JP2000051606A - Gas permeation membrane apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gas permeation membrane apparatus whose treatment efficiency is not deteriorated for a long duration. SOLUTION: This gas permeation membrane apparatus 10 is a degassing apparatus for an objective liquid to be treated and is provided with a gas permeation membrane module 18 comprising a liquid chamber 14 and a gas chamber 16 connected to each other through a gas permeation membrane 12, a heating apparatus 20 for heating the gas to be sent to the gas permeation membrane module 18, a vacuum pump 22 for keeping the gas chamber 16 in decreased pressure state, and a gas source 24 for supplying nitrogen gas to the gas chamber 16. When a gas is sent to the gas chamber 16, the gas is so heated by the heating apparatus as to keep the temperature of nitrogen gas measured by a thermometer 36 higher than that of the objective liquid measured by a thermometer 38.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas permeable membrane device, and more particularly, to a gas capable of efficiently degassing a liquid to be treated or dissolving a gas in the liquid to be treated over a long period of time. The present invention relates to a permeable membrane device.

[0002]

2. Description of the Related Art A gas permeable membrane device includes a gas permeable membrane, a gas permeable membrane module having a liquid chamber and a gas chamber defined by the gas permeable membrane, and allows gas to flow from the gas chamber through the gas permeable membrane. It is a device for moving gas to the liquid chamber or gas from the liquid chamber to the gas chamber. One of the two chambers defined by the gas permeable membrane is a flow path through which the liquid to be processed flows, and the other gas chamber is an introduction gas to be dissolved in the liquid to be processed.
Alternatively, it is a flow path for a gas such as a gas or water vapor degassed from the liquid to be processed. Generally, a gas permeable membrane composed of a hydrophobic hollow fiber membrane is frequently used as a gas permeable membrane. In recent years, a gas pressure permeable differential pressure of a liquid is small, and it is easy to increase the size of a module. In general, a so-called external pressure type module is used, in which the liquid to be treated flows outside the hollow fiber membrane inside the hollow fiber membrane.

Here, the configuration of an external pressure type gas permeable membrane module will be described with reference to FIG. FIG. 3 is a perspective view showing an example of the configuration of the external pressure type gas permeable membrane module. The gas permeable membrane module 50 is an example of an external pressure type gas permeable membrane module. As shown in FIG. 3, a housing 52 having a cylindrical shape and a partition plate 54 are provided at the midpoint in the longitudinal direction of the housing 52 by a partition plate 54. A first chamber 56 and a second chamber 58 that are partitioned and partitioned, respectively, and one end 60 of the housing 52 (hereinafter, referred to as a first end 60).
A liquid distribution pipe 64 and a liquid collection pipe 66 that extend in the longitudinal direction at the center of the housing 52 between the liquid supply pipe 64 and the other end 62 (hereinafter, referred to as a second end 62). When,
The partition plate 5 is disposed around the liquid distribution pipe 64 and the liquid collection pipe 66.
4 and a number of hollow fiber membranes 68 extending between the first end 60 and the second end 62.

The liquid distribution pipe 64 and the liquid collection pipe 66 are respectively
A large number of through holes 70 are provided in the tube wall, and the liquid is distributed into the first chamber 56 through the through holes 70, and the liquid is collected from inside the second chamber 58. The partition plate 54 is a disk-shaped plate having a diameter slightly smaller than the inner diameter of the housing 52, and the liquid flowing out of the liquid distribution pipe 64 into the first chamber 56 passes between a number of hollow fiber membranes 68. It flows in a sewn manner, and then flows from the first chamber 56 to the second chamber 58 through the gap 72 between the housing 52 and the partition plate 54, and again returns to the plurality of hollow fiber membranes 6.
Then, the water flows into the liquid collecting pipe 66 after being sewn through the gap 8. The hollow fiber membrane 68 is made of, for example, porous polypropylene.
Made of film, thickness 30μm, effective pore size 0.05μ
m, a hollow fiber membrane having a porosity of 30%.

