CN207877300U - A kind of ultra-pure water decarburization/device for deoxidizing system based on membrane contactor - Google Patents
A kind of ultra-pure water decarburization/device for deoxidizing system based on membrane contactor Download PDFInfo
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- CN207877300U CN207877300U CN201820097585.7U CN201820097585U CN207877300U CN 207877300 U CN207877300 U CN 207877300U CN 201820097585 U CN201820097585 U CN 201820097585U CN 207877300 U CN207877300 U CN 207877300U
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Abstract
Ultra-pure water decarburization/device for deoxidizing system based on membrane contactor that the utility model discloses a kind of, including：Infusion pump, for conveying pending water；Membrane contactor, shell side inlet are connect with the water outlet of the infusion pump, and shell-side outlet exports the water handled well；Nitrogen basin is connect by decompression member with the tube side import of the membrane contactor；Vacuum pump, import and the tube side outlet of the membrane contactor connect, outlet output nitrogen and the mixed gas for being degassed body；Ultra-pure water decarburization/device for deoxidizing the system based on membrane contactor of the utility model, the removal efficiency of carbon dioxide or oxygen is high, occupation area of equipment is small, Operation and Maintenance is simple, and the gas of vacuum pump outlet can be used for food fresh keeping when carbon dioxide removal, system product can be utilized, good in economic efficiency.
Description
Technical field
The utility model is related to decarburization/deoxy technology field, more particularly to a kind of ultra-pure water decarburization based on membrane contactor/
Device for deoxidizing system.
Background technology
In the industrial processes such as electronics, semiconductor, liquid crystal display, photovoltaic, a large amount of pure water, high-purity is often required to use
Water, ultra-pure water cleaning semi-finished product, finished product.The integrated level of integrated circuit is higher, and line width is narrower, and the requirement to water quality is also higher.Often
There are three types of ultra-pure water process of preparing：(1) ion exchange, (2) two steps ro, (3) efficient reverse osmosis plus EDI (electricity
Desalination).Reverse osmosis to remove almost all of divalent salts and a part of monovalent salt, remaining salt is removed by EDI；But it is reverse osmosis
Solubilised state carbon dioxide in water can not be removed, after by reverse osmosis membrane again partial ionization can occur for these carbon dioxide, increase
The load of EDI influences its service life.
Traditional decarbonization method is usually to carry out decarburization to water with stripping tower, and water enters from top inside stripping tower, spray
It flows down along packing layer, cleaned air is blasted from stripping tower bottom, with water counter current contacting；Carbon dioxide partial pressure in air is less than water
The partial pressure of middle carbon dioxide balance, carbon dioxide are just diffused into from water in air, to remove carbon dioxide in water.
But the gas-liquid contact face that unit volume filler provides in stripping tower is limited, and degassing rate is low, and filler needs periodically
It replaces, cost is higher.
In addition the ultra-pure water of semiconductor integrated circuit cleaning needs to carry out dissolving oxygen removal, avoids dissolving in cleaning process
Oxygen aoxidizes integrated circuit board surface metal；Beer, beverage, oral liquid medicine are also required to carry out dissolving oxygen removal with water, avoid dissolving
Oxygen aoxidizes the active nutrients in water.But lack efficient pure water device for deoxidizing at present.
Utility model content
The utility model provides a kind of ultra-pure water decarburization/device for deoxidizing system based on membrane contactor, carbon dioxide and
Oxygen removal efficiency is high, and occupation area of equipment is small, and Operation and Maintenance is simple.
A kind of ultra-pure water decarburization/device for deoxidizing system based on membrane contactor, including：
Infusion pump, for conveying pending water；
Membrane contactor, shell side inlet are connect with the water outlet of the infusion pump, and shell-side outlet exports the water handled well；
Nitrogen basin is connect by decompression member with the tube side import of the membrane contactor；
Vacuum pump, import and the tube side outlet of the membrane contactor connect, outlet output nitrogen and the mixing for being degassed body
Gas.
