the efficiency of exhaust is improved.
In Fig. 3, the degassing unit 102 includes four parallel arrangement of degassing membrane tubes 302.Four degassing membrane tubes 302
It being connected to the heater 101, being same when being passed through the liquid to be de-gassed in heater 101 to the degassing unit 102
When be passed through to it is described degassing unit 102 four degassing membrane tubes 302 in.In fact, degassing membrane tube 302 can be set as needed
Number.In a certain range, with the increase of the number of degassing membrane tube 302, the contact area for the membrane tube 302 and electroplate liquid of deaerating
Increase, the degassing process effect for treating de-gas liq is better.
In a specific embodiment, the degasser further include: filter 104 is set to inlet 100 and institute
It states between heater 101, it is described to slough for being filtered processing to the liquid to be de-gassed inputted from the inlet 100
Impurity in liquid to be de-gassed.In fact, it can also be not provided with the filter 104 when the impurity in liquid to be de-gassed is less,
To save the Material Cost of the degasser.
In a specific embodiment, the filter 104 includes active carbon filter core, passes through the high-ratio surface of active carbon
Product is to adsorb the impurity in liquid to be de-gassed.In fact, the specific configuration of filter 104 can be set as needed, such as it was arranged
Filter 104 further includes amberplex, makes to treat certain ion in de-gas liq and is filtered out.
Please refer to Fig. 5, Fig. 5 is the plating with degasser in a kind of specific embodiment of the utility model
The structural schematic diagram of equipment.In this specific embodiment, the electroplating device with degasser includes: reactive tank 501,
For containing the electroplate liquid that electroplating reaction occurs；Degasser is connected to the reactive tank 501, is used for the reactive tank 501
Inside it is passed through the electroplate liquid for completing degassing process, comprising: inlet 100, for being passed through electroplate liquid to be de-gassed to the degasser；
Deaerate unit 102, is connected with the inlet 100 and reactive tank 501, for sloughing the gas in electroplate liquid to be de-gassed, and
The electroplate liquid after gas will be sloughed to be passed through to the reactive tank 501；Heater 101 is set to the inlet 100 and takes off with described
Between gas unit 102, it is connected with the inlet and degassing unit, for heating the electroplate liquid to be de-gassed flowed through, to reduce
The solubility of gas in electroplate liquid to be de-gassed makes the gas evolution dissolved in electroplate liquid to be de-gassed.
In a specific embodiment, the heater 101 includes heating pipe 1011 and is wound in the heating tube
The heater strip 1012 on 1011 surface of road.The heating pipe 1011 is used to flow through for electroplate liquid to be de-gassed, the heater strip 1012
For heating the electroplate liquid to be de-gassed flowed through in the heating pipe 1011.Heater strip 1012 winds the heating pipe 1011,
The electroplate liquid to be de-gassed flowed through in the heating pipe 1011 is set to be heated properly.
After the electroplate liquid to be de-gassed is heated by the heater strip 1012, the physical property of electroplate liquid to be de-gassed not will cause
It reacts with the tube wall of the variation of chemical property, electroplate liquid to be de-gassed and heating pipe 1011 after heating will not be made, more
Electroplate liquid to be de-gassed after will not making heating reacts with degassing unit 102.
Electroplate liquid to be de-gassed is being heated by heater 101, after increasing the temperature of electroplate liquid to be de-gassed, gas
Solubility in electroplate liquid to be de-gassed reduces, and the gas being originally dissolved in electroplate liquid to be de-gassed is precipitated, the heater
When the degassing unit 102 of 101 connections is de-gassed electroplate liquid to be de-gassed, the gas being precipitated can also be sloughed, be treated de-
The effect of the degassing process of pneumoelectric plating solution is more preferable.
In specific embodiment shown in Fig. 1, the degasser further include: cooler 103, with the degassing unit
102 are connected, for carrying out cooling treatment to the electroplate liquid Jing Guo degassing process.After cooler 103, cooling can be passed through
The electroplate liquid for being heated to certain temperature is cooled to normal operating temperature by device 103, prevents the electricity higher than normal working temperature
Plating solution impacts subsequent process flow.
Please refer to Fig. 2, in specific embodiment shown in Fig. 2, the cooler 103 includes double-jacket tube, described
Double-jacket tube includes inner tube 202 and outer tube 201, and wherein inner tube 202 is used for the electroplate liquid by having been subjected to degassing process, double sets
Interlayer between the inner tube 202 and outer tube 201 of pipe is filled with coolant liquid 203, for the cooling plating flowed through from said inner tube 202
Liquid.
In a specific embodiment, the coolant liquid 203 includes water.In fact, cooling velocity that can be as needed
And the temperature being cooled to is wanted the type of the coolant liquid 203 and the length of double-jacket tube is arranged.Such as needed is cold
But speed, setting coolant liquid 203 are the mixed solution of ethylene glycol, anticorrosive additive, anti-foaming additive and water.Cooler
The length of 103 double-jacket tube is directly related with cooling time.The length of double-jacket tube is longer, the plating after 103 pairs of cooler degassings
The cooling time of liquid is longer.