The liquid flows into a liquid distribution pipe 64 from a liquid inlet nozzle 74 provided at the first end 60, and flows out of a liquid outlet nozzle 76 provided at the second end 62 via a liquid collecting pipe 66. leak. In a method in which gas and liquid flow in countercurrent,
A gas distribution chamber 78 is provided at the second end 62 and a gas collection chamber 80 is provided at the first end 60, respectively, and the hollow fiber membrane 68 extends from the gas distribution chamber 78 to the gas collection chamber 80. I have. The gas flows into the hollow fiber membrane 68 from the gas inlet nozzle 82 provided at the second end 62 through the gas distribution chamber 78, and then flows through the gas collection chamber 80 provided at the first end 60. It flows out from the outlet nozzle 84 to the outside. In this example,
The gas chamber is a hollow portion inside the hollow fiber membrane 68 and the gas distribution chamber 78.
In some cases, the gas collecting chamber 80 is also included. The liquid chambers are the first chamber 56 and the second chamber 58 outside the hollow fiber membrane 68. In this example, the gas and the liquid flow in countercurrent, but instead, the gas and liquid may flow in parallel. The gas permeable membrane module is commercially available, for example, sold by Celgard Co., Ltd. under the trade name Riki Cell (trademark) Extra Flow.

The gas permeable membrane device has no moving parts and is easy to maintain and inspect. Therefore, the gas to be treated is hardly dissolved by degassing the liquid to be treated, or the treatment liquid from which a specific gas has been removed is used. As an apparatus for the deaeration process to be obtained, or a gas dissolution process for dissolving a gas in a liquid to be processed to obtain a processing solution in which a gas is dissolved,
It is actively used. For example, the first field of application is to flow water such as pure water to the liquid chamber side of the gas permeable membrane device, and to flow an inert gas such as nitrogen gas to the gas chamber side so that oxygen, carbon dioxide gas, and the like in the water flow from the liquid chamber. This is a field in which water is deoxygenated and decarbonated by allowing the gas to pass through a gas chamber through a gas permeable membrane. The second area of application is:
A decarbonation treatment in which water is supplied to the liquid chamber side of the gas permeable membrane device, air is supplied to the gas chamber side, and carbon dioxide gas in the water is transmitted from the liquid chamber to the gas chamber through the gas permeable membrane to decarbonate water. Also,
Conversely, this is the field of carbonic acid dissolving treatment in which carbon dioxide gas in air is transmitted through a gas permeable membrane into a liquid chamber, and the carbon dioxide gas is dissolved in water. A third application field is to flow water to the liquid chamber side of the gas permeable membrane device and to flow an active gas such as carbon dioxide, hydrogen, ozone, or oxygen to the gas chamber side, and to transfer the active gas to the liquid chamber through the gas permeable membrane. It is the field of gas dissolving treatment in which active gas is dissolved in water by permeation. A fourth field of application is to flow water to the liquid chamber side of the gas permeable membrane device, and to flow an inert gas such as nitrogen gas under reduced pressure to the gas chamber side, and to allow oxygen and carbon dioxide dissolved in the water to pass through the gas permeable membrane. This is a field in which water is deoxygenated and decarbonated by allowing the water to pass through a gas chamber. A fifth application field is that water is supplied to the liquid chamber side of the gas permeable membrane device, the pressure in the gas chamber side is reduced, and most of the gas dissolved in the water is transmitted to the gas chamber through the gas permeable membrane. This is the field of degassing treatment for degassing (gas-free) water.

[0007] In particular, in the production process of ultrapure water supplied as washing water or the like to a semiconductor device manufacturing plant, deaeration or gas removal such as deoxidation for removing oxygen from water or decarbonation for removing carbon dioxide gas. In the first or second application field, particularly in the fourth application field, the gas permeable membrane is required because free treatment is required, degassing efficiency is high, installation space is small, and equipment and operation costs are low. The equipment is used extensively. As a third field of application of gas dissolution, it is used as an apparatus for producing water (reducing water) in which hydrogen gas is dissolved in ultrapure water or water (oxidizing water) in which ozone gas is dissolved.