It is oxygen or carbon dioxide to be degassed body, is distinguished according to the difference of processing requirement, pending water is through defeated
Liquid pump pressurization enters shell side, from inside to outside Radial Flow into the central tube of membrane contactor lower part by the pore on central tube
Across film wire, the top of membrane contactor is entered across partition board, flows radially through film wire from outside to inside, in being reentered by pore
Heart pipe goes out membrane contactor from top, further removes gas subsequently into next membrane contactor shell side, the infusion pump is generally adopted
Use centrifugal pump.
The tube side outlet of membrane contactor lower side connects vacuum pump, and the high pure nitrogen in nitrogen basin passes through decompression member
Membrane contactor is entered by the tube side import of upper side after decompression, decompression member generally uses pressure reducing valve.
What gas circuit was connected to is the tube side of membrane contactor, and for water in the shell fluid flow of membrane contactor, tube side top is passed through High Purity Nitrogen
Gas, bottom vacuumize, theoretically with that body concentration of ordinary dissolution is degassed in the water of gas-liquid equilibrium is almost nil, body is degassed in water and is just oozed
Film medium is diffused through thoroughly, into gas phase.It is constantly equipped with nitrogen purging, vacuumizes, ensure the carbon dioxide or oxygen in gas phase
Concentration is very low always, and the carbon dioxide or oxygen in such water are also with regard to continuous diffusion to gas phase.To remove dioxy in water
Change carbon or oxygen.
In order to improve treatment effect, it is preferred that the membrane contactor is equipped with concatenated two of shell side, and respectively the first film connects
Tentaculum and the second membrane contactor.Decarburization/deoxidation treatment is carried out by the membrane contactor of two-stage, processing effect can be further increased
Fruit.
In order to improve treatment effect, it is preferred that the nitrogen basin is contacted by being respectively connected to the first film after decompression member
The tube side import of device and the second membrane contactor.The nitrogen for inputting membrane contactors at different levels is exported from nitrogen basin, and purity is high, is inhaled
Fruit of producing effects is more preferable.
It is that pretreated water is passed through in upstream in transfer water tank, it is preferred that the water inlet of the infusion pump is connected to pending
The transfer water tank of water；It needs micro high-purity hydrochloric acid is added when system carbon dioxide removal and pH value is adjusted to slightly below 5.6.
In order to improve treatment effect, it is preferred that micro high purity hydrochloric acid need to be added to transfer water tank when carbon dioxide removal, it will
The pH value of water is adjusted to 5.6 hereinafter, the water outlet of the infusion pump is equipped with pH testers；When removing oxygen, the second film contact
The water outlet of device shell side is equipped with dissolved oxygen detector.
Preferably, it connects to be equipped on the pipeline of the water outlet of the infusion pump and the shell side inlet of the membrane contactor and add
Hot cell.Water temperature is increased, the solubility of gas in water can be reduced, increases removing power；Heating unit may be used electricity and add
Hot device.
Preferably, gas precision filter is installed between the gas outlet and decompression member of the nitrogen basin.Nitrogen is store
High pure nitrogen in tank is filtered by gas precision filter, and impurity is avoided to enter system.
In order to improve diffusion effect, it is preferred that the outlet side of the decompression member and the vacuum pump inlet end
Equipped with pressure detector.The atmospheric pressure value of the outlet side of detection decompression member and vacuum pump in real time, is expanded with the infiltration being optimal
Dissipate effect.
Nitrogen accounts for 99% or more in the mixed gas that this system is used to generate when carbon dioxide eliminating, remaining major part is two
Carbonoxide, the mixed gas formed in this way are used directly for food fresh keeping.
The beneficial effects of the utility model：
Ultra-pure water decarburization/device for deoxidizing the system based on membrane contactor of the utility model, carbon dioxide or oxygen take off
Except rate height, occupation area of equipment is small, and Operation and Maintenance is simple, and the gas of vacuum pump outlet can be used for eating when carbon dioxide removal
Product are fresh-keeping, and system product can be utilized, good in economic efficiency.
Description of the drawings
Fig. 1 is the structural schematic diagram of the ultra-pure water decarburization/device for deoxidizing system based on membrane contactor of the utility model.