Degassing unit 102 is connected to the reactive tank 501 by cooler 103, and will have passed through successively have passed through heating, takes off
Gas and the electroplate liquid of cooling treatment are passed through to the reactive tank 501.
Please refer to Fig. 3, in specific embodiment shown in Fig. 3, the degassing unit 102 includes: vacuum tube
301, the gas deviate from from electroplate liquid to be de-gassed for containing the degassing unit 102；Deaerate membrane tube 302, is set to described
In vacuum tube 301, it is connected with the heater 101, for being carried out to the electroplate liquid to be de-gassed for flowing into the degassing membrane tube 302
Degassing process.
Please refer to Fig. 4, the tube wall of the degassing membrane tube 302 is doughnut tube wall, has a large amount of doughnut.
There is small hole on doughnut, hydrone cannot be by this aperture, and gas molecule can pass through, therefore to be de-gassed
During electroplate liquid passes through in degassing membrane tube 302, the gas in electroplate liquid to be de-gassed will be constantly via described hollow
Fiber tube wall is spilt into vacuum tube 301, to achieve the purpose that remove gas in electroplate liquid.
In a specific embodiment, the degasser further include: filter 104 is set to inlet 100 and institute
It states between heater 101, for being filtered processing to the electroplate liquid to be de-gassed inputted from the inlet 100, to slough
State the impurity in electroplate liquid to be de-gassed.In fact, the filtering can also be not provided with when the impurity in electroplate liquid to be de-gassed is less
Device 104, to save the Material Cost of the degasser.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
Art personnel can also make several improvements and modifications without departing from the principle of this utility model, these improvements and modifications
Also it should be regarded as the protection scope of the utility model.
Claims (10)
1. a kind of degasser, comprising:
Inlet, for being passed through liquid to be de-gassed to the degasser；
Deaerate unit, is connected with the inlet, for sloughing the gas in liquid to be de-gassed；It is characterized by further comprising:
Heater is set between the inlet and the degassing unit, is connected with the inlet and degassing unit, is used
In the liquid to be de-gassed that flows through of heating, to reduce the solubility of the gas in liquid to be de-gassed, make to dissolve in liquid to be de-gassed
Gas evolution.
2. degasser according to claim 1, which is characterized in that further include:
Cooler is connected with the degassing unit, for carrying out cooling treatment to the liquid Jing Guo degassing process.
3. degasser according to claim 2, which is characterized in that the cooler includes double-jacket tube, the double-jacket tube
Including inner and outer tubes, said inner tube is arranged in outer tube, and the inner tube of the double-jacket tube is used for by having been subjected to degassing process
Liquid, filled with coolant liquid between the inner and outer tubes of the double-jacket tube, for the cooling liquid passed through from said inner tube.
4. degasser according to claim 3, which is characterized in that the coolant liquid includes water.
5. degasser according to claim 1, which is characterized in that the degassing unit includes:
Vacuum tube, the gas deviate from from liquid to be de-gassed for containing the degassing unit；
Deaerate membrane tube, is set in the vacuum tube, is connected with the heater, for carrying out to the liquid to be de-gassed flowed through
Degassing process.
6. degasser according to claim 5, which is characterized in that the degassing unit includes at least two degassing films
Pipe, is set to parallel in the vacuum tube.
7. degasser according to claim 5, which is characterized in that the tube wall of the degassing membrane tube is hollow fiber conduit
Wall.
8. degasser according to claim 5, which is characterized in that the degassing unit further include:
Vacuum pump is connected to the vacuum tube, for vacuumizing to the vacuum tube.
9. degasser according to claim 1, which is characterized in that further include:
Filter is set between inlet and the heater, for from the liquid to be de-gassed that the inlet inputs into
Row filtration treatment, to slough the impurity in the liquid to be de-gassed.
10. a kind of electroplating device with degasser characterized by comprising
Reactive tank, for containing the electroplate liquid that electroplating reaction occurs；
Degasser is connected to the reactive tank, for being passed through the electroplate liquid for completing degassing process, packet into the reactive tank
It includes:
Inlet, for being passed through electroplate liquid to be de-gassed to the degasser；
Deaerate unit, is connected with the inlet and reactive tank, for sloughing the gas in electroplate liquid to be de-gassed, and will slough
Electroplate liquid after gas is passed through to the reactive tank；
Heater is set between the inlet and the degassing unit, is connected with the inlet and degassing unit, is used
Made in electroplate liquid to be de-gassed in the electroplate liquid to be de-gassed that heating is flowed through with reducing the solubility of the gas in electroplate liquid to be de-gassed
The gas evolution of dissolution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821948199.0U CN209128586U (en) | 2018-11-23 | 2018-11-23 | Degasser and electroplating device with degasser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821948199.0U CN209128586U (en) | 2018-11-23 | 2018-11-23 | Degasser and electroplating device with degasser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209128586U true CN209128586U (en) | 2019-07-19 |
Family
ID=67246765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821948199.0U Expired - Fee Related CN209128586U (en) | 2018-11-23 | 2018-11-23 | Degasser and electroplating device with degasser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209128586U (en) |
-
2018
- 2018-11-23 CN CN201821948199.0U patent/CN209128586U/en not_active Expired - Fee Related
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Granted publication date: 20190719 |