[0008]

By the way, using a conventional gas permeable membrane device, a treatment in the above-described first to fifth fields of application, for example, a gas dissolving treatment of ultrapure water to reduce water,
Alternatively, if oxidizing water is produced, or if deaerated ultrapure water is produced by subjecting deionized water to deionized water, the treatment efficiency decreases as the treatment time elapses, and a predetermined gas concentration decreases. It has been difficult to obtain reducing water or oxidizing water or to obtain ultrapure water degassed to a predetermined degassing rate. So, conventionally,
There has been a demand for the realization of a gas permeable membrane device in which the processing efficiency does not decrease as the processing time elapses. Therefore,
An object of the present invention is to provide a gas permeable membrane device in which the processing efficiency does not decrease for a long time.

[0009]

Means for Solving the Problems The present inventor has studied the cause of the decrease in processing efficiency with the lapse of processing time in the conventional gas permeable membrane apparatus, and found the following. The gas permeable membrane is a membrane that selectively allows gas to permeate, and although the fluid that permeates the gas permeable membrane is gas molecules, a small amount of water and a large amount of water vapor (gas) are converted from the aqueous solution flowing through the liquid chamber to the gas. It passes through the permeable membrane and moves to the gas chamber side. In the conventional gas permeable membrane device, the temperature of the gas fed into the gas chamber of the gas permeable membrane module is not particularly controlled, and water molecules that have moved to the gas chamber as water vapor are likely to decrease the outside air temperature. It easily condenses into water (liquid) due to external factors. The water (liquid) generated in the gas chamber in this way adheres to the membrane surface of the gas permeable membrane and covers the membrane surface, so that it is degassed and / or degassed.
Alternatively, the area of the film surface provided for gas dissolution is reduced. As a result, the degassing and / or gas dissolving efficiency of the gas permeable membrane decreases as the processing time elapses. In particular, it has been found that in a device using a hollow fiber membrane as a gas permeable membrane, the hollow fiber membrane is blocked by condensed water, so that the efficiency is significantly reduced.
Conventionally, a permeated gas component (water vapor) is condensed on the exposed portion of the gas chamber and adheres to the wall of the gas chamber, or condensed water is generated in a gas inlet pipe or a gas discharge pipe. However, such condensed water flows into the end face of the hollow fiber to cover the gas permeable membrane or close the hollow fiber membrane. Therefore, the present inventor considers that if the temperature of the gas flowing through the gas chamber is equal to or higher than the dew point of water vapor, the water vapor in the gas chamber will not condense, and repeats the experiment to complete the present invention. Reached.

In order to achieve the above object, a gas permeable membrane device for degassing according to the present invention (hereinafter referred to as a first invention).
Comprises a gas permeable membrane, a gas permeable membrane module having a liquid chamber and a gas chamber partitioned by the gas permeable membrane,
The liquid to be treated in which the gas is dissolved flows into the liquid chamber, and the second gas different from the first gas flows into the gas chamber, and the first gas permeates from the liquid chamber to the gas chamber through the gas permeable membrane. The gas permeable membrane device for degassing the liquid to be treated is characterized by comprising a heating means for heating the second gas flowing into the gas chamber of the gas permeable membrane module. In the first invention, the second gas may flow into the gas chamber under normal pressure or under pressure, but it is more effective to reduce the pressure in the gas chamber and to flow the second gas into the gas chamber under reduced pressure. Since the deaeration process can be performed, it is usually performed under reduced pressure. Further, under reduced pressure, the amount of water vapor passing through the gas permeable membrane is increased, and condensed water is more likely to be generated on the gas chamber side, so that the effect of the present invention is further exhibited.