Specific implementation mode
As shown in Figure 1, the ultra-pure water decarburization/device for deoxidizing system based on membrane contactor of the present embodiment includes transfer water tank
1, centrifugal pump 2, electric heater 3, membrane contactor 4, membrane contactor 5, gas precision filter 6, pressure reducing valve 7, nitrogen basin 8 and water
Ring vacuum pump 9.
Centrifugal pump 2 is for conveying the water from transfer water tank 1；The shell side of membrane contactor 4 and membrane contactor 5 is connected, and film connects
The shell side inlet of tentaculum 5 is connect with the water outlet of centrifugal pump 2, and the shell-side outlet of membrane contactor 4 exports the water handled well；Nitrogen is store
Tank 8 is connect by pressure reducing valve 7 with the tube side import of membrane contactor 4 and membrane contactor 5；The import of water ring vacuum pump 9 is contacted with film
The tube side of device 4 and membrane contactor 5 outlet connection, the outlet output nitrogen of water ring vacuum pump 9 and the mixed gas for being degassed body.
Electric heater 3 is mounted on the pipeline of the water outlet of connection centrifugal pump 2 and the shell side inlet of membrane contactor 5, nitrogen
Gas precision filter 6 is installed between the gas outlet and pressure reducing valve 7 of basin 8.The outlet side of pressure reducing valve 7 and water ring vacuum pump 9
Inlet end be equipped with pressure detector.The water outlet of centrifugal pump 2 is equipped with pH testers and is used to export water when carbon dioxide eliminating
The detection of pH value.AI is the dissolved oxygen content of detection water outlet when oxygen removes.
The system of the present embodiment has been exchanged with the material that the external world occurs：It removed the water 01 of carbon dioxide or oxygen, come from
The pending water 02 in upstream, high-purity hydrochloric acid 03 (being used when carbon dioxide removal), nitrogen and the mixed gas for being degassed body
04。
The operation principle of the present embodiment system removing is as follows：
It is that pretreated water is passed through in upstream in transfer water tank 1, needs to be added when system carbon dioxide removal micro high-purity
PH value is adjusted to slightly below 5.6 by degree hydrochloric acid, is entered 5 lower central pipe of membrane contactor through the pressurization of centrifugal pump 2, is entered shell by pore
Journey flows radially through film wire from inside to outside, and the top of membrane contactor 5 is entered across partition board, is flowed radially through from outside to inside
Film wire enters central tube by pore, goes out membrane contactor 5 from top, this carries out second of removing dioxy by membrane contactor 4 for another example
Change carbon or oxygen, subsequently into next process.
Membrane contactor 4 connects water ring vacuum pump 9, the high pure nitrogen in nitrogen basin 8 with 5 lower side pipeline of membrane contactor
It is filtered by gas precision filter 6, two membrane contactors is entered by upper side after being depressurized by pressure reducing valve 7.
What gas circuit was connected to is the tube side of membrane contactor, and for water in the shell fluid flow of membrane contactor, tube side top is passed through High Purity Nitrogen
Gas, bottom vacuumize, theoretically almost nil with the concentration of ordinary dissolution that is degassed body in the water of gas-liquid equilibrium, and body is degassed in water just
Diffusion is by film medium, into gas phase.It is constantly equipped with nitrogen purging, vacuumizes, ensure carbon dioxide/oxygen in gas phase
Concentration is very low always, and carbon dioxide/oxygen in such water is also with regard to continuous diffusion to gas phase.To realize titanium dioxide in water
The removing of carbon/oxygen.
Nitrogen accounts for 99% or more in the mixed gas of the nitrogen and carbon dioxide that are generated during carbon dioxide eliminating, remaining
Major part is carbon dioxide, and the mixed gas formed in this way is used directly for food fresh keeping.
In conclusion ultra-pure water decarburization/device for deoxidizing system, carbon dioxide or the oxygen based on membrane contactor of the present embodiment
Gas removal efficiency is high, and occupation area of equipment is small, and Operation and Maintenance is simple, and the gas of vacuum pump outlet can be used when carbon dioxide removal
It is good in economic efficiency in food fresh keeping.