A gas permeable membrane device for dissolving gas according to the present invention (hereinafter referred to as a second invention) is a gas permeable membrane having a gas permeable membrane, and a liquid chamber and a gas chamber partitioned by the gas permeable membrane. A gas permeable membrane device, comprising a module, for flowing a liquid to be processed into a liquid chamber, flowing a gas to a gas chamber, and transmitting gas from the gas chamber to the liquid chamber through a gas permeable membrane to dissolve the gas in the liquid to be processed. Is characterized in that a heating means is provided for heating the gas flowing into the gas chamber of the gas permeable membrane module. In the second invention, the pressure of the gas chamber is not particularly limited, but generally, it is preferably normal pressure or a higher pressure.

The gas permeable membrane used in the first and second inventions is not limited in its structure, material and form as long as it is permeable to gas and difficult to permeate liquid. A hollow fiber membrane or a spiral membrane may be used, but a hollow fiber membrane having a large membrane area per unit volume and capable of miniaturizing the apparatus is preferable. Further, the heating means has its configuration,
There is no limitation on the type, and there are, for example, a heat exchanger for exchanging heat with gas such as hot water or steam to heat the gas, a heater of a combustion furnace type, a heater using a heating wire as a heating element, and the like. In the first and second inventions, the composition of the liquid to be treated is not limited, and can be applied to, for example, water and oil. The permeated gas that is likely to be condensed by passing from the liquid to be treated to the gas side is not limited to water vapor, but may be a vaporized gas of the solvent as long as it is a solvent. The heating temperature of the gas is
Theoretically, the dew point of the permeated gas component in the gas may be higher than the dew point temperature of water vapor, for example.However, the dew point temperature of the permeated gas component in the gas is the permeability of the permeated gas through the gas permeable membrane, the gas pressure, Since it is complicatedly related to the vapor pressure curve of the permeated gas, the composition of the liquid to be treated, and the like, it is practically desirable that the temperature be equal to or higher than the temperature of the liquid to be treated. However, even when the temperature is lower than that, the generation of the condensed liquid can be prevented as much as possible by heating the gas to minimize the temperature difference from the liquid to be treated. The higher the temperature of the gas, the better the temperature of the gas permeable membrane, the housing, the sealant, the packing, etc., that is, the lower the heat resistance of the module, although the purpose of the present invention is met.

Preferably, the inlet pipe for feeding gas into the gas chamber of the gas permeable membrane module and / or the air-exposed portion of the gas chamber is preferably kept warm or heated. For example, in the example illustrated in FIG. 3, the inlet pipe refers to a gas pipe connected to the gas inlet nozzle 82 and the gas outlet nozzle 84 provided at the second end 62, and the atmosphere-exposed portion of the gas chamber refers to: It refers to the gas distribution chamber 78 provided at the second end 62. Note that the outer wall of the gas collection chamber 80 may be included in this. By keeping the temperature of the inlet pipe and / or the air-exposed portion of the gas chamber warm or heated, the gas is rapidly cooled by the atmosphere, and condensed gas components in the gas chamber, for example, water vapor can be prevented from condensing.

[0014]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Embodiment 1 This embodiment is an example of an embodiment in which the gas permeable membrane device according to the present invention is applied to the deaeration of a liquid to be treated, in this example, to a water deaerator. FIG. 3 is a flow sheet showing a configuration of a gas permeable membrane device of an embodiment. As shown in FIG. 1, the gas permeable membrane device 10 of the present embodiment sends a gas permeable membrane module 18 having a liquid chamber 14 and a gas chamber 16 via a gas permeable membrane 12 to a gas permeable membrane module 18. The apparatus includes a heater 20 for heating gas to be supplied, a vacuum pump 22 for maintaining the gas chamber 16 in a reduced pressure state, and a gas source 24 for supplying gas to the gas chamber 16. Gas permeable membrane module 1
8 has basically the same configuration as the gas permeable membrane module 50 described in FIG. 3, and as shown in FIG. 1, the hollow fiber membrane has a gas inlet nozzle at the upper part and a gas outlet nozzle at the lower part. Are arranged in the vertical direction.

At the lower end and the upper end of the liquid chamber 14,
Liquid inflow pipe 2 into which liquid to be degassed flows
6. The treatment liquid outflow pipes 28 for letting out the treatment liquid subjected to the degassing treatment are respectively connected. The gas chamber 16
A gas inlet pipe 30 for feeding gas from the gas source 24 to the gas chamber 16 at an upper end thereof, and a gas discharge pipe 32 for discharging gas from the gas chamber 16 at a lower end of the gas chamber 16. Are connected respectively. The heater 20 is provided in the middle of the gas inlet pipe 30, and a gas flow meter 34 and a thermometer 36 are attached to the upstream and downstream of the heater 20. The vacuum pump 22 is a gas exhaust pipe 32
The gas chamber 16 is provided with a pressure gauge 37 for measuring the pressure of the gas chamber 16.
A thermometer 38 is provided in the to-be-treated liquid inflow pipe 26 to measure the temperature of the aqueous solution. Note that nitrogen gas may be supplied at normal pressure or in a pressurized state without providing the vacuum pump 22.

In the present embodiment, the heater 20 is a heat exchanger, and heats the gas by heat exchange with hot water, a heat medium, steam, or the like according to the set temperature rising temperature of the gas. In addition, a normal temperature control device may be provided to control the heating temperature of the gas by the heater 20. Heater 2
The gas inlet pipe 30 downstream from 0 and the air-exposed region of the gas chamber 16 (corresponding to the outer wall of the gas distribution chamber 78 in FIG. 3) are kept warm by the heat retaining material 39. Thereby, the heater 2
Since the gas in the gas inlet pipe 30 and the gas chamber 16 downstream from 0 is maintained in an adiabatic state from the atmosphere, there is almost no gas cooling effect by the atmosphere. Note that, in contrast to the gas permeable membrane module of the present embodiment, the gas permeable membrane module is vertically arranged with the gas inlet nozzle at the bottom and the gas outlet nozzle at the top, or the gas permeable membrane module is placed horizontally. When the gas discharge pipe is disposed, the condensed water generated inside the gas discharge pipe may flow backward and flow into the gas permeable membrane module. In such a case, it is preferable to keep the gas discharge pipe warm or heated. This is the same also in the case of gas dissolution of Embodiment 2 described later.

Next, referring to FIG. 1, the gas permeable membrane device 1 will be described.
The operation method of 0 will be described. First, hot water is introduced into the heater 20 to make the heater into an operating state, and then the vacuum pump 22 is started to measure the flow rate with the flow meter 34 while maintaining the gas chamber 16 of the gas permeable membrane module 18 at a predetermined reduced pressure. At the same time, for example, nitrogen gas is introduced into the gas chamber 16 from the gas supply source 24 at a predetermined flow rate. At this time, the temperature of the nitrogen gas measured by the thermometer 36 is higher than the temperature of the liquid to be treated measured by the thermometer 38. Next, the liquid to be treated, in this embodiment, water is caused to flow into the liquid chamber 14 of the gas permeable membrane module 18 at a predetermined flow rate by the liquid to be treated inflow pipe 26, and the processing liquid is caused to flow out from the processing liquid outflow pipe 28. By the above operation, the liquid to be treated can be degassed as predetermined.

An experiment apparatus having the same configuration as that of the gas permeable membrane device 10 was manufactured using Liqui-Cel manufactured by Celgard as the gas permeable membrane module 18, and the following experiments were performed. Experimental Example 1 The vacuum pump 22 was started and the gas permeable membrane module 18 was started.
While maintaining the pressure of the gas chamber 16 at 50 Torr, the thermometer 3
A nitrogen gas was introduced into the gas chamber 16 at a flow rate of 1 liter (0 ° C., 1 atm conversion) / min while heating with the heater 20 so that the temperature measured in Step 6 became 30 ° C. On the other hand, a water temperature of pure water having a dissolved oxygen concentration (DO) of 50 μg / liter 2
Sample water at 0 ° C. was introduced at a flow rate of 1.5 m ³ / h into the liquid chamber 14 of the gas permeable membrane module 18 to degas the sample water. Even after the degassing process is continued for 12 hours, the dissolved oxygen concentration (DO) of the degassed sample water flowing out of the liquid discharge pipe 28 to be processed.
Was 1.0 μg / liter, which was 1/50 of the dissolved oxygen concentration (DO) before degassing.