Claims (8)
1. a kind of ultra-pure water decarburization/device for deoxidizing system based on membrane contactor, which is characterized in that including：
Infusion pump, for conveying pending water；
Membrane contactor, shell side inlet are connect with the water outlet of the infusion pump, and shell-side outlet exports the water handled well；
Nitrogen basin is connect by decompression member with the tube side import of the membrane contactor；
Vacuum pump, import and the tube side outlet of the membrane contactor connect, outlet output nitrogen and the mixed gas for being degassed body.
2. ultra-pure water decarburization/device for deoxidizing system based on membrane contactor as described in claim 1, which is characterized in that described
Membrane contactor is equipped with concatenated two of shell side, respectively the first membrane contactor and the second membrane contactor.
3. ultra-pure water decarburization/device for deoxidizing system based on membrane contactor as claimed in claim 2, which is characterized in that described
Nitrogen basin is by being respectively connected to the tube side import of the first membrane contactor and the second membrane contactor after decompression member.
4. ultra-pure water decarburization/device for deoxidizing system based on membrane contactor as described in claim 1, which is characterized in that described
The water inlet of infusion pump is connected to the transfer water tank of accessing pending water.
5. ultra-pure water decarburization/device for deoxidizing system based on membrane contactor as described in claim 1, which is characterized in that connection
Heating unit is installed on the pipeline of the shell side inlet of the water outlet of the infusion pump and the membrane contactor.
6. ultra-pure water decarburization/device for deoxidizing system based on membrane contactor as described in claim 1, which is characterized in that described
Gas precision filter is installed between the gas outlet and decompression member of nitrogen basin.
7. ultra-pure water decarburization/device for deoxidizing system based on membrane contactor as described in claim 1, which is characterized in that described
The outlet side of decompression member and the vacuum pump inlet end are equipped with pressure detector.
8. ultra-pure water decarburization/device for deoxidizing system based on membrane contactor as claimed in claim 2, which is characterized in that removing
When carbon dioxide, the water outlet of the infusion pump is equipped with pH testers；When removing oxygen, the second membrane contactor shell side goes out
The mouth of a river is equipped with dissolved oxygen detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201820097585.7U CN207877300U (en) | 2018-01-19 | 2018-01-19 | A kind of ultra-pure water decarburization/device for deoxidizing system based on membrane contactor |
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| CN201820097585.7U CN207877300U (en) | 2018-01-19 | 2018-01-19 | A kind of ultra-pure water decarburization/device for deoxidizing system based on membrane contactor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111579348A (en) * | 2020-05-12 | 2020-08-25 | 南京华天科技发展股份有限公司 | Liquid degassing method and degassing conductance device and system |
| CN112646975A (en) * | 2020-12-17 | 2021-04-13 | 紫金矿业集团股份有限公司 | Treatment method for reducing and recycling copper ore acid raffinate |
| CN113613803A (en) * | 2019-04-08 | 2021-11-05 | Mks仪器有限公司 | System and method for producing a dissolved ammonia solution with reduced dissolved carrier gas and oxygen content |
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2018
- 2018-01-19 CN CN201820097585.7U patent/CN207877300U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113613803A (en) * | 2019-04-08 | 2021-11-05 | Mks仪器有限公司 | System and method for producing a dissolved ammonia solution with reduced dissolved carrier gas and oxygen content |
| US11691111B2 (en) | 2019-04-08 | 2023-07-04 | Mks Instruments, Inc. | Systems and methods for generating a dissolved ammonia solution with reduced dissolved carrier gas and oxygen content |
| CN113613803B (en) * | 2019-04-08 | 2024-02-02 | Mks仪器有限公司 | System and method for supplying cleaning liquid |
| CN111579348A (en) * | 2020-05-12 | 2020-08-25 | 南京华天科技发展股份有限公司 | Liquid degassing method and degassing conductance device and system |
| CN112646975A (en) * | 2020-12-17 | 2021-04-13 | 紫金矿业集团股份有限公司 | Treatment method for reducing and recycling copper ore acid raffinate |
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