Comparative Experimental Example 1 A degassing experiment was performed in the same manner as in Experimental Example 1 except that the heating temperature of the nitrogen gas was set at 10 ° C. lower than the water temperature of the sample water. Dissolved oxygen concentration (DO)
Was 3.2 μg / liter, which was 15.6 times lower than the dissolved oxygen concentration (DO) before degassing.

From the above experimental results, it has been found that by setting the temperature of the nitrogen gas higher than the temperature of the sample water to be degassed, a high degassing efficiency can be maintained for a long time. Can be evaluated as high.

Embodiment 2 This embodiment is an embodiment in which the gas permeable membrane device according to the present invention is applied to an apparatus for dissolving a gas in a liquid to be treated, in this embodiment, an apparatus for dissolving a hydrogen gas in pure water. As an example, FIG. 2 is a flow sheet showing the configuration of the gas permeable membrane device of the present embodiment. The gas permeable membrane device 40 of the present embodiment is shown in FIG.
As shown in FIG.
2 has the same configuration as the configuration of the gas permeable membrane device 10 of the first embodiment except that the on-off valve 42 and the blower 44 are provided, and that the gas chamber 16 is in a normal pressure or a pressurized state. Have.

Next, referring to FIG.
The operation method of 0 will be described. First, the on-off valve 42 is closed,
In addition, hot water is introduced into the heater 20 to bring the heater into an operating state, and then the gas supply source 24 is adjusted so that the pressure in the gas chamber 16 is adjusted to a predetermined pressure by a pressure gauge 37 or to a predetermined gas flow rate by a gas flow meter 34. For example, hydrogen gas is introduced into the gas chamber 16. At this time, the temperature of the hydrogen gas measured by the thermometer 36 is higher than the temperature of the liquid to be treated measured by the thermometer 38. Next, the liquid chamber 1 of the gas permeable membrane module 18
4, a liquid to be treated is supplied at a predetermined flow rate by a liquid to be treated inflow pipe 26;
In this embodiment, pure water is allowed to flow in and the processing liquid
Out of the processing solution. By the above operation, hydrogen gas can be dissolved in pure water as predetermined. Since the exhaust gas discharged from the gas discharge pipe 32 contains excess hydrogen gas, the exhaust gas is sucked by the blower 44 and brought into contact with a hydrogen decomposition catalyst (not shown) to decompose hydrogen. Good release to the atmosphere.

An experiment apparatus having the same configuration as the gas permeable membrane device 40 was manufactured by using Liqui-Cel of Hoechst as the gas permeable membrane module 18, and the following experiments were performed. EXPERIMENTAL EXAMPLE 2 A gas permeable membrane module 1 was supplied with hydrogen gas at a flow rate of 0.5 liter (0 ° C., 1 atm conversion) / min while heating with the heater 20 so that the temperature measured by the thermometer 36 became 30 ° C.
8 into the gas chamber 16. On the other hand, the dissolved hydrogen concentration (D
H) Sample water having a water temperature of 20 ° C. consisting of pure water having almost 0 μg / liter (less than the lower limit of measurement) was introduced into the liquid chamber 14 of the gas permeable membrane module 18 at a flow rate of 1.5 m ³ / h. Hydrogen gas was dissolved in water. At that time, the gas chamber 1
6 so as to maintain the pressure of 1 kgf / cm ² at 1 kgf / cm ^2.
Was adjusted. Even after the hydrogen gas dissolution treatment was continued for 8 hours, the dissolved hydrogen concentration (DH) of the sample water flowing out of the liquid to be treated outlet pipe 28 was 2.1 μg / liter.

Comparative Experimental Example 2 A hydrogen gas dissolution experiment was performed in the same manner as in Experimental Example 2 except that the heating temperature of the hydrogen gas was set at 10 ° C. lower than the water temperature of the sample water. Hydrogen concentration (D
H) was 1.5 μg / liter.

From the above experimental results, it has been found that by setting the temperature of the hydrogen gas higher than the temperature of the sample water, a high gas dissolving efficiency can be maintained for a long period of time. it can.

[0026]

According to the first and second aspects of the present invention, a heating means is provided for heating the gas flowing into the gas chamber of the gas permeable membrane device, and the gas to be flowed is heated. By heating a gas to a temperature equal to or higher than the temperature of a liquid, a gas permeable membrane device that degass a liquid to be treated with high efficiency for a long time or dissolves a gas in the liquid to be treated is realized.

[Brief description of the drawings]

FIG. 1 is a flow sheet showing a configuration of a gas permeable membrane device according to a first embodiment.

FIG. 2 is a flow sheet showing a configuration of a gas permeable membrane device according to a second embodiment.

FIG. 3 is a perspective view illustrating a configuration of a gas permeable membrane module.

[Explanation of symbols]

 Reference Signs List 10 Gas permeable membrane device of first embodiment 12 Gas permeable membrane 14 Liquid chamber 16 Gas chamber 18 Gas permeable membrane module 20 Heater 22 Vacuum pump 24 Gas source 26 Liquid to be treated inlet pipe 28 Treatment liquid outlet pipe 30 Gas inlet pipe Reference Signs List 32 gas discharge pipe 34 gas flow meter 36 thermometer 37 pressure gauge 38 thermometer 39 heat insulating material 40 gas permeable membrane device of Embodiment 2 42 on-off valve 44 blower 50 gas permeable membrane module 52 housing 54 partition plate 56 first chamber 58 Second chamber 60 First end 62 Second end 64 Liquid distribution pipe 66 Liquid collection pipe 68 Hollow fiber membrane 70 Through hole 72 Gap 74 Liquid inlet nozzle 76 Liquid outlet nozzle 78 Gas distribution chamber 80 Gas collection chamber 82 Gas inlet Nozzle 84 Gas outlet nozzle

Claims (4)

[Claims] A gas permeable membrane module comprising a gas permeable membrane, a liquid chamber partitioned by the gas permeable membrane, and a gas chamber, wherein a liquid to be treated in which a first gas is dissolved flows into the liquid chamber;
And flowing a second gas different from the first gas into the gas chamber,
In a gas permeable membrane device for degassing a liquid to be processed by passing a first gas from a liquid chamber to a gas chamber through a gas permeable membrane, heating a second gas flowing into the gas chamber of the gas permeable membrane module. A gas permeable membrane device comprising heating means. 2. A gas permeable membrane module comprising a gas permeable membrane, a liquid chamber partitioned by the gas permeable membrane, and a gas chamber, wherein the liquid to be treated flows into the liquid chamber and the gas flows into the gas chamber. A gas permeable membrane device for allowing a gas to permeate from a gas chamber to a liquid chamber through a permeable membrane and dissolving the gas in the liquid to be treated, comprising a heating means for heating the gas flowing into the gas chamber of the gas permeable membrane module. A gas permeable membrane device characterized by the above-mentioned. 3. The gas permeable membrane according to claim 1, wherein the heating means heats the second gas flowing into the gas chamber of the gas permeable membrane module to a temperature equal to or higher than the temperature of the liquid to be treated. apparatus. 4. The gas-permeable membrane module according to claim 1, wherein the inlet pipe for feeding gas into the gas chamber and / or the air-exposed portion of the gas chamber is kept warm or heated.
The gas permeable membrane device according to any one of the